DE69612997T2 - Verfahren zur herstellung von aluminiumoxidfilmen unter verwendung von dialkylaluminiumalkoxid - Google Patents

Verfahren zur herstellung von aluminiumoxidfilmen unter verwendung von dialkylaluminiumalkoxid

Info

Publication number
DE69612997T2
DE69612997T2 DE69612997T DE69612997T DE69612997T2 DE 69612997 T2 DE69612997 T2 DE 69612997T2 DE 69612997 T DE69612997 T DE 69612997T DE 69612997 T DE69612997 T DE 69612997T DE 69612997 T2 DE69612997 T2 DE 69612997T2
Authority
DE
Germany
Prior art keywords
pct
oxide films
aluminum oxide
date
dialkyl
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69612997T
Other languages
English (en)
Other versions
DE69612997D1 (de
Inventor
Soo Kim
Yong Koh
Jin Ku
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Korea Research Institute of Chemical Technology KRICT
Original Assignee
Korea Research Institute of Chemical Technology KRICT
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Korea Research Institute of Chemical Technology KRICT filed Critical Korea Research Institute of Chemical Technology KRICT
Publication of DE69612997D1 publication Critical patent/DE69612997D1/de
Application granted granted Critical
Publication of DE69612997T2 publication Critical patent/DE69612997T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/403—Oxides of aluminium, magnesium or beryllium
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/16—Oxides
    • C30B29/20—Aluminium oxides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
DE69612997T 1995-12-04 1996-12-03 Verfahren zur herstellung von aluminiumoxidfilmen unter verwendung von dialkylaluminiumalkoxid Expired - Fee Related DE69612997T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1019950046455A KR0164984B1 (ko) 1995-12-04 1995-12-04 화학증착에 의해 알킬산디알킬알루미늄으로부터 산화알루미늄막을 형성하는 방법
PCT/KR1996/000230 WO1997020963A1 (en) 1995-12-04 1996-12-03 Process for the preparation of aluminum oxide film using dialkylaluminum alkoxide

Publications (2)

Publication Number Publication Date
DE69612997D1 DE69612997D1 (de) 2001-06-28
DE69612997T2 true DE69612997T2 (de) 2001-09-20

Family

ID=19437614

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69612997T Expired - Fee Related DE69612997T2 (de) 1995-12-04 1996-12-03 Verfahren zur herstellung von aluminiumoxidfilmen unter verwendung von dialkylaluminiumalkoxid

Country Status (8)

Country Link
US (1) US5922405A (de)
EP (1) EP0865514B1 (de)
JP (1) JP3148249B2 (de)
KR (1) KR0164984B1 (de)
AT (1) ATE201460T1 (de)
DE (1) DE69612997T2 (de)
ES (1) ES2159057T3 (de)
WO (1) WO1997020963A1 (de)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013004558A1 (de) 2013-03-18 2014-09-18 Apple Inc. Oberflächenverspannte Saphirscheibe
DE102013004559A1 (de) * 2013-03-18 2014-09-18 Apple Inc. Bruchstabile Saphirscheibe
US9718249B2 (en) 2012-11-16 2017-08-01 Apple Inc. Laminated aluminum oxide cover component
US9745662B2 (en) 2013-03-15 2017-08-29 Apple Inc. Layered coatings for sapphire substrate
US11269374B2 (en) 2019-09-11 2022-03-08 Apple Inc. Electronic device with a cover assembly having an adhesion layer

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5912498A (en) * 1997-10-10 1999-06-15 Lucent Technologies Inc. Article comprising an oxide layer on GAN
KR100186949B1 (ko) * 1996-02-12 1999-05-15 재단법인 한국화학연구소 알킬알루미늄알킬산마그네슘과 그 제조 방법 및이를이용한알루민산마그네슘의합성
JP2001502381A (ja) * 1996-10-16 2001-02-20 ザ プレジデント アンド フェロウズ オブ ハーバード カレッジ 酸化アルミニウムの化学蒸着法
KR100254530B1 (ko) * 1997-08-12 2000-05-01 김충섭 2가 금속과 13족 금속의 알킬산알킬헤테로금속 화합물,이의 제조방법 및 이를 이용한 mm'2o4 형 복합 산화물 막의 제조방법
FI117942B (fi) * 1999-10-14 2007-04-30 Asm Int Menetelmä oksidiohutkalvojen kasvattamiseksi
JP4111756B2 (ja) 2002-06-20 2008-07-02 セントラル硝子株式会社 ３，３，３−トリフルオロ−２−ヒドロキシプロピオン酸およびその誘導体の製造方法
KR100480756B1 (ko) * 2002-08-02 2005-04-06 한국화학연구원 산화알루미늄 박막 제조 방법
US7160578B2 (en) 2004-03-10 2007-01-09 Pilkington North America Method for depositing aluminum oxide coatings on flat glass
CN100439293C (zh) * 2007-04-20 2008-12-03 江苏省陶瓷研究所有限公司 一种覆有纳米陶瓷过滤膜的多孔陶瓷过滤板及其制造方法
KR102123996B1 (ko) * 2013-02-25 2020-06-17 삼성전자주식회사 알루미늄 전구체, 이를 이용한 박막 형성 방법 및 커패시터 형성 방법
CN106086814A (zh) * 2016-06-17 2016-11-09 中山大学 一种玻璃面板镀膜层及其制备方法
RU2665498C1 (ru) * 2017-12-04 2018-08-30 Федеральное государственное бюджетное образовательное учреждение высшего образования Северо-Кавказский горно-металлургический институт (государственный технологический университет) (СКГМИ (ГТУ) Способ модификации фотонного кристалла на основе наноструктурированного пористого анодного оксида алюминия
WO2023177696A1 (en) * 2022-03-16 2023-09-21 Entegris, Inc. Process for preparing dialkyl aluminum alkoxides

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2202865A (en) * 1987-03-26 1988-10-05 Plessey Co Plc Thin film deposition process
DE3918932A1 (de) * 1989-06-08 1990-12-13 Schering Ag Verfahren zur herstellung duenner oxydschichten durch die plasma-umsetzung metallorganischer verbindungen
FI92897C (fi) * 1993-07-20 1995-01-10 Planar International Oy Ltd Menetelmä kerrosrakenteen valmistamiseksi elektroluminenssikomponentteja varten
US5389401A (en) * 1994-02-23 1995-02-14 Gordon; Roy G. Chemical vapor deposition of metal oxides

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9718249B2 (en) 2012-11-16 2017-08-01 Apple Inc. Laminated aluminum oxide cover component
US9745662B2 (en) 2013-03-15 2017-08-29 Apple Inc. Layered coatings for sapphire substrate
DE102013004558A1 (de) 2013-03-18 2014-09-18 Apple Inc. Oberflächenverspannte Saphirscheibe
DE102013004559A1 (de) * 2013-03-18 2014-09-18 Apple Inc. Bruchstabile Saphirscheibe
DE102013004559B4 (de) * 2013-03-18 2015-07-23 Apple Inc. Bruchstabile Saphirscheibe und Verfahren zu ihrer Herstellung
US9617639B2 (en) 2013-03-18 2017-04-11 Apple Inc. Surface-tensioned sapphire plate
US9750150B2 (en) 2013-03-18 2017-08-29 Apple Inc. Break resistant and shock resistant sapphire plate
DE102013004558B4 (de) 2013-03-18 2018-04-05 Apple Inc. Verfahren zur Herstellung einer oberflächenverspannten Saphirscheibe, oberflächenverspannte Saphirscheibe und elektrisches Gerät mit einer transparenten Abdeckung
US11269374B2 (en) 2019-09-11 2022-03-08 Apple Inc. Electronic device with a cover assembly having an adhesion layer

Also Published As

Publication number Publication date
JPH11500789A (ja) 1999-01-19
DE69612997D1 (de) 2001-06-28
EP0865514B1 (de) 2001-05-23
EP0865514A1 (de) 1998-09-23
KR970043358A (ko) 1997-07-26
WO1997020963A1 (en) 1997-06-12
JP3148249B2 (ja) 2001-03-19
ES2159057T3 (es) 2001-09-16
US5922405A (en) 1999-07-13
ATE201460T1 (de) 2001-06-15
KR0164984B1 (ko) 1999-01-15

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