DE69713214T2 - Verfahren zum Zersetzen von Fluorkohlenstoffen, Reagens und Vorrichtung zur Ausführung dieses Verfahrens - Google Patents

Verfahren zum Zersetzen von Fluorkohlenstoffen, Reagens und Vorrichtung zur Ausführung dieses Verfahrens

Info

Publication number
DE69713214T2
DE69713214T2 DE69713214T DE69713214T DE69713214T2 DE 69713214 T2 DE69713214 T2 DE 69713214T2 DE 69713214 T DE69713214 T DE 69713214T DE 69713214 T DE69713214 T DE 69713214T DE 69713214 T2 DE69713214 T2 DE 69713214T2
Authority
DE
Germany
Prior art keywords
reagent
carrying
fluorocarbons
decomposing
decomposing fluorocarbons
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69713214T
Other languages
English (en)
Other versions
DE69713214D1 (de
Inventor
Izumikawa Chiaki
Tezuka Kazumasa
Ito Kazuto
Atobe Hitoshi
Kaneko Toraichi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dowa Iron Powder Co Ltd
Dowa Holdings Co Ltd
Resonac Holdings Corp
Original Assignee
Showa Denko KK
Dowa Iron Powder Co Ltd
Dowa Mining Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Denko KK, Dowa Iron Powder Co Ltd, Dowa Mining Co Ltd filed Critical Showa Denko KK
Publication of DE69713214D1 publication Critical patent/DE69713214D1/de
Application granted granted Critical
Publication of DE69713214T2 publication Critical patent/DE69713214T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B01D53/70—Organic halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2251/00—Reactants
    • B01D2251/30—Alkali metal compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2251/00—Reactants
    • B01D2251/40—Alkaline earth metal or magnesium compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2251/00—Reactants
    • B01D2251/60—Inorganic bases or salts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S588/00—Hazardous or toxic waste destruction or containment
    • Y10S588/90—Apparatus
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S588/00—Hazardous or toxic waste destruction or containment
    • Y10S588/901—Compositions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Biomedical Technology (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Treating Waste Gases (AREA)
  • Fire-Extinguishing Compositions (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Catalysts (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
DE69713214T 1996-07-04 1997-07-01 Verfahren zum Zersetzen von Fluorkohlenstoffen, Reagens und Vorrichtung zur Ausführung dieses Verfahrens Expired - Fee Related DE69713214T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19269196A JP3713333B2 (ja) 1996-07-04 1996-07-04 弗化炭素類の分解法

Publications (2)

Publication Number Publication Date
DE69713214D1 DE69713214D1 (de) 2002-07-18
DE69713214T2 true DE69713214T2 (de) 2003-02-20

Family

ID=16295449

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69713214T Expired - Fee Related DE69713214T2 (de) 1996-07-04 1997-07-01 Verfahren zum Zersetzen von Fluorkohlenstoffen, Reagens und Vorrichtung zur Ausführung dieses Verfahrens

Country Status (8)

Country Link
US (2) US6022489A (de)
EP (1) EP0819449B1 (de)
JP (1) JP3713333B2 (de)
KR (1) KR980008298A (de)
CN (1) CN1174811A (de)
DE (1) DE69713214T2 (de)
SG (1) SG50858A1 (de)
TW (1) TW402576B (de)

