DE69521147D1 - Reduktion des metallionensgehaltes in novolakharzen mit einem ionenaustauschharz in einem polaren lösungsmittel, und photoresistzusammensetzungen mit diesen novolaken - Google Patents
Reduktion des metallionensgehaltes in novolakharzen mit einem ionenaustauschharz in einem polaren lösungsmittel, und photoresistzusammensetzungen mit diesen novolakenInfo
- Publication number
- DE69521147D1 DE69521147D1 DE69521147T DE69521147T DE69521147D1 DE 69521147 D1 DE69521147 D1 DE 69521147D1 DE 69521147 T DE69521147 T DE 69521147T DE 69521147 T DE69521147 T DE 69521147T DE 69521147 D1 DE69521147 D1 DE 69521147D1
- Authority
- DE
- Germany
- Prior art keywords
- novolaces
- reduction
- polar solvent
- photoresist compositions
- ion exchange
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G8/00—Condensation polymers of aldehydes or ketones with phenols only
- C08G8/04—Condensation polymers of aldehydes or ketones with phenols only of aldehydes
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
- Y10S430/1055—Radiation sensitive composition or product or process of making
- Y10S430/106—Binder containing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/942—Masking
- Y10S438/948—Radiation resist
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Materials For Photolithography (AREA)
- Phenolic Resins Or Amino Resins (AREA)
- Processes Of Treating Macromolecular Substances (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/365,659 US5521052A (en) | 1994-12-30 | 1994-12-30 | Metal ion reduction in novolak resin using an ion exchange catalyst in a polar solvent and photoresists compositions therefrom |
PCT/US1995/016785 WO1996021176A1 (en) | 1994-12-30 | 1995-12-21 | Metal ion reduction in novolak resin using an ion exchange resin in a polar solvent and photoresists compositions therefrom |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69521147D1 true DE69521147D1 (de) | 2001-07-05 |
DE69521147T2 DE69521147T2 (de) | 2001-10-31 |
Family
ID=23439793
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69521147T Expired - Lifetime DE69521147T2 (de) | 1994-12-30 | 1995-12-21 | Reduktion des metallionensgehaltes in novolakharzen mit einem ionenaustauschharz in einem polaren lösungsmittel, und photoresistzusammensetzungen mit diesen novolaken |
Country Status (8)
Country | Link |
---|---|
US (1) | US5521052A (de) |
EP (1) | EP0800664B1 (de) |
JP (1) | JP3612077B2 (de) |
KR (1) | KR100394444B1 (de) |
CN (1) | CN1082677C (de) |
DE (1) | DE69521147T2 (de) |
TW (1) | TW354835B (de) |
WO (1) | WO1996021176A1 (de) |
Families Citing this family (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5830990A (en) * | 1992-07-10 | 1998-11-03 | Clariant Finance (Bvi) Limited | Low metals perfluorooctanoic acid and top anti-reflective coatings for photoresists |
SG52770A1 (en) * | 1992-07-10 | 1998-09-28 | Hoechst Celanese Corp | Metal ion reduction in top anti-reflective coatings for photoresists |
US5837417A (en) * | 1994-12-30 | 1998-11-17 | Clariant Finance (Bvi) Limited | Quinone diazide compositions containing low metals p-cresol oligomers and process of producing the composition |
US5739265A (en) * | 1995-09-20 | 1998-04-14 | Clariant Finance (Bvi) Ltd. | Fractionation of phenol formaldehyde condensate and photoresist compositions produced therefrom |
US5693749A (en) * | 1995-09-20 | 1997-12-02 | Hoechst Celanese Corporation | Fractionation of phenol formaldehyde condensate and photoresist compositions produced therefrom |
US5750031A (en) * | 1995-09-26 | 1998-05-12 | Clariant Finance (Bvi) Limited | Process for producing surfactant having a low metal ion level and developer produced therefrom |
US5656413A (en) * | 1995-09-28 | 1997-08-12 | Hoechst Celanese Corporation | Low metal ion containing 4,4'-[1-[4-[1-(4-Hydroxyphenyl)-1-methylethyl]phenyl]ethylidene]bisphe nol and photoresist compositions therefrom |
US5962183A (en) * | 1995-11-27 | 1999-10-05 | Clariant Finance (Bvi) Limited | Metal ion reduction in photoresist compositions by chelating ion exchange resin |
US5665517A (en) * | 1996-01-11 | 1997-09-09 | Hoechst Celanese Corporation | Acidic ion exchange resin as a catalyst to synthesize a novolak resin and photoresist composition therefrom |
CA2261862A1 (en) * | 1996-07-30 | 1998-02-05 | Cuno Incorporated | Filter sheet and process for purifying photoresist composition employing the filter sheet |
US6576139B1 (en) | 1996-07-30 | 2003-06-10 | Kenneth C. Hou | Process for purifying photoresist composition employing a filter sheet |
JP2001506769A (ja) * | 1996-12-18 | 2001-05-22 | クラリアント インターナショナル リミテッド | 重合体添加剤を含有するフォトレジスト組成物 |
US6562161B1 (en) | 1997-03-24 | 2003-05-13 | Daicel Chemical Industries, Ltd. | Gas generating compositions for air bag |
JP3978255B2 (ja) * | 1997-06-24 | 2007-09-19 | Azエレクトロニックマテリアルズ株式会社 | リソグラフィー用洗浄剤 |
US5936071A (en) * | 1998-02-02 | 1999-08-10 | Clariant Finance (Bvi) Limited | Process for making a photoactive compound and photoresist therefrom |
US5955570A (en) * | 1998-07-01 | 1999-09-21 | Clariant International Ltd. | Trace metal ion reduction by Ion Exchange Pack |
US6297352B1 (en) * | 1998-11-12 | 2001-10-02 | Clariant Finance (Bvi) Limited | Method of reducing metal ion content of film-forming resins using a liquid/liquid centrifuge |
US6121412A (en) * | 1998-11-12 | 2000-09-19 | Clariant Finance (Bvi) Limited | Preparation of fractionated novolak resins by a novel extraction technique |
US6296778B1 (en) * | 1999-03-31 | 2001-10-02 | Lam Research Corporation | Method and apparatus for simulating standard test wafers |
JP2004511814A (ja) * | 2000-10-13 | 2004-04-15 | クラリアント・インターナシヨナル・リミテッド | スタティックミキサー及び液−液遠心分離器を用いて樹脂を分画する方法 |
US6512087B1 (en) | 2000-10-13 | 2003-01-28 | Clariant Finance (Bvi) Limited | Fractionation of resins using a static mixer and a liquid-liquid centrifuge |
DE112004000806D2 (de) * | 2003-02-28 | 2006-01-19 | Fraunhofer Ges Forschung | Phenol urea/melamineformaldehydecopolymers, method for the production thereof and use of the same |
KR101222947B1 (ko) | 2005-06-30 | 2013-01-17 | 엘지디스플레이 주식회사 | 인쇄용 용제, 및 그를 이용한 인쇄용 패턴 조성물 및 패턴 형성방법 |
JP5002137B2 (ja) * | 2005-07-28 | 2012-08-15 | 富士フイルム株式会社 | 化学増幅型レジスト組成物及びその製造方法 |
CN101314573B (zh) * | 2008-07-08 | 2010-12-08 | 杭州格林达化学有限公司 | 离子交换树脂处理四甲基碳酸铵的方法 |
JP5541766B2 (ja) * | 2009-05-19 | 2014-07-09 | 株式会社ダイセル | フォトレジスト用高分子化合物の製造方法 |
JP6349943B2 (ja) * | 2014-05-13 | 2018-07-04 | 三菱ケミカル株式会社 | 化合物の精製方法、及び高分子化合物の製造方法 |
FR3021551A1 (fr) * | 2014-06-03 | 2015-12-04 | Arkema France | Procede d'elimination d'ions metalliques dans une solution organique visqueuse |
CN109426070A (zh) * | 2017-08-25 | 2019-03-05 | 京东方科技集团股份有限公司 | 光刻胶组合物、金属图案以及阵列基板的制备方法 |
KR102455810B1 (ko) | 2018-03-15 | 2022-10-18 | 엔테그리스, 아이엔씨. | 플루오르화 필터 막, 필터, 및 방법 |
Family Cites Families (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2929808A (en) * | 1956-04-04 | 1960-03-22 | Exxon Research Engineering Co | Removal of metal contaminants in polymerization processes |
US4033909A (en) * | 1974-08-13 | 1977-07-05 | Union Carbide Corporation | Stable phenolic resoles |
US4033910A (en) * | 1975-09-26 | 1977-07-05 | Union Carbide Corporation | Methyl formate as an adjuvant in phenolic foam formation |
GB1509354A (en) * | 1976-04-24 | 1978-05-04 | Maruzen Oil Co Ltd | Process for purifying halogenated alkenyl-phenol polymers |
US4452883A (en) * | 1983-05-17 | 1984-06-05 | Minnesota Mining And Manufacturing Company | Barrier resin for photothermographic color separation |
US4567130A (en) * | 1984-07-27 | 1986-01-28 | E. I. Du Pont De Nemours And Company | Process for etching single photopolymer layer utilizing chemically soluble pigments |
US4584261A (en) * | 1984-07-27 | 1986-04-22 | E. I. Du Pont De Nemours And Company | Process for etching nonphotosensitive layer under washoff photopolymer layer |
JPH063549B2 (ja) * | 1984-12-25 | 1994-01-12 | 株式会社東芝 | ポジ型フォトレジスト現像液組成物 |
