DE69416534D1 - Vorrichtung und verfahren zur gasreaktantabgabe - Google Patents

Vorrichtung und verfahren zur gasreaktantabgabe

Info

Publication number
DE69416534D1
DE69416534D1 DE69416534T DE69416534T DE69416534D1 DE 69416534 D1 DE69416534 D1 DE 69416534D1 DE 69416534 T DE69416534 T DE 69416534T DE 69416534 T DE69416534 T DE 69416534T DE 69416534 D1 DE69416534 D1 DE 69416534D1
Authority
DE
Germany
Prior art keywords
gas reactant
reactant delivery
delivery
gas
reactant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69416534T
Other languages
English (en)
Inventor
Joseph Hillman
W Ramsey
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Application granted granted Critical
Publication of DE69416534D1 publication Critical patent/DE69416534D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/4485—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation without using carrier gas in contact with the source material
DE69416534T 1994-05-11 1994-11-29 Vorrichtung und verfahren zur gasreaktantabgabe Expired - Lifetime DE69416534D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/241,184 US5451258A (en) 1994-05-11 1994-05-11 Apparatus and method for improved delivery of vaporized reactant gases to a reaction chamber
PCT/US1994/013743 WO1995031583A1 (en) 1994-05-11 1994-11-29 Apparatus and method for delivery of reactant gases

Publications (1)

Publication Number Publication Date
DE69416534D1 true DE69416534D1 (de) 1999-03-25

Family

ID=22909610

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69416534T Expired - Lifetime DE69416534D1 (de) 1994-05-11 1994-11-29 Vorrichtung und verfahren zur gasreaktantabgabe

Country Status (8)

Country Link
US (1) US5451258A (de)
EP (1) EP0760022B1 (de)
JP (1) JP3398751B2 (de)
AU (1) AU1332595A (de)
CA (1) CA2189559A1 (de)
DE (1) DE69416534D1 (de)
TW (1) TW306969B (de)
WO (1) WO1995031583A1 (de)

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Also Published As

Publication number Publication date
JPH10500733A (ja) 1998-01-20
JP3398751B2 (ja) 2003-04-21
AU1332595A (en) 1995-12-05
CA2189559A1 (en) 1995-11-23
US5451258A (en) 1995-09-19
TW306969B (de) 1997-06-01
EP0760022B1 (de) 1999-02-10
EP0760022A1 (de) 1997-03-05
WO1995031583A1 (en) 1995-11-23

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Legal Events

Date Code Title Description
8332 No legal effect for de