DE69622297D1 - Vorrichtung zur Bestimmung einer Verschiebung und deren Verwendung in einer Einrichtung zur Antriebsregelung - Google Patents
Vorrichtung zur Bestimmung einer Verschiebung und deren Verwendung in einer Einrichtung zur AntriebsregelungInfo
- Publication number
- DE69622297D1 DE69622297D1 DE69622297T DE69622297T DE69622297D1 DE 69622297 D1 DE69622297 D1 DE 69622297D1 DE 69622297 T DE69622297 T DE 69622297T DE 69622297 T DE69622297 T DE 69622297T DE 69622297 D1 DE69622297 D1 DE 69622297D1
- Authority
- DE
- Germany
- Prior art keywords
- displacement
- determining
- drive control
- control device
- drive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Revoked
Links
- 238000006073 displacement reaction Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3219595A JPH08226804A (ja) | 1995-02-21 | 1995-02-21 | 変位情報検出装置及びこれを用いたドライブ制御装置 |
JP15720795A JPH08327321A (ja) | 1995-05-30 | 1995-05-30 | 変位情報検出装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69622297D1 true DE69622297D1 (de) | 2002-08-22 |
DE69622297T2 DE69622297T2 (de) | 2002-11-21 |
Family
ID=26370731
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69622297T Revoked DE69622297T2 (de) | 1995-02-21 | 1996-02-20 | Vorrichtung zur Bestimmung einer Verschiebung und deren Verwendung in einer Einrichtung zur Antriebsregelung |
Country Status (3)
Country | Link |
---|---|
US (1) | US5956140A (de) |
EP (1) | EP0729013B1 (de) |
DE (1) | DE69622297T2 (de) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6229140B1 (en) | 1995-10-27 | 2001-05-08 | Canon Kabushiki Kaisha | Displacement information detection apparatus |
DE19754595B4 (de) | 1997-12-10 | 2011-06-01 | Dr. Johannes Heidenhain Gmbh | Lichtelektrische Positionsmeßeinrichtung |
JPH11351813A (ja) | 1998-06-08 | 1999-12-24 | Canon Inc | 干渉装置及びそれを用いた位置検出装置 |
US6332614B1 (en) * | 1998-10-19 | 2001-12-25 | Michael A. Hesse | Method for playing poker games |
JP4365927B2 (ja) * | 1999-03-12 | 2009-11-18 | キヤノン株式会社 | 干渉計測装置及び格子干渉式エンコーダ |
US6674066B1 (en) | 1999-04-16 | 2004-01-06 | Canon Kabushiki Kaisha | Encoder |
US6492911B1 (en) * | 1999-04-19 | 2002-12-10 | Netzer Motion Sensors Ltd. | Capacitive displacement encoder |
JP2000321021A (ja) | 1999-05-10 | 2000-11-24 | Canon Inc | 干渉装置、変位測定装置、及びそれを用いた情報記録又は/及び再生装置 |
JP4846909B2 (ja) | 2000-02-15 | 2011-12-28 | キヤノン株式会社 | 光学式エンコーダ及び回折格子の変位測定方法 |
US6713756B2 (en) | 2000-05-09 | 2004-03-30 | Olympus Corporation | Optical encoder and optical rotary encoder |
JP2001336952A (ja) | 2000-05-26 | 2001-12-07 | Canon Inc | 測定装置 |
US7476843B2 (en) | 2005-12-23 | 2009-01-13 | Delphi Technologies, Inc. | Method for determining the position of a first moving component relative to a second component and device for applying said method |
JP5021244B2 (ja) * | 2006-07-03 | 2012-09-05 | 株式会社ミツトヨ | 変位検出エンコーダ |
WO2010023442A2 (en) * | 2008-08-26 | 2010-03-04 | The University Court Of The University Of Glasgow | Uses of electromagnetic interference patterns |
JP5787513B2 (ja) * | 2010-12-15 | 2015-09-30 | キヤノン株式会社 | アブソリュートロータリーエンコーダ |
US8941052B2 (en) | 2011-12-23 | 2015-01-27 | Mitutoyo Corporation | Illumination portion for an adaptable resolution optical encoder |
US9029757B2 (en) | 2011-12-23 | 2015-05-12 | Mitutoyo Corporation | Illumination portion for an adaptable resolution optical encoder |
US9018578B2 (en) | 2011-12-23 | 2015-04-28 | Mitutoyo Corporation | Adaptable resolution optical encoder having structured illumination and spatial filtering |
US9080899B2 (en) | 2011-12-23 | 2015-07-14 | Mitutoyo Corporation | Optical displacement encoder having plural scale grating portions with spatial phase offset of scale pitch |
JP5939956B2 (ja) * | 2012-10-12 | 2016-06-29 | Dmg森精機株式会社 | 変位検出装置 |
EP3425362B1 (de) | 2013-03-12 | 2020-12-09 | Stryker Corporation | Sensoranordnung und verfahren zur messung von kräften und drehmomenten |
US10281301B2 (en) | 2013-10-01 | 2019-05-07 | Renishaw Plc | Reference mark detector arrangement |
US11221238B2 (en) * | 2019-07-05 | 2022-01-11 | Canon Kabushiki Kaisha | Optical encoder and drive control device comprising a light receiving element to receive a first interference fringe formed by a first periodic pattern and a second diffracted light from a second periodic pattern toward the first periodic pattern |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB8432574D0 (en) * | 1984-12-22 | 1985-02-06 | Renishaw Plc | Opto-electronic scale-reading apparatus |
US4912322A (en) * | 1986-08-15 | 1990-03-27 | Mitutoyo Mfg. Co., Ltd. | Optical type displacement detecting device |
US4979827A (en) * | 1988-02-26 | 1990-12-25 | Kabushiki Kaisha Okuma Tekkosho | Optical linear encoder |
GB2239088B (en) * | 1989-11-24 | 1994-05-25 | Ricoh Kk | Optical movement measuring method and apparatus |
US5323001A (en) * | 1989-12-26 | 1994-06-21 | Canon Kabushiki Kaisha | Rotary encoder with scale member and interference of zero and first order diffraction beam |
US5283434A (en) * | 1991-12-20 | 1994-02-01 | Canon Kabushiki Kaisha | Displacement detecting device with integral optics |
US5390022A (en) * | 1992-04-07 | 1995-02-14 | Canon Kabushiki Kaisha | Displacement information detection apparatus for receiving a divergent light beam |
JP3254737B2 (ja) * | 1992-06-17 | 2002-02-12 | キヤノン株式会社 | エンコーダー |
JP3478567B2 (ja) * | 1992-09-25 | 2003-12-15 | キヤノン株式会社 | 回転情報検出装置 |
JPH06194123A (ja) * | 1992-12-24 | 1994-07-15 | Canon Inc | 変位検出装置 |
JP3173208B2 (ja) * | 1993-01-29 | 2001-06-04 | キヤノン株式会社 | 変位測定装置 |
JPH0783612A (ja) * | 1993-09-17 | 1995-03-28 | Canon Inc | 光学式変位センサ |
JP3530573B2 (ja) * | 1994-04-27 | 2004-05-24 | キヤノン株式会社 | 光学式変位センサ |
-
1996
- 1996-02-20 EP EP96102527A patent/EP0729013B1/de not_active Revoked
- 1996-02-20 DE DE69622297T patent/DE69622297T2/de not_active Revoked
- 1996-02-21 US US08/604,384 patent/US5956140A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE69622297T2 (de) | 2002-11-21 |
US5956140A (en) | 1999-09-21 |
EP0729013B1 (de) | 2002-07-17 |
EP0729013A2 (de) | 1996-08-28 |
EP0729013A3 (de) | 1999-04-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8363 | Opposition against the patent | ||
8331 | Complete revocation |