DE69529438D1 - Verfahren und Gerät zum Evakuieren eines Vakuumsystems - Google Patents

Verfahren und Gerät zum Evakuieren eines Vakuumsystems

Info

Publication number
DE69529438D1
DE69529438D1 DE69529438T DE69529438T DE69529438D1 DE 69529438 D1 DE69529438 D1 DE 69529438D1 DE 69529438 T DE69529438 T DE 69529438T DE 69529438 T DE69529438 T DE 69529438T DE 69529438 D1 DE69529438 D1 DE 69529438D1
Authority
DE
Germany
Prior art keywords
evacuating
vacuum system
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69529438T
Other languages
English (en)
Other versions
DE69529438T2 (de
Inventor
Katsuya Okumura
Yuuichi Mikata
Manabu Tsujimura
Yoshio Ando
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Toshiba Corp
Original Assignee
Ebara Corp
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp, Toshiba Corp filed Critical Ebara Corp
Publication of DE69529438D1 publication Critical patent/DE69529438D1/de
Application granted granted Critical
Publication of DE69529438T2 publication Critical patent/DE69529438T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0261—Surge control by varying driving speed
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
    • Y02B30/70—Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
DE69529438T 1994-06-28 1995-06-28 Verfahren und Gerät zum Evakuieren eines Vakuumsystems Expired - Fee Related DE69529438T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP17030194 1994-06-28
JP14950395A JP3847357B2 (ja) 1994-06-28 1995-05-23 真空系の排気装置

Publications (2)

Publication Number Publication Date
DE69529438D1 true DE69529438D1 (de) 2003-02-27
DE69529438T2 DE69529438T2 (de) 2003-11-27

Family

ID=26479375

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69529438T Expired - Fee Related DE69529438T2 (de) 1994-06-28 1995-06-28 Verfahren und Gerät zum Evakuieren eines Vakuumsystems

Country Status (5)

Country Link
US (1) US5746581A (de)
EP (1) EP0690235B1 (de)
JP (1) JP3847357B2 (de)
KR (1) KR100354457B1 (de)
DE (1) DE69529438T2 (de)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5971711A (en) * 1996-05-21 1999-10-26 Ebara Corporation Vacuum pump control system
JP3767052B2 (ja) * 1996-11-30 2006-04-19 アイシン精機株式会社 多段式真空ポンプ
GB9717400D0 (en) * 1997-08-15 1997-10-22 Boc Group Plc Vacuum pumping systems
JP3929185B2 (ja) * 1998-05-20 2007-06-13 株式会社荏原製作所 真空排気装置及び方法
US6045331A (en) * 1998-08-10 2000-04-04 Gehm; William Fluid pump speed controller
JP2002541541A (ja) * 1999-04-07 2002-12-03 アルカテル 真空チャンバ内の圧力を調整するためのシステム、このシステムを装備した真空ポンピングユニット
DE19929519A1 (de) * 1999-06-28 2001-01-04 Pfeiffer Vacuum Gmbh Verfahren zum Betrieb einer Mehrkammer-Vakuumanlage
FR2807951B1 (fr) * 2000-04-20 2003-05-16 Cit Alcatel Procede et systeme de pompage des chambres de transfert d'equipement de semi-conducteur
US6589023B2 (en) * 2001-10-09 2003-07-08 Applied Materials, Inc. Device and method for reducing vacuum pump energy consumption
JP2003155981A (ja) * 2001-11-21 2003-05-30 Toyota Industries Corp 真空ポンプにおける運転制御方法及び運転制御装置
US6893506B2 (en) * 2002-03-11 2005-05-17 Micron Technology, Inc. Atomic layer deposition apparatus and method
US6739840B2 (en) * 2002-05-22 2004-05-25 Applied Materials Inc Speed control of variable speed pump
GB0401396D0 (en) * 2004-01-22 2004-02-25 Boc Group Plc Pressure control method
CA2573349C (en) * 2004-07-13 2013-09-24 Delaval Holding Ab Controllable vacuum source
US20080023005A1 (en) * 2004-07-16 2008-01-31 Shuichi Tokunaga Intra-Tracheal Sputum Aspirating Apparatus
FR2878913B1 (fr) * 2004-12-03 2007-01-19 Cit Alcatel Controle des pressions partielles de gaz pour optimisation de procede
GB0502149D0 (en) * 2005-02-02 2005-03-09 Boc Group Inc Method of operating a pumping system
GB0508872D0 (en) * 2005-04-29 2005-06-08 Boc Group Plc Method of operating a pumping system
US20070020115A1 (en) * 2005-07-01 2007-01-25 The Boc Group, Inc. Integrated pump apparatus for semiconductor processing
FR2888894A1 (fr) 2005-07-20 2007-01-26 Alcatel Sa Pompage rapide d'enceinte avec economie d'energie
JP4737770B2 (ja) * 2006-09-12 2011-08-03 アネスト岩田株式会社 真空ポンプの運転制御装置および方法
JP4798092B2 (ja) * 2007-07-23 2011-10-19 三菱自動車工業株式会社 電気自動車の制動装置
DE102009017887A1 (de) * 2009-04-17 2010-10-21 Oerlikon Leybold Vacuum Gmbh Grobpumpverfahren für eine Verdrängerpumpe
ITPR20110042A1 (it) * 2011-05-23 2012-11-24 Brain Bee Holding S P A Metodo di manutenzione di una pompa a vuoto a bagno d'olio per impiego in una stazione di recupero di fluido refrigerante da un impianto di condizionamento e sistema di pilotaggio e manutenzione della pompa
JP5524285B2 (ja) * 2012-07-10 2014-06-18 株式会社東芝 ポンプユニット
DE102013216593B4 (de) * 2013-08-21 2024-07-11 Pfeiffer Vacuum Gmbh Vakuumpumpe und verfahren zum betreiben einer vakuumpumpe
JP6749857B2 (ja) * 2017-03-24 2020-09-02 株式会社日立ハイテク 自動分析装置
CN107989781B (zh) * 2017-11-25 2019-06-04 蚌埠市鑫源机电设备有限公司 一种多级联动的泵运行调控系统
CN107893751B (zh) * 2017-11-25 2019-06-04 蚌埠市鑫源机电设备有限公司 一种基于多泵联动的泵运行调控方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4699570A (en) * 1986-03-07 1987-10-13 Itt Industries, Inc Vacuum pump system
JPS62224685A (ja) * 1986-03-25 1987-10-02 Sigma Gijutsu Kogyo Kk 真空圧力制御装置
JPS62243982A (ja) * 1986-04-14 1987-10-24 Hitachi Ltd ２段型真空ポンプ装置およびその運転方法
JPH0784871B2 (ja) * 1986-06-12 1995-09-13 株式会社日立製作所 真空排気装置
FR2621141B1 (fr) * 1987-09-25 1989-12-01 Cit Alcatel Procede de demarrage de pompes a vide couplees en serie, et dispositif permettant la mise en oeuvre de ce procede
DE3828608A1 (de) * 1988-08-23 1990-03-08 Alcatel Hochvakuumtechnik Gmbh Vakuumpumpvorrichtung
FR2640697B1 (fr) * 1988-12-16 1993-01-08 Cit Alcatel Ensemble de pompage pour l'obtention de vides eleves
US5318667A (en) * 1991-04-04 1994-06-07 Hitachi, Ltd. Method and apparatus for dry etching
JP3323530B2 (ja) * 1991-04-04 2002-09-09 株式会社日立製作所 半導体装置の製造方法
JPH05231381A (ja) * 1992-02-26 1993-09-07 Hitachi Ltd ドライ真空ポンプの真空排気容量制御方法とその装置並びにドライ真空ポンプおよび半導体製造用真空処理装置
KR100190310B1 (ko) * 1992-09-03 1999-06-01 모리시따 요오이찌 진공배기장치

Also Published As

Publication number Publication date
EP0690235A3 (de) 1997-09-24
KR960001501A (ko) 1996-01-25
US5746581A (en) 1998-05-05
KR100354457B1 (ko) 2003-02-05
JP3847357B2 (ja) 2006-11-22
DE69529438T2 (de) 2003-11-27
JPH0874768A (ja) 1996-03-19
EP0690235A2 (de) 1996-01-03
EP0690235B1 (de) 2003-01-22

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee