DE69713211T2 - Interferometrisches Verfahren und Apparat zum Messen von Positionsveränderungen eines Objektes in einem rotierenden Referenzsystem - Google Patents

Interferometrisches Verfahren und Apparat zum Messen von Positionsveränderungen eines Objektes in einem rotierenden Referenzsystem

Info

Publication number
DE69713211T2
DE69713211T2 DE69713211T DE69713211T DE69713211T2 DE 69713211 T2 DE69713211 T2 DE 69713211T2 DE 69713211 T DE69713211 T DE 69713211T DE 69713211 T DE69713211 T DE 69713211T DE 69713211 T2 DE69713211 T2 DE 69713211T2
Authority
DE
Germany
Prior art keywords
beams
wave plate
reference system
quarter
rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69713211T
Other languages
German (de)
English (en)
Other versions
DE69713211D1 (de
Inventor
John J. Bockman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agilent Technologies Inc
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of DE69713211D1 publication Critical patent/DE69713211D1/de
Application granted granted Critical
Publication of DE69713211T2 publication Critical patent/DE69713211T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/22—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring existing or desired position of tool or work
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02011—Interferometers characterised by controlling or generating intrinsic radiation properties using temporal polarization variation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02049—Interferometers characterised by particular mechanical design details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE69713211T 1996-07-03 1997-07-03 Interferometrisches Verfahren und Apparat zum Messen von Positionsveränderungen eines Objektes in einem rotierenden Referenzsystem Expired - Fee Related DE69713211T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/676,872 US5677768A (en) 1996-07-03 1996-07-03 Method and interferometric apparatus for measuring changes in displacement of an object in a rotating reference frame

Publications (2)

Publication Number Publication Date
DE69713211D1 DE69713211D1 (de) 2002-07-18
DE69713211T2 true DE69713211T2 (de) 2003-01-16

Family

ID=24716391

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69713211T Expired - Fee Related DE69713211T2 (de) 1996-07-03 1997-07-03 Interferometrisches Verfahren und Apparat zum Messen von Positionsveränderungen eines Objektes in einem rotierenden Referenzsystem

Country Status (6)

Country Link
US (1) US5677768A (enExample)
EP (1) EP0816798B1 (enExample)
JP (1) JP3841516B2 (enExample)
KR (1) KR100434007B1 (enExample)
DE (1) DE69713211T2 (enExample)
TW (1) TW316289B (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6157458A (en) * 1998-04-30 2000-12-05 Agilent Technologies Achromatic quarter wave plate for an air turbulence compensating inteferometer
US6399940B1 (en) 1999-05-10 2002-06-04 Fanuc America Corporation Optical rotary position encoder
JP2003211346A (ja) * 2002-01-15 2003-07-29 Mori Seiki Co Ltd 工作機械の精度解析装置
US6847455B1 (en) 2002-01-25 2005-01-25 The United States Of America As Represented By The Department Of Energy Heterodyne interferometer with angstrom-level periodic nonlinearity
US6897962B2 (en) * 2002-04-18 2005-05-24 Agilent Technologies, Inc. Interferometer using beam re-tracing to eliminate beam walk-off
KR100468155B1 (ko) * 2002-06-27 2005-01-26 한국과학기술원 이종모드 헬륨-네온 레이저와 슈퍼 헤테로다인위상측정법을 이용한 헤테로다인 레이저 간섭계
US7251039B1 (en) * 2005-04-29 2007-07-31 Agilent Technologies, Inc. Low non-linear error displacement measuring interferometer
US7330272B2 (en) * 2005-04-29 2008-02-12 Agilent Technologies, Inc. Discrete quarter wave plates for displacement measuring interferometers
US20090135430A1 (en) * 2007-11-26 2009-05-28 Miao Zhu Systems and Methods for Reducing Nonlinearity in an Interferometer
CN102147505B (zh) * 2010-02-08 2015-06-03 菲尼萨公司 增强型多体式光学设备
US20120064759A1 (en) * 2010-09-09 2012-03-15 Spatial Digital Systems Retractable mobile power device module
TWI452262B (zh) * 2011-05-17 2014-09-11 Univ Nat Yunlin Sci & Tech 同時量測位移及傾角之干涉儀系統
CN107966103B (zh) * 2017-10-13 2019-11-19 深圳大学 基于局域自旋特性的超灵敏位移传感方法及装置
WO2019071545A1 (zh) * 2017-10-13 2019-04-18 深圳大学 基于局域自旋特性的超灵敏位移传感方法及装置
TWI641805B (zh) * 2018-04-02 2018-11-21 國立雲林科技大學 Laser interference calibrator

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2904836A1 (de) * 1979-02-08 1980-08-14 Max Planck Gesellschaft Interferometrische einrichtung zur messung der wellenlaenge optischer strahlung
US4802765A (en) * 1986-06-12 1989-02-07 Zygo Corporation Differential plane mirror having beamsplitter/beam folder assembly
DE3708295C1 (en) * 1987-03-14 1988-08-25 Daimler Benz Ag Laser interferometer arrangement for measuring the axial play of two parts mounted so as to be capable of mutual rotation
JP2572111B2 (ja) * 1988-07-11 1997-01-16 株式会社東京精密 レーザ干渉測定装置
US5064289A (en) * 1989-02-23 1991-11-12 Hewlett-Packard Company Linear-and-angular measuring plane mirror interferometer
JP2757072B2 (ja) * 1989-12-11 1998-05-25 コニカ株式会社 レーザー干渉測長計
EP0634636B1 (de) * 1993-07-07 1999-10-06 Deutsches Zentrum für Luft- und Raumfahrt e.V. Interferometer nach Michelson
US5583638A (en) * 1993-07-21 1996-12-10 Hewlett-Packard Company Angular michelson interferometer and optical wavemeter based on a rotating periscope

Also Published As

Publication number Publication date
TW316289B (en) 1997-09-21
DE69713211D1 (de) 2002-07-18
EP0816798A2 (en) 1998-01-07
KR980008447A (ko) 1998-04-30
KR100434007B1 (ko) 2004-08-02
EP0816798B1 (en) 2002-06-12
US5677768A (en) 1997-10-14
JPH1082609A (ja) 1998-03-31
JP3841516B2 (ja) 2006-11-01
EP0816798A3 (en) 2000-01-12

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: AGILENT TECHNOLOGIES, INC. (N.D.GES.D.STAATES DELA

8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: AGILENT TECHNOLOGIES, INC. (N.D.GES.D. STAATES, US

8339 Ceased/non-payment of the annual fee