JPH10512996A - 小型質量フィルタ - Google Patents
小型質量フィルタInfo
- Publication number
- JPH10512996A JPH10512996A JP8512586A JP51258696A JPH10512996A JP H10512996 A JPH10512996 A JP H10512996A JP 8512586 A JP8512586 A JP 8512586A JP 51258696 A JP51258696 A JP 51258696A JP H10512996 A JPH10512996 A JP H10512996A
- Authority
- JP
- Japan
- Prior art keywords
- mass
- mass filter
- filter
- ions
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 150000002500 ions Chemical class 0.000 claims abstract description 93
- 239000000758 substrate Substances 0.000 claims abstract description 15
- 239000004065 semiconductor Substances 0.000 claims abstract description 7
- 230000005672 electromagnetic field Effects 0.000 claims abstract description 6
- 230000005686 electrostatic field Effects 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 11
- 230000003287 optical effect Effects 0.000 claims description 7
- 230000005684 electric field Effects 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 238000009966 trimming Methods 0.000 claims description 4
- 239000007789 gas Substances 0.000 claims 5
- 238000001914 filtration Methods 0.000 claims 1
- 230000003068 static effect Effects 0.000 claims 1
- 238000010884 ion-beam technique Methods 0.000 description 15
- 238000001514 detection method Methods 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 238000000926 separation method Methods 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 235000012239 silicon dioxide Nutrition 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000007123 defense Effects 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005459 micromachining Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000012491 analyte Substances 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000013500 data storage Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000000752 ionisation method Methods 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 238000001819 mass spectrum Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000002366 time-of-flight method Methods 0.000 description 1
- 230000001988 toxicity Effects 0.000 description 1
- 231100000419 toxicity Toxicity 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/0013—Miniaturised spectrometers, e.g. having smaller than usual scale, integrated conventional components
- H01J49/0018—Microminiaturised spectrometers, e.g. chip-integrated devices, Micro-Electro-Mechanical Systems [MEMS]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/28—Static spectrometers
- H01J49/284—Static spectrometers using electrostatic and magnetic sectors with simple focusing, e.g. with parallel fields such as Aston spectrometer
- H01J49/286—Static spectrometers using electrostatic and magnetic sectors with simple focusing, e.g. with parallel fields such as Aston spectrometer with energy analysis, e.g. Castaing filter
- H01J49/288—Static spectrometers using electrostatic and magnetic sectors with simple focusing, e.g. with parallel fields such as Aston spectrometer with energy analysis, e.g. Castaing filter using crossed electric and magnetic fields perpendicular to the beam, e.g. Wien filter
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Tubes For Measurement (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Abstract
Description
Claims (1)
