DE69523393D1 - Förderer mit elektrostatischer levitation und seine elektroden zur elektrostatischen levitation - Google Patents

Förderer mit elektrostatischer levitation und seine elektroden zur elektrostatischen levitation

Info

Publication number
DE69523393D1
DE69523393D1 DE69523393T DE69523393T DE69523393D1 DE 69523393 D1 DE69523393 D1 DE 69523393D1 DE 69523393 T DE69523393 T DE 69523393T DE 69523393 T DE69523393 T DE 69523393T DE 69523393 D1 DE69523393 D1 DE 69523393D1
Authority
DE
Germany
Prior art keywords
electrostatic levitation
conveyor
electrodes
levitation
electrostatic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69523393T
Other languages
English (en)
Other versions
DE69523393T2 (de
Inventor
Toshiro Higuchi
Ju Jin
Manabu Kanemoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kanagawa Academy of Science and Technology
Mitsubishi Materials Corp
Original Assignee
Kanagawa Academy of Science and Technology
Mitsubishi Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kanagawa Academy of Science and Technology, Mitsubishi Materials Corp filed Critical Kanagawa Academy of Science and Technology
Publication of DE69523393D1 publication Critical patent/DE69523393D1/de
Application granted granted Critical
Publication of DE69523393T2 publication Critical patent/DE69523393T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G54/00—Non-mechanical conveyors not otherwise provided for
    • B65G54/02—Non-mechanical conveyors not otherwise provided for electrostatic, electric, or magnetic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H3/00—Separating articles from piles
    • B65H3/18—Separating articles from piles using electrostatic force
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H5/00—Feeding articles separated from piles; Feeding articles to machines
    • B65H5/004—Feeding articles separated from piles; Feeding articles to machines using electrostatic force
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
    • H01L21/6833—Details of electrostatic chucks
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N13/00—Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Non-Mechanical Conveyors (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
DE69523393T 1994-03-18 1995-03-17 Förderer mit elektrostatischer levitation und seine elektroden zur elektrostatischen levitation Expired - Fee Related DE69523393T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP6048175A JPH07257751A (ja) 1994-03-18 1994-03-18 静電浮上搬送装置及びその静電浮上用電極
PCT/JP1995/000470 WO1995025689A1 (fr) 1994-03-18 1995-03-17 Convoyeur a sustentation electrostatique et ses electrodes de sustentation electrostatique

Publications (2)

Publication Number Publication Date
DE69523393D1 true DE69523393D1 (de) 2001-11-29
DE69523393T2 DE69523393T2 (de) 2002-05-16

Family

ID=12796058

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69523393T Expired - Fee Related DE69523393T2 (de) 1994-03-18 1995-03-17 Förderer mit elektrostatischer levitation und seine elektroden zur elektrostatischen levitation

Country Status (5)

Country Link
US (1) US5789843A (de)
EP (1) EP0699606B1 (de)
JP (1) JPH07257751A (de)
DE (1) DE69523393T2 (de)
WO (1) WO1995025689A1 (de)

