DE69622297D1 - Vorrichtung zur Bestimmung einer Verschiebung und deren Verwendung in einer Einrichtung zur Antriebsregelung - Google Patents

Vorrichtung zur Bestimmung einer Verschiebung und deren Verwendung in einer Einrichtung zur Antriebsregelung

Info

Publication number
DE69622297D1
DE69622297D1 DE69622297T DE69622297T DE69622297D1 DE 69622297 D1 DE69622297 D1 DE 69622297D1 DE 69622297 T DE69622297 T DE 69622297T DE 69622297 T DE69622297 T DE 69622297T DE 69622297 D1 DE69622297 D1 DE 69622297D1
Authority
DE
Germany
Prior art keywords
displacement
determining
drive control
control device
drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Revoked
Application number
DE69622297T
Other languages
English (en)
Other versions
DE69622297T2 (de
Inventor
Koh Ishizuka
Takayuki Kadoshima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=26370731&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69622297(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Priority claimed from JP3219595A external-priority patent/JPH08226804A/ja
Priority claimed from JP15720795A external-priority patent/JPH08327321A/ja
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE69622297D1 publication Critical patent/DE69622297D1/de
Publication of DE69622297T2 publication Critical patent/DE69622297T2/de
Anticipated expiration legal-status Critical
Revoked legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36Forming the light into pulses
    • G01D5/38Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
DE69622297T 1995-02-21 1996-02-20 Vorrichtung zur Bestimmung einer Verschiebung und deren Verwendung in einer Einrichtung zur Antriebsregelung Revoked DE69622297T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP3219595A JPH08226804A (ja) 1995-02-21 1995-02-21 変位情報検出装置及びこれを用いたドライブ制御装置
JP15720795A JPH08327321A (ja) 1995-05-30 1995-05-30 変位情報検出装置

Publications (2)

Publication Number Publication Date
DE69622297D1 true DE69622297D1 (de) 2002-08-22
DE69622297T2 DE69622297T2 (de) 2002-11-21

Family

ID=26370731

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69622297T Revoked DE69622297T2 (de) 1995-02-21 1996-02-20 Vorrichtung zur Bestimmung einer Verschiebung und deren Verwendung in einer Einrichtung zur Antriebsregelung

Country Status (3)

Country Link
US (1) US5956140A (de)
EP (1) EP0729013B1 (de)
DE (1) DE69622297T2 (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6229140B1 (en) 1995-10-27 2001-05-08 Canon Kabushiki Kaisha Displacement information detection apparatus
DE19754595B4 (de) 1997-12-10 2011-06-01 Dr. Johannes Heidenhain Gmbh Lichtelektrische Positionsmeßeinrichtung
JPH11351813A (ja) 1998-06-08 1999-12-24 Canon Inc 干渉装置及びそれを用いた位置検出装置
US6332614B1 (en) * 1998-10-19 2001-12-25 Michael A. Hesse Method for playing poker games
JP4365927B2 (ja) * 1999-03-12 2009-11-18 キヤノン株式会社 干渉計測装置及び格子干渉式エンコーダ
US6674066B1 (en) 1999-04-16 2004-01-06 Canon Kabushiki Kaisha Encoder
US6492911B1 (en) * 1999-04-19 2002-12-10 Netzer Motion Sensors Ltd. Capacitive displacement encoder
JP2000321021A (ja) 1999-05-10 2000-11-24 Canon Inc 干渉装置、変位測定装置、及びそれを用いた情報記録又は/及び再生装置
JP4846909B2 (ja) 2000-02-15 2011-12-28 キヤノン株式会社 光学式エンコーダ及び回折格子の変位測定方法
US6713756B2 (en) 2000-05-09 2004-03-30 Olympus Corporation Optical encoder and optical rotary encoder
JP2001336952A (ja) 2000-05-26 2001-12-07 Canon Inc 測定装置
US7476843B2 (en) 2005-12-23 2009-01-13 Delphi Technologies, Inc. Method for determining the position of a first moving component relative to a second component and device for applying said method
JP5021244B2 (ja) * 2006-07-03 2012-09-05 株式会社ミツトヨ 変位検出エンコーダ
WO2010023442A2 (en) * 2008-08-26 2010-03-04 The University Court Of The University Of Glasgow Uses of electromagnetic interference patterns
JP5787513B2 (ja) * 2010-12-15 2015-09-30 キヤノン株式会社 アブソリュートロータリーエンコーダ
US8941052B2 (en) 2011-12-23 2015-01-27 Mitutoyo Corporation Illumination portion for an adaptable resolution optical encoder
US9029757B2 (en) 2011-12-23 2015-05-12 Mitutoyo Corporation Illumination portion for an adaptable resolution optical encoder
US9018578B2 (en) 2011-12-23 2015-04-28 Mitutoyo Corporation Adaptable resolution optical encoder having structured illumination and spatial filtering
US9080899B2 (en) 2011-12-23 2015-07-14 Mitutoyo Corporation Optical displacement encoder having plural scale grating portions with spatial phase offset of scale pitch
JP5939956B2 (ja) * 2012-10-12 2016-06-29 Dmg森精機株式会社 変位検出装置
EP3425362B1 (de) 2013-03-12 2020-12-09 Stryker Corporation Sensoranordnung und verfahren zur messung von kräften und drehmomenten
US10281301B2 (en) 2013-10-01 2019-05-07 Renishaw Plc Reference mark detector arrangement
US11221238B2 (en) * 2019-07-05 2022-01-11 Canon Kabushiki Kaisha Optical encoder and drive control device comprising a light receiving element to receive a first interference fringe formed by a first periodic pattern and a second diffracted light from a second periodic pattern toward the first periodic pattern

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8432574D0 (en) * 1984-12-22 1985-02-06 Renishaw Plc Opto-electronic scale-reading apparatus
US4912322A (en) * 1986-08-15 1990-03-27 Mitutoyo Mfg. Co., Ltd. Optical type displacement detecting device
US4979827A (en) * 1988-02-26 1990-12-25 Kabushiki Kaisha Okuma Tekkosho Optical linear encoder
GB2239088B (en) * 1989-11-24 1994-05-25 Ricoh Kk Optical movement measuring method and apparatus
US5323001A (en) * 1989-12-26 1994-06-21 Canon Kabushiki Kaisha Rotary encoder with scale member and interference of zero and first order diffraction beam
US5283434A (en) * 1991-12-20 1994-02-01 Canon Kabushiki Kaisha Displacement detecting device with integral optics
US5390022A (en) * 1992-04-07 1995-02-14 Canon Kabushiki Kaisha Displacement information detection apparatus for receiving a divergent light beam
JP3254737B2 (ja) * 1992-06-17 2002-02-12 キヤノン株式会社 エンコーダー
JP3478567B2 (ja) * 1992-09-25 2003-12-15 キヤノン株式会社 回転情報検出装置
JPH06194123A (ja) * 1992-12-24 1994-07-15 Canon Inc 変位検出装置
JP3173208B2 (ja) * 1993-01-29 2001-06-04 キヤノン株式会社 変位測定装置
JPH0783612A (ja) * 1993-09-17 1995-03-28 Canon Inc 光学式変位センサ
JP3530573B2 (ja) * 1994-04-27 2004-05-24 キヤノン株式会社 光学式変位センサ

Also Published As

Publication number Publication date
DE69622297T2 (de) 2002-11-21
US5956140A (en) 1999-09-21
EP0729013B1 (de) 2002-07-17
EP0729013A2 (de) 1996-08-28
EP0729013A3 (de) 1999-04-14

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8331 Complete revocation