DE69600781D1 - Verfahren zur herstellung eines cristobalit enthaltenden quarzglases - Google Patents

Verfahren zur herstellung eines cristobalit enthaltenden quarzglases

Info

Publication number
DE69600781D1
DE69600781D1 DE69600781T DE69600781T DE69600781D1 DE 69600781 D1 DE69600781 D1 DE 69600781D1 DE 69600781 T DE69600781 T DE 69600781T DE 69600781 T DE69600781 T DE 69600781T DE 69600781 D1 DE69600781 D1 DE 69600781D1
Authority
DE
Germany
Prior art keywords
cristobalit
producing
quartz glass
containing quartz
glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69600781T
Other languages
English (en)
Other versions
DE69600781T2 (de
Inventor
Kyoichi Inaki
Tohru Segawa
Nobumasa Yoshida
Mamoru Endo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Heraeus Quarzglas GmbH and Co KG
Original Assignee
Heraeus Quarzglas GmbH and Co KG
Shin Etsu Quartz Products Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP09749495A external-priority patent/JP3400180B2/ja
Application filed by Heraeus Quarzglas GmbH and Co KG, Shin Etsu Quartz Products Co Ltd filed Critical Heraeus Quarzglas GmbH and Co KG
Publication of DE69600781D1 publication Critical patent/DE69600781D1/de
Application granted granted Critical
Publication of DE69600781T2 publication Critical patent/DE69600781T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C14/00—Glass compositions containing a non-glass component, e.g. compositions containing fibres, filaments, whiskers, platelets, or the like, dispersed in a glass matrix
    • C03C14/004—Glass compositions containing a non-glass component, e.g. compositions containing fibres, filaments, whiskers, platelets, or the like, dispersed in a glass matrix the non-glass component being in the form of particles or flakes
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B20/00—Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B32/00—Thermal after-treatment of glass products not provided for in groups C03B19/00, C03B25/00 - C03B31/00 or C03B37/00, e.g. crystallisation, eliminating gas inclusions or other impurities; Hot-pressing vitrified, non-porous, shaped glass products
    • C03B32/02—Thermal crystallisation, e.g. for crystallising glass bodies into glass-ceramic articles
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/06—Glass compositions containing silica with more than 90% silica by weight, e.g. quartz
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2201/00—Glass compositions
    • C03C2201/02—Pure silica glass, e.g. pure fused quartz
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2201/00—Glass compositions
    • C03C2201/80—Glass compositions containing bubbles or microbubbles, e.g. opaque quartz glass
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2214/00—Nature of the non-vitreous component
    • C03C2214/20—Glass-ceramics matrix
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2214/00—Nature of the non-vitreous component
    • C03C2214/30—Methods of making the composites

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Geochemistry & Mineralogy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Glass Compositions (AREA)
  • Surface Treatment Of Glass (AREA)
  • Physical Vapour Deposition (AREA)
  • Glass Melting And Manufacturing (AREA)
DE69600781T 1995-02-28 1996-02-27 Verfahren zur herstellung eines cristobalit enthaltenden quarzglases Expired - Fee Related DE69600781T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP6487695 1995-02-28
JP09749495A JP3400180B2 (ja) 1995-03-31 1995-03-31 シリカガラス治具
PCT/EP1996/000794 WO1996026908A1 (en) 1995-02-28 1996-02-27 Cristobalite-contained silica glass, method of producing same and silica glass jig made of same

Publications (2)

Publication Number Publication Date
DE69600781D1 true DE69600781D1 (de) 1998-11-19
DE69600781T2 DE69600781T2 (de) 1999-05-20

Family

ID=26405998

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69611686T Expired - Fee Related DE69611686T2 (de) 1995-02-28 1996-02-27 Cristobalit enthaltendes Quarzglas, und daraus hergestellte Quarzglas-Haltevorrichtung
DE69600781T Expired - Fee Related DE69600781T2 (de) 1995-02-28 1996-02-27 Verfahren zur herstellung eines cristobalit enthaltenden quarzglases

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69611686T Expired - Fee Related DE69611686T2 (de) 1995-02-28 1996-02-27 Cristobalit enthaltendes Quarzglas, und daraus hergestellte Quarzglas-Haltevorrichtung

Country Status (6)

