DE69615942T2 - Verfahren und Vorrichtung zum Auftragen verschleissfester Beschichtungen mittels Hochvakuum-PVD - Google Patents
Verfahren und Vorrichtung zum Auftragen verschleissfester Beschichtungen mittels Hochvakuum-PVDInfo
- Publication number
- DE69615942T2 DE69615942T2 DE69615942T DE69615942T DE69615942T2 DE 69615942 T2 DE69615942 T2 DE 69615942T2 DE 69615942 T DE69615942 T DE 69615942T DE 69615942 T DE69615942 T DE 69615942T DE 69615942 T2 DE69615942 T2 DE 69615942T2
- Authority
- DE
- Germany
- Prior art keywords
- resistant coatings
- applying wear
- vacuum pvd
- pvd
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000576 coating method Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32422—Arrangement for selecting ions or species in the plasma
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/541—Heating or cooling of the substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
- H01J37/32449—Gas control, e.g. control of the gas flow
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH01944/95A CH690857A5 (de) | 1995-07-04 | 1995-07-04 | Anlage zur plasmaunterstützten physikalischen Hochvakuumbedampfung von Werkstücken mit verschleissfesten Schichten und Verfahren zur Durchführung in dieser Anlage |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69615942D1 DE69615942D1 (de) | 2001-11-22 |
DE69615942T2 true DE69615942T2 (de) | 2002-06-20 |
Family
ID=4222250
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69615942T Expired - Fee Related DE69615942T2 (de) | 1995-07-04 | 1996-07-01 | Verfahren und Vorrichtung zum Auftragen verschleissfester Beschichtungen mittels Hochvakuum-PVD |
Country Status (5)
Country | Link |
---|---|
US (2) | US5792519A (de) |
EP (1) | EP0752482B1 (de) |
JP (1) | JPH09104970A (de) |
CH (1) | CH690857A5 (de) |
DE (1) | DE69615942T2 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7506826B2 (en) | 2002-10-04 | 2009-03-24 | Robert Bosch Gmbh | Injection valve with a corrosion-inhibiting, wear-resistant coating and method for the production thereof |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19548160C1 (de) * | 1995-12-22 | 1997-05-07 | Fraunhofer Ges Forschung | Verfahren zur Herstellung organisch modifizierter Oxid-, Oxinitrid- oder Nitridschichten durch Vakuumbeschichtung und danach beschichtetes Substrat |
DE19803740C2 (de) * | 1998-01-30 | 2001-05-31 | Mtu Aero Engines Gmbh | Gasphasenbeschichtungsverfahren und Vorrichtung zur Gasphasenbeschichtung von Werkstücken |
US6392395B2 (en) | 1999-10-19 | 2002-05-21 | Robotics Technologies, Inc. | Automatic circuit breaker detector |
US6743462B1 (en) * | 2001-05-31 | 2004-06-01 | Advanced Cardiovascular Systems, Inc. | Apparatus and method for coating implantable devices |
US6695920B1 (en) * | 2001-06-27 | 2004-02-24 | Advanced Cardiovascular Systems, Inc. | Mandrel for supporting a stent and a method of using the mandrel to coat a stent |
US6905773B2 (en) * | 2002-10-22 | 2005-06-14 | Schlage Lock Company | Corrosion-resistant coatings and methods of manufacturing the same |
US7074276B1 (en) * | 2002-12-12 | 2006-07-11 | Advanced Cardiovascular Systems, Inc. | Clamp mandrel fixture and a method of using the same to minimize coating defects |
WO2006127472A1 (en) * | 2005-05-20 | 2006-11-30 | Cardinal Cg Company | Deposition chamber desiccation systems and methods of use thereof |
US7622070B2 (en) * | 2005-06-20 | 2009-11-24 | Advanced Cardiovascular Systems, Inc. | Method of manufacturing an implantable polymeric medical device |
US7823533B2 (en) * | 2005-06-30 | 2010-11-02 | Advanced Cardiovascular Systems, Inc. | Stent fixture and method for reducing coating defects |
US7735449B1 (en) | 2005-07-28 | 2010-06-15 | Advanced Cardiovascular Systems, Inc. | Stent fixture having rounded support structures and method for use thereof |
US7867547B2 (en) | 2005-12-19 | 2011-01-11 | Advanced Cardiovascular Systems, Inc. | Selectively coating luminal surfaces of stents |
DE102006004702B3 (de) * | 2006-01-31 | 2007-10-25 | Cotec Gmbh | Verfahren und Vorrichtung zum allseitigen Beschichten von Gegenständen |
US8003156B2 (en) | 2006-05-04 | 2011-08-23 | Advanced Cardiovascular Systems, Inc. | Rotatable support elements for stents |
US7985441B1 (en) | 2006-05-04 | 2011-07-26 | Yiwen Tang | Purification of polymers for coating applications |
DE102009000200B3 (de) * | 2009-01-14 | 2010-09-02 | Robert Bosch Gmbh | Abschreckvorrichtung sowie Abschreckverfahren |
KR101146982B1 (ko) * | 2009-11-20 | 2012-05-22 | 삼성모바일디스플레이주식회사 | 박막 증착 장치 및 유기 발광 디스플레이 장치 제조 방법 |
CN109974400A (zh) * | 2019-04-11 | 2019-07-05 | 江苏鼎茂半导体有限公司 | 一种传热均匀的真空烤箱 |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3645230A (en) * | 1970-03-05 | 1972-02-29 | Hugle Ind Inc | Chemical deposition apparatus |
US3980044A (en) * | 1972-03-06 | 1976-09-14 | Balzers Patent Und Beteiligungs Ag | Apparatus for depositing thin coats by vaporization under the simultaneous action of an ionized gas |
JPS5691437A (en) * | 1979-12-26 | 1981-07-24 | Nippon Hoso Kyokai <Nhk> | Preparation of metallized element |
US4485759A (en) * | 1983-01-19 | 1984-12-04 | Multi-Arc Vacuum Systems Inc. | Planetary substrate support apparatus for vapor vacuum deposition coating |
CH664768A5 (de) * | 1985-06-20 | 1988-03-31 | Balzers Hochvakuum | Verfahren zur beschichtung von substraten in einer vakuumkammer. |
JPS62251030A (ja) * | 1986-04-18 | 1987-10-31 | Yamada Mie | 制御器用締付け保持位置規制装置 |
US4868003A (en) * | 1986-11-26 | 1989-09-19 | Optical Coating Laboratory, Inc. | System and method for vacuum deposition of thin films |
JPS63274762A (ja) * | 1987-05-01 | 1988-11-11 | Ulvac Corp | 反応蒸着膜の形成装置 |
ES2022946T5 (es) * | 1987-08-26 | 1996-04-16 | Balzers Hochvakuum | Procedimiento para la aportacion de capas sobre sustratos. |
US4789333A (en) * | 1987-12-02 | 1988-12-06 | Gas Research Institute | Convective heat transfer within an industrial heat treating furnace |
JPH02185976A (ja) * | 1989-01-13 | 1990-07-20 | Hitachi Ltd | 薄膜形成方法およびその装置 |
JPH02274868A (ja) * | 1989-04-13 | 1990-11-09 | Fujitsu Ltd | 半導体製造装置 |
DE3936550C1 (en) * | 1989-11-03 | 1991-04-18 | Arthur Klink Gmbh, 7530 Pforzheim, De | Substrate coating for wear resistance - with titanium nitride in vacuum chamber contg. titanium evaporator and heater with rotary substrate holder |
DE4037480A1 (de) * | 1990-11-24 | 1992-05-27 | Krupp Widia Gmbh | Verfahren zur herstellung eines beschichteten hartmetallschneidkoerpers |
US5181556A (en) * | 1991-09-20 | 1993-01-26 | Intevac, Inc. | System for substrate cooling in an evacuated environment |
JPH0590214A (ja) * | 1991-09-30 | 1993-04-09 | Tokyo Ohka Kogyo Co Ltd | 同軸型プラズマ処理装置 |
JP2607055B2 (ja) * | 1992-08-14 | 1997-05-07 | ヒューズ・エアクラフト・カンパニー | 炭素質材料上に窒化チタンを形成するための表面処理および蒸着方法 |
JPH0758036A (ja) * | 1993-08-16 | 1995-03-03 | Ebara Corp | 薄膜形成装置 |
US5651865A (en) * | 1994-06-17 | 1997-07-29 | Eni | Preferential sputtering of insulators from conductive targets |
US5571332A (en) * | 1995-02-10 | 1996-11-05 | Jet Process Corporation | Electron jet vapor deposition system |
JP3553688B2 (ja) * | 1995-05-10 | 2004-08-11 | アネルバ株式会社 | プラズマ処理装置及びプラズマ処理方法 |
-
1995
- 1995-07-04 CH CH01944/95A patent/CH690857A5/de not_active IP Right Cessation
-
1996
- 1996-07-01 DE DE69615942T patent/DE69615942T2/de not_active Expired - Fee Related
- 1996-07-01 EP EP96810433A patent/EP0752482B1/de not_active Expired - Lifetime
- 1996-07-02 US US08/674,505 patent/US5792519A/en not_active Expired - Fee Related
- 1996-07-04 JP JP8175017A patent/JPH09104970A/ja active Pending
-
1997
- 1997-06-17 US US08/877,475 patent/US5855684A/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7506826B2 (en) | 2002-10-04 | 2009-03-24 | Robert Bosch Gmbh | Injection valve with a corrosion-inhibiting, wear-resistant coating and method for the production thereof |
Also Published As
Publication number | Publication date |
---|---|
DE69615942D1 (de) | 2001-11-22 |
EP0752482B1 (de) | 2001-10-17 |
US5792519A (en) | 1998-08-11 |
US5855684A (en) | 1999-01-05 |
JPH09104970A (ja) | 1997-04-22 |
EP0752482A2 (de) | 1997-01-08 |
EP0752482A3 (de) | 1998-09-09 |
CH690857A5 (de) | 2001-02-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: HAUZER TECHNO COATING EUROPE B.V., VENLO, NL |
|
8381 | Inventor (new situation) |
Free format text: BERGMANN, ERICH, BASEL, CH |
|
8339 | Ceased/non-payment of the annual fee |