DE69614682D1 - Ungeordnete beschichtung mit darin dispergierten kubischem bornitrid - Google Patents

Ungeordnete beschichtung mit darin dispergierten kubischem bornitrid

Info

Publication number
DE69614682D1
DE69614682D1 DE69614682T DE69614682T DE69614682D1 DE 69614682 D1 DE69614682 D1 DE 69614682D1 DE 69614682 T DE69614682 T DE 69614682T DE 69614682 T DE69614682 T DE 69614682T DE 69614682 D1 DE69614682 D1 DE 69614682D1
Authority
DE
Germany
Prior art keywords
dispersed
bornitride
cubic
disordered coating
disordered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69614682T
Other languages
English (en)
Other versions
DE69614682T2 (de
Inventor
Bruce Dewald
Lewis Beattie
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bodycote Metallurgical Coatings Inc
Original Assignee
Bodycote Diamond Black Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bodycote Diamond Black Inc filed Critical Bodycote Diamond Black Inc
Publication of DE69614682D1 publication Critical patent/DE69614682D1/de
Application granted granted Critical
Publication of DE69614682T2 publication Critical patent/DE69614682T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C23C14/0073—Reactive sputtering by exposing the substrates to reactive gases intermittently
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/027—Graded interfaces
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]
    • Y10T428/24967—Absolute thicknesses specified
    • Y10T428/24975—No layer or component greater than 5 mils thick
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
DE69614682T 1995-05-12 1996-05-06 Ungeordnete beschichtung mit darin dispergierten kubischem bornitrid Expired - Fee Related DE69614682T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US43968195A 1995-05-12 1995-05-12
US08/552,500 US5928771A (en) 1995-05-12 1995-11-09 Disordered coating with cubic boron nitride dispersed therein
PCT/US1996/006365 WO1996035820A1 (en) 1995-05-12 1996-05-06 Disordered coating with cubic boron nitride dispersed therein

Publications (2)

Publication Number Publication Date
DE69614682D1 true DE69614682D1 (de) 2001-09-27
DE69614682T2 DE69614682T2 (de) 2003-08-14

Family

ID=27032127

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69614682T Expired - Fee Related DE69614682T2 (de) 1995-05-12 1996-05-06 Ungeordnete beschichtung mit darin dispergierten kubischem bornitrid

Country Status (9)

Country Link
US (1) US5928771A (de)
EP (1) EP0826074B1 (de)
JP (1) JPH11505572A (de)
AU (1) AU5728696A (de)
CA (1) CA2220303A1 (de)
DE (1) DE69614682T2 (de)
IN (1) IN187895B (de)
MX (1) MX9708711A (de)
WO (1) WO1996035820A1 (de)