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US6509511B1 (en) * 1998-10-07 2003-01-21 Guild Associates, Inc. Process for the conversion of perfluoroalkanes, a catalyst for use therein and a method for its preparation
US6676913B2 (en) 1996-06-12 2004-01-13 Guild Associates, Inc. Catalyst composition and method of controlling PFC and HFC emissions
US20010001652A1 (en) * 1997-01-14 2001-05-24 Shuichi Kanno Process for treating flourine compound-containing gas
TW550112B (en) * 1997-11-14 2003-09-01 Hitachi Ltd Method for processing perfluorocarbon, and apparatus therefor
TW581708B (en) * 1998-09-22 2004-04-01 Japan Pionics Cleaning agent and cleaning method for halogen-containing exhaust gas
US6309618B1 (en) * 1999-03-12 2001-10-30 Showa Denko K. K. Method for treating exhaust gas containing fluorine-containing interhalogen compound, and treating agent and treating apparatus
GB9923951D0 (en) * 1999-10-08 1999-12-08 Boc Group Plc Treatment of gas mixture
JP2001219031A (ja) * 2000-02-08 2001-08-14 Air Liquide Japan Ltd パーフルオロ化合物の分解方法及び分解装置
US6673326B1 (en) 2000-08-07 2004-01-06 Guild Associates, Inc. Catalytic processes for the reduction of perfluorinated compounds and hydrofluorocarbons
JP2003020468A (ja) * 2001-07-05 2003-01-24 Dowa Mining Co Ltd 弗化系ガスの分解剤
CN100528300C (zh) * 2004-01-29 2009-08-19 大阳日酸株式会社 废气处理剂、废气处理方法以及废气处理装置
EP1716912A4 (de) * 2004-01-29 2008-02-06 Taiyo Nippon Sanso Corp Verfahren und vorrichtung zur behandlung von abgas
JP2006305410A (ja) * 2005-04-26 2006-11-09 Ueda Sekkai Seizo Kk 難分解性フロンガスの分解方法
GB0520468D0 (en) * 2005-10-07 2005-11-16 Boc Group Plc Fluorine abatement
TW200843840A (en) * 2007-05-09 2008-11-16 Pao-Chu Liu Catalysts for treating acid and halogen gases and production methods thereof
WO2009008454A1 (ja) * 2007-07-10 2009-01-15 Ebara Corporation フッ素固定剤及びｐｆｃ分解処理剤並びにこれらの調製方法
JP5066021B2 (ja) * 2007-07-10 2012-11-07 株式会社荏原製作所 Ｐｆｃ処理装置及びｐｆｃ含有ガスの処理方法
TWI454305B (zh) * 2007-07-10 2014-10-01 Ebara Corp 氟固定劑與ｐｆｃ分解處理劑及其調製方法、ｐｆｃ處理裝置與含ｐｆｃ之氣體的處理方法
US8192693B2 (en) 2008-02-12 2012-06-05 Innovative Engineering Solutions, Inc. Apparatus for dynamic oxidation of process gas
JP5132489B2 (ja) * 2008-09-04 2013-01-30 中部電力株式会社 フッ化物ガスの分解処理方法、分解処理剤及び分解処理装置
US20100286463A1 (en) * 2009-05-07 2010-11-11 Ideal Fluids, Inc. Process and Apparatus for the Pyrolytic Conversion of Organic Halides to Hydrogen Halides
US20110212010A1 (en) * 2009-09-02 2011-09-01 Despatch Industries Limited Partnership Apparatus and Method for Thermal Destruction of Volatile Organic Compounds
US8530241B2 (en) * 2010-08-27 2013-09-10 Empire Technology Development Llc Hydrofluorocarbon sensing and elimination device and method
US8128902B2 (en) * 2011-04-12 2012-03-06 Midwest Refrigerants, Llc Method for the synthesis of anhydrous hydrogen halide and anhydrous carbon dioxide
US8834830B2 (en) 2012-09-07 2014-09-16 Midwest Inorganics LLC Method for the preparation of anhydrous hydrogen halides, inorganic substances and/or inorganic hydrides by using as reactants inorganic halides and reducing agents
CN103233088B (zh) * 2013-05-02 2015-05-20 莱芜钢铁集团有限公司 一种非真空条件下清洗积碳的方法
KR102031984B1 (ko) * 2018-07-13 2019-10-14 (주)플라즈닉스 플라즈마 상에서 대상기체 함유 배출기체를 처리하는 방법 및 장치

Family Cites Families (16)

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Publication number Priority date Publication date Assignee Title
US1207273A (en) * 1914-07-17 1916-12-05 John Cadman Absorbent medium for carbonic-acid gas.
GB277540A (en) * 1927-01-25 1927-09-22 Leonard Angelo Levy Improvements in granules for the absorption of gases
US2395842A (en) * 1930-07-14 1946-03-05 Borgstrom Parry Gas absorbent material and process of making the same
US3565574A (en) * 1968-04-23 1971-02-23 Exxon Research Engineering Co Catalytic conversion of exhaust gas impurities
US4070300A (en) * 1973-06-09 1978-01-24 Collo Gmbh Pourable solid filter material, particularly for the removal of unpleasant odors from the air, and a process for its manufacture
CA1236488A (en) * 1985-06-25 1988-05-10 Hydro-Quebec Process for the destruction of toxic organic products
SU1456358A1 (ru) * 1986-11-27 1989-02-07 Днепродзержинский Индустриальный Институт Им.М.И.Арсеничева Способ получени углеродного адсорбента
JPH06104183B2 (ja) * 1989-06-09 1994-12-21 三井・デュポンフロロケミカル株式会社 塩弗化アルカンの接触分解方法
US5064526A (en) * 1990-04-27 1991-11-12 The United States Of America As Represented By The Administrator Of The Environmental Protection Agency Method for the base-catalyzed decomposition of halogenated and non-halogenated organic compounds in a contaminated medium
JP3553624B2 (ja) * 1993-04-06 2004-08-11 同和鉱業株式会社 フロンの分解法
JP3249986B2 (ja) * 1993-07-06 2002-01-28 同和鉱業株式会社 フロンの分解処理法および装置
JP3410797B2 (ja) * 1994-02-15 2003-05-26 株式会社荏原製作所 ハロゲン化有機化合物の分解方法
JP3192557B2 (ja) * 1994-08-26 2001-07-30 シャープ株式会社 排水処理装置および排水処理方法
US5496583A (en) * 1994-08-29 1996-03-05 Amoco/Enron Solar Hydrogen fluoride dopant source in the preparation of conductive coated substrate
JP3190225B2 (ja) * 1995-01-06 2001-07-23 同和鉱業株式会社 フロン分解法
US5817284A (en) * 1995-10-30 1998-10-06 Central Glass Company, Limited Method for decomposing halide-containing gas

Also Published As

Publication number Publication date
JPH1015349A (ja) 1998-01-20
CN1174811A (zh) 1998-03-04
KR980008298A (ko) 1998-04-30
JP3713333B2 (ja) 2005-11-09
EP0819449B1 (de) 2002-06-12
DE69713214D1 (de) 2002-07-18
SG50858A1 (en) 1998-07-20
US6022489A (en) 2000-02-08
EP0819449A1 (de) 1998-01-21
TW402576B (en) 2000-08-21
US6294709B1 (en) 2001-09-25

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee