DE69602140D1 - Elektronenmikroskopprobenträger - Google Patents

Elektronenmikroskopprobenträger

Info

Publication number
DE69602140D1
DE69602140D1 DE69602140T DE69602140T DE69602140D1 DE 69602140 D1 DE69602140 D1 DE 69602140D1 DE 69602140 T DE69602140 T DE 69602140T DE 69602140 T DE69602140 T DE 69602140T DE 69602140 D1 DE69602140 D1 DE 69602140D1
Authority
DE
Germany
Prior art keywords
electron microscope
microscope carrier
carrier
electron
microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69602140T
Other languages
English (en)
Other versions
DE69602140T2 (de
Inventor
Peter David Augustus
Muhammed Masood Ahmed
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Marconi Caswell Ltd
Original Assignee
Marconi Electronic Systems Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Marconi Electronic Systems Ltd filed Critical Marconi Electronic Systems Ltd
Application granted granted Critical
Publication of DE69602140D1 publication Critical patent/DE69602140D1/de
Publication of DE69602140T2 publication Critical patent/DE69602140T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
DE69602140T 1995-09-08 1996-08-28 Elektronenmikroskopprobenträger Expired - Fee Related DE69602140T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB9518329A GB2304982B (en) 1995-09-08 1995-09-08 Electron microscope specimen supports

Publications (2)

Publication Number Publication Date
DE69602140D1 true DE69602140D1 (de) 1999-05-27
DE69602140T2 DE69602140T2 (de) 1999-08-05

Family

ID=10780375

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69602140T Expired - Fee Related DE69602140T2 (de) 1995-09-08 1996-08-28 Elektronenmikroskopprobenträger

Country Status (6)

Country Link
US (1) US5821544A (de)
EP (1) EP0762466B1 (de)
JP (1) JPH09115471A (de)
DE (1) DE69602140T2 (de)
GB (1) GB2304982B (de)
ZA (1) ZA967260B (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT411070B (de) * 1996-03-25 2003-09-25 Electrovac Verfahren zur herstellung eines substrates mit einer polykristallinen diamantschicht
JP3360269B2 (ja) * 1997-05-21 2002-12-24 信越化学工業株式会社 Ｘ線リソグラフィ用ダイヤモンド膜及びその製造方法
US6413681B1 (en) 1997-05-21 2002-07-02 Shin-Etsu Chemical Co., Ltd. Diamond film for x-ray lithography and making method
US6140652A (en) * 1998-09-09 2000-10-31 Intersil Corporation Device containing sample preparation sites for transmission electron microscopic analysis and processes of formation and use
US7147810B2 (en) * 2003-10-31 2006-12-12 Fraunhofer Usa, Inc. Drapable diamond thin films and method for the preparation thereof
NL1027025C2 (nl) * 2004-09-13 2006-03-14 Univ Delft Tech Microreactor voor een transmissie elektronenmicroscoop en verwarmingselement en werkwijze voor vervaardiging daarvan.
JP4654018B2 (ja) * 2004-12-17 2011-03-16 株式会社日立ハイテクノロジーズ 集束イオンビーム加工装置、試料台、及び試料観察方法
US7713053B2 (en) * 2005-06-10 2010-05-11 Protochips, Inc. Reusable template for creation of thin films; method of making and using template; and thin films produced from template
US7348570B2 (en) * 2005-12-14 2008-03-25 University Of Washington Unsupported, electron transparent films and related methods
US8058627B2 (en) * 2008-08-13 2011-11-15 Wisys Technology Foundation Addressable transmission electron microscope grid
US8349125B2 (en) 2009-07-24 2013-01-08 Xei Scientific, Inc. Cleaning device for transmission electron microscopes
US8716676B2 (en) 2011-08-04 2014-05-06 Xei Scientific, Inc. Device to load TEM sample holders into a vacuum chamber
US9449785B2 (en) 2013-11-11 2016-09-20 Howard Hughes Medical Institute Workpiece transport and positioning apparatus
GB201721152D0 (en) * 2017-12-18 2018-01-31 Univ Warwick Transmission electron microscopy systems
US11577296B2 (en) * 2018-03-12 2023-02-14 Massachusetts Institute Of Technology Devices and methods for holding a sample for multi-axial testing

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4250127A (en) * 1977-08-17 1981-02-10 Connecticut Research Institute, Inc. Production of electron microscope grids and other micro-components
JPS57145260A (en) * 1981-03-02 1982-09-08 Nippon Telegr & Teleph Corp <Ntt> Sample support substance for transmissible electron microscope
US5275798A (en) * 1986-07-11 1994-01-04 Kyocera Corporation Method for producing diamond films
US4851254A (en) * 1987-01-13 1989-07-25 Nippon Soken, Inc. Method and device for forming diamond film
US4822466A (en) * 1987-06-25 1989-04-18 University Of Houston - University Park Chemically bonded diamond films and method for producing same
CA2065581C (en) * 1991-04-22 2002-03-12 Andal Corp. Plasma enhancement apparatus and method for physical vapor deposition
CA2061302C (en) * 1992-02-17 2000-04-18 Jeffrey S. Hansen Method of making synthetic diamond film

Also Published As

Publication number Publication date
US5821544A (en) 1998-10-13
JPH09115471A (ja) 1997-05-02
DE69602140T2 (de) 1999-08-05
EP0762466B1 (de) 1999-04-21
GB2304982B (en) 1999-07-21
EP0762466A1 (de) 1997-03-12
GB2304982A (en) 1997-03-26
GB9518329D0 (en) 1995-11-08
ZA967260B (en) 1997-03-04

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: MARCONI CASWELL LTD., LONDON, GB

8339 Ceased/non-payment of the annual fee