DE69700021D1 - Linearer Hochdruckwandler - Google Patents

Linearer Hochdruckwandler

Info

Publication number
DE69700021D1
DE69700021D1 DE69700021T DE69700021T DE69700021D1 DE 69700021 D1 DE69700021 D1 DE 69700021D1 DE 69700021 T DE69700021 T DE 69700021T DE 69700021 T DE69700021 T DE 69700021T DE 69700021 D1 DE69700021 D1 DE 69700021D1
Authority
DE
Germany
Prior art keywords
high pressure
pressure converter
linear high
linear
converter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69700021T
Other languages
English (en)
Other versions
DE69700021T2 (de
Inventor
Kazuyoshi Nagase
Hironobu Baba
Masahito Imai
Yukihiko Tanizawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
Denso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denso Corp filed Critical Denso Corp
Application granted granted Critical
Publication of DE69700021D1 publication Critical patent/DE69700021D1/de
Publication of DE69700021T2 publication Critical patent/DE69700021T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0038—Fluidic connecting means being part of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0084—Electrical connection means to the outside of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/148—Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
DE69700021T 1996-02-26 1997-02-19 Linearer Hochdruckwandler Expired - Fee Related DE69700021T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8038377A JPH09232595A (ja) 1996-02-26 1996-02-26 圧力検出装置

Publications (2)

Publication Number Publication Date
DE69700021D1 true DE69700021D1 (de) 1998-10-08
DE69700021T2 DE69700021T2 (de) 1999-01-21

Family

ID=12523598

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69700021T Expired - Fee Related DE69700021T2 (de) 1996-02-26 1997-02-19 Linearer Hochdruckwandler

Country Status (4)

Country Link
US (1) US5872315A (de)
EP (1) EP0793082B1 (de)
JP (1) JPH09232595A (de)
DE (1) DE69700021T2 (de)

Families Citing this family (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4161410B2 (ja) 1997-07-25 2008-10-08 株式会社デンソー 圧力検出装置
US6782755B2 (en) * 2000-07-06 2004-08-31 California Institute Of Technology Surface-micromachined pressure sensor and high pressure application
DE10148859A1 (de) * 2001-10-04 2003-04-10 Bosch Gmbh Robert Mikromechanisches Bauelement und Drucksensor mit einem solchen Bauelement
JP2004101515A (ja) * 2002-07-10 2004-04-02 Texas Instruments Inc 気密圧力変換器
JP2004045184A (ja) * 2002-07-11 2004-02-12 Denso Corp 半導体力学量センサ
US6739199B1 (en) 2003-03-10 2004-05-25 Hewlett-Packard Development Company, L.P. Substrate and method of forming substrate for MEMS device with strain gage
US6838303B2 (en) * 2003-03-19 2005-01-04 Asia Pacific Microsystems, Inc. Silicon pressure sensor and the manufacturing method thereof
JP4828804B2 (ja) * 2003-06-26 2011-11-30 京セラ株式会社 セラミックダイアフラム及びその製法並びに圧力センサ
JP4744088B2 (ja) * 2004-02-24 2011-08-10 京セラ株式会社 圧力検出装置用パッケージ
US7866964B2 (en) * 2005-05-20 2011-01-11 Emerson Climate Technologies, Inc. Sensor for hermetic machine
US7260994B2 (en) * 2005-11-03 2007-08-28 Honeywell International Inc. Low cost high-pressure sensor
DE102005058653A1 (de) * 2005-12-07 2007-06-28 Siemens Ag Mitteldrucksensor
CN101379377B (zh) * 2006-02-03 2011-05-11 弗兰霍菲尔运输应用研究公司 可偏转微机械系统及其应用
JP5186725B2 (ja) * 2006-03-15 2013-04-24 株式会社デンソー 圧力センサ
DE102006033467B4 (de) * 2006-07-19 2010-03-25 Continental Automotive Gmbh Druckerfassungsvorrichtung
DE102008000128B4 (de) * 2007-01-30 2013-01-03 Denso Corporation Halbleitersensorvorrichtung und deren Herstellungsverfahren
JP2008190394A (ja) 2007-02-02 2008-08-21 Denso Corp 圧力センサ、及び圧力制御装置
US8262372B2 (en) 2007-05-10 2012-09-11 Emerson Climate Technologies, Inc. Compressor hermetic terminal
US8939734B2 (en) * 2007-08-28 2015-01-27 Emerson Climate Technologies, Inc. Molded plug for a compressor
WO2009108872A1 (en) * 2008-02-27 2009-09-03 Measurement Specialties, Inc. A low pressure transducer using beam and diaphragm
EP2138820B1 (de) 2008-06-25 2016-09-21 Sensata Technologies, Inc. Piezoresistiver Druckmessungsstecker für einen Verbrennungsmotor
JP5243988B2 (ja) 2009-02-10 2013-07-24 本田技研工業株式会社 多軸力覚センサおよび加速度センサ
US8939735B2 (en) * 2009-03-27 2015-01-27 Emerson Climate Technologies, Inc. Compressor plug assembly
JP5206833B2 (ja) * 2010-09-28 2013-06-12 株式会社デンソー Ａ／ｄ変換回路
US9480177B2 (en) 2012-07-27 2016-10-25 Emerson Climate Technologies, Inc. Compressor protection module
JP5975970B2 (ja) * 2013-11-20 2016-08-23 日立オートモティブシステムズ株式会社 圧力センサ
WO2015098324A1 (ja) * 2013-12-25 2015-07-02 日立オートモティブシステムズ株式会社 圧力測定装置
DE102015104410B4 (de) 2015-03-24 2018-09-13 Tdk-Micronas Gmbh Drucksensor
EP3147258A1 (de) * 2015-09-22 2017-03-29 AT & S Austria Technologie & Systemtechnik Aktiengesellschaft Verbindungspaneel für elektronische bauelemente
JP6581900B2 (ja) 2015-12-28 2019-09-25 アズビル株式会社 圧力センサ
JP6521876B2 (ja) * 2016-01-14 2019-05-29 アズビル株式会社 圧力センサ
JP6579965B2 (ja) * 2016-01-19 2019-09-25 アズビル株式会社 圧力センサ
US9964458B2 (en) 2016-05-12 2018-05-08 Continental Automotive Systems, Inc. Pressure sensor device with anchors for die shrinkage and high sensitivity
US20170350782A1 (en) * 2016-06-03 2017-12-07 Honeywell International Inc. Fill fluid thermal expansion compensation for pressure sensors
CN106289624A (zh) * 2016-11-07 2017-01-04 中国海洋大学 一种基于mems的海洋湍流传感器
DE102019129411A1 (de) * 2019-09-12 2021-03-18 Wika Alexander Wiegand Se & Co. Kg Aufnehmerkörper mit einem Messelement und Herstellungsverfahren für einen Aufnehmerkörper
DE102020200213A1 (de) * 2019-12-04 2021-06-10 Siemens Aktiengesellschaft Multifunktionaler Sensor für die Prozessindustrie
DE102020105210A1 (de) 2020-02-27 2021-09-02 Tdk Electronics Ag Sensor und Verfahren zur Herstellung eines Sensors
DE102020105214A1 (de) * 2020-02-27 2021-09-02 Endress+Hauser SE+Co. KG Vibronischer Multisensor

