DE69635530T2 - Verfahren zum Trocknen eines Substrats - Google Patents
Verfahren zum Trocknen eines Substrats Download PDFInfo
- Publication number
- DE69635530T2 DE69635530T2 DE69635530T DE69635530T DE69635530T2 DE 69635530 T2 DE69635530 T2 DE 69635530T2 DE 69635530 T DE69635530 T DE 69635530T DE 69635530 T DE69635530 T DE 69635530T DE 69635530 T2 DE69635530 T2 DE 69635530T2
- Authority
- DE
- Germany
- Prior art keywords
- drying
- condensation
- liquid
- web
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001035 drying Methods 0.000 title claims description 93
- 239000000758 substrate Substances 0.000 title claims description 40
- 238000000034 method Methods 0.000 title claims description 27
- 239000007788 liquid Substances 0.000 claims description 90
- 238000012546 transfer Methods 0.000 claims description 6
- 239000000126 substance Substances 0.000 claims description 2
- 238000009833 condensation Methods 0.000 description 106
- 230000005494 condensation Effects 0.000 description 106
- 238000000576 coating method Methods 0.000 description 43
- 239000011248 coating agent Substances 0.000 description 37
- 239000002904 solvent Substances 0.000 description 29
- 239000007789 gas Substances 0.000 description 24
- 230000005484 gravity Effects 0.000 description 18
- 239000010408 film Substances 0.000 description 15
- 239000000463 material Substances 0.000 description 14
- 238000010438 heat treatment Methods 0.000 description 12
- 239000002245 particle Substances 0.000 description 12
- 230000032258 transport Effects 0.000 description 11
- 230000008569 process Effects 0.000 description 9
- 230000008901 benefit Effects 0.000 description 8
- 230000007547 defect Effects 0.000 description 8
- 238000011084 recovery Methods 0.000 description 8
- 239000012530 fluid Substances 0.000 description 7
- 230000009471 action Effects 0.000 description 5
- 239000003570 air Substances 0.000 description 5
- 239000012298 atmosphere Substances 0.000 description 5
- 230000005499 meniscus Effects 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 230000002829 reductive effect Effects 0.000 description 4
- 239000012080 ambient air Substances 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 239000013529 heat transfer fluid Substances 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 238000001311 chemical methods and process Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 230000000763 evoking effect Effects 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 239000000123 paper Substances 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 230000000717 retained effect Effects 0.000 description 2
- 230000002441 reversible effect Effects 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 241000364021 Tulsa Species 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000011111 cardboard Substances 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000013500 data storage Methods 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 230000002996 emotional effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 230000002706 hydrostatic effect Effects 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 239000006249 magnetic particle Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 231100000252 nontoxic Toxicity 0.000 description 1
- 230000003000 nontoxic effect Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000011087 paperboard Substances 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 239000013557 residual solvent Substances 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B25/00—Details of general application not covered by group F26B21/00 or F26B23/00
- F26B25/005—Treatment of dryer exhaust gases
- F26B25/006—Separating volatiles, e.g. recovering solvents from dryer exhaust gases
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B13/00—Machines and apparatus for drying fabrics, fibres, yarns, or other materials in long lengths, with progressive movement
- F26B13/10—Arrangements for feeding, heating or supporting materials; Controlling movement, tension or position of materials
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B13/00—Machines and apparatus for drying fabrics, fibres, yarns, or other materials in long lengths, with progressive movement
- F26B13/10—Arrangements for feeding, heating or supporting materials; Controlling movement, tension or position of materials
- F26B13/105—Drying webs by contact with heated surfaces other than rollers or drums
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B25/00—Details of general application not covered by group F26B21/00 or F26B23/00
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B3/00—Drying solid materials or objects by processes involving the application of heat
- F26B3/18—Drying solid materials or objects by processes involving the application of heat by conduction, i.e. the heat is conveyed from the heat source, e.g. gas flame, to the materials or objects to be dried by direct contact
- F26B3/20—Drying solid materials or objects by processes involving the application of heat by conduction, i.e. the heat is conveyed from the heat source, e.g. gas flame, to the materials or objects to be dried by direct contact the heat source being a heated surface, e.g. a moving belt or conveyor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B7/00—Drying solid materials or objects by processes using a combination of processes not covered by a single one of groups F26B3/00 and F26B5/00
- F26B7/002—Drying solid materials or objects by processes using a combination of processes not covered by a single one of groups F26B3/00 and F26B5/00 using an electric field and heat
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/842—Coating a support with a liquid magnetic dispersion
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/842—Coating a support with a liquid magnetic dispersion
- G11B5/845—Coating a support with a liquid magnetic dispersion in a magnetic field
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Dispersion Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Microbiology (AREA)
- Drying Of Solid Materials (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Coating Apparatus (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US08/536,593 US5581905A (en) | 1995-09-18 | 1995-09-18 | Coated substrate drying system |
| US536593 | 1995-09-18 | ||
| US699522 | 1996-09-04 | ||
| US08/699,522 US5694701A (en) | 1996-09-04 | 1996-09-04 | Coated substrate drying system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69635530D1 DE69635530D1 (de) | 2006-01-05 |
| DE69635530T2 true DE69635530T2 (de) | 2006-08-10 |
Family
ID=27065191
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69635530T Expired - Lifetime DE69635530T2 (de) | 1995-09-18 | 1996-09-09 | Verfahren zum Trocknen eines Substrats |
| DE69635682T Expired - Lifetime DE69635682T2 (de) | 1995-09-18 | 1996-09-09 | Trocknungssystem für ein beschichtetes Substrat |
| DE69627357T Expired - Lifetime DE69627357T2 (de) | 1995-09-18 | 1996-09-09 | Verfahren und vorrichtung zur trocknung eines beschichteten substrats |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69635682T Expired - Lifetime DE69635682T2 (de) | 1995-09-18 | 1996-09-09 | Trocknungssystem für ein beschichtetes Substrat |
| DE69627357T Expired - Lifetime DE69627357T2 (de) | 1995-09-18 | 1996-09-09 | Verfahren und vorrichtung zur trocknung eines beschichteten substrats |
Country Status (11)
| Country | Link |
|---|---|
| EP (5) | EP1191295B1 (enExample) |
