TW316289B - Method and interferometric apparatus for measuring changes in displacement of an object in a rotating reference frame - Google Patents
Method and interferometric apparatus for measuring changes in displacement of an object in a rotating reference frame Download PDFInfo
- Publication number
- TW316289B TW316289B TW086100274A TW86100274A TW316289B TW 316289 B TW316289 B TW 316289B TW 086100274 A TW086100274 A TW 086100274A TW 86100274 A TW86100274 A TW 86100274A TW 316289 B TW316289 B TW 316289B
- Authority
- TW
- Taiwan
- Prior art keywords
- beams
- item
- light
- wave plate
- reference frame
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims description 34
- 238000006073 displacement reaction Methods 0.000 title claims description 28
- 238000005259 measurement Methods 0.000 claims abstract description 37
- 230000003287 optical effect Effects 0.000 claims abstract description 26
- 230000010287 polarization Effects 0.000 claims description 22
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 16
- 229910052692 Dysprosium Inorganic materials 0.000 claims description 12
- KBQHZAAAGSGFKK-UHFFFAOYSA-N dysprosium atom Chemical compound [Dy] KBQHZAAAGSGFKK-UHFFFAOYSA-N 0.000 claims description 12
- 230000009977 dual effect Effects 0.000 claims description 9
- 229910052759 nickel Inorganic materials 0.000 claims description 8
- 230000005540 biological transmission Effects 0.000 claims description 5
- 230000002079 cooperative effect Effects 0.000 claims description 5
- 238000011161 development Methods 0.000 claims description 5
- 238000012360 testing method Methods 0.000 claims description 5
- 230000001419 dependent effect Effects 0.000 claims description 2
- 238000009434 installation Methods 0.000 claims description 2
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 claims description 2
- 238000012546 transfer Methods 0.000 claims 5
- 230000002262 irrigation Effects 0.000 claims 3
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- 230000005855 radiation Effects 0.000 claims 3
- 238000000926 separation method Methods 0.000 claims 3
- 230000004888 barrier function Effects 0.000 claims 2
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- 230000033001 locomotion Effects 0.000 description 3
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- 230000005611 electricity Effects 0.000 description 2
- 230000016507 interphase Effects 0.000 description 2
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- 241000270728 Alligator Species 0.000 description 1
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- 241000270722 Crocodylidae Species 0.000 description 1
- 241000255925 Diptera Species 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- 240000002853 Nelumbo nucifera Species 0.000 description 1
- 235000006508 Nelumbo nucifera Nutrition 0.000 description 1
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- 239000003638 chemical reducing agent Substances 0.000 description 1
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- LNNWVNGFPYWNQE-GMIGKAJZSA-N desomorphine Chemical group C1C2=CC=C(O)C3=C2[C@]24CCN(C)[C@H]1[C@@H]2CCC[C@@H]4O3 LNNWVNGFPYWNQE-GMIGKAJZSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
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- 238000005305 interferometry Methods 0.000 description 1
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
- B23Q17/22—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring existing or desired position of tool or work
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02011—Interferometers characterised by controlling or generating intrinsic radiation properties using temporal polarization variation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02007—Two or more frequencies or sources used for interferometric measurement
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02049—Interferometers characterised by particular mechanical design details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/70—Using polarization in the interferometer
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US08/676,872 US5677768A (en) | 1996-07-03 | 1996-07-03 | Method and interferometric apparatus for measuring changes in displacement of an object in a rotating reference frame |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW316289B true TW316289B (en) | 1997-09-21 |
Family
ID=24716391