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US5976716A (en) * 1996-04-04 1999-11-02 Kennametal Inc. Substrate with a superhard coating containing boron and nitrogen and method of making the same
US5948541A (en) * 1996-04-04 1999-09-07 Kennametal Inc. Boron and nitrogen containing coating and method for making
DE19753624A1 (de) * 1997-12-03 1999-06-10 Fraunhofer Ges Forschung Verschleiß- und reibungsmindernde Schicht, mit Substrat mit dieser Schicht sowie Verfahren zum Herstellen einer solchen Schicht
DE10005612A1 (de) * 2000-02-09 2001-08-16 Hauzer Techno Coating Europ B Verfahren zur Herstellung eines Gegenstandes und Gegenstand
DE10056729B4 (de) * 2000-11-15 2007-10-04 Josef Albrecht Bohrfutterfabrik Gmbh & Co. Axial-Spannfutter
JP4677123B2 (ja) * 2001-05-31 2011-04-27 株式会社アルバック 高密度へリコンプラズマを利用した緻密な硬質薄膜の形成装置及び形成方法
DE10256257A1 (de) * 2002-12-03 2004-06-24 Robert Bosch Gmbh Vorrichtung und Verfahren zum Beschichten eines Substrates und Beschichtung auf einem Substrat
EP1729950A4 (de) * 2004-02-11 2011-04-27 Diamond Innovations Inc Produktformwerkzeuge und verfahren zu deren herstellung
DE102004028112B4 (de) * 2004-06-09 2019-12-12 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Werkzeugsubstrat mit borhaltigem Schichtsystem, bestehend aus einer Borcarbid-, einer B-C-N und einer kohlenstoffmodifizierten kubischen Bornitridschicht sowie Verfahren zur Herstellung eines solchen Schichtsystems und Verwendung
US7207374B2 (en) * 2004-10-26 2007-04-24 United Technologies Corporation Non-oxidizable coating
TW200615243A (en) * 2004-11-05 2006-05-16 Hon Hai Prec Ind Co Ltd Mold for molding glass optical articles
US7510760B2 (en) * 2005-03-07 2009-03-31 Boardof Trustees Of The University Of Arkansas Nanoparticle compositions, coatings and articles made therefrom, methods of making and using said compositions, coatings and articles
US7562858B2 (en) * 2005-03-16 2009-07-21 Diamond Innovations, Inc. Wear and texture coatings for components used in manufacturing glass light bulbs
US10100266B2 (en) 2006-01-12 2018-10-16 The Board Of Trustees Of The University Of Arkansas Dielectric nanolubricant compositions
CN101379168A (zh) 2006-01-12 2009-03-04 阿肯色大学评议会 纳米颗粒组合物、其制备方法及用途
MX2009004149A (es) 2006-10-19 2009-08-07 Univ Arkansas Metodos y aparatos para hacer recubrimientos utilizando rocio electrostatico.
MX349614B (es) 2006-10-19 2017-07-26 Nanomech Inc Metodos y aparatos para elaborar recubrimientos utilizando deposicion de rocio ultrasonico.
WO2008103759A1 (en) 2007-02-20 2008-08-28 Tech M3, Inc. Composite brake disks and methods for coating
US8084089B2 (en) * 2007-02-20 2011-12-27 Tech M3, Inc. Wear resistant coating for brake disks with unique surface appearance and method for coating
US20090104462A1 (en) * 2007-08-16 2009-04-23 Reflective X-Ray Optics Llc X-ray multilayer films and smoothing layers for x-ray optics having improved stress and roughness properties and method of making same
US7727798B1 (en) * 2009-01-27 2010-06-01 National Taipei University Technology Method for production of diamond-like carbon film having semiconducting property
US20120001360A1 (en) * 2010-07-01 2012-01-05 County Materials Corporation Concrete block mold with diamond insert
US8647989B2 (en) * 2011-04-15 2014-02-11 United Microelectronics Corp. Method of forming opening on semiconductor substrate
CN102747321A (zh) * 2011-04-18 2012-10-24 鸿富锦精密工业（深圳）有限公司 镀膜件及其制备方法
JP5960803B2 (ja) 2011-05-27 2016-08-02 ナノメック、インコーポレイテッド 厚膜立方晶窒化ホウ素（ｃＢＮ）層及びその作製方法
JP5629716B2 (ja) * 2012-03-23 2014-11-26 株式会社日立製作所 硬質皮膜、摺動部品、摺動部品の製造方法
KR101165329B1 (ko) 2012-05-03 2012-07-18 한국과학기술연구원 입방정질화붕소 박막 제조방법 및 이를 통해 제조된 입방정질화붕소 박막 구조물
US8476206B1 (en) 2012-07-02 2013-07-02 Ajay P. Malshe Nanoparticle macro-compositions
US8486870B1 (en) 2012-07-02 2013-07-16 Ajay P. Malshe Textured surfaces to enhance nano-lubrication
US10012279B2 (en) 2013-03-15 2018-07-03 Tech M3, Inc. Braking systems incorporating wear and corrosion resistant rotors
US10197121B2 (en) 2013-03-15 2019-02-05 Tech M3, Inc. Wear resistant braking systems
KR102576122B1 (ko) * 2015-06-05 2023-09-06 어플라이드 머티어리얼스, 인코포레이티드 붕소-도핑된 탄소 막들을 위한 정전 척킹 및 우수한 입자 성능을 가능하게 하기 위한 그레이딩된 인-시튜 전하 트랩핑 층들
CN108715557A (zh) * 2018-08-30 2018-10-30 东莞市鸿亿导热材料有限公司 具有导电和氧化稳定性涂层的石墨片的制造方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5940227B2 (ja) * 1980-06-24 1984-09-28 富士通株式会社 リアクティブスパッタリング方法
US4716083A (en) * 1983-09-23 1987-12-29 Ovonic Synthetic Materials Company Disordered coating
US4619865A (en) * 1984-07-02 1986-10-28 Energy Conversion Devices, Inc. Multilayer coating and method
US4735856A (en) * 1986-03-31 1988-04-05 Spectran Corporation Hermetic coatings for optical fiber and product
NL8602759A (nl) * 1986-10-31 1988-05-16 Bekaert Sa Nv Werkwijze en inrichting voor het behandelen van een langwerpig substraat, dat van een deklaag voorzien is; alsmede volgens die werkwijze behandelde substraten en met deze substraten versterkte voorwerpen uit polymeermateriaal.
JPH01251313A (ja) * 1988-03-30 1989-10-06 Fuji Electric Co Ltd 磁気記録媒体
US5075130A (en) * 1990-11-19 1991-12-24 The United States Of America As Represented By The Secretary Of The Army Surface modification of boron carbide to form pockets of solid lubricant
US5670252A (en) * 1991-03-11 1997-09-23 Regents Of The University Of California Boron containing multilayer coatings and method of fabrication
DE69203633T2 (de) * 1991-03-18 1996-01-25 Gen Motors Corp Filme aus kohlenstofflegiertem, kubischem Bornitrid.
US5270263A (en) * 1991-12-20 1993-12-14 Micron Technology, Inc. Process for depositing aluminum nitride (AlN) using nitrogen plasma sputtering
EP0592986B1 (de) * 1992-10-12 1998-07-08 Sumitomo Electric Industries, Limited Ultradünnes Filmlaminat
US5346601A (en) * 1993-05-11 1994-09-13 Andrew Barada Sputter coating collimator with integral reactive gas distribution
DE4407274C1 (de) * 1994-03-04 1995-03-30 Fraunhofer Ges Forschung Verfahren zur Herstellung von verschleißfesten Schichten aus kubischem Bornitrid und ihre Anwendung

Also Published As

Publication number Publication date
IN187895B (de) 2002-07-20
WO1996035820A1 (en) 1996-11-14
AU5728696A (en) 1996-11-29
DE69614682T2 (de) 2003-08-14
JPH11505572A (ja) 1999-05-21
CA2220303A1 (en) 1996-11-14
EP0826074A1 (de) 1998-03-04
MX9708711A (es) 1998-03-31
US5928771A (en) 1999-07-27
EP0826074B1 (de) 2001-08-22

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Legal Events

Date Code Title Description
8332 No legal effect for de
8370 Indication of lapse of patent is to be deleted
8327 Change in the person/name/address of the patent owner

Owner name: BODYCOTE METALLURGICAL COATINGS,INC., GREENSBORO,

8339 Ceased/non-payment of the annual fee