DE69530095D1 - X-y-theta positioniervorrichtung - Google Patents

X-y-theta positioniervorrichtung

Info

Publication number
DE69530095D1
DE69530095D1 DE69530095T DE69530095T DE69530095D1 DE 69530095 D1 DE69530095 D1 DE 69530095D1 DE 69530095 T DE69530095 T DE 69530095T DE 69530095 T DE69530095 T DE 69530095T DE 69530095 D1 DE69530095 D1 DE 69530095D1
Authority
DE
Germany
Prior art keywords
positioning device
theta positioning
theta
positioning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69530095T
Other languages
English (en)
Other versions
DE69530095T2 (de
Inventor
Gary Lynn Burton
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of DE69530095D1 publication Critical patent/DE69530095D1/de
Application granted granted Critical
Publication of DE69530095T2 publication Critical patent/DE69530095T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
    • B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
    • B23Q1/623—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair followed perpendicularly by a single rotating pair
DE69530095T 1994-10-04 1995-09-29 X-y-theta positioniervorrichtung Expired - Fee Related DE69530095T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/317,570 US5523941A (en) 1994-10-04 1994-10-04 X-Y-theta positioning mechanism
PCT/US1995/012900 WO1996010469A1 (en) 1994-10-04 1995-09-29 X-y-υ positioning mechanism

Publications (2)

Publication Number Publication Date
DE69530095D1 true DE69530095D1 (de) 2003-04-30
DE69530095T2 DE69530095T2 (de) 2003-10-30

Family

ID=23234281

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69530095T Expired - Fee Related DE69530095T2 (de) 1994-10-04 1995-09-29 X-y-theta positioniervorrichtung

Country Status (6)

Country Link
US (1) US5523941A (de)
EP (1) EP0784527B1 (de)
JP (1) JPH10506850A (de)
AU (1) AU3891095A (de)
DE (1) DE69530095T2 (de)
WO (1) WO1996010469A1 (de)

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US5763966A (en) * 1995-03-15 1998-06-09 Hinds; Walter E. Single plane motor system generating orthogonal movement
US5648690A (en) * 1995-03-15 1997-07-15 Hinds; Walter E. Motor system generating orthogonal movement in a single plane
JPH08275490A (ja) * 1995-03-31 1996-10-18 Minolta Co Ltd エンコーダ付き電動モータ
JP3832891B2 (ja) * 1996-03-28 2006-10-11 日本トムソン株式会社 リニア電磁アクチュエータを用いたｘｙテーブル
DE10018251C2 (de) * 2000-04-13 2003-08-14 Leica Microsystems Laserschneid-Vorrichtung mit Mikroskop
US6631798B1 (en) * 2000-11-01 2003-10-14 Micron Technology, Inc. Printed circuit board support
DE50007505D1 (de) * 2000-12-21 2004-09-23 Liechti Engineering Ag Langnau Positioniervorrichtung
US6588081B2 (en) * 2001-03-19 2003-07-08 Aerotech, Inc. Small footprint direct drive mechanical positioning stage
JP4198334B2 (ja) * 2001-06-01 2008-12-17 富士通マイクロエレクトロニクス株式会社 Ｘｙステージを用いた処理方法及び装置
WO2003026838A1 (en) * 2001-09-24 2003-04-03 Agency For Science, Technology And Research Decoupled planar positioning system
DE10249767B4 (de) * 2002-10-24 2006-11-23 Asmec Advanced Surface Mechanics Gmbh Probentisch für die Messung lateraler Kräfte und Verschiebungen
US7093704B2 (en) * 2004-08-17 2006-08-22 Micron Technology, Inc. Printed circuit board support
US20070040314A1 (en) * 2005-07-12 2007-02-22 Lkt Automation Sdn Bhd Adjustable tool holder
KR100674440B1 (ko) * 2005-08-12 2007-01-25 주식회사 파이컴 프로브 카드 제조 방법 및 장치
WO2007062505A1 (en) * 2005-11-17 2007-06-07 Socovar, Société En Commandite Planar parallel mechanism and method
US8104752B2 (en) * 2006-03-20 2012-01-31 Boaz Eidelberg Integrated large XY rotary positioning table with virtual center of rotation
KR100857416B1 (ko) * 2006-11-22 2008-09-08 주식회사 자코드 휴대용 단말기의 2축 슬라이딩장치
DE102007004234A1 (de) * 2007-01-27 2008-08-07 Eppendorf Ag Verfahren zur insbesondere optischen Untersuchung der Oberfläche eines Probenträgers für biologische Objekte
EP1990110A1 (de) * 2007-05-08 2008-11-12 Güdel Group Ag Zentriervorrichtung für flächige Werkstücke in einer Presse und Verfahren zum Einrichten einer solchen Zentriervorrichtung
US8290240B2 (en) * 2008-06-11 2012-10-16 Sirona Dental Systems Gmbh System, apparatus, method, and computer program product for determining spatial characteristics of an object using a camera and a search pattern
US8121389B2 (en) 2008-06-11 2012-02-21 Sirona Dental Systems Gmbh System, apparatus, method and computer program product for optical position recognition
JP2012032215A (ja) * 2010-07-29 2012-02-16 Mitsutoyo Corp 産業機械
DE102010061167B3 (de) 2010-12-10 2012-05-31 Leica Microsystems Cms Gmbh Mikroskoptisch
CN102350590A (zh) * 2011-09-26 2012-02-15 江苏大学 一种用于调整曲面工件位姿的混联六自由度工作台
CN103066894B (zh) * 2012-12-12 2015-05-20 清华大学 一种六自由度磁悬浮工件台
US9950402B2 (en) * 2012-12-31 2018-04-24 Corner Star Limited System and method for aligning an ingot with mounting block
US9272442B2 (en) * 2012-12-31 2016-03-01 Sunedison, Inc. Methods for aligning an ingot with mounting block
US10843824B2 (en) * 2015-12-30 2020-11-24 Baxter International Inc. Syringe positioning apparatus and method
CN107290119A (zh) * 2016-04-13 2017-10-24 富泰华工业（深圳）有限公司 抗摔损测试机构及具有该测试机构的测试装置
CN105824200B (zh) * 2016-05-31 2017-08-29 京东方科技集团股份有限公司 一种基板支撑结构及曝光机
CN109955208B (zh) * 2019-04-18 2020-12-01 深圳市惠诚自动化科技有限公司 高稳定的移动对位平台
CN110837068B (zh) * 2019-11-25 2021-08-20 中北大学 一种在局部维持恒定均匀磁场且方向强度精密调节的装置