- 【特許請求の範囲】 1.サンプルガスを分析するためのソリッドステート型の質量分析器に用いられ る質量フィルタであって、前記質量フィルタは、半導体基板に設けられた空洞の 質量フィルタ部に配置され、前記質量フィルタは、前記空洞内に電磁場を発生さ せ、前記質量フィルタは、ガスイオン化器により発生された前記サンプルガスの イオン化された部分を質量/電荷比率によりフィルタ処理することを特徴する質 量フィルタ。 2.前記空洞は、イオン光学的な開口を更に含み、前記イオン光学的な開口は前 記ガスイオン化器と前記質量フィルタとの間に設けられ、10ミクロン幅の開口 が前記空洞に設けられて前記開口として作用することを特徴とする請求の範囲第 1項に記載の質量フィルタ。 3.入口と、前記入口に対してほぼ垂直に設けられた検出器配列体とを更に備え 、前記質量フィルタにより発生される前記電磁場は、前記イオンをして、円形軌 跡の限定されたセクタを横断させることを特徴とする請求の範囲第1項に記載の 質量フィルタ。 4.前記電磁場を発生させるための磁極面を更に備え、前記検出器配列体は前記 磁極面に対して傾斜関係に設けられていることを特徴とする請求の範囲第3項に 記載の質量フィルタ。 5.前記基板に設けられ、前記イオンの経路に対して垂直な磁場を発生させる永 久磁石を更に備えることを特徴とする請求の範囲第1項に記載の質量フィルタ。 6.2対の電極を更に備え、各前記電極対の各電極は、前記空洞の前記質量フィ ルタ部の対向壁に設けられることを特徴とする請求の範囲第5項に記載の質量フ ィルタ。 7.前記空洞の前記質量フィルタ部の頂壁および底壁に設けられた磁性膜と、前 記磁性膜の頂面に設けられた一対の電極とを更に備え、前記磁性膜は、前記イオ ンの経路に垂直な磁場を発生させることを特徴とする請求の範囲第1項に記載の 質量フィルタ。 8.前記基板の外側に設けられたヨークを有する永久磁石を更に備え、前記永久 磁石は、前記イオンの経路に対して垂直な磁場を発生させることを特徴とする請 求の範囲第1項の質量フィルタ。 9.前記ガスイオン化器と前記質量フィルタとの間に設けられた静電界アナライ ザを更に備えることを特徴とする請求の範囲第1項に記載の質量フィルタ。 10.前記イオンに対して静電界を印加する手段と、前記イオンに磁界を印加す る手段とを更に備えることを特徴とする請求の範囲第1項に記載の質量フィルタ 。 11.前記静電界を印加する手段は、前記イオンが前記磁界による作用を受ける 前に前記イオン同士をイオンの質量と電荷との比に応じて分離することを特徴と する請求の範囲第10項に記載の質量フィルタ。 12.前記磁界を印加するための手段の端に設けられた検出器配列体を更に備え ることを特徴とする請求の範囲第11項に記載の質量フィルタ。 13.前記空洞の前記質量フィルタ部の対向壁に設けられた一対のトリミング電 極を更に備え、前記トリミング電極は、質量分析計の製造中に形成されることを 特徴とする請求の範囲第1項に記載の質量フィルタ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/320,474 US5536939A (en) | 1993-09-22 | 1994-10-07 | Miniaturized mass filter |
US08/320,474 | 1994-10-07 | ||
PCT/US1995/011908 WO1996011492A1 (en) | 1994-10-07 | 1995-09-21 | Miniaturized mass filter |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH10512996A true JPH10512996A (ja) | 1998-12-08 |
JP3713557B2 JP3713557B2 (ja) | 2005-11-09 |
Family
ID=23246588
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP51258696A Expired - Lifetime JP3713557B2 (ja) | 1994-10-07 | 1995-09-21 | 小型質量フィルタ |
Country Status (6)
Country | Link |
---|---|
US (1) | US5536939A (ja) |
EP (1) | EP0784863B1 (ja) |
JP (1) | JP3713557B2 (ja) |
CA (1) | CA2202060C (ja) |
DE (1) | DE69527432T2 (ja) |
WO (1) | WO1996011492A1 (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011077054A (ja) * | 1999-07-21 | 2011-04-14 | Charles Stark Draper Lab Inc | 超小型非対称電界イオン移動度フィルタおよび検出システム |
JP2014506718A (ja) * | 2011-02-14 | 2014-03-17 | マサチューセッツ インスティテュート オブ テクノロジー | 質量分析の方法、装置、及びシステム |
WO2016017712A1 (ja) * | 2014-07-29 | 2016-02-04 | 俊 保坂 | 超小型質量分析装置および超小型粒子加速装置 |
WO2021176937A1 (ja) * | 2020-03-05 | 2021-09-10 | 新東工業株式会社 | ガス測定器及びガス測定方法 |
Families Citing this family (53)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5747815A (en) * | 1993-09-22 | 1998-05-05 | Northrop Grumman Corporation | Micro-miniature ionizer for gas sensor applications and method of making micro-miniature ionizer |
CN1124167C (zh) * | 1998-09-17 | 2003-10-15 | 阿德文生物科学公司 | 用于液体化学分析的集成小型化系统 |
KR100274871B1 (ko) * | 1998-11-12 | 2000-12-15 | 김순택 | 발광 화합물 및 이를 발색 재료로서 채용하고 있는 표시소자2 |
US6633031B1 (en) | 1999-03-02 | 2003-10-14 | Advion Biosciences, Inc. | Integrated monolithic microfabricated dispensing nozzle and liquid chromatography-electrospray system and method |
US7057168B2 (en) * | 1999-07-21 | 2006-06-06 | Sionex Corporation | Systems for differential ion mobility analysis |
US7157700B2 (en) * | 2001-06-30 | 2007-01-02 | Sionex Corporation | System for collection of data and identification of unknown ion species in an electric field |
US7381944B2 (en) * | 2004-04-28 | 2008-06-03 | Sionex Corporation | Systems and methods for ion species analysis with enhanced condition control and data interpretation |
US7399958B2 (en) | 1999-07-21 | 2008-07-15 | Sionex Corporation | Method and apparatus for enhanced ion mobility based sample analysis using various analyzer configurations |
US7005632B2 (en) * | 2002-04-12 | 2006-02-28 | Sionex Corporation | Method and apparatus for control of mobility-based ion species identification |
US7148477B2 (en) * | 1999-07-21 | 2006-12-12 | Sionex Corporation | System for trajectory-based ion species identification |
US7098449B1 (en) | 1999-07-21 | 2006-08-29 | The Charles Stark Draper Laboratory, Inc. | Spectrometer chip assembly |
US7129482B2 (en) * | 1999-07-21 | 2006-10-31 | Sionex Corporation | Explosives detection using differential ion mobility spectrometry |
US6815669B1 (en) * | 1999-07-21 | 2004-11-09 | The Charles Stark Draper Laboratory, Inc. | Longitudinal field driven ion mobility filter and detection system |
US6512224B1 (en) | 1999-07-21 | 2003-01-28 | The Charles Stark Draper Laboratory, Inc. | Longitudinal field driven field asymmetric ion mobility filter and detection system |
US6690004B2 (en) * | 1999-07-21 | 2004-02-10 | The Charles Stark Draper Laboratory, Inc. | Method and apparatus for electrospray-augmented high field asymmetric ion mobility spectrometry |
US6806463B2 (en) * | 1999-07-21 | 2004-10-19 | The Charles Stark Draper Laboratory, Inc. | Micromachined field asymmetric ion mobility filter and detection system |
US6815668B2 (en) | 1999-07-21 | 2004-11-09 | The Charles Stark Draper Laboratory, Inc. | Method and apparatus for chromatography-high field asymmetric waveform ion mobility spectrometry |
US6501074B1 (en) | 1999-10-19 | 2002-12-31 | Regents Of The University Of Minnesota | Double-focusing mass spectrometer apparatus and methods regarding same |
CA2395694C (en) | 1999-12-30 | 2006-11-21 | Advion Biosciences, Inc. | Multiple electrospray device, systems and methods |
EP1248949B1 (en) | 2000-01-18 | 2013-05-22 | Advion, Inc. | Electrospray device with array of separation columns and method for separation of fluidic samples |
US6831276B2 (en) | 2000-05-08 | 2004-12-14 | Philip S. Berger | Microscale mass spectrometric chemical-gas sensor |
EP1280595A4 (en) | 2000-05-08 | 2007-04-11 | Mass Sensors Inc | CHEMICAL GAS MASS SPECTROMETRIC SENSOR WITH REDUCED SCALE |
CA2452128A1 (en) * | 2001-06-30 | 2003-01-16 | Sionex Corporation | System for collection of data and identification of unknown ion species in an electric field |
US7119328B2 (en) * | 2001-06-30 | 2006-10-10 | Sionex Corporation | System for DMS peak resolution |
US7274015B2 (en) * | 2001-08-08 | 2007-09-25 | Sionex Corporation | Capacitive discharge plasma ion source |
US7091481B2 (en) | 2001-08-08 | 2006-08-15 | Sionex Corporation | Method and apparatus for plasma generation |
US6727496B2 (en) | 2001-08-14 | 2004-04-27 | Sionex Corporation | Pancake spectrometer |
GB2384908B (en) * | 2002-02-05 | 2005-05-04 | Microsaic Systems Ltd | Mass spectrometry |
US7122794B1 (en) * | 2002-02-21 | 2006-10-17 | Sionex Corporation | Systems and methods for ion mobility control |
GB2391694B (en) * | 2002-08-01 | 2006-03-01 | Microsaic Systems Ltd | Monolithic micro-engineered mass spectrometer |
AU2003298597A1 (en) | 2002-10-12 | 2004-05-25 | Sionex Corporation | NOx MONITOR USING DIFFERENTIAL MOBILITY SPECTROMETRY |
WO2005028973A2 (en) * | 2003-09-17 | 2005-03-31 | Sionex Corporation | Solid-state flow generator and related systems, applications, and methods |
CA2547389A1 (en) * | 2003-11-25 | 2005-06-09 | Sionex Corporation | Mobility based apparatus and methods using dispersion characteristics, sample fragmentation, and/or pressure control to improve analysis of a sample |
WO2005060696A2 (en) * | 2003-12-18 | 2005-07-07 | Sionex Corporation | Methods and apparatus for enhanced ion based sample detection using selective pre-separation and amplification |
WO2005067582A2 (en) * | 2004-01-13 | 2005-07-28 | Sionex Corporation | Methods and apparatus for enhanced sample identification based on combined analytical techniques |
US7456394B2 (en) * | 2004-02-02 | 2008-11-25 | Sionex Corporation | Compact sample analysis systems and related methods of using combined chromatography and mobility spectrometry techniques |
GB2411046B (en) * | 2004-02-12 | 2006-10-25 | Microsaic Systems Ltd | Mass spectrometer system |
US7057170B2 (en) * | 2004-03-12 | 2006-06-06 | Northrop Grumman Corporation | Compact ion gauge using micromachining and MISOC devices |
WO2006060807A1 (en) * | 2004-12-03 | 2006-06-08 | Sionex Corporation | Method and apparatus for enhanced ion based sample filtering and detection |
GB2422951B (en) * | 2005-02-07 | 2010-07-28 | Microsaic Systems Ltd | Integrated analytical device |
US7608818B2 (en) * | 2005-04-29 | 2009-10-27 | Sionex Corporation | Compact gas chromatography and ion mobility based sample analysis systems, methods, and devices |
US20070001114A1 (en) * | 2005-06-29 | 2007-01-04 | Goodley Paul C | Apparatus and method for ion capture and production |
GB2441943A (en) | 2005-07-26 | 2008-03-19 | Sionex Corp | Ultra compact ion mobility based analyzer system and method |
US7402799B2 (en) * | 2005-10-28 | 2008-07-22 | Northrop Grumman Corporation | MEMS mass spectrometer |
US20070272852A1 (en) * | 2006-01-26 | 2007-11-29 | Sionex Corporation | Differential mobility spectrometer analyzer and pre-filter apparatus, methods, and systems |
EP2126960B1 (en) | 2007-02-01 | 2019-03-13 | DH Technologies Development Pte. Ltd. | Differential mobility spectrometer pre-filter assembly for a mass spectrometer |
EP1959476A1 (de) * | 2007-02-19 | 2008-08-20 | Technische Universität Hamburg-Harburg | Massenspektrometer |
US7649171B1 (en) * | 2007-05-21 | 2010-01-19 | Northrop Grumman Corporation | Miniature mass spectrometer for the analysis of biological small molecules |
US9443698B2 (en) * | 2008-10-06 | 2016-09-13 | Axcelis Technologies, Inc. | Hybrid scanning for ion implantation |
US10319572B2 (en) * | 2017-09-28 | 2019-06-11 | Northrop Grumman Systems Corporation | Space ion analyzer with mass spectrometer on a chip (MSOC) using floating MSOC voltages |
US20200152437A1 (en) | 2018-11-14 | 2020-05-14 | Northrop Grumman Systems Corporation | Tapered magnetic ion transport tunnel for particle collection |
US10755827B1 (en) | 2019-05-17 | 2020-08-25 | Northrop Grumman Systems Corporation | Radiation shield |
GB2622402A (en) * | 2022-09-14 | 2024-03-20 | Thermo Fisher Scient Bremen Gmbh | Simulating a mass spectrometer |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3955084A (en) * | 1974-09-09 | 1976-05-04 | California Institute Of Technology | Electro-optical detector for use in a wide mass range mass spectrometer |
DE3813641A1 (de) * | 1988-01-26 | 1989-08-03 | Finnigan Mat Gmbh | Doppelfokussierendes massenspektrometer und ms/ms-anordnung |
US5304799A (en) * | 1992-07-17 | 1994-04-19 | Monitor Group, Inc. | Cycloidal mass spectrometer and ionizer for use therein |
US5386115A (en) * | 1993-09-22 | 1995-01-31 | Westinghouse Electric Corporation | Solid state micro-machined mass spectrograph universal gas detection sensor |
US5401963A (en) * | 1993-11-01 | 1995-03-28 | Rosemount Analytical Inc. | Micromachined mass spectrometer |
-
1994
- 1994-10-07 US US08/320,474 patent/US5536939A/en not_active Expired - Lifetime
-
1995
- 1995-09-21 JP JP51258696A patent/JP3713557B2/ja not_active Expired - Lifetime
- 1995-09-21 WO PCT/US1995/011908 patent/WO1996011492A1/en active IP Right Grant
- 1995-09-21 EP EP95935011A patent/EP0784863B1/en not_active Expired - Lifetime
- 1995-09-21 CA CA002202060A patent/CA2202060C/en not_active Expired - Lifetime
- 1995-09-21 DE DE69527432T patent/DE69527432T2/de not_active Expired - Lifetime
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011077054A (ja) * | 1999-07-21 | 2011-04-14 | Charles Stark Draper Lab Inc | 超小型非対称電界イオン移動度フィルタおよび検出システム |
JP2014506718A (ja) * | 2011-02-14 | 2014-03-17 | マサチューセッツ インスティテュート オブ テクノロジー | 質量分析の方法、装置、及びシステム |
WO2016017712A1 (ja) * | 2014-07-29 | 2016-02-04 | 俊 保坂 | 超小型質量分析装置および超小型粒子加速装置 |
US10249483B2 (en) | 2014-07-29 | 2019-04-02 | Takashi Hosaka | Ultra-compact mass analysis device and ultra-compact particle acceleration device |
