DE69706124D1 - Polierzusammensetzung für Aluminiumscheiben und Polierverfahren - Google Patents

Polierzusammensetzung für Aluminiumscheiben und Polierverfahren

Info

Publication number
DE69706124D1
DE69706124D1 DE69706124T DE69706124T DE69706124D1 DE 69706124 D1 DE69706124 D1 DE 69706124D1 DE 69706124 T DE69706124 T DE 69706124T DE 69706124 T DE69706124 T DE 69706124T DE 69706124 D1 DE69706124 D1 DE 69706124D1
Authority
DE
Germany
Prior art keywords
polishing
processes
aluminum discs
composition
polishing composition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69706124T
Other languages
English (en)
Other versions
DE69706124T2 (de
Inventor
Toshio Kasai
Isao Ota
Takao Kaga
Tohru Nishimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissan Chemical Corp
Original Assignee
Nissan Chemical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissan Chemical Corp filed Critical Nissan Chemical Corp
Publication of DE69706124D1 publication Critical patent/DE69706124D1/de
Application granted granted Critical
Publication of DE69706124T2 publication Critical patent/DE69706124T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09G—POLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00—Polishing compositions
    • C09G1/02—Polishing compositions containing abrasives or grinding agents
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1454—Abrasive powders, suspensions and pastes for polishing
    • C09K3/1463—Aqueous liquid suspensions
DE69706124T 1996-11-14 1997-11-07 Polierzusammensetzung für Aluminiumscheiben und Polierverfahren Expired - Fee Related DE69706124T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30271596 1996-11-14

Publications (2)

Publication Number Publication Date
DE69706124D1 true DE69706124D1 (de) 2001-09-20
DE69706124T2 DE69706124T2 (de) 2002-05-02

Family

ID=17912311

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69706124T Expired - Fee Related DE69706124T2 (de) 1996-11-14 1997-11-07 Polierzusammensetzung für Aluminiumscheiben und Polierverfahren

Country Status (5)

Country Link
US (1) US6007592A (de)
EP (1) EP0842997B1 (de)
DE (1) DE69706124T2 (de)
MY (1) MY115702A (de)
SG (1) SG75815A1 (de)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6475407B2 (en) * 1998-05-19 2002-11-05 Showa Denko K.K. Composition for polishing metal on semiconductor wafer and method of using same
US6490758B1 (en) * 1999-04-22 2002-12-10 Chuo Hatsujo Kabushiki Kaisha Frictional hinge device
US6162268A (en) * 1999-05-03 2000-12-19 Praxair S. T. Technology, Inc. Polishing slurry
CN1125861C (zh) * 1999-07-16 2003-10-29 长兴化学工业股份有限公司 半导体加工用化学机械研磨组合物
CN1161826C (zh) * 1999-08-26 2004-08-11 日立化成工业株式会社 化学机械研磨用研磨剂及研磨方法
CN1125862C (zh) * 1999-09-20 2003-10-29 长兴化学工业股份有限公司 半导体加工用化学机械研磨组合物
US6258140B1 (en) * 1999-09-27 2001-07-10 Fujimi America Inc. Polishing composition
US6488729B1 (en) * 1999-09-30 2002-12-03 Showa Denko K.K. Polishing composition and method
MY127884A (en) * 1999-09-30 2006-12-29 Showa Denko Kk Polishing composition and method
US6461958B1 (en) 2000-02-04 2002-10-08 Seagate Technology Llc Polishing memory disk substrates with reclaim slurry
US6261476B1 (en) * 2000-03-21 2001-07-17 Praxair S. T. Technology, Inc. Hybrid polishing slurry
CN1200066C (zh) * 2000-05-12 2005-05-04 日产化学工业株式会社 抛光剂组合物
US8025808B2 (en) * 2003-04-25 2011-09-27 Saint-Gobain Ceramics & Plastics, Inc. Methods for machine ceramics
JP4202183B2 (ja) * 2003-05-09 2008-12-24 株式会社フジミインコーポレーテッド 研磨用組成物
US7438875B2 (en) 2003-10-16 2008-10-21 Kimberly-Clark Worldwide, Inc. Method for reducing odor using metal-modified silica particles
US7879350B2 (en) 2003-10-16 2011-02-01 Kimberly-Clark Worldwide, Inc. Method for reducing odor using colloidal nanoparticles
US7413550B2 (en) 2003-10-16 2008-08-19 Kimberly-Clark Worldwide, Inc. Visual indicating device for bad breath
US7488520B2 (en) 2003-10-16 2009-02-10 Kimberly-Clark Worldwide, Inc. High surface area material blends for odor reduction, articles utilizing such blends and methods of using same
US7678367B2 (en) 2003-10-16 2010-03-16 Kimberly-Clark Worldwide, Inc. Method for reducing odor using metal-modified particles
US7837663B2 (en) 2003-10-16 2010-11-23 Kimberly-Clark Worldwide, Inc. Odor controlling article including a visual indicating device for monitoring odor absorption
US7754197B2 (en) 2003-10-16 2010-07-13 Kimberly-Clark Worldwide, Inc. Method for reducing odor using coordinated polydentate compounds
US7794737B2 (en) 2003-10-16 2010-09-14 Kimberly-Clark Worldwide, Inc. Odor absorbing extrudates
WO2008079704A2 (en) * 2006-12-20 2008-07-03 Saint-Gobain Ceramics & Plastics, Inc. Methods for machining inorganic, non-metallic workpieces
CN107731648B (zh) * 2010-10-28 2020-02-14 应用材料公司 高纯度铝涂层硬阳极化
CN104194645B (zh) * 2014-08-07 2016-05-11 湖北迪曼特科技有限公司 用于去除待修模具中残铝的清模饼及其制备和使用方法
CN104294206B (zh) * 2014-10-09 2016-05-04 沈阳富创精密设备有限公司 一种半导体装备用抗高温蠕变接地基片的制备方法
SG11201909474XA (en) * 2017-04-14 2019-11-28 Cabot Microelectronics Corp Chemical-mechanical processing slurry and methods for processing a nickel substrate surface

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3441596A1 (de) * 1984-11-14 1986-05-15 Riedel-De Haen Ag, 3016 Seelze Aktiver fuellstoff fuer schleifscheiben
JPS6225187A (ja) * 1985-07-25 1987-02-03 Fujimi Kenmazai Kogyo Kk メモリ−ハ−ドデイスクの研磨用組成物
US4769046A (en) * 1985-07-25 1988-09-06 Fujimi Kanmazai Kogyo Kabushiki Kaisha Of Japan Process for polishing surface of memory hard disc
JPH01121163A (ja) * 1987-11-02 1989-05-12 Showa Denko Kk アルミニウム磁気ディスク研磨用組成物
JP2632898B2 (ja) * 1988-02-09 1997-07-23 株式会社フジミインコーポレーテッド 研磨用組成物
JPH0223589A (ja) * 1988-07-12 1990-01-25 Fujitsu Ltd バブルメモリ装置
JP2725191B2 (ja) * 1988-12-09 1998-03-09 株式会社フジミインコーポレーテッド 研磨剤組成物
JP2725192B2 (ja) * 1988-12-09 1998-03-09 株式会社フジミインコーポレーテッド 研磨剤組成物
JPH03277683A (ja) * 1990-03-27 1991-12-09 Sumitomo Chem Co Ltd 精密研磨用組成物
JPH0438788A (ja) * 1990-06-04 1992-02-07 Oki Electric Ind Co Ltd リフレッシュ方式
JP3160820B2 (ja) * 1992-03-24 2001-04-25 株式会社フジミインコーポレーテッド 研磨剤組成物
KR970700745A (ko) * 1993-12-28 1997-02-12 테릴 켄트 퀄리 알파 알루미나계 연마 입자(alpha alumina-based abrasive grain)

Also Published As

Publication number Publication date
EP0842997A1 (de) 1998-05-20
MY115702A (en) 2003-08-30
US6007592A (en) 1999-12-28
SG75815A1 (en) 2000-10-24
DE69706124T2 (de) 2002-05-02
EP0842997B1 (de) 2001-08-16

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee