DE69527432D1 - Massenspektrograph mit einem Massenfilter in einem Halbleitersubstrat - Google Patents
Massenspektrograph mit einem Massenfilter in einem HalbleitersubstratInfo
- Publication number
- DE69527432D1 DE69527432D1 DE69527432T DE69527432T DE69527432D1 DE 69527432 D1 DE69527432 D1 DE 69527432D1 DE 69527432 T DE69527432 T DE 69527432T DE 69527432 T DE69527432 T DE 69527432T DE 69527432 D1 DE69527432 D1 DE 69527432D1
- Authority
- DE
- Germany
- Prior art keywords
- mass
- semiconductor substrate
- spectrograph
- filter
- mass filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 title 1
- 239000000758 substrate Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/0013—Miniaturised spectrometers, e.g. having smaller than usual scale, integrated conventional components
- H01J49/0018—Microminiaturised spectrometers, e.g. chip-integrated devices, Micro-Electro-Mechanical Systems [MEMS]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/28—Static spectrometers
- H01J49/284—Static spectrometers using electrostatic and magnetic sectors with simple focusing, e.g. with parallel fields such as Aston spectrometer
- H01J49/286—Static spectrometers using electrostatic and magnetic sectors with simple focusing, e.g. with parallel fields such as Aston spectrometer with energy analysis, e.g. Castaing filter
- H01J49/288—Static spectrometers using electrostatic and magnetic sectors with simple focusing, e.g. with parallel fields such as Aston spectrometer with energy analysis, e.g. Castaing filter using crossed electric and magnetic fields perpendicular to the beam, e.g. Wien filter
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Tubes For Measurement (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/320,474 US5536939A (en) | 1993-09-22 | 1994-10-07 | Miniaturized mass filter |
PCT/US1995/011908 WO1996011492A1 (en) | 1994-10-07 | 1995-09-21 | Miniaturized mass filter |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69527432D1 true DE69527432D1 (de) | 2002-08-22 |
DE69527432T2 DE69527432T2 (de) | 2003-02-27 |
Family
ID=23246588
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69527432T Expired - Lifetime DE69527432T2 (de) | 1994-10-07 | 1995-09-21 | Massenspektrograph mit einem Massenfilter in einem Halbleitersubstrat |
Country Status (6)
Country | Link |
---|---|
US (1) | US5536939A (de) |
EP (1) | EP0784863B1 (de) |
JP (1) | JP3713557B2 (de) |
CA (1) | CA2202060C (de) |
DE (1) | DE69527432T2 (de) |
WO (1) | WO1996011492A1 (de) |
Families Citing this family (57)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5747815A (en) * | 1993-09-22 | 1998-05-05 | Northrop Grumman Corporation | Micro-miniature ionizer for gas sensor applications and method of making micro-miniature ionizer |
CN100525876C (zh) * | 1998-09-17 | 2009-08-12 | 阿德文生物系统公司 | 产生液体电喷射的方法 |
KR100274871B1 (ko) * | 1998-11-12 | 2000-12-15 | 김순택 | 발광 화합물 및 이를 발색 재료로서 채용하고 있는 표시소자2 |
US6633031B1 (en) * | 1999-03-02 | 2003-10-14 | Advion Biosciences, Inc. | Integrated monolithic microfabricated dispensing nozzle and liquid chromatography-electrospray system and method |
US7005632B2 (en) * | 2002-04-12 | 2006-02-28 | Sionex Corporation | Method and apparatus for control of mobility-based ion species identification |
US7157700B2 (en) * | 2001-06-30 | 2007-01-02 | Sionex Corporation | System for collection of data and identification of unknown ion species in an electric field |
US6806463B2 (en) * | 1999-07-21 | 2004-10-19 | The Charles Stark Draper Laboratory, Inc. | Micromachined field asymmetric ion mobility filter and detection system |
US7045776B2 (en) * | 2001-06-30 | 2006-05-16 | Sionex Corporation | System for collection of data and identification of unknown ion species in an electric field |
US7399958B2 (en) | 1999-07-21 | 2008-07-15 | Sionex Corporation | Method and apparatus for enhanced ion mobility based sample analysis using various analyzer configurations |
US6690004B2 (en) * | 1999-07-21 | 2004-02-10 | The Charles Stark Draper Laboratory, Inc. | Method and apparatus for electrospray-augmented high field asymmetric ion mobility spectrometry |
US6512224B1 (en) | 1999-07-21 | 2003-01-28 | The Charles Stark Draper Laboratory, Inc. | Longitudinal field driven field asymmetric ion mobility filter and detection system |
US6815669B1 (en) * | 1999-07-21 | 2004-11-09 | The Charles Stark Draper Laboratory, Inc. | Longitudinal field driven ion mobility filter and detection system |
US7129482B2 (en) * | 1999-07-21 | 2006-10-31 | Sionex Corporation | Explosives detection using differential ion mobility spectrometry |
US6815668B2 (en) * | 1999-07-21 | 2004-11-09 | The Charles Stark Draper Laboratory, Inc. | Method and apparatus for chromatography-high field asymmetric waveform ion mobility spectrometry |
US7148477B2 (en) * | 1999-07-21 | 2006-12-12 | Sionex Corporation | System for trajectory-based ion species identification |
US7057168B2 (en) * | 1999-07-21 | 2006-06-06 | Sionex Corporation | Systems for differential ion mobility analysis |
US6495823B1 (en) * | 1999-07-21 | 2002-12-17 | The Charles Stark Draper Laboratory, Inc. | Micromachined field asymmetric ion mobility filter and detection system |
US7098449B1 (en) | 1999-07-21 | 2006-08-29 | The Charles Stark Draper Laboratory, Inc. | Spectrometer chip assembly |
US6501074B1 (en) | 1999-10-19 | 2002-12-31 | Regents Of The University Of Minnesota | Double-focusing mass spectrometer apparatus and methods regarding same |
WO2001050499A1 (en) | 1999-12-30 | 2001-07-12 | Advion Biosciences, Inc. | Multiple electrospray device, systems and methods |
AU2001229633A1 (en) | 2000-01-18 | 2001-07-31 | Advion Biosciences, Inc. | Separation media, multiple electrospray nozzle system and method |
CA2408235A1 (en) | 2000-05-08 | 2001-11-15 | Mass Sensors, Inc. | Microscale mass spectrometric chemical-gas sensor |
US6831276B2 (en) | 2000-05-08 | 2004-12-14 | Philip S. Berger | Microscale mass spectrometric chemical-gas sensor |
US7119328B2 (en) * | 2001-06-30 | 2006-10-10 | Sionex Corporation | System for DMS peak resolution |
US7274015B2 (en) * | 2001-08-08 | 2007-09-25 | Sionex Corporation | Capacitive discharge plasma ion source |
US7091481B2 (en) | 2001-08-08 | 2006-08-15 | Sionex Corporation | Method and apparatus for plasma generation |
US6727496B2 (en) * | 2001-08-14 | 2004-04-27 | Sionex Corporation | Pancake spectrometer |
GB2384908B (en) * | 2002-02-05 | 2005-05-04 | Microsaic Systems Ltd | Mass spectrometry |
US7122794B1 (en) * | 2002-02-21 | 2006-10-17 | Sionex Corporation | Systems and methods for ion mobility control |
GB2391694B (en) * | 2002-08-01 | 2006-03-01 | Microsaic Systems Ltd | Monolithic micro-engineered mass spectrometer |
WO2004040257A2 (en) | 2002-10-12 | 2004-05-13 | Sionex Corporation | NOx MONITOR USING DIFFERENTIAL MOBILITY SPECTROMETRY |
EP1668298A4 (de) * | 2003-09-17 | 2010-04-14 | Sionex Corp | Festkörperströmungsgenerator und verwandte systeme, anwendungen und verfahren |
US7227134B2 (en) * | 2003-11-25 | 2007-06-05 | Sionex Corporation | Mobility based apparatus and methods using dispersion characteristics, sample fragmentation, and/or pressure control to improve analysis of a sample |
EP1697024B1 (de) * | 2003-12-18 | 2017-08-30 | DH Technologies Development Pte. Ltd. | Verfahren und vorrichtung zur verbesserten ionenbasierten probendetektion unter verwendung von selektiver vortrennung und verstärkung |
CA2551991A1 (en) * | 2004-01-13 | 2005-07-28 | Sionex Corporation | Methods and apparatus for enhanced sample identification based on combined analytical techniques |
EP1735613A4 (de) * | 2004-02-02 | 2009-03-11 | Sionex Corp | Kompaktes probenanalysesystem und diesbezügliche verfahren mit kombinierten chromatographie- und mobilitätsspektrometrietechniken |
GB2411046B (en) * | 2004-02-12 | 2006-10-25 | Microsaic Systems Ltd | Mass spectrometer system |
US7057170B2 (en) * | 2004-03-12 | 2006-06-06 | Northrop Grumman Corporation | Compact ion gauge using micromachining and MISOC devices |
EP1756561A1 (de) * | 2004-04-28 | 2007-02-28 | Sionex Corporation | System und verfahren zur ionenspeziesanalyse mit verbesserter zustandskontrolle und dateninterpretation unter verwendung differentieller mobilitätsspektrometer |
US7399959B2 (en) * | 2004-12-03 | 2008-07-15 | Sionex Corporation | Method and apparatus for enhanced ion based sample filtering and detection |
GB2422951B (en) * | 2005-02-07 | 2010-07-28 | Microsaic Systems Ltd | Integrated analytical device |
EP1920243B1 (de) * | 2005-04-29 | 2015-09-09 | DH Technologies Development Pte. Ltd. | Kompakte auf gaschromatographie und ionenmobilität basierende probenanalysesysteme, -verfahren und -vorrichtungen |
US20070001114A1 (en) * | 2005-06-29 | 2007-01-04 | Goodley Paul C | Apparatus and method for ion capture and production |
GB2441943A (en) | 2005-07-26 | 2008-03-19 | Sionex Corp | Ultra compact ion mobility based analyzer system and method |
US7402799B2 (en) * | 2005-10-28 | 2008-07-22 | Northrop Grumman Corporation | MEMS mass spectrometer |
WO2007120373A2 (en) * | 2006-01-26 | 2007-10-25 | Sionex Corporation | Differential mobility spectrometer analyzer and pre-filter apparatus, methods and systems |
WO2008094704A2 (en) | 2007-02-01 | 2008-08-07 | Sionex Corporation | Differential mobility spectrometer pre-filter assembly for a mass spectrometer |
EP1959476A1 (de) * | 2007-02-19 | 2008-08-20 | Technische Universität Hamburg-Harburg | Massenspektrometer |
US7649171B1 (en) * | 2007-05-21 | 2010-01-19 | Northrop Grumman Corporation | Miniature mass spectrometer for the analysis of biological small molecules |
US9443698B2 (en) * | 2008-10-06 | 2016-09-13 | Axcelis Technologies, Inc. | Hybrid scanning for ion implantation |
JP6141772B2 (ja) * | 2011-02-14 | 2017-06-07 | マサチューセッツ インスティテュート オブ テクノロジー | 質量分析の方法、装置、及びシステム |
JP6624482B2 (ja) | 2014-07-29 | 2019-12-25 | 俊 保坂 | 超小型加速器および超小型質量分析装置 |
US10319572B2 (en) * | 2017-09-28 | 2019-06-11 | Northrop Grumman Systems Corporation | Space ion analyzer with mass spectrometer on a chip (MSOC) using floating MSOC voltages |
US20200152437A1 (en) | 2018-11-14 | 2020-05-14 | Northrop Grumman Systems Corporation | Tapered magnetic ion transport tunnel for particle collection |
US10755827B1 (en) | 2019-05-17 | 2020-08-25 | Northrop Grumman Systems Corporation | Radiation shield |
JP7276751B2 (ja) * | 2020-03-05 | 2023-05-18 | 新東工業株式会社 | ガス測定器及びガス測定方法 |
GB2622402A (en) * | 2022-09-14 | 2024-03-20 | Thermo Fisher Scient Bremen Gmbh | Simulating a mass spectrometer |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3955084A (en) * | 1974-09-09 | 1976-05-04 | California Institute Of Technology | Electro-optical detector for use in a wide mass range mass spectrometer |
DE3813641A1 (de) * | 1988-01-26 | 1989-08-03 | Finnigan Mat Gmbh | Doppelfokussierendes massenspektrometer und ms/ms-anordnung |
US5304799A (en) * | 1992-07-17 | 1994-04-19 | Monitor Group, Inc. | Cycloidal mass spectrometer and ionizer for use therein |
US5386115A (en) * | 1993-09-22 | 1995-01-31 | Westinghouse Electric Corporation | Solid state micro-machined mass spectrograph universal gas detection sensor |
US5401963A (en) * | 1993-11-01 | 1995-03-28 | Rosemount Analytical Inc. | Micromachined mass spectrometer |
-
1994
- 1994-10-07 US US08/320,474 patent/US5536939A/en not_active Expired - Lifetime
-
1995
- 1995-09-21 JP JP51258696A patent/JP3713557B2/ja not_active Expired - Lifetime
- 1995-09-21 WO PCT/US1995/011908 patent/WO1996011492A1/en active IP Right Grant
- 1995-09-21 EP EP95935011A patent/EP0784863B1/de not_active Expired - Lifetime
- 1995-09-21 DE DE69527432T patent/DE69527432T2/de not_active Expired - Lifetime
- 1995-09-21 CA CA002202060A patent/CA2202060C/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JP3713557B2 (ja) | 2005-11-09 |
CA2202060A1 (en) | 1996-04-18 |
EP0784863A1 (de) | 1997-07-23 |
EP0784863B1 (de) | 2002-07-17 |
JPH10512996A (ja) | 1998-12-08 |
WO1996011492A1 (en) | 1996-04-18 |
CA2202060C (en) | 2006-07-18 |
DE69527432T2 (de) | 2003-02-27 |
US5536939A (en) | 1996-07-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8328 | Change in the person/name/address of the agent |
Representative=s name: WIESE KONNERTH FISCHER PATENTANWAELTE PARTNERSCHAF |
|
8328 | Change in the person/name/address of the agent |
Representative=s name: SCHROETER LEHMANN FISCHER & NEUGEBAUER, 81479 MUEN |
|
R082 | Change of representative |
Ref document number: 784863 Country of ref document: EP Representative=s name: NEUGEBAUER, JUERGEN, DIPL.-PHYS.UNIV. M.A./SUN, DE |