DE69516274T2 - Feuchtigkeitssensor - Google Patents
FeuchtigkeitssensorInfo
- Publication number
- DE69516274T2 DE69516274T2 DE69516274T DE69516274T DE69516274T2 DE 69516274 T2 DE69516274 T2 DE 69516274T2 DE 69516274 T DE69516274 T DE 69516274T DE 69516274 T DE69516274 T DE 69516274T DE 69516274 T2 DE69516274 T2 DE 69516274T2
- Authority
- DE
- Germany
- Prior art keywords
- temperature
- resistor
- humidity sensor
- humidity
- output voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000001514 detection method Methods 0.000 claims description 28
- 239000010409 thin film Substances 0.000 claims description 7
- 230000005855 radiation Effects 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 description 14
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 11
- 239000010408 film Substances 0.000 description 8
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 8
- 101100311330 Schizosaccharomyces pombe (strain 972 / ATCC 24843) uap56 gene Proteins 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 101150018444 sub2 gene Proteins 0.000 description 5
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 229910052697 platinum Inorganic materials 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 229910052681 coesite Inorganic materials 0.000 description 2
- 229910052906 cristobalite Inorganic materials 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910052682 stishovite Inorganic materials 0.000 description 2
- 229910052905 tridymite Inorganic materials 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011540 sensing material Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
- G01N27/18—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by changes in the thermal conductivity of a surrounding material to be tested
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33897494A JPH08184575A (ja) | 1994-12-29 | 1994-12-29 | 湿度センサ |
| JP33897594A JP3343801B2 (ja) | 1994-12-29 | 1994-12-29 | 湿度センサ |
| PCT/JP1995/002727 WO1996021146A1 (fr) | 1994-12-29 | 1995-12-27 | Detecteur d'humidite |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69516274D1 DE69516274D1 (de) | 2000-05-18 |
| DE69516274T2 true DE69516274T2 (de) | 2000-08-31 |
Family
ID=26576277
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69516274T Expired - Fee Related DE69516274T2 (de) | 1994-12-29 | 1995-12-27 | Feuchtigkeitssensor |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US5837884A (enrdf_load_stackoverflow) |
| EP (1) | EP0749013B1 (enrdf_load_stackoverflow) |
| KR (1) | KR100230079B1 (enrdf_load_stackoverflow) |
| CN (1) | CN1099590C (enrdf_load_stackoverflow) |
| CA (1) | CA2184055C (enrdf_load_stackoverflow) |
| DE (1) | DE69516274T2 (enrdf_load_stackoverflow) |
| WO (1) | WO1996021146A1 (enrdf_load_stackoverflow) |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6295863B1 (en) * | 2000-07-26 | 2001-10-02 | Ford Global Technologies, Inc. | Method and apparatus for determining seal failure in a ball joint |
| WO2002042689A1 (en) * | 2000-11-21 | 2002-05-30 | Lg Electronics Inc. | Bolometric humidity sensor and cooker using the same and method for controlling the cooker |
| US6700389B2 (en) * | 2001-08-17 | 2004-03-02 | Delphi Technologies, Inc. | Temperature compensation of an inductive sensor |
| JP4538175B2 (ja) * | 2001-09-07 | 2010-09-08 | 本田技研工業株式会社 | 排気ガス浄化装置の状態判定装置 |
| JP3855950B2 (ja) * | 2003-03-19 | 2006-12-13 | 株式会社デンソー | 容量式湿度センサ |
| US6960744B2 (en) * | 2003-08-04 | 2005-11-01 | International Business Machines Corporation | Electrically tunable on-chip resistor |
| DK1810013T3 (da) * | 2004-10-18 | 2012-08-13 | Senmatic As | Fugtighedssensor og fremgangsmåde til fremstilling af samme |
| JP4976469B2 (ja) * | 2009-08-28 | 2012-07-18 | 日立オートモティブシステムズ株式会社 | 熱式湿度センサ |
| JP5055349B2 (ja) * | 2009-12-28 | 2012-10-24 | 日立オートモティブシステムズ株式会社 | 熱式ガスセンサ |
| JP6012515B2 (ja) | 2013-03-15 | 2016-10-25 | 日立オートモティブシステムズ株式会社 | ガスセンサ |
| US9164477B2 (en) | 2013-12-02 | 2015-10-20 | Xerox Corporation | Current leakage correction in humid environments |
| JP2015227822A (ja) * | 2014-06-02 | 2015-12-17 | Tdk株式会社 | 熱伝導式ガスセンサ |
| JP6160667B2 (ja) * | 2015-03-12 | 2017-07-12 | Tdk株式会社 | 熱伝導式ガスセンサ |
