DE112007003547A5 - Mikromechanisches Schallemissionsmesssystem - Google Patents

Mikromechanisches Schallemissionsmesssystem Download PDF

Info

Publication number
DE112007003547A5
DE112007003547A5 DE112007003547T DE112007003547T DE112007003547A5 DE 112007003547 A5 DE112007003547 A5 DE 112007003547A5 DE 112007003547 T DE112007003547 T DE 112007003547T DE 112007003547 T DE112007003547 T DE 112007003547T DE 112007003547 A5 DE112007003547 A5 DE 112007003547A5
Authority
DE
Germany
Prior art keywords
measuring system
sound emission
emission measuring
micromechanical sound
micromechanical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE112007003547T
Other languages
English (en)
Inventor
Klaus-Dieter Müller
Dirk Scheibner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of DE112007003547A5 publication Critical patent/DE112007003547A5/de
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H13/00—Measuring resonant frequency
DE112007003547T 2007-04-16 2007-04-16 Mikromechanisches Schallemissionsmesssystem Ceased DE112007003547A5 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/DE2007/000657 WO2008125071A1 (de) 2007-04-16 2007-04-16 Mikromechanisches schallemissionsmesssystem

Publications (1)

Publication Number Publication Date
DE112007003547A5 true DE112007003547A5 (de) 2010-04-01

Family

ID=39432928

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112007003547T Ceased DE112007003547A5 (de) 2007-04-16 2007-04-16 Mikromechanisches Schallemissionsmesssystem

Country Status (2)

Country Link
DE (1) DE112007003547A5 (de)
WO (1) WO2008125071A1 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5518176B2 (ja) * 2009-03-31 2014-06-11 シーメンス アクチエンゲゼルシヤフト ビーム型エレメントを有する振動可能なマイクロメカニカルシステムおよびその製造方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2918066B2 (ja) * 1995-09-29 1999-07-12 インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン マイクロメカニカル発振器及びインテリジェント音響検出器に基づく機械的信号プロセッサ並びにそれに基づくシステム
US6359367B1 (en) * 1999-12-06 2002-03-19 Acuson Corporation Micromachined ultrasonic spiral arrays for medical diagnostic imaging
CA2352653A1 (en) * 2000-07-06 2002-01-06 Robert I. Macdonald Acoustically actuated mems devices
JP5222457B2 (ja) * 2005-09-26 2013-06-26 株式会社日立製作所 センサおよびセンサモジュール

Also Published As

Publication number Publication date
WO2008125071A1 (de) 2008-10-23

Similar Documents

Publication Publication Date Title
DE602007000251D1 (de) Verschiebungsmesssystem
IT1392662B1 (it) Sistema micromeccanico
DK2338287T3 (da) Transducersystem
FI20060131A0 (fi) Yhteysjärjestelmä
DE602007005970D1 (de) Bremssystem
DE602008003603D1 (de) Speicherplattensystem
DE602007003775D1 (de) Lautsprecher
DE602007010404D1 (de) Ultraschallsystem
DE602008004276D1 (de) Luftkanone
DK2323553T3 (da) System til måling af lydtryksniveau
DE112008003988A5 (de) Abstandsmesssystem
DE112009002556A5 (de) Navigationssystem
DE602008005054D1 (de) Ultraschallsystem
DE112008002988B8 (de) Impedanzmesssystem
FI20060905A0 (fi) Opastusjärjestelmä
DE602008005825D1 (de) Luftdruckwaffe
DK2147106T3 (da) Expressionssystem
DE502006007105D1 (de) Vibrationsmesssystem
DK2187175T3 (da) Måletransducer
DE112008001850A5 (de) Navigationssystem
BRPI0820115A2 (pt) Transdutor acústico
ATE454037T1 (de) Haltesystem
DE112007003547A5 (de) Mikromechanisches Schallemissionsmesssystem
DE502008000917D1 (de) Lautsprecherbox
LU91233B1 (de) Laderaumsystem

Legal Events

Date Code Title Description
8131 Rejection