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JPH09330975A (ja) * 1996-06-11 1997-12-22 Nikon Corp 搬送装置
EP0866375A3 (de) 1997-03-17 2000-05-24 Nikon Corporation Vorrichtung zur Positionierung eines Artikels und damit versehener Belichtungsapparat
DE10038611C2 (de) * 2000-08-08 2003-08-07 Karlsruhe Forschzent Fördereinrichtung für den berührungslosen Transport von Bauteilen aus Kunststoff, Halbleitermaterial oder Metall
DE10062011B4 (de) * 2000-12-13 2005-02-24 Infineon Technologies Ag Halteeinrichtung
KR100750835B1 (ko) * 2001-01-19 2007-08-22 가부시키가이샤 알박 흡착장치
US6710507B2 (en) * 2001-12-20 2004-03-23 Texas Instruments Incorporated Digital control loop to solve instability of electrostatic drives beyond ⅓ gap limit
US7334443B2 (en) 2002-02-22 2008-02-26 Master Lock Company Llc Radio frequency electronic lock
TW200406088A (en) 2002-09-27 2004-04-16 Tsukuba Seiko Ltd Electrostatic holding device and electrostatic tweezers using same
JP4526759B2 (ja) * 2002-09-27 2010-08-18 筑波精工株式会社 静電保持装置及びそれを用いた搬送装置又はステージ
US6966882B2 (en) * 2002-11-25 2005-11-22 Tibion Corporation Active muscle assistance device and method
US6856067B2 (en) * 2003-02-21 2005-02-15 Robert Bosch Gmbh Device and method for electrostatically levitating a disk and method for using an electrostatic levitated disk as a sensor
US7239065B2 (en) * 2003-07-08 2007-07-03 Tibion Corporation Electrostatic actuator with fault tolerant electrode structure
WO2006022014A1 (ja) * 2004-08-27 2006-03-02 Tsukuba Seiko Ltd. 搬送検査装置及び搬送装置
US7811189B2 (en) * 2005-12-30 2010-10-12 Tibion Corporation Deflector assembly
US20080019061A1 (en) * 2006-07-21 2008-01-24 David Joel Maker Electrostatic 512kV rotator and oscillator propulsion system
US8353854B2 (en) 2007-02-14 2013-01-15 Tibion Corporation Method and devices for moving a body joint
JP2009028863A (ja) * 2007-07-27 2009-02-12 Ihi Corp 非接触搬送装置
WO2009099671A2 (en) 2008-02-08 2009-08-13 Tibion Corporation Multi-fit orthotic and mobility assistance apparatus
US20090306548A1 (en) 2008-06-05 2009-12-10 Bhugra Kern S Therapeutic method and device for rehabilitation
US8274244B2 (en) 2008-08-14 2012-09-25 Tibion Corporation Actuator system and method for extending a joint
US8058823B2 (en) 2008-08-14 2011-11-15 Tibion Corporation Actuator system with a multi-motor assembly for extending and flexing a joint
US8639455B2 (en) 2009-02-09 2014-01-28 Alterg, Inc. Foot pad device and method of obtaining weight data
US8970820B2 (en) * 2009-05-20 2015-03-03 Nikon Corporation Object exchange method, exposure method, carrier system, exposure apparatus, and device manufacturing method
DE102010003010B4 (de) * 2010-03-18 2017-05-04 manroland sheetfed GmbH Vorrichtung zum Fördern eines Bogens in einem Bogenausleger einer Bogendruckmaschine
CN103026479B (zh) * 2010-07-27 2016-02-24 株式会社爱发科 基板运送方法和基板运送系统
WO2014151584A1 (en) 2013-03-15 2014-09-25 Alterg, Inc. Orthotic device drive system and method
WO2015013142A1 (en) 2013-07-22 2015-01-29 Applied Materials, Inc. An electrostatic chuck for high temperature process applications
WO2015013143A1 (en) 2013-07-22 2015-01-29 Applied Materials, Inc. An end effector for transferring a substrate
JP6518666B2 (ja) 2013-08-05 2019-05-22 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 薄い基板をハンドリングするための静電キャリア
WO2015020791A1 (en) 2013-08-05 2015-02-12 Applied Materials, Inc. In-situ removable electrostatic chuck
US9460950B2 (en) 2013-12-06 2016-10-04 Applied Materials, Inc. Wafer carrier for smaller wafers and wafer pieces
DE102016206193A1 (de) 2016-04-13 2017-10-19 Trumpf Gmbh + Co. Kg Elektroadhäsionsgreifer mit fraktalen Elektroden
JP6760560B2 (ja) * 2016-08-29 2020-09-23 株式会社ダイヘン 搬送ロボット
US11360400B2 (en) 2017-05-19 2022-06-14 Massachusetts Institute Of Technology Transport system having a magnetically levitated transportation stage
US11277079B2 (en) * 2018-07-24 2022-03-15 Wisconsin Alumni Research Foundation Bearing-less electrostatic flywheel
CN109545731B (zh) * 2018-11-20 2021-12-28 合肥京东方显示技术有限公司 转移头及其制备方法、转移方法、转移装置
US12091313B2 (en) 2019-08-26 2024-09-17 The Research Foundation For The State University Of New York Electrodynamically levitated actuator
US11355368B2 (en) 2020-07-13 2022-06-07 Applied Materials, Inc. Decentralized substrate handling and processing system
US20230395409A1 (en) * 2020-11-13 2023-12-07 Massachusetts Institute Of Technology Reticle exchange device with reticle levitation

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3961000A (en) * 1972-11-28 1976-06-01 Altainer Incorporated Method of manufacturing a nesting or interlocking loose-fill cellular packing material
FR2543673B1 (fr) * 1983-04-01 1986-04-11 Sfim Appareil gyroscopique ou gyrometrique, notamment gyroaccelerometre, a suspension souple et sustentation electrostatique
US4943750A (en) * 1987-05-20 1990-07-24 Massachusetts Institute Of Technology Electrostatic micromotor
JPH02164288A (ja) * 1988-12-17 1990-06-25 Yaskawa Electric Mfg Co Ltd 非接触支持装置
US4965429A (en) * 1989-08-21 1990-10-23 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Adminstration Electrostatically suspended rotor for angular encoder
US5015906A (en) * 1989-11-03 1991-05-14 Princeton University Electrostatic levitation control system for micromechanical devices
EP0439000B1 (de) * 1990-01-25 1994-09-14 Applied Materials, Inc. Elektrostatische Klemmvorrichtung und Verfahren
JPH04372152A (ja) * 1991-06-20 1992-12-25 Nikon Corp 静電チャック装置
JPH056933A (ja) * 1991-06-27 1993-01-14 Kyocera Corp セラミツク製静電チヤツク
JP3278067B2 (ja) * 1991-07-15 2002-04-30 株式会社安川電機 静電浮上リニアモータの案内支持機構
JPH06143075A (ja) * 1992-11-02 1994-05-24 Nippon Steel Corp 静電吸着装置

Also Published As

Publication number Publication date
EP0699606A4 (de) 1997-12-17
EP0699606B1 (de) 2001-10-24
US5789843A (en) 1998-08-04
WO1995025689A1 (fr) 1995-09-28
EP0699606A1 (de) 1996-03-06
DE69523393T2 (de) 2002-05-16
JPH07257751A (ja) 1995-10-09

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee