DE69515691D1 - Reinigung von aluminium werkstücken - Google Patents

Reinigung von aluminium werkstücken

Info

Publication number
DE69515691D1
DE69515691D1 DE69515691T DE69515691T DE69515691D1 DE 69515691 D1 DE69515691 D1 DE 69515691D1 DE 69515691 T DE69515691 T DE 69515691T DE 69515691 T DE69515691 T DE 69515691T DE 69515691 D1 DE69515691 D1 DE 69515691D1
Authority
DE
Germany
Prior art keywords
pct
cleaning
workpiece
sec
aluminum workpieces
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69515691T
Other languages
English (en)
Other versions
DE69515691T2 (de
Inventor
Peter Karl Ferdinand Limbach
Armin Kumpart
Nigel Cleaton Davies
Jonathan Ball
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Novelis Inc Canada
Original Assignee
Alcan International Ltd Canada
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=8217953&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69515691(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Alcan International Ltd Canada filed Critical Alcan International Ltd Canada
Application granted granted Critical
Publication of DE69515691D1 publication Critical patent/DE69515691D1/de
Publication of DE69515691T2 publication Critical patent/DE69515691T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F1/00—Electrolytic cleaning, degreasing, pickling or descaling
    • C25F1/02—Pickling; Descaling
    • C25F1/04—Pickling; Descaling in solution
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/34—Pretreatment of metallic surfaces to be electroplated
    • C25D5/42—Pretreatment of metallic surfaces to be electroplated of light metals
    • C25D5/44—Aluminium

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Engineering & Computer Science (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • ing And Chemical Polishing (AREA)
DE69515691T 1994-12-19 1995-12-18 Reinigung von aluminium werkstücken Expired - Lifetime DE69515691T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP94309501 1994-12-19
PCT/GB1995/002956 WO1996019596A1 (en) 1994-12-19 1995-12-18 Cleaning aluminium workpieces

Publications (2)

Publication Number Publication Date
DE69515691D1 true DE69515691D1 (de) 2000-04-20
DE69515691T2 DE69515691T2 (de) 2000-07-20

Family

ID=8217953

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69515691T Expired - Lifetime DE69515691T2 (de) 1994-12-19 1995-12-18 Reinigung von aluminium werkstücken

Country Status (9)

Country Link
US (1) US5997721A (de)
EP (1) EP0795048B1 (de)
JP (1) JP3647461B2 (de)
AT (1) ATE190678T1 (de)
AU (1) AU4267096A (de)
CA (1) CA2208109C (de)
DE (1) DE69515691T2 (de)
ES (1) ES2143085T3 (de)
WO (1) WO1996019596A1 (de)

