DE69625396D1 - Segmentierter optischer Leiter, dessen Verwendung insbesondere in einer Halbleitervorrichtung - Google Patents
Segmentierter optischer Leiter, dessen Verwendung insbesondere in einer HalbleitervorrichtungInfo
- Publication number
- DE69625396D1 DE69625396D1 DE69625396T DE69625396T DE69625396D1 DE 69625396 D1 DE69625396 D1 DE 69625396D1 DE 69625396 T DE69625396 T DE 69625396T DE 69625396 T DE69625396 T DE 69625396T DE 69625396 D1 DE69625396 D1 DE 69625396D1
- Authority
- DE
- Germany
- Prior art keywords
- semiconductor device
- optical conductor
- segmented optical
- segmented
- conductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/026—Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers
- H01S5/0265—Intensity modulators
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/30—Optical coupling means for use between fibre and thin-film device
- G02B6/305—Optical coupling means for use between fibre and thin-film device and having an integrated mode-size expanding section, e.g. tapered waveguide
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Optical Integrated Circuits (AREA)
- Semiconductor Lasers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9502045A FR2730821B1 (fr) | 1995-02-22 | 1995-02-22 | Guide optique segmente pouvant notamment etre inclus dans un dispositif semiconducteur |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69625396D1 true DE69625396D1 (de) | 2003-01-30 |
DE69625396T2 DE69625396T2 (de) | 2003-08-21 |
Family
ID=9476400
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69625396T Expired - Lifetime DE69625396T2 (de) | 1995-02-22 | 1996-02-19 | Segmentierter optischer Leiter, dessen Verwendung insbesondere in einer Halbleitervorrichtung |
Country Status (6)
Country | Link |
---|---|
US (1) | US5687272A (de) |
EP (1) | EP0729042B1 (de) |
JP (1) | JPH08248248A (de) |
CA (1) | CA2170005C (de) |
DE (1) | DE69625396T2 (de) |
FR (1) | FR2730821B1 (de) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1075011A (ja) * | 1996-08-30 | 1998-03-17 | Sony Corp | 半導体レーザ |
FR2760850B1 (fr) * | 1997-03-13 | 1999-04-16 | Alsthom Cge Alcatel | Procede de fabrication de circuits optiques integres permettant de minimiser les pertes optiques de couplage |
US5917967A (en) * | 1997-05-21 | 1999-06-29 | The United States Of America As Represented By The Secretary Of The Army | Techniques for forming optical electronic integrated circuits having interconnects in the form of semiconductor waveguides |
KR100265795B1 (ko) * | 1997-11-18 | 2000-09-15 | 윤종용 | 광도파로칩 |
GB2334789B (en) * | 1998-06-12 | 2000-01-19 | Bookham Technology Ltd | A waveguide end face |
FR2779834B1 (fr) * | 1998-06-15 | 2000-08-04 | Alsthom Cge Alcatel | Composant monolithique electro-optique multi-sections |
SE522417C2 (sv) * | 1998-10-15 | 2004-02-10 | Ericsson Telefon Ab L M | Elektro-absorptionsmodulator (EAM) samt förfarande för tillverkning av sådan modulator |
US6600764B1 (en) * | 2000-01-20 | 2003-07-29 | Trump Photonics Inc. | High power single mode semiconductor laser |
CN100375349C (zh) * | 2000-06-08 | 2008-03-12 | 日亚化学工业株式会社 | 半导体激光元件及其制造方法 |
EP1306944B1 (de) * | 2000-06-08 | 2007-07-04 | Nichia Corporation | Halbleiterlaserbauelement und verfahren zu seiner herstellung |
GB2366394A (en) | 2000-08-11 | 2002-03-06 | Kymata Ltd | Integrated optical device with cladding having mesa formation |
US7006744B2 (en) * | 2000-10-27 | 2006-02-28 | Pirelli Cavi E Sistemi S.P.A. | Hybrid buried/ridge planar waveguides |
US6643048B2 (en) * | 2000-11-03 | 2003-11-04 | Codeon Corporation | Low-loss electrode structures using resistive connections for optical modulation applications |
US6539150B2 (en) * | 2000-12-13 | 2003-03-25 | Alcatel Optronics Uk Limited | Segmented waveguide flattening the passband of a phasar |
JP4320167B2 (ja) * | 2002-12-12 | 2009-08-26 | 忠弘 大見 | 半導体素子及びシリコン酸化窒化膜の製造方法 |
KR100596509B1 (ko) * | 2004-11-18 | 2006-07-05 | 한국전자통신연구원 | 봉우리형 도파로 집적 반도체 광소자의 제조방법 |
SE531378C8 (sv) * | 2007-06-27 | 2009-07-07 | Syntune Ab | Övergångsdel mellan två optiska vägledare |
JP2011258785A (ja) * | 2010-06-10 | 2011-12-22 | Nippon Telegr & Teleph Corp <Ntt> | 光導波路およびそれを用いた光半導体装置 |
JP6324645B1 (ja) * | 2016-10-27 | 2018-05-16 | 三菱電機株式会社 | 半導体光導波路及び光集積素子 |
JP2020174140A (ja) * | 2019-04-11 | 2020-10-22 | 住友電気工業株式会社 | 半導体集積光デバイス、半導体集積光デバイスを作製する方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4913506A (en) * | 1988-02-26 | 1990-04-03 | Kokusai Denshin Denwa Kabushiki Kaisha | Optical modulation device |
US5078516A (en) * | 1990-11-06 | 1992-01-07 | Bell Communications Research, Inc. | Tapered rib waveguides |
EP0495202B1 (de) * | 1991-01-15 | 1996-04-24 | Siemens Aktiengesellschaft | Anordnung zum Umwandeln einer optischen Welle kleiner Fleckweite in eine Welle grösserer Fleckweite |
DE69112058T2 (de) * | 1991-09-19 | 1996-05-02 | Ibm | Selbstjustierender optischer Wellenleiter-Laser, Struktur und dessen Herstellungsverfahren. |
US5515464A (en) * | 1992-07-06 | 1996-05-07 | Sheem Sang K | Optical fiber interconnections using self-aligned core-extensions |
US5323476A (en) * | 1992-08-14 | 1994-06-21 | Siemens Aktiengesellschaft | Apparatus for increasing the cross section of optical waves |
JP2982619B2 (ja) * | 1994-06-29 | 1999-11-29 | 日本電気株式会社 | 半導体光導波路集積型受光素子 |
-
1995
- 1995-02-22 FR FR9502045A patent/FR2730821B1/fr not_active Expired - Lifetime
-
1996
- 1996-02-16 US US08/602,380 patent/US5687272A/en not_active Expired - Lifetime
- 1996-02-19 DE DE69625396T patent/DE69625396T2/de not_active Expired - Lifetime
- 1996-02-19 EP EP96400337A patent/EP0729042B1/de not_active Expired - Lifetime
- 1996-02-21 CA CA002170005A patent/CA2170005C/fr not_active Expired - Fee Related
- 1996-02-22 JP JP8035199A patent/JPH08248248A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
CA2170005C (fr) | 2000-05-30 |
US5687272A (en) | 1997-11-11 |
FR2730821A1 (fr) | 1996-08-23 |
EP0729042A1 (de) | 1996-08-28 |
EP0729042B1 (de) | 2002-12-18 |
CA2170005A1 (fr) | 1996-08-23 |
DE69625396T2 (de) | 2003-08-21 |
JPH08248248A (ja) | 1996-09-27 |
FR2730821B1 (fr) | 1997-04-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: AVANEX CORP., FREMONT, CALIF., US |