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US3884580A (en) * 1973-09-07 1975-05-20 Gerber Scientific Instr Co Apparatus for measuring and positioning by interferometry
US4191916A (en) * 1977-11-23 1980-03-04 Fujitsu Limited Table positioning system including optical reference position measuring transducer
US4157818A (en) * 1977-12-01 1979-06-12 Motorola, Inc. X-Y Movable work holder
US4977361A (en) * 1978-06-26 1990-12-11 Eaton Corporation X-Y addressable workpiece positioner and mask aligner using same
US4280054A (en) * 1979-04-30 1981-07-21 Varian Associates, Inc. X-Y Work table
US4464030A (en) * 1982-03-26 1984-08-07 Rca Corporation Dynamic accuracy X-Y positioning table for use in a high precision light-spot writing system
JPS58186364A (ja) * 1982-04-21 1983-10-31 Matsushita Electric Ind Co Ltd Ｘｙリニアモ−タ装置
US4589746A (en) * 1982-05-07 1986-05-20 The Gerber Scientific Instrument Company Dual-axis, single mirror interferometer measuring system
JPS5972727A (ja) * 1982-10-19 1984-04-24 Matsushita Electric Ind Co Ltd 位置合わせ用テ−ブル
US4577845A (en) * 1983-01-18 1986-03-25 Citizen Watch Co., Ltd. Hydrostatic pressure XY table
JPS6069322A (ja) * 1983-09-27 1985-04-20 Hiroshi Teramachi クロス直線ベアリング
JPS6176239A (ja) * 1984-09-25 1986-04-18 Hiroshi Teramachi リニアモ−タ付ｘｙテ−ブル
JPS61109637A (ja) * 1984-10-31 1986-05-28 Hitachi Ltd テ−ブル装置
US4676492A (en) * 1985-07-01 1987-06-30 Shamir Arye H Shallow X-Y table positioning device having large travel capability
JPS6228146A (ja) * 1985-07-26 1987-02-06 Hiroshi Teramachi リニアモ−タ付ｘｙテ−ブル
US4742286A (en) * 1985-10-29 1988-05-03 Micro-Stage, Inc. Gas bearing X-Y-θ stage assembly
JPS62120928A (ja) * 1985-11-20 1987-06-02 Kitamura Kikai Kk Ｘｙテ−ブル
JPS63162132A (ja) * 1986-12-26 1988-07-05 Nippon Thompson Co Ltd Ｘｙテ−ブル
US4812725A (en) * 1987-10-16 1989-03-14 Anwar Chitayat Positioning device with dual linear motor
US4972311A (en) * 1988-08-15 1990-11-20 Kulicke And Soffa Industries Inc. X-Y table error mapping apparatus and method
GB2272523B (en) * 1992-04-09 1995-11-01 Mitutoyo Corp X-Y table apparatus
US5334892A (en) * 1992-12-22 1994-08-02 Anorad Corporation Positioning device for planar positioning

Also Published As

Publication number Publication date
US5523941A (en) 1996-06-04
AU3891095A (en) 1996-04-26
EP0784527A1 (de) 1997-07-23
EP0784527B1 (de) 2003-03-26
DE69530095T2 (de) 2003-10-30
JPH10506850A (ja) 1998-07-07
WO1996010469A1 (en) 1996-04-11

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee