DE69522721D1 - Mechanischer signalprozessor auf basis von mikromechanischen oszillatoren und intelligenten akustischen detektoren und darauf aufgebaute systeme - Google Patents

Mechanischer signalprozessor auf basis von mikromechanischen oszillatoren und intelligenten akustischen detektoren und darauf aufgebaute systeme

Info

Publication number
DE69522721D1
DE69522721D1 DE69522721T DE69522721T DE69522721D1 DE 69522721 D1 DE69522721 D1 DE 69522721D1 DE 69522721 T DE69522721 T DE 69522721T DE 69522721 T DE69522721 T DE 69522721T DE 69522721 D1 DE69522721 D1 DE 69522721D1
Authority
DE
Germany
Prior art keywords
signal processor
mechanical signal
acoustic detectors
intelligent acoustic
systems based
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69522721T
Other languages
English (en)
Other versions
DE69522721T2 (de
Inventor
Karl Binnig
Leopold Gueret
Heinrich Rohrer
Peter Vettiger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE69522721D1 publication Critical patent/DE69522721D1/de
Publication of DE69522721T2 publication Critical patent/DE69522721T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Micromachines (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
DE69522721T 1995-09-29 1995-09-29 Mechanischer signalprozessor auf basis von mikromechanischen oszillatoren und intelligenten akustischen detektoren und darauf aufgebaute systeme Expired - Fee Related DE69522721T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/IB1995/000817 WO1997013127A1 (en) 1995-09-29 1995-09-29 Mechanical signal processor based on micromechanical oscillators and intelligent acoustic detectors and systems based thereon

Publications (2)

Publication Number Publication Date
DE69522721D1 true DE69522721D1 (de) 2001-10-18
DE69522721T2 DE69522721T2 (de) 2002-07-04

Family

ID=11004374

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69522721T Expired - Fee Related DE69522721T2 (de) 1995-09-29 1995-09-29 Mechanischer signalprozessor auf basis von mikromechanischen oszillatoren und intelligenten akustischen detektoren und darauf aufgebaute systeme

Country Status (5)

Country Link
US (1) US6092422A (de)
EP (1) EP0852708B1 (de)
JP (1) JP2918066B2 (de)
DE (1) DE69522721T2 (de)
WO (1) WO1997013127A1 (de)

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Also Published As

Publication number Publication date
US6092422A (en) 2000-07-25
DE69522721T2 (de) 2002-07-04
JPH11502088A (ja) 1999-02-16
WO1997013127A1 (en) 1997-04-10
JP2918066B2 (ja) 1999-07-12
EP0852708A1 (de) 1998-07-15
EP0852708B1 (de) 2001-09-12

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8339 Ceased/non-payment of the annual fee