US10804087B2 (en) | 2014-07-29 | 2020-10-13 | Takashi Hosaka | Ultra-compact mass analysis device and ultra-compact particle acceleration device |
WO2021176937A1 (ja) * | 2020-03-05 | 2021-09-10 | 新東工業株式会社 | ガス測定器及びガス測定方法 |
JP2021139766A (ja) * | 2020-03-05 | 2021-09-16 | 新東工業株式会社 | ガス測定器及びガス測定方法 |
Also Published As
Publication number | Publication date |
---|---|
EP0784863B1 (en) | 2002-07-17 |
EP0784863A1 (en) | 1997-07-23 |
US5536939A (en) | 1996-07-16 |
JP3713557B2 (ja) | 2005-11-09 |
DE69527432D1 (de) | 2002-08-22 |
WO1996011492A1 (en) | 1996-04-18 |
CA2202060C (en) | 2006-07-18 |
CA2202060A1 (en) | 1996-04-18 |
DE69527432T2 (de) | 2003-02-27 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP3713557B2 (ja) | 小型質量フィルタ | |
US5541408A (en) | Micromachined mass spectrometer | |
US5719393A (en) | Miniature quadrupole mass spectrometer array | |
US5962851A (en) | Multipole ion guide for mass spectrometry | |
US7550722B2 (en) | Focal plane detector assembly of a mass spectrometer | |
US5386115A (en) | Solid state micro-machined mass spectrograph universal gas detection sensor | |
US6992284B2 (en) | Ion mobility TOF/MALDI/MS using drift cell alternating high and low electrical field regions | |
US5492867A (en) | Method for manufacturing a miniaturized solid state mass spectrograph | |
US8101923B2 (en) | System and method for spatially-resolved chemical analysis using microplasma desorption and ionization of a sample | |
JP2006500751A (ja) | 調節可能イオン光学素子を備える電気セクタ飛行時間型質量分析計 | |
US20080017794A1 (en) | Coaxial ring ion trap | |
Freidhoff et al. | Chemical sensing using nonoptical microelectromechanical systems | |
JPS6110844A (ja) | 質量分析計および質量分析法 | |
EP0746872B1 (en) | Cycloidal mass spectrometer | |
WO2005089203A2 (en) | Compact ion gauge using micromachining and misoc devices | |
US6921906B2 (en) | Mass spectrometer | |
JP2006500757A (ja) | 電気セクタ時間飛行型タンデム質量分析計 | |
US6897439B1 (en) | Multipole ion guide for mass spectrometry | |
AU687960B2 (en) | Solid state micro-machined mass spectrograph universal gas detection sensor |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20041012 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20050107 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20050719 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20050805 |
|
A72 | Notification of change in name of applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A721 Effective date: 20050729 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080902 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090902 Year of fee payment: 4 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090902 Year of fee payment: 4 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090902 Year of fee payment: 4 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090902 Year of fee payment: 4 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090902 Year of fee payment: 4 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100902 Year of fee payment: 5 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110902 Year of fee payment: 6 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120902 Year of fee payment: 7 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120902 Year of fee payment: 7 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120902 Year of fee payment: 7 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120902 Year of fee payment: 7 |
|
RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: R3D02 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120902 Year of fee payment: 7 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130902 Year of fee payment: 8 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
EXPY | Cancellation because of completion of term |