| JP (2) | JP3874799B2 (enExample) |
| KR (3) | KR100449962B1 (enExample) |
| CN (2) | CN1145775C (enExample) |
| AU (1) | AU696910B2 (enExample) |
| BR (1) | BR9610658A (enExample) |
| CA (1) | CA2229870A1 (enExample) |
| DE (3) | DE69635530T2 (enExample) |
| ES (3) | ES2253321T3 (enExample) |
| PT (2) | PT1195564E (enExample) |
| WO (1) | WO1997011328A1 (enExample) |
Families Citing this family (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USRE38412E1 (en) | 1996-09-04 | 2004-02-03 | Imation Corp. | Coated substrate drying system with magnetic particle orientation |
| US5813133A (en) * | 1996-09-04 | 1998-09-29 | Minnesota Mining And Manufacturing Company | Coated substrate drying system with magnetic particle orientation |
| EP0897092A1 (de) * | 1997-08-08 | 1999-02-17 | Voith Sulzer Papiertechnik Patent GmbH | Kondensations-Trocknung |
| US6134808A (en) * | 1998-05-18 | 2000-10-24 | Minnesota Mining And Manufacturing Company | Gap drying with insulation layer between substrate and heated platen |
| ATE324563T1 (de) * | 2000-09-24 | 2006-05-15 | 3M Innovative Properties Co | Trocknungsverfahren zur selektiven entfernung flüchtiger bestandteile aus nassen beschichtungen |
| CN100464826C (zh) * | 2000-09-24 | 2009-03-04 | 3M创新有限公司 | 制造微孔膜的挤出方法和设备 |
| JP4631242B2 (ja) * | 2001-09-27 | 2011-02-16 | 富士フイルム株式会社 | 塗布膜の乾燥方法および装置 |
| JP4763184B2 (ja) * | 2001-09-27 | 2011-08-31 | 富士フイルム株式会社 | 溶液製膜方法および装置 |
| JP5358908B2 (ja) * | 2007-08-02 | 2013-12-04 | 大日本印刷株式会社 | カラーフィルタ製造装置、カラーフィルタ製造方法、乾燥装置、乾燥方法、表示装置の製造装置、表示装置の製造方法 |
| TW201005813A (en) | 2008-05-15 | 2010-02-01 | Du Pont | Process for forming an electroactive layer |
| KR101007896B1 (ko) * | 2009-02-12 | 2011-01-14 | 주식회사 희람테크 | 통신케이블 단자함 구조 |
| KR20110134452A (ko) | 2009-03-06 | 2011-12-14 | 이 아이 듀폰 디 네모아 앤드 캄파니 | 전기활성 층을 형성하기 위한 방법 |
| KR20110139253A (ko) | 2009-03-09 | 2011-12-28 | 이 아이 듀폰 디 네모아 앤드 캄파니 | 전기활성 층을 형성하기 위한 방법 |
| TW201044667A (en) * | 2009-03-09 | 2010-12-16 | Du Pont | Process for forming an electroactive layer |
| JP5503937B2 (ja) * | 2009-10-08 | 2014-05-28 | 日産自動車株式会社 | 電極乾燥装置及び電極乾燥方法 |
| JP5222333B2 (ja) * | 2010-09-09 | 2013-06-26 | 富士フイルム株式会社 | 塗布膜の乾燥方法および装置 |
| CA2879373C (en) * | 2012-07-18 | 2019-10-29 | Shang-Yo Lee | Room temperature drying system |
| JP6149547B2 (ja) * | 2013-07-01 | 2017-06-21 | コニカミノルタ株式会社 | 湿式画像形成装置 |
| JP6909617B2 (ja) * | 2016-09-30 | 2021-07-28 | 東京エレクトロン株式会社 | 減圧乾燥装置 |
| CN109216573A (zh) * | 2017-06-30 | 2019-01-15 | 京东方科技集团股份有限公司 | 冷板及其制备方法、干燥设备、oled面板的制备方法 |
| CN109200736B (zh) * | 2017-06-30 | 2021-01-08 | 京东方科技集团股份有限公司 | 冷凝板、真空干燥设备以及真空干燥方法 |
| DE102017128397A1 (de) * | 2017-11-30 | 2019-06-06 | Mitsubishi Hitec Paper Europe Gmbh | Verfahren und Vorrichtung zum Herstellen eines beschichteten Substrats sowie beschichtetes Substrat |
| CN108527745B (zh) * | 2018-03-13 | 2021-03-02 | 广西师范大学 | 一种聚酰亚胺厚膜或聚酰亚胺超厚膜的制备装置和制备方法 |
| CN108541143B (zh) * | 2018-03-13 | 2021-07-13 | 广西师范大学 | 一种聚酰亚胺覆铜板的制备装置和制备方法 |
| CN109406247A (zh) * | 2018-10-26 | 2019-03-01 | 杭州依美洛克医学科技有限公司 | 用于载物片实验液的排出装置 |
| US12343953B2 (en) | 2018-11-09 | 2025-07-01 | 3M Innovative Properties Company | Nanostructured optical films and intermediates |
| CN110128033A (zh) * | 2019-05-23 | 2019-08-16 | 深圳市华星光电技术有限公司 | 一种烘烤设备 |
| KR102794049B1 (ko) * | 2019-07-12 | 2025-04-11 | 주식회사 엘지화학 | 필름의 건조 장치 |
| JP6907280B2 (ja) * | 2019-09-12 | 2021-07-21 | 中外炉工業株式会社 | 減圧乾燥装置 |
| CN111589628B (zh) * | 2020-04-28 | 2021-04-09 | 台州伟志机床股份有限公司 | 一种板材防锈油低损耗率速干型喷涂设备 |
| CN112122081B (zh) * | 2020-09-23 | 2024-09-10 | 深圳市善营自动化科技有限公司 | 一种涂布基材的烘干方法及其装置 |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE421890C (enExample) * | ||||
| BE464050A (enExample) * | ||||
| GB1253124A (enExample) * | 1969-02-28 | 1971-11-10 | ||
| AT321257B (de) * | 1971-05-26 | 1975-03-25 | Koreska Gmbh W | Anlage zur Rückgewinnung flüchtiger Lösungsmittel |
| GB1502040A (en) * | 1975-12-30 | 1978-02-22 | Tampella Oy Ab | Method of drying a cardboard or a paper web and drying device for applying this method |
| FI59636C (fi) * | 1976-08-25 | 1981-09-10 | Tampella Oy Ab | Torkanlaeggning foer torkning av en pappers- kartong-eller textilbana eller annan fibrig eller poroes bana |
| FI59439C (fi) * | 1980-04-25 | 1981-08-10 | Tampella Oy Ab | Foerfarande foer att utnyttjande av entalpiinnehaollet i kylvattnet vid en sugtorkningsprocess foer papper kartong eller en annan poroes matta eller bana |
| JPS57134558A (en) * | 1981-02-16 | 1982-08-19 | Fuji Photo Film Co Ltd | Production of organic vapor deposited thin film |
| FI61537C (fi) * | 1981-02-19 | 1982-08-10 | Tampella Oy Ab | Foerfarande och anlaeggning foer kontinuerlig torkning av en pappers- eller liknande poroes bana |
| US4365423A (en) * | 1981-03-27 | 1982-12-28 | Eastman Kodak Company | Method and apparatus for drying coated sheet material |
| JPS57198544A (en) * | 1981-05-28 | 1982-12-06 | Sony Corp | Manufacture of magnetic recording medium |
| JPS5880136A (ja) * | 1981-11-02 | 1983-05-14 | Fuji Photo Film Co Ltd | 磁気記録材料の製造方法 |
| DE3240063A1 (de) * | 1981-11-02 | 1983-05-26 | Basf Ag, 6700 Ludwigshafen | Vorrichtung zur herstellung eines magnetogrammtraegers |
| JPH0656656B2 (ja) * | 1983-10-03 | 1994-07-27 | 富士写真フイルム株式会社 | 磁気記録媒体の製造方法 |
| JPS6292132A (ja) * | 1985-10-18 | 1987-04-27 | Fuji Photo Film Co Ltd | 磁気記録媒体の製造方法 |
| US4923766A (en) * | 1988-03-29 | 1990-05-08 | Canon Kabushiki Kaisha | Process for preparing magnetic recording |
| DE4009797A1 (de) * | 1990-03-27 | 1991-10-02 | Pagendarm Gmbh | Verfahren und anordnung zum kondensieren von dampffoermigen substanzen |
-
1996
- 1996-09-09 BR BR9610658A patent/BR9610658A/pt not_active IP Right Cessation
- 1996-09-09 PT PT01129625T patent/PT1195564E/pt unknown
- 1996-09-09 CN CNB961969962A patent/CN1145775C/zh not_active Expired - Lifetime
- 1996-09-09 CN CNB031041523A patent/CN1269546C/zh not_active Expired - Fee Related
- 1996-09-09 ES ES01129624T patent/ES2253321T3/es not_active Expired - Lifetime
- 1996-09-09 WO PCT/US1996/014435 patent/WO1997011328A1/en not_active Ceased
- 1996-09-09 KR KR10-1998-0701975A patent/KR100449962B1/ko not_active Expired - Fee Related
- 1996-09-09 EP EP01129624A patent/EP1191295B1/en not_active Expired - Lifetime
- 1996-09-09 DE DE69635530T patent/DE69635530T2/de not_active Expired - Lifetime
- 1996-09-09 CA CA002229870A patent/CA2229870A1/en not_active Abandoned
- 1996-09-09 AU AU69710/96A patent/AU696910B2/en not_active Ceased
- 1996-09-09 EP EP05020575A patent/EP1632740A3/en not_active Withdrawn
- 1996-09-09 EP EP05020576A patent/EP1632741A3/en not_active Withdrawn
- 1996-09-09 ES ES96930780T patent/ES2191107T3/es not_active Expired - Lifetime
- 1996-09-09 PT PT96930780T patent/PT851997E/pt unknown
- 1996-09-09 EP EP96930780A patent/EP0851997B1/en not_active Expired - Lifetime
- 1996-09-09 DE DE69635682T patent/DE69635682T2/de not_active Expired - Lifetime
- 1996-09-09 ES ES01129625T patent/ES2256146T3/es not_active Expired - Lifetime
- 1996-09-09 KR KR10-2004-7004557A patent/KR100449961B1/ko not_active Expired - Fee Related
- 1996-09-09 EP EP01129625A patent/EP1195564B1/en not_active Expired - Lifetime
- 1996-09-09 JP JP51275097A patent/JP3874799B2/ja not_active Expired - Fee Related
- 1996-09-09 DE DE69627357T patent/DE69627357T2/de not_active Expired - Lifetime
- 1996-09-09 KR KR10-2004-7004554A patent/KR100485832B1/ko not_active Expired - Lifetime
-
2004
- 2004-11-04 JP JP2004320818A patent/JP4099474B2/ja not_active Expired - Fee Related
Also Published As
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