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3922705A (en) * 1973-06-04 1975-11-25 Gen Electric Dielectrically isolated integral silicon diaphram or other semiconductor product
JPS5362581A (en) * 1976-11-17 1978-06-05 Hitachi Ltd Pressure detecting element
JPS5921495B2 (ja) * 1977-12-15 1984-05-21 株式会社豊田中央研究所 細管型圧力計
US4507170A (en) * 1980-01-07 1985-03-26 Myhre Kjell E Optimized stress and strain distribution diaphragms
US4498070A (en) * 1983-06-30 1985-02-05 Lirman Irving R Semi-conductor transducer and method of making the same
JPS6188121A (ja) * 1984-10-05 1986-05-06 Nippon Denso Co Ltd 圧力変換器
JPS6273131A (ja) * 1985-09-26 1987-04-03 Nippon Soken Inc 圧力検出器
US4712430A (en) * 1986-04-04 1987-12-15 Dynisco, Inc. Pressure transducer
JPS62291533A (ja) * 1986-06-11 1987-12-18 Nippon Soken Inc 圧力検出器
JPH0711461B2 (ja) * 1986-06-13 1995-02-08 株式会社日本自動車部品総合研究所 圧力検出器
JPS635232A (ja) * 1986-06-25 1988-01-11 Nippon Soken Inc 圧力検出器
JPS6316240A (ja) * 1986-07-08 1988-01-23 Nippon Soken Inc 圧力検出器
DE3624240A1 (de) * 1986-07-18 1988-01-28 Vdo Schindling Mechanisch-elektrischer wandler
JPS63196081A (ja) * 1987-02-10 1988-08-15 Nippon Denso Co Ltd 半導体式圧力検出器
JPH07101747B2 (ja) * 1987-03-05 1995-11-01 日本電装株式会社 半導体圧力センサ
JPH01211986A (ja) * 1988-02-19 1989-08-25 Matsushita Electric Ind Co Ltd 半導体圧力センサ
US5310610A (en) * 1988-05-07 1994-05-10 Sharp Kabushiki Kaisha Silicon micro sensor and manufacturing method therefor
JPH02271234A (ja) * 1989-04-12 1990-11-06 Nippon Soken Inc 圧力検出器
JPH0328732A (ja) * 1989-06-26 1991-02-06 Nippon Soken Inc 圧力検出器およびその製造方法
JPH04258176A (ja) * 1991-02-12 1992-09-14 Mitsubishi Electric Corp 半導体圧力センサ
JP3084304B2 (ja) * 1991-07-04 2000-09-04 長野計器株式会社 圧力センサの金属製ダイヤフラム
JPH0573551A (ja) * 1991-09-11 1993-03-26 Toshiba Corp 電子ドキユメント見直し支援装置
US5291788A (en) * 1991-09-24 1994-03-08 Kabushiki Kaisha Toshiba Semiconductor pressure sensor
DE59303373D1 (de) * 1993-01-19 1996-09-05 Fraunhofer Ges Forschung Drucksensor
US5483834A (en) * 1993-09-20 1996-01-16 Rosemount Inc. Suspended diaphragm pressure sensor

Also Published As

Publication number Publication date
US5872315A (en) 1999-02-16
JPH09232595A (ja) 1997-09-05
DE69700021T2 (de) 1999-01-21
EP0793082B1 (de) 1998-09-02
EP0793082A1 (de) 1997-09-03

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee