DE69708882D1 - Überwachung der dicke - Google Patents

Überwachung der dicke

Info

Publication number
DE69708882D1
DE69708882D1 DE69708882T DE69708882T DE69708882D1 DE 69708882 D1 DE69708882 D1 DE 69708882D1 DE 69708882 T DE69708882 T DE 69708882T DE 69708882 T DE69708882 T DE 69708882T DE 69708882 D1 DE69708882 D1 DE 69708882D1
Authority
DE
Germany
Prior art keywords
thickness monitoring
thickness
polarisation
illuminated
examined
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69708882T
Other languages
English (en)
Other versions
DE69708882T2 (de
Inventor
Mark Burton Holbrook
William George Beckmann
Simon Eric Hicks
Christopher David Wi Wilkinson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOC Group Ltd
Original Assignee
Vorgem Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vorgem Ltd filed Critical Vorgem Ltd
Publication of DE69708882D1 publication Critical patent/DE69708882D1/de
Application granted granted Critical
Publication of DE69708882T2 publication Critical patent/DE69708882T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
DE69708882T 1996-08-10 1997-08-11 Überwachung der dicke Expired - Fee Related DE69708882T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB9616853.9A GB9616853D0 (en) 1996-08-10 1996-08-10 An improved thickness monitor
PCT/GB1997/002139 WO1998007002A1 (en) 1996-08-10 1997-08-11 Improved thickness monitoring

Publications (2)

Publication Number Publication Date
DE69708882D1 true DE69708882D1 (de) 2002-01-17
DE69708882T2 DE69708882T2 (de) 2002-08-01

Family

ID=10798334

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69708882T Expired - Fee Related DE69708882T2 (de) 1996-08-10 1997-08-11 Überwachung der dicke

Country Status (8)

Country Link
US (1) US6226086B1 (de)
EP (1) EP0917642B1 (de)
JP (1) JP3816533B2 (de)
AT (1) ATE210274T1 (de)
AU (1) AU3856897A (de)
DE (1) DE69708882T2 (de)
GB (1) GB9616853D0 (de)
WO (1) WO1998007002A1 (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1095264A1 (de) * 1998-07-11 2001-05-02 Vorgem Limited Verbesserte prozessüberwachung
JP4128339B2 (ja) * 2001-03-05 2008-07-30 株式会社日立製作所 試料処理装置用プロセスモニタ及び試料の製造方法
US7108584B2 (en) * 2001-09-26 2006-09-19 Fuji Photo Film Co., Ltd. Method and apparatus for manufacturing liquid drop ejecting head
JP4449293B2 (ja) * 2001-12-19 2010-04-14 株式会社ニコン 成膜装置、及び光学部材の製造方法
US6762849B1 (en) 2002-06-19 2004-07-13 Novellus Systems, Inc. Method for in-situ film thickness measurement and its use for in-situ control of deposited film thickness
US7271916B2 (en) * 2002-11-14 2007-09-18 Fitel Usa Corp Characterization of optical fiber using Fourier domain optical coherence tomography
US20080246951A1 (en) * 2007-04-09 2008-10-09 Phillip Walsh Method and system for using reflectometry below deep ultra-violet (DUV) wavelengths for measuring properties of diffracting or scattering structures on substrate work-pieces
US8564780B2 (en) * 2003-01-16 2013-10-22 Jordan Valley Semiconductors Ltd. Method and system for using reflectometry below deep ultra-violet (DUV) wavelengths for measuring properties of diffracting or scattering structures on substrate work pieces
US7126131B2 (en) * 2003-01-16 2006-10-24 Metrosol, Inc. Broad band referencing reflectometer
US20050042777A1 (en) * 2003-08-20 2005-02-24 The Boc Group Inc. Control of etch and deposition processes
US7804059B2 (en) * 2004-08-11 2010-09-28 Jordan Valley Semiconductors Ltd. Method and apparatus for accurate calibration of VUV reflectometer
US20070249071A1 (en) * 2006-04-21 2007-10-25 Lei Lian Neural Network Methods and Apparatuses for Monitoring Substrate Processing
US20080129986A1 (en) 2006-11-30 2008-06-05 Phillip Walsh Method and apparatus for optically measuring periodic structures using orthogonal azimuthal sample orientations
DE102007009901B4 (de) * 2007-02-28 2011-07-07 Globalfoundries Inc. Technik zum Strukturieren unterschiedlich verspannter Schichten, die über Transistoren ausgebildet sind, durch verbesserte Ätzsteuerungsstrategien
US20090219537A1 (en) * 2008-02-28 2009-09-03 Phillip Walsh Method and apparatus for using multiple relative reflectance measurements to determine properties of a sample using vacuum ultra violet wavelengths
US8153987B2 (en) 2009-05-22 2012-04-10 Jordan Valley Semiconductors Ltd. Automated calibration methodology for VUV metrology system
KR101306986B1 (ko) * 2010-03-09 2013-09-26 한국전자통신연구원 박막 형성 장치
US8867041B2 (en) 2011-01-18 2014-10-21 Jordan Valley Semiconductor Ltd Optical vacuum ultra-violet wavelength nanoimprint metrology
TWI441271B (zh) 2011-01-31 2014-06-11 Ind Tech Res Inst 量測矽通孔結構之系統、方法與電腦可讀取記錄媒體
US8565379B2 (en) 2011-03-14 2013-10-22 Jordan Valley Semiconductors Ltd. Combining X-ray and VUV analysis of thin film layers
WO2013105870A1 (ru) * 2012-01-10 2013-07-18 Labusov Vladimir Alexandrovich Способ измерения толщин нанометровых слоёв многослойного покрытия, проводимого в процессе его напыления
BE1022682B1 (nl) * 2015-01-11 2016-07-14 Soleras Advanced Coatings Bvba Een deksel met een sensorsysteem voor een configureerbaar meetsysteem voor een configureerbaar sputtersysteem
TWI600876B (zh) 2015-11-23 2017-10-01 財團法人工業技術研究院 量測系統
US9952269B2 (en) * 2016-05-20 2018-04-24 Kerim Akel Measurement of complex dielectric constant and permeability
JP2023012630A (ja) * 2021-07-14 2023-01-26 住友電気工業株式会社 光ファイバ、および光ファイバの製造方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69021813T2 (de) * 1989-09-25 1996-05-23 Mitsubishi Electric Corp Apparat und Verfahren für die Ausmessung von dünnen mehrschichtigen Lagen.
GB2257507B (en) 1991-06-26 1995-03-01 Digital Equipment Corp Semiconductor wafer processing with across-wafer critical dimension monitoring using optical endpoint detection
US5333049A (en) 1991-12-06 1994-07-26 Hughes Aircraft Company Apparatus and method for interferometrically measuring the thickness of thin films using full aperture irradiation
JPH074922A (ja) * 1993-06-21 1995-01-10 Jasco Corp 半導体多層薄膜膜厚測定装置およびその測定方法
JP2866559B2 (ja) 1993-09-20 1999-03-08 大日本スクリーン製造株式会社 膜厚測定方法
SE502239C2 (sv) 1994-06-27 1995-09-18 Hassbjer Micro System Ab Sätt och anordning för tjockleksbedömning
EP0735565B1 (de) 1995-03-31 1999-06-02 International Business Machines Corporation Verfahren und Gerät zur Überwachung des Trockenätzens eines dielektrischen Films bis zu einer gegebenen Dicke

Also Published As

Publication number Publication date
EP0917642B1 (de) 2001-12-05
EP0917642A1 (de) 1999-05-26
US6226086B1 (en) 2001-05-01
ATE210274T1 (de) 2001-12-15
JP3816533B2 (ja) 2006-08-30
DE69708882T2 (de) 2002-08-01
JP2000516712A (ja) 2000-12-12
WO1998007002A1 (en) 1998-02-19
AU3856897A (en) 1998-03-06
GB9616853D0 (en) 1996-09-25

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: THE BOC GROUP PLC, WINDLESHAM, SURREY, GB

8339 Ceased/non-payment of the annual fee