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW086100274A TW316289B (en) | 1996-07-03 | 1997-01-13 | Method and interferometric apparatus for measuring changes in displacement of an object in a rotating reference frame |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US5677768A (enExample) |
| EP (1) | EP0816798B1 (enExample) |
| JP (1) | JP3841516B2 (enExample) |
| KR (1) | KR100434007B1 (enExample) |
| DE (1) | DE69713211T2 (enExample) |
| TW (1) | TW316289B (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI641805B (zh) * | 2018-04-02 | 2018-11-21 | 國立雲林科技大學 | Laser interference calibrator |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6157458A (en) * | 1998-04-30 | 2000-12-05 | Agilent Technologies | Achromatic quarter wave plate for an air turbulence compensating inteferometer |
| US6399940B1 (en) | 1999-05-10 | 2002-06-04 | Fanuc America Corporation | Optical rotary position encoder |
| JP2003211346A (ja) * | 2002-01-15 | 2003-07-29 | Mori Seiki Co Ltd | 工作機械の精度解析装置 |
| US6847455B1 (en) | 2002-01-25 | 2005-01-25 | The United States Of America As Represented By The Department Of Energy | Heterodyne interferometer with angstrom-level periodic nonlinearity |
| US6897962B2 (en) * | 2002-04-18 | 2005-05-24 | Agilent Technologies, Inc. | Interferometer using beam re-tracing to eliminate beam walk-off |
| KR100468155B1 (ko) * | 2002-06-27 | 2005-01-26 | 한국과학기술원 | 이종모드 헬륨-네온 레이저와 슈퍼 헤테로다인위상측정법을 이용한 헤테로다인 레이저 간섭계 |
| US7251039B1 (en) * | 2005-04-29 | 2007-07-31 | Agilent Technologies, Inc. | Low non-linear error displacement measuring interferometer |
| US7330272B2 (en) * | 2005-04-29 | 2008-02-12 | Agilent Technologies, Inc. | Discrete quarter wave plates for displacement measuring interferometers |
| US20090135430A1 (en) * | 2007-11-26 | 2009-05-28 | Miao Zhu | Systems and Methods for Reducing Nonlinearity in an Interferometer |
| CN102147505B (zh) * | 2010-02-08 | 2015-06-03 | 菲尼萨公司 | 增强型多体式光学设备 |
| US20120064759A1 (en) * | 2010-09-09 | 2012-03-15 | Spatial Digital Systems | Retractable mobile power device module |
| TWI452262B (zh) * | 2011-05-17 | 2014-09-11 | Univ Nat Yunlin Sci & Tech | 同時量測位移及傾角之干涉儀系統 |
| CN107966103B (zh) * | 2017-10-13 | 2019-11-19 | 深圳大学 | 基于局域自旋特性的超灵敏位移传感方法及装置 |
| WO2019071545A1 (zh) * | 2017-10-13 | 2019-04-18 | 深圳大学 | 基于局域自旋特性的超灵敏位移传感方法及装置 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2904836A1 (de) * | 1979-02-08 | 1980-08-14 | Max Planck Gesellschaft | Interferometrische einrichtung zur messung der wellenlaenge optischer strahlung |
| US4802765A (en) * | 1986-06-12 | 1989-02-07 | Zygo Corporation | Differential plane mirror having beamsplitter/beam folder assembly |
| DE3708295C1 (en) * | 1987-03-14 | 1988-08-25 | Daimler Benz Ag | Laser interferometer arrangement for measuring the axial play of two parts mounted so as to be capable of mutual rotation |
| JP2572111B2 (ja) * | 1988-07-11 | 1997-01-16 | 株式会社東京精密 | レーザ干渉測定装置 |
| US5064289A (en) * | 1989-02-23 | 1991-11-12 | Hewlett-Packard Company | Linear-and-angular measuring plane mirror interferometer |
| JP2757072B2 (ja) * | 1989-12-11 | 1998-05-25 | コニカ株式会社 | レーザー干渉測長計 |
| EP0634636B1 (de) * | 1993-07-07 | 1999-10-06 | Deutsches Zentrum für Luft- und Raumfahrt e.V. | Interferometer nach Michelson |
| US5583638A (en) * | 1993-07-21 | 1996-12-10 | Hewlett-Packard Company | Angular michelson interferometer and optical wavemeter based on a rotating periscope |
-
1996
- 1996-07-03 US US08/676,872 patent/US5677768A/en not_active Expired - Fee Related
-
1997
- 1997-01-13 TW TW086100274A patent/TW316289B/zh active
- 1997-06-11 JP JP15376597A patent/JP3841516B2/ja not_active Expired - Fee Related
- 1997-07-02 KR KR1019970030726A patent/KR100434007B1/ko not_active Expired - Fee Related
- 1997-07-03 DE DE69713211T patent/DE69713211T2/de not_active Expired - Fee Related
- 1997-07-03 EP EP97111166A patent/EP0816798B1/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI641805B (zh) * | 2018-04-02 | 2018-11-21 | 國立雲林科技大學 | Laser interference calibrator |
Also Published As
| Publication number | Publication date |
|---|---|
| DE69713211D1 (de) | 2002-07-18 |
| DE69713211T2 (de) | 2003-01-16 |
| EP0816798A2 (en) | 1998-01-07 |
| KR980008447A (ko) | 1998-04-30 |
| KR100434007B1 (ko) | 2004-08-02 |
| EP0816798B1 (en) | 2002-06-12 |
| US5677768A (en) | 1997-10-14 |
| JPH1082609A (ja) | 1998-03-31 |
| JP3841516B2 (ja) | 2006-11-01 |
| EP0816798A3 (en) | 2000-01-12 |
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