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CN1304643C (zh) * 2001-04-20 2007-03-14 克里斯铝轧制品有限公司 镀覆和预处理铝件方法
DE50101194D1 (de) * 2001-06-20 2004-01-29 Wolf-Dieter Franz Verfahren zum Reinigen und Passivieren von Leichtmetalllegierungsoberflächen
ATE277207T1 (de) * 2001-10-11 2004-10-15 Franz Oberflaechentechnik Gmbh Beschichtungsverfahren für leichtmetalllegierungsoberflächen
US6994919B2 (en) 2002-01-31 2006-02-07 Corus Aluminium Walzprodukte Gmbh Brazing product and method of manufacturing a brazing product
US7294411B2 (en) 2002-01-31 2007-11-13 Aleris Aluminum Koblenz Gmbh Brazing product and method of its manufacture
WO2004035876A1 (de) * 2002-10-09 2004-04-29 Wolf-Dieter Franz Verfahren zum reinigen und passivieren von leichtmetalllegierungsoberflächen
US7056597B2 (en) * 2002-12-13 2006-06-06 Corus Aluminium Walzprodukte Gmbh Brazing sheet product and method of its manufacture
US7078111B2 (en) 2002-12-13 2006-07-18 Corus Aluminium Walzprodukte Gmbh Brazing sheet product and method of its manufacture
US20060157352A1 (en) * 2005-01-19 2006-07-20 Corus Aluminium Walzprodukte Gmbh Method of electroplating and pre-treating aluminium workpieces
BRPI0610826B8 (pt) 2005-05-19 2023-01-10 Hydro Aluminium Deutschland Gmbh Método de condicionamento da superfície de uma litofaixa consistindo de uma liga de alumínio
JP2007270217A (ja) * 2006-03-30 2007-10-18 Fujifilm Corp 電解処理方法及び装置、並びに平版印刷版の製造方法及び装置
CN101484322A (zh) * 2006-03-31 2009-07-15 美铝公司 生产平版印刷片材的制造方法
EP2024190B9 (de) * 2006-06-06 2012-09-05 Hydro Aluminium Rolled Products GmbH Verfahren zur konditionierung der oberfläche eines lithobands
EP1880861B1 (de) * 2006-07-21 2015-11-04 Hydro Aluminium Rolled Products GmbH Aluminiumband für lithografische Druckplattenträger
CN101591797B (zh) * 2008-05-30 2012-08-08 中芯国际集成电路制造(上海)有限公司 铝垫电化学刻蚀方法
WO2011059341A1 (en) * 2009-11-13 2011-05-19 Norsk Hydro Asa Process for production of magnesium containing aluminium strip or web material with improved adhesion
US9132436B2 (en) 2012-09-21 2015-09-15 Applied Materials, Inc. Chemical control features in wafer process equipment
US10256079B2 (en) 2013-02-08 2019-04-09 Applied Materials, Inc. Semiconductor processing systems having multiple plasma configurations
US9966240B2 (en) 2014-10-14 2018-05-08 Applied Materials, Inc. Systems and methods for internal surface conditioning assessment in plasma processing equipment
US9355922B2 (en) 2014-10-14 2016-05-31 Applied Materials, Inc. Systems and methods for internal surface conditioning in plasma processing equipment
US11637002B2 (en) 2014-11-26 2023-04-25 Applied Materials, Inc. Methods and systems to enhance process uniformity
US9741593B2 (en) 2015-08-06 2017-08-22 Applied Materials, Inc. Thermal management systems and methods for wafer processing systems
US9691645B2 (en) 2015-08-06 2017-06-27 Applied Materials, Inc. Bolted wafer chuck thermal management systems and methods for wafer processing systems
US10504700B2 (en) 2015-08-27 2019-12-10 Applied Materials, Inc. Plasma etching systems and methods with secondary plasma injection
US10504754B2 (en) 2016-05-19 2019-12-10 Applied Materials, Inc. Systems and methods for improved semiconductor etching and component protection
US9865484B1 (en) 2016-06-29 2018-01-09 Applied Materials, Inc. Selective etch using material modification and RF pulsing
US10629473B2 (en) 2016-09-09 2020-04-21 Applied Materials, Inc. Footing removal for nitride spacer
US10546729B2 (en) 2016-10-04 2020-01-28 Applied Materials, Inc. Dual-channel showerhead with improved profile
US10163696B2 (en) 2016-11-11 2018-12-25 Applied Materials, Inc. Selective cobalt removal for bottom up gapfill
US10026621B2 (en) 2016-11-14 2018-07-17 Applied Materials, Inc. SiN spacer profile patterning
US10431429B2 (en) 2017-02-03 2019-10-01 Applied Materials, Inc. Systems and methods for radial and azimuthal control of plasma uniformity
US10943834B2 (en) 2017-03-13 2021-03-09 Applied Materials, Inc. Replacement contact process
US11276590B2 (en) 2017-05-17 2022-03-15 Applied Materials, Inc. Multi-zone semiconductor substrate supports
US11276559B2 (en) 2017-05-17 2022-03-15 Applied Materials, Inc. Semiconductor processing chamber for multiple precursor flow
US10920320B