| EP3093659B1 (en) * | 2015-05-11 | 2017-06-14 | Siemens Aktiengesellschaft | Thermal conductivity detector and method for operating the same |
| WO2018047385A1 (ja) * | 2016-09-08 | 2018-03-15 | 株式会社村田製作所 | 風速測定装置および風量測定装置 |
| DE102016117088A1 (de) | 2016-09-12 | 2018-03-15 | Innovative Sensor Technology Ist Ag | Vorrichtung zur kapazitiven Bestimmung des Feuchtegehalts und Verfahren zum Betreiben der Vorrichtung |
| GB201709639D0 (en) | 2017-06-16 | 2017-08-02 | Univ Oxford Innovation Ltd | Sensing apparatus and sensing method |
| JP7070175B2 (ja) * | 2017-09-26 | 2022-05-18 | Tdk株式会社 | ガスセンサ |
| CN108896612A (zh) * | 2018-09-13 | 2018-11-27 | 中国科学院微电子研究所 | 微型湿度传感器 |
| US11397047B2 (en) * | 2019-04-10 | 2022-07-26 | Minebea Mitsumi Inc. | Moisture detector, moisture detection method, electronic device, and log output system |
| CN111007112B (zh) * | 2019-10-24 | 2020-10-16 | 上海交通大学 | 一种基于电导率法的在线测量蒸汽湿度的系统及方法 |
| CN112378961B (zh) * | 2020-11-24 | 2024-07-02 | 五邑大学 | 一种仿生柔性湿度传感器及电子皮肤湿度监测装置 |
| KR102755175B1 (ko) * | 2022-10-25 | 2025-01-21 | 한국쎄미텍 주식회사 | 서미스터를 이용한 이산화탄소 감지 센서 구조 |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4419021A (en) * | 1980-02-04 | 1983-12-06 | Matsushita Electric Industrial Co., Ltd. | Multi-functional sensing or measuring system |
| US4532797A (en) * | 1981-11-30 | 1985-08-06 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Instrumentation for sensing moisture content of material using a transient thermal pulse |
| CA1253592A (en) * | 1985-02-15 | 1989-05-02 | Tatsuya Tsuda | Heating apparatus with humidity sensor |
| DE3751125T2 (de) * | 1986-02-04 | 1995-08-10 | Sharp Kk | Feuchtigkeitsmesskreis. |
| DE3622307A1 (de) * | 1986-07-03 | 1988-01-14 | Draegerwerk Ag | Messeinrichtung zum nachweis des anteils von brennbaren gasen in luftgemischen |
| US4735082A (en) * | 1986-07-14 | 1988-04-05 | Hewlett-Packard Company | Pulse modulated thermal conductivity detector |
| US4911357A (en) * | 1988-04-11 | 1990-03-27 | Shibaura Electronics Company, Ltd. | Humidity controller utilizing absolute humidity |
| DE68928739T2 (de) * | 1988-12-29 | 1999-02-11 | Sharp K.K., Osaka | Detecteur d'humidite |
| US4918974A (en) * | 1989-02-06 | 1990-04-24 | Alcan International Limited | Method and apparatus for the measurement of the thermal conductivity of gases |
| US5081869A (en) * | 1989-02-06 | 1992-01-21 | Alcan International Limited | Method and apparatus for the measurement of the thermal conductivity of gases |
| AU657016B2 (en) * | 1991-12-16 | 1995-02-23 | Sharp Kabushiki Kaisha | A circuit for humidity detection |
| JP3106324B2 (ja) * | 1992-02-12 | 2000-11-06 | 株式会社トーキン | 熱伝導式絶対湿度センサ |
| JP2865939B2 (ja) * | 1992-04-10 | 1999-03-08 | シャープ株式会社 | センサー素子 |
| JPH06242048A (ja) * | 1993-02-19 | 1994-09-02 | Tokin Corp | 熱伝導式絶対湿度センサ |
| US5551283A (en) * | 1993-08-10 | 1996-09-03 | Ricoh Seiki Company, Ltd. | Atmosphere measuring device and flow sensor |
| JP2889909B2 (ja) * | 1993-08-10 | 1999-05-10 | リコーエレメックス株式会社 | 雰囲気計 |
-
1995
- 1995-12-27 KR KR1019960704759A patent/KR100230079B1/ko not_active Expired - Fee Related
- 1995-12-27 EP EP95942287A patent/EP0749013B1/en not_active Expired - Lifetime
- 1995-12-27 CA CA002184055A patent/CA2184055C/en not_active Expired - Fee Related
- 1995-12-27 DE DE69516274T patent/DE69516274T2/de not_active Expired - Fee Related
- 1995-12-27 WO PCT/JP1995/002727 patent/WO1996021146A1/ja active IP Right Grant
- 1995-12-27 US US08/702,602 patent/US5837884A/en not_active Expired - Lifetime
- 1995-12-27 CN CN95191843A patent/CN1099590C/zh not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| WO1996021146A1 (fr) | 1996-07-11 |
| DE69516274D1 (de) | 2000-05-18 |
| EP0749013B1 (en) | 2000-04-12 |
| EP0749013A1 (en) | 1996-12-18 |
| KR100230079B1 (ko) | 1999-12-01 |
| CA2184055C (en) | 2001-12-18 |
| EP0749013A4 (enrdf_load_stackoverflow) | 1997-01-29 |
| CN1099590C (zh) | 2003-01-22 |
| CA2184055A1 (en) | 1996-07-11 |
| KR970701347A (ko) | 1997-03-17 |
| CN1142263A (zh) | 1997-02-05 |
| US5837884A (en) | 1998-11-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition | ||
| 8327 | Change in the person/name/address of the patent owner |
Owner name: NEC TOKIN CORP., SENDAI, MIYAGI, JP Owner name: KIMURA, MITSUTERU, MIYAGI, JP |
|
| 8339 | Ceased/non-payment of the annual fee |