DE69532429D1 - Apparat zum Messen der in einem Leiterteil induzierten elektrischen Ladung und elektrisches Ladungsmessverfahren - Google Patents

Apparat zum Messen der in einem Leiterteil induzierten elektrischen Ladung und elektrisches Ladungsmessverfahren

Info

Publication number
DE69532429D1
DE69532429D1 DE69532429T DE69532429T DE69532429D1 DE 69532429 D1 DE69532429 D1 DE 69532429D1 DE 69532429 T DE69532429 T DE 69532429T DE 69532429 T DE69532429 T DE 69532429T DE 69532429 D1 DE69532429 D1 DE 69532429D1
Authority
DE
Germany
Prior art keywords
electrical charge
measuring
conductor part
measuring method
induced
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69532429T
Other languages
English (en)
Other versions
DE69532429T2 (de
Inventor
Kouichi Suzuki
Youko Yaguchi
Juniti Yamaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Harada Corp
Original Assignee
Fab Solutions Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fab Solutions Inc filed Critical Fab Solutions Inc
Publication of DE69532429D1 publication Critical patent/DE69532429D1/de
Application granted granted Critical
Publication of DE69532429T2 publication Critical patent/DE69532429T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/01—Subjecting similar articles in turn to test, e.g. "go/no-go" tests in mass production; Testing objects at points as they pass through a testing station
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
    • G01R29/12—Measuring electrostatic fields or voltage-potential
    • G01R29/14—Measuring field distribution
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06766—Input circuits therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
    • G01R29/24—Arrangements for measuring quantities of charge

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Tests Of Electronic Circuits (AREA)
DE69532429T 1994-05-31 1995-05-31 Apparat zum Messen der in einem Leiterteil induzierten elektrischen Ladung und elektrisches Ladungsmessverfahren Expired - Lifetime DE69532429T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP6119115A JP2908240B2 (ja) 1994-05-31 1994-05-31 電荷量の測定方法、静電エネルギーの測定方法及び電荷量測定装置
JP11911594 1994-05-31

Publications (2)

Publication Number Publication Date
DE69532429D1 true DE69532429D1 (de) 2004-02-19
DE69532429T2 DE69532429T2 (de) 2004-11-11

Family

ID=14753304

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69532429T Expired - Lifetime DE69532429T2 (de) 1994-05-31 1995-05-31 Apparat zum Messen der in einem Leiterteil induzierten elektrischen Ladung und elektrisches Ladungsmessverfahren

Country Status (5)

Country Link
US (2) US6034530A (de)
EP (1) EP0685745B1 (de)
JP (1) JP2908240B2 (de)
KR (1) KR100230628B1 (de)
DE (1) DE69532429T2 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2836676B2 (ja) * 1996-02-09 1998-12-14 日本電気株式会社 半導体要素の試験方法及び装置
JP3379490B2 (ja) 1999-10-20 2003-02-24 日本電気株式会社 電荷測定装置
JP3466518B2 (ja) * 1999-10-20 2003-11-10 ファブソリューション株式会社 電荷測定装置
US6628121B1 (en) * 2000-10-13 2003-09-30 Heidelberger Druckmaschinen Ag Tools for measuring electrometer dispenser response
JP4413445B2 (ja) * 2001-03-19 2010-02-10 三菱電機株式会社 空調ダクト装置
JP2006023119A (ja) * 2004-07-06 2006-01-26 Fab Solution Kk 静電破壊防止用材料の評価方法および静電破壊防止用材料の評価装置
KR100802751B1 (ko) * 2005-11-01 2008-02-12 현대자동차주식회사 유동전위 측정용 센서
DE102007053862B4 (de) * 2006-11-17 2011-05-26 Suss Microtec Test Systems Gmbh Prober zum Testen von Halbleitersubstraten mit EMI-Abschirmung
US8278951B2 (en) 2006-11-17 2012-10-02 Cascade Microtech, Inc. Probe station for testing semiconductor substrates and comprising EMI shielding
EP2180327A1 (de) * 2008-10-21 2010-04-28 Applied Materials, Inc. Vorrichtung und Verfahren zur aktiven Spannungskompensierung
US9817032B2 (en) 2012-05-23 2017-11-14 Semiconductor Energy Laboratory Co., Ltd. Measurement device
CN103575942A (zh) * 2012-07-20 2014-02-12 太仓子午电气有限公司 一种多用防滑测量笔
US11609358B2 (en) 2016-07-18 2023-03-21 Omni Lps. Co., Ltd. Lightning strike alarm system using bipolar conventional air terminal
KR101785024B1 (ko) 2016-07-18 2017-10-13 (주)옴니엘피에스 쌍극자피뢰침(BCAT: Bipolar Conventional Air Terminal)를 이용한 낙뢰경보시스템
JP7123663B2 (ja) * 2018-06-29 2022-08-23 株式会社東芝 製造ライン内の静電気測定方法
CN110231519A (zh) * 2019-06-18 2019-09-13 国网河南省电力公司辉县市供电公司 一种静电检测消除装置
FR3140443A1 (fr) * 2022-10-04 2024-04-05 Lipeo Absorbeur de charge électrique, capteur de charge et magnétomètre

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2883619A (en) * 1956-02-29 1959-04-21 Tektronix Inc Electrical probe
DE1281573B (de) * 1964-12-08 1968-10-31 Kalle Ag Messsonde zur Bestimmung der oertlichen Ladungsverteilung auf Oberflaechen von Festkoerpern
US3826981A (en) * 1968-05-03 1974-07-30 H Ross Solid-state high impedance meter system
US3689832A (en) * 1970-05-01 1972-09-05 Western Technical Products Inc Resistance tester for producing an audible tone that varies with the resistance
US3829776A (en) * 1973-07-31 1974-08-13 E Lozoya Pen type voltmeter
JPS53116182A (en) * 1977-03-18 1978-10-11 Nippon Kayaku Kk Method of measuring amount of electrostatic charge
US4139813A (en) * 1977-04-01 1979-02-13 Xerox Corporation Adaptor for an electrometer probe to permit contact potential measurements and method for using same
US4205264A (en) * 1978-04-25 1980-05-27 Charles Gold High impedance electrical testing instrument for AC and DC voltage detection and continuity testing
JPS5810663A (ja) * 1981-07-11 1983-01-21 Hasegawa Denki Kogyo Kk 直流特別高圧用検電器
JPS5833577A (ja) * 1981-08-25 1983-02-26 Shinko Electric Co Ltd 無人誘導台車
JPS6020694Y2 (ja) * 1981-08-31 1985-06-20 日成企業株式会社 循環蛇口
US4591794A (en) * 1982-12-28 1986-05-27 United Technologies Corporation Gas turbine access port plug electrostatic probe
SU1283672A1 (ru) * 1985-07-17 1987-01-15 Научно-исследовательский институт механики и физики при Саратовском государственном университете Датчик поверхностных зар дов и потенциалов
JPS63281069A (ja) * 1987-05-13 1988-11-17 Hitachi Ltd 静電気検出装置
DE69020425T2 (de) * 1989-04-28 1996-03-07 Toshiba Kawasaki Kk Oberflächenpotentialmesssystem.
US5300889A (en) * 1991-04-25 1994-04-05 Bakhoum Ezzat G Ground-free electrostatic measurement device with electrical charge storing capacitor
US5164674A (en) * 1992-01-22 1992-11-17 Bakhoum Ezzat G Static charge warning device

Also Published As

Publication number Publication date
KR950033500A (ko) 1995-12-26
KR100230628B1 (ko) 1999-11-15
EP0685745A3 (de) 1997-05-07
EP0685745B1 (de) 2004-01-14
US6034530A (en) 2000-03-07
DE69532429T2 (de) 2004-11-11
JP2908240B2 (ja) 1999-06-21
EP0685745A2 (de) 1995-12-06
US6107804A (en) 2000-08-22
JPH07325119A (ja) 1995-12-12

Similar Documents

Publication Publication Date Title
DE69532429D1 (de) Apparat zum Messen der in einem Leiterteil induzierten elektrischen Ladung und elektrisches Ladungsmessverfahren
NO984301D0 (no) FremgangsmÕte og apparat for mÕling av resistivitet i en grunnformasjon
DE69524298T2 (de) Apparat und Verfahren zum Messen einer Verschiebung
NO972194D0 (no) Apparat for registrering av elektriske utladninger i et pröveobjekt
NO954030L (no) Fremgangsmåte og apparat for måling av slam-resistivitet i et borehull
GB2306680B (en) Method and apparatus for measuring RF power in a test set
DE69119798D1 (de) Elektromagnetischer Apparat zum Messen der Leitfähigkeit und Verfahren zum Messen der Leitfähigkeit
EP0441373A3 (en) Method and apparatus for measuring pattern dimension
NO965040D0 (no) Apparat for måling av resistiviteten i formasjoner
DE59502268D1 (de) Verfahren und anordnung zum messen von elektrischen strömen aus wenigstens zwei messbereichen
EP0410234A3 (en) Method and apparatus for measuring an electric field or an electric voltage
DE68906710D1 (de) Verfahren und apparat zum verkapseln einer elektronischen anordnung.
PL331532A1 (en) Gap with measuring method and apparatus
DE69009053T2 (de) Vorrichtung und verfahren zum messen elektrischen stromes im zustand hoher interferenz.
DE59610371D1 (de) Verfahren und Vorrichtung zum Prüfen einer elektrischen Leiteranordnung
DE69513429D1 (de) Verfahren und Vorrichtung zum elektrischen Testen eines mehradrigen Kabels
DE19781840T1 (de) Verfahren und Vorrichtung zum Messen der Schmelzentemperatur in einem Schmelzengefäß
NO953609D0 (no) Fremgangsmåte og apparat for effektmåling
DE59802939D1 (de) Verfahren zum Messen von elektrischen Strömen in n Leitern sowie Vorrichtung zur Durchführung des Verfahrens
DE69523879T2 (de) Vorrichtung und Verfahren zum Berechnen der Dicke eines Bündels von elektrischen Drähten
EP0699889A3 (de) Apparat und Verfahren zur Messung eines Spaltes
DE69007272D1 (de) Verfahren und Vorrichtung zum Abdichten der Spalte zwischen Elektrode und Deckel bei einem Elektroofen.
NO953608D0 (no) Fremgangsmåte og apparat for effektmåling
DE69316467D1 (de) Phantom zum Simulieren der elektrischen Belastung in einem magnetischen Resonanzapparat
GB2182477B (en) Method and device for establishing the reference values in coin testing apparatus

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: HARADA CORP., OSAKA, JP