US4636540A (en) * | 1985-07-08 | 1987-01-13 | Atlantic Richfield Company | Purification of polymer solutions |
JPS6232453A (ja) * | 1985-08-06 | 1987-02-12 | Tokyo Ohka Kogyo Co Ltd | ポジ型ホトレジスト用現像液 |
US4784937A (en) * | 1985-08-06 | 1988-11-15 | Tokyo Ohka Kogyo Co., Ltd. | Developing solution for positive-working photoresist comprising a metal ion free organic base and an anionic surfactant |
US4747954A (en) * | 1985-09-16 | 1988-05-31 | The Dow Chemical Company | Removal of metals from solutions |
JPS6472155A (en) * | 1987-09-12 | 1989-03-17 | Tama Kagaku Kogyo Kk | Developing solution for positive type photoresist |
GB8729510D0 (en) * | 1987-12-18 | 1988-02-03 | Ucb Sa | Photosensitive compositions containing phenolic resins & diazoquinone compounds |
JPH01228560A (ja) * | 1988-03-08 | 1989-09-12 | Hitachi Chem Co Ltd | 不純金属成分の低減された溶液の製造法 |
US5175078A (en) * | 1988-10-20 | 1992-12-29 | Mitsubishi Gas Chemical Company, Inc. | Positive type photoresist developer |
JPH03128903A (ja) * | 1989-07-13 | 1991-05-31 | Fine Kurei:Kk | 合成樹脂の改質方法および改質合成樹脂 |
DE3923426A1 (de) * | 1989-07-15 | 1991-01-17 | Hoechst Ag | Verfahren zur herstellung von novolak-harzen mit geringem metallionengehalt |
JPH0465415A (ja) * | 1990-07-04 | 1992-03-02 | Hitachi Chem Co Ltd | 不純金属成分の低減されたノボラツク樹脂の製造法 |
US5378802A (en) * | 1991-09-03 | 1995-01-03 | Ocg Microelectronic Materials, Inc. | Method for removing impurities from resist components and novolak resins |
JPH0768296B2 (ja) * | 1991-11-28 | 1995-07-26 | 丸善石油化学株式会社 | ビニルフェノール系重合体の金属除去方法 |
JPH0768297B2 (ja) * | 1991-11-28 | 1995-07-26 | 丸善石油化学株式会社 | フォトレジスト用ビニルフェノール系重合体の精製方法 |
DE69215383T2 (de) * | 1991-12-18 | 1997-04-30 | Hoechst Celanese Corp | Reduktion des metallionengehaltes in novolakharzen |
JP3184530B2 (ja) * | 1992-03-06 | 2001-07-09 | クラリアント・ファイナンス・(ビーブイアイ)・リミテッド | 金属イオンレベルが低いフォトレジスト |
SG52770A1 (en) * | 1992-07-10 | 1998-09-28 | Hoechst Celanese Corp | Metal ion reduction in top anti-reflective coatings for photoresists |
EP0671025B1 (de) * | 1992-11-25 | 1997-08-13 | Hoechst Celanese Corporation | Metallionenreduzierung in antireflexunterschichten für photoresist |
US5476750A (en) * | 1992-12-29 | 1995-12-19 | Hoechst Celanese Corporation | Metal ion reduction in the raw materials and using a Lewis base to control molecular weight of novolak resin to be used in positive photoresists |
US5286606A (en) * | 1992-12-29 | 1994-02-15 | Hoechst Celanese Corporation | Process for producing a developer having a low metal ion level |
WO1994014858A1 (en) * | 1992-12-29 | 1994-07-07 | Hoechst Celanese Corporation | Metal ion reduction in polyhydroxystyrene and photoresists |
US5350714A (en) * | 1993-11-08 | 1994-09-27 | Shipley Company Inc. | Point-of-use purification |
-
1994
- 1994-12-30 US US08/365,659 patent/US5521052A/en not_active Expired - Lifetime
-
1995
- 1995-12-13 TW TW084113293A patent/TW354835B/zh not_active IP Right Cessation
- 1995-12-21 DE DE69521147T patent/DE69521147T2/de not_active Expired - Lifetime
- 1995-12-21 JP JP52110496A patent/JP3612077B2/ja not_active Expired - Lifetime
- 1995-12-21 EP EP95944205A patent/EP0800664B1/de not_active Expired - Lifetime
- 1995-12-21 WO PCT/US1995/016785 patent/WO1996021176A1/en active IP Right Grant
- 1995-12-21 KR KR1019970704387A patent/KR100394444B1/ko not_active IP Right Cessation
- 1995-12-21 CN CN95197179.4A patent/CN1082677C/zh not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US5521052A (en) | 1996-05-28 |
JPH10512970A (ja) | 1998-12-08 |
CN1082677C (zh) | 2002-04-10 |
EP0800664B1 (de) | 2001-05-30 |
CN1171847A (zh) | 1998-01-28 |
EP0800664A1 (de) | 1997-10-15 |
WO1996021176A1 (en) | 1996-07-11 |
JP3612077B2 (ja) | 2005-01-19 |
KR100394444B1 (ko) | 2004-05-24 |
DE69521147T2 (de) | 2001-10-31 |
TW354835B (en) | 1999-03-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: AZ ELECTRONIC MATERIALS USA CORP. (N.D.GES.D. STAA |
|
8328 | Change in the person/name/address of the agent |
Representative=s name: PATENTANWAELTE ISENBRUCK BOESL HOERSCHLER WICHMANN HU |