Country Link
US (1) US5876473A (de)
EP (2) EP0757665B1 (de)
KR (1) KR100197471B1 (de)
DE (2) DE69611686T2 (de)
TW (1) TW382007B (de)
WO (1) WO1996026908A1 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6120922A (en) * 1997-04-28 2000-09-19 Goto; Naoyuki Glass-ceramic substrate for a magnetic information storage medium
CA2299934C (en) * 1999-03-03 2006-09-19 Kuraray Co., Ltd. Oxygen absorptive resin composition
EP1187170B1 (de) * 2000-08-29 2007-05-09 Heraeus Quarzglas GmbH & Co. KG Plasmafeste Quartzglas-Haltevorrichtung
AUPR054000A0 (en) * 2000-10-04 2000-10-26 Austai Motors Designing Pty Ltd A planetary gear apparatus
KR100445669B1 (ko) * 2001-03-24 2004-08-21 조철환 석영 표면의 세라믹 코팅방법
JP3970692B2 (ja) * 2002-05-31 2007-09-05 信越化学工業株式会社 プリフォーム製造方法
JP5050363B2 (ja) * 2005-08-12 2012-10-17 株式会社Ｓｕｍｃｏ 半導体シリコン基板用熱処理治具およびその製作方法
JP4994647B2 (ja) * 2005-11-30 2012-08-08 ジャパンスーパークォーツ株式会社 結晶化し易い石英ガラス部材とその用途
DE102006018711B4 (de) * 2006-04-20 2008-09-25 Heraeus Quarzglas Gmbh & Co. Kg Werkstoff, insbesondere für ein optisches Bauteil zum Einsatz in der Mikrolithographie und Verfahren zur Herstellung eines Formkörpers aus dem Werkstoff
FR2958934A1 (fr) 2010-04-14 2011-10-21 Michel Davidovics Matrice a base de cristobalite nano-cristalline pour materiau composite fibreux thermostructural
WO2021041792A1 (en) 2019-08-29 2021-03-04 Covia Holdings Corporation Ultra-white silica-based filler

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA634437A (en) * 1962-01-09 D. Stookey Stanley Method of making a semicrystalline ceramic body
US3113877A (en) * 1960-10-06 1963-12-10 Int Resistance Co Partially devitrified glasses
GB1466801A (en) * 1974-11-20 1977-03-09 Rolls Royce Method of manufacturing a refractory material containing fused silica and crystalline phase silica
US4180409A (en) * 1975-07-10 1979-12-25 Bayer Aktiengesellschaft Thermally stable quartz glass
US4473653A (en) * 1982-08-16 1984-09-25 Rudoi Boris L Ballistic-resistant glass-ceramic and method of preparation
US5053359A (en) * 1989-03-24 1991-10-01 Pyromatics, Inc. Cristobalite reinforcement of high silica glass
US5389582A (en) * 1985-11-06 1995-02-14 Loxley; Ted A. Cristobalite reinforcement of quartz glass
JPS62202826A (ja) * 1986-02-28 1987-09-07 Nippon Sanso Kk ガラスの製造法
US4828593A (en) * 1986-02-28 1989-05-09 Japan Oxygen Co., Ltd. Process for the production of glass
JPH01126238A (ja) * 1987-11-09 1989-05-18 Shinetsu Sekiei Kk 石英ガラス炉芯管
US4935046A (en) * 1987-12-03 1990-06-19 Shin-Etsu Handotai Company, Limited Manufacture of a quartz glass vessel for the growth of single crystal semiconductor

Also Published As

Publication number Publication date
DE69611686D1 (de) 2001-03-01
EP0757665A1 (de) 1997-02-12
EP0854116B1 (de) 2001-01-24
KR100197471B1 (ko) 1999-06-15
US5876473A (en) 1999-03-02
TW382007B (en) 2000-02-11
EP0757665B1 (de) 1998-10-14
EP0854116A2 (de) 1998-07-22
WO1996026908A1 (en) 1996-09-06
KR960031363A (ko) 1996-09-17
DE69600781T2 (de) 1999-05-20
DE69611686T2 (de) 2001-08-02
EP0854116A3 (de) 1999-01-07

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: HERAEUS QUARZGLAS GMBH & CO. KG, 63450 HANAU, DE S

8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee