DE69615303T2 - Vorrichtung und Verfahren zur Abgasreinigung - Google Patents

Vorrichtung und Verfahren zur Abgasreinigung

Info

Publication number
DE69615303T2
DE69615303T2 DE69615303T DE69615303T DE69615303T2 DE 69615303 T2 DE69615303 T2 DE 69615303T2 DE 69615303 T DE69615303 T DE 69615303T DE 69615303 T DE69615303 T DE 69615303T DE 69615303 T2 DE69615303 T2 DE 69615303T2
Authority
DE
Germany
Prior art keywords
exhaust gas
gas purification
purification
exhaust
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69615303T
Other languages
English (en)
Other versions
DE69615303D1 (de
Inventor
Yoshihiro Ibaraki
Hidekazu Ina
Takayuki Makioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide Japan GK
Original Assignee
Air Liquide Japan GK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide Japan GK filed Critical Air Liquide Japan GK
Application granted granted Critical
Publication of DE69615303D1 publication Critical patent/DE69615303D1/de
Publication of DE69615303T2 publication Critical patent/DE69615303T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B01D53/70—Organic halogen compounds
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2209/00—Specific waste
    • F23G2209/14—Gaseous waste or fumes
    • F23G2209/142—Halogen gases, e.g. silane
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Biomedical Technology (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Treating Waste Gases (AREA)
  • Incineration Of Waste (AREA)
DE69615303T 1995-10-16 1996-10-16 Vorrichtung und Verfahren zur Abgasreinigung Expired - Fee Related DE69615303T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26750095A JP3486022B2 (ja) 1995-10-16 1995-10-16 排ガス処理装置

Publications (2)

Publication Number Publication Date
DE69615303D1 DE69615303D1 (de) 2001-10-25
DE69615303T2 true DE69615303T2 (de) 2002-07-04

Family

ID=17445721

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69615303T Expired - Fee Related DE69615303T2 (de) 1995-10-16 1996-10-16 Vorrichtung und Verfahren zur Abgasreinigung

Country Status (4)

Country Link
US (1) US5891404A (de)
EP (1) EP0768109B1 (de)
JP (1) JP3486022B2 (de)
DE (1) DE69615303T2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006052586A1 (de) * 2006-11-08 2008-05-29 Schott Solar Gmbh Verfahren und Vorrichtung zur Reinigung der Abgase einer Siliziumdünnschicht-Produktionsanlage

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US5955037A (en) * 1996-12-31 1999-09-21 Atmi Ecosys Corporation Effluent gas stream treatment system having utility for oxidation treatment of semiconductor manufacturing effluent gases
SE512645C2 (sv) * 1997-09-29 2000-04-17 Ssd Innovation Ab Portabel brännare
US6153150A (en) 1998-01-12 2000-11-28 Advanced Technology Materials, Inc. Apparatus and method for controlled decomposition oxidation of gaseous pollutants
JPH11218318A (ja) * 1998-02-03 1999-08-10 Air Liquide Japan Ltd 排ガス処理設備
US6423284B1 (en) 1999-10-18 2002-07-23 Advanced Technology Materials, Inc. Fluorine abatement using steam injection in oxidation treatment of semiconductor manufacturing effluent gases
JP3994605B2 (ja) * 1999-11-26 2007-10-24 株式会社日立製作所 Ｐｆｃガスの処理方法及び処理装置
US20010048902A1 (en) * 2000-05-01 2001-12-06 Christopher Hertzler Treatment system for removing hazardous substances from a semiconductor process waste gas stream
US20030049182A1 (en) * 2000-05-01 2003-03-13 Christopher Hertzler System and method for abatement of dangerous substances from a waste gas stream
US6524096B2 (en) * 2001-01-05 2003-02-25 Vincent R. Pribish Burner for high-temperature combustion
US6527828B2 (en) * 2001-03-19 2003-03-04 Advanced Technology Materials, Inc. Oxygen enhanced CDA modification to a CDO integrated scrubber
WO2002087732A2 (de) * 2001-04-27 2002-11-07 Infineon Technologies Ag Zentrale verbrennungsanlage zur behandlung pfc-haltiger abluft
JP4703028B2 (ja) * 2001-05-08 2011-06-15 大阪瓦斯株式会社 燃焼装置
JP4772223B2 (ja) * 2001-07-03 2011-09-14 パナソニック環境エンジニアリング株式会社 排ガス除害装置及び方法
US6551381B2 (en) * 2001-07-23 2003-04-22 Advanced Technology Materials, Inc. Method for carbon monoxide reduction during thermal/wet abatement of organic compounds
US6596054B2 (en) * 2001-07-23 2003-07-22 Advanced Technology Materials, Inc. Method for carbon monoxide reduction during thermal/wet abatement of organic compounds
DE50105033D1 (de) * 2001-08-30 2005-02-10 Das Duennschicht Anlagen Sys Verfahren und Einrichtung zur Reinigung insbesondere von fluorhaltigen Abgasen in einem Brenner mit räumlicher Trennung der Einspeisung von Gasen
JP4374814B2 (ja) * 2001-09-20 2009-12-02 株式会社日立製作所 過弗化物処理の処理方法
DE10211964A1 (de) * 2002-03-19 2003-10-23 Uhde Gmbh Verfahren zur Verminderung der NOx-Abgaskonzentration in einer unter Druck betriebenen Salpetersäureanlage beim Ab- und/oder Anfahren der Anlage
FR2854943B1 (fr) * 2003-05-13 2006-05-26 Air Liquide Procede de controle de bruleurs assurant le chauffage de canaux d'ecoulement de verre liquide
US7569193B2 (en) * 2003-12-19 2009-08-04 Applied Materials, Inc. Apparatus and method for controlled combustion of gaseous pollutants
US7074034B2 (en) * 2004-06-07 2006-07-11 Air Products And Chemicals, Inc. Burner and process for combustion of a gas capable of reacting to form solid products
GB0424967D0 (en) * 2004-11-12 2004-12-15 Hamworthy Combustion Eng Ltd Incinerator for boil-off gas
US7736599B2 (en) * 2004-11-12 2010-06-15 Applied Materials, Inc. Reactor design to reduce particle deposition during process abatement
JP2006150260A (ja) * 2004-11-30 2006-06-15 Iwatani Internatl Corp 半導体製造ラインにおける排ガス処理装置
GB0509163D0 (en) 2005-05-05 2005-06-15 Boc Group Plc Gas combustion apparatus
DE102005040576B4 (de) * 2005-08-26 2007-08-16 Centrotherm Clean Solutions Gmbh & Co. Kg Luftbrenner zur Verbrennung von Abgasen aus Prozessen zur Behandlung von Halbleitern
JP5102217B2 (ja) * 2005-10-31 2012-12-19 アプライド マテリアルズ インコーポレイテッド プロセス削減反応器
GB0611968D0 (en) * 2006-06-16 2006-07-26 Boc Group Plc Method and apparatus for the removal of fluorine from a gas system
GB0613044D0 (en) * 2006-06-30 2006-08-09 Boc Group Plc Gas combustion apparatus
US20080016768A1 (en) 2006-07-18 2008-01-24 Togna Keith A Chemically-modified mixed fuels, methods of production and used thereof
JP5232407B2 (ja) * 2007-05-25 2013-07-10 日本パイオニクス株式会社 排ガスの浄化装置
JP2008298399A (ja) * 2007-06-01 2008-12-11 Sunray Reinetsu Co Ltd バーナー、排ガス処理装置、および排ガス処理方法
JPWO2009125457A1 (ja) * 2008-04-11 2011-07-28 カンケンテクノ株式会社 シラン系ガス及びフッ素系ガス含有排ガスの処理方法及び該方法を用いた排ガス処理装置
GB0902234D0 (en) * 2009-02-11 2009-03-25 Edwards Ltd Method of treating an exhaust gas stream
JP5479756B2 (ja) * 2009-02-20 2014-04-23 カンケンテクノ株式会社 熱処理炉およびこれを用いた排ガス処理装置
CN102230633B (zh) * 2011-06-03 2012-11-21 王兴文 一种废气焚烧热风炉的烧嘴部
CN102230630B (zh) * 2011-06-03 2013-01-16 芜湖三峰节能设备有限公司 一种可用于废气焚烧的热风炉
WO2013163192A1 (en) * 2012-04-24 2013-10-31 Applied Materials, Inc. Gas reclamation and abatement system for high volume epitaxial silicon deposition system
GB2504468B (en) 2012-07-27 2017-03-22 Edwards Ltd Burner Nozzle Reciprocating Scraper Arrangement for Reducing Effluent Gas Deposits
GB2515017B (en) * 2013-06-10 2017-09-20 Edwards Ltd Process gas abatement
GB2516267B (en) * 2013-07-17 2016-08-17 Edwards Ltd Head assembly
CN104096464B (zh) * 2014-07-18 2015-11-18 杭州电子科技大学 一种栅栏电晕簇射放电处理挥发性有机污染物的方法
CN104296146B (zh) * 2014-10-22 2018-06-22 天津升华机械设备有限公司 一种喷火头、燃烧罐及燃烧罐在处理燃料中的用途
CN111306559A (zh) * 2017-07-07 2020-06-19 鉴锋国际股份有限公司 用于控制气体污染物分解氧化的装置及系统
KR102242310B1 (ko) * 2019-06-25 2021-04-20 오브유니티 주식회사 배기장치 및 그 제어 방법
CN111676464A (zh) * 2020-06-17 2020-09-18 北京北方华创微电子装备有限公司 半导体加工设备的排气装置及半导体加工设备

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DE2360187C2 (de) * 1973-12-03 1985-07-11 Volvo Flygmotor AB, Trollhättan Verbrennungskammer für die Reinigung von Prozeßabgasen
DE2742070C2 (de) * 1977-09-19 1982-10-07 Fa. J. Aichelin, 7015 Korntal Industriebrenner zur Beheizung von Ofenräumen in Industrieöfen
US4801437A (en) * 1985-12-04 1989-01-31 Japan Oxygen Co., Ltd. Process for treating combustible exhaust gases containing silane and the like
JPS6387519A (ja) * 1986-09-29 1988-04-18 Mitsubishi Jushi Eng Kk 半導体製造装置の排ガス燃焼方法
FR2612606B1 (fr) * 1987-03-18 1990-09-14 Air Liquide Procede et dispositif de destruction d'effluents gazeux toxiques
US5462429A (en) * 1993-10-20 1995-10-31 Praxair Technology, Inc. Mechanical wiper for waste gas incinerator
US5510093A (en) * 1994-07-25 1996-04-23 Alzeta Corporation Combustive destruction of halogenated compounds
DE19511644A1 (de) * 1995-03-30 1996-10-02 Das Duennschicht Anlagen Sys Verfahren und Einrichtung zur Reinigung von schadstoffhaltigen Abgasen durch chemische Umsetzung

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006052586A1 (de) * 2006-11-08 2008-05-29 Schott Solar Gmbh Verfahren und Vorrichtung zur Reinigung der Abgase einer Siliziumdünnschicht-Produktionsanlage
DE102006052586B4 (de) * 2006-11-08 2008-07-03 Schott Solar Gmbh Verfahren und Vorrichtung zur Reinigung der Abgase einer Siliziumdünnschicht-Produktionsanlage

Also Published As

Publication number Publication date
EP0768109A2 (de) 1997-04-16
US5891404A (en) 1999-04-06
EP0768109B1 (de) 2001-09-19
EP0768109A3 (de) 1997-12-17
JPH09108532A (ja) 1997-04-28
DE69615303D1 (de) 2001-10-25
JP3486022B2 (ja) 2004-01-13

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee