JP3841516B2 - 干渉計による変位測定装置及び方法 - Google Patents

干渉計による変位測定装置及び方法 Download PDF

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Publication number
JP3841516B2
JP3841516B2 JP15376597A JP15376597A JP3841516B2 JP 3841516 B2 JP3841516 B2 JP 3841516B2 JP 15376597 A JP15376597 A JP 15376597A JP 15376597 A JP15376597 A JP 15376597A JP 3841516 B2 JP3841516 B2 JP 3841516B2
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Japan
Prior art keywords
beams
reference frame
optical path
wave plate
polarization state
Prior art date
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Expired - Fee Related
Application number
JP15376597A
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English (en)
Japanese (ja)
Other versions
JPH1082609A5 (enExample
JPH1082609A (ja
Inventor
ジョン・ジェイ・ボックマン
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Agilent Technologies Inc
Original Assignee
Agilent Technologies Inc
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Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of JPH1082609A publication Critical patent/JPH1082609A/ja
Publication of JPH1082609A5 publication Critical patent/JPH1082609A5/ja
Application granted granted Critical
Publication of JP3841516B2 publication Critical patent/JP3841516B2/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/22—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring existing or desired position of tool or work
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02011—Interferometers characterised by controlling or generating intrinsic radiation properties using temporal polarization variation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02049—Interferometers characterised by particular mechanical design details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP15376597A 1996-07-03 1997-06-11 干渉計による変位測定装置及び方法 Expired - Fee Related JP3841516B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/676,872 US5677768A (en) 1996-07-03 1996-07-03 Method and interferometric apparatus for measuring changes in displacement of an object in a rotating reference frame
US676872 1996-07-03

Publications (3)

Publication Number Publication Date
JPH1082609A JPH1082609A (ja) 1998-03-31
JPH1082609A5 JPH1082609A5 (enExample) 2005-04-21
JP3841516B2 true JP3841516B2 (ja) 2006-11-01

Family

ID=24716391

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15376597A Expired - Fee Related JP3841516B2 (ja) 1996-07-03 1997-06-11 干渉計による変位測定装置及び方法

Country Status (6)

Country Link
US (1) US5677768A (enExample)
EP (1) EP0816798B1 (enExample)
JP (1) JP3841516B2 (enExample)
KR (1) KR100434007B1 (enExample)
DE (1) DE69713211T2 (enExample)
TW (1) TW316289B (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6157458A (en) * 1998-04-30 2000-12-05 Agilent Technologies Achromatic quarter wave plate for an air turbulence compensating inteferometer
US6399940B1 (en) 1999-05-10 2002-06-04 Fanuc America Corporation Optical rotary position encoder
JP2003211346A (ja) * 2002-01-15 2003-07-29 Mori Seiki Co Ltd 工作機械の精度解析装置
US6847455B1 (en) 2002-01-25 2005-01-25 The United States Of America As Represented By The Department Of Energy Heterodyne interferometer with angstrom-level periodic nonlinearity
US6897962B2 (en) * 2002-04-18 2005-05-24 Agilent Technologies, Inc. Interferometer using beam re-tracing to eliminate beam walk-off
KR100468155B1 (ko) * 2002-06-27 2005-01-26 한국과학기술원 이종모드 헬륨-네온 레이저와 슈퍼 헤테로다인위상측정법을 이용한 헤테로다인 레이저 간섭계
US7251039B1 (en) * 2005-04-29 2007-07-31 Agilent Technologies, Inc. Low non-linear error displacement measuring interferometer
US7330272B2 (en) * 2005-04-29 2008-02-12 Agilent Technologies, Inc. Discrete quarter wave plates for displacement measuring interferometers
US20090135430A1 (en) * 2007-11-26 2009-05-28 Miao Zhu Systems and Methods for Reducing Nonlinearity in an Interferometer
CN102147505B (zh) * 2010-02-08 2015-06-03 菲尼萨公司 增强型多体式光学设备
US20120064759A1 (en) * 2010-09-09 2012-03-15 Spatial Digital Systems Retractable mobile power device module
TWI452262B (zh) * 2011-05-17 2014-09-11 Univ Nat Yunlin Sci & Tech 同時量測位移及傾角之干涉儀系統
CN107966103B (zh) * 2017-10-13 2019-11-19 深圳大学 基于局域自旋特性的超灵敏位移传感方法及装置
WO2019071545A1 (zh) * 2017-10-13 2019-04-18 深圳大学 基于局域自旋特性的超灵敏位移传感方法及装置
TWI641805B (zh) * 2018-04-02 2018-11-21 國立雲林科技大學 Laser interference calibrator

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2904836A1 (de) * 1979-02-08 1980-08-14 Max Planck Gesellschaft Interferometrische einrichtung zur messung der wellenlaenge optischer strahlung
US4802765A (en) * 1986-06-12 1989-02-07 Zygo Corporation Differential plane mirror having beamsplitter/beam folder assembly
DE3708295C1 (en) * 1987-03-14 1988-08-25 Daimler Benz Ag Laser interferometer arrangement for measuring the axial play of two parts mounted so as to be capable of mutual rotation
JP2572111B2 (ja) * 1988-07-11 1997-01-16 株式会社東京精密 レーザ干渉測定装置
US5064289A (en) * 1989-02-23 1991-11-12 Hewlett-Packard Company Linear-and-angular measuring plane mirror interferometer
JP2757072B2 (ja) * 1989-12-11 1998-05-25 コニカ株式会社 レーザー干渉測長計
EP0634636B1 (de) * 1993-07-07 1999-10-06 Deutsches Zentrum für Luft- und Raumfahrt e.V. Interferometer nach Michelson
US5583638A (en) * 1993-07-21 1996-12-10 Hewlett-Packard Company Angular michelson interferometer and optical wavemeter based on a rotating periscope

Also Published As

Publication number Publication date
TW316289B (en) 1997-09-21
DE69713211D1 (de) 2002-07-18
DE69713211T2 (de) 2003-01-16
EP0816798A2 (en) 1998-01-07
KR980008447A (ko) 1998-04-30
KR100434007B1 (ko) 2004-08-02
EP0816798B1 (en) 2002-06-12
US5677768A (en) 1997-10-14
JPH1082609A (ja) 1998-03-31
EP0816798A3 (en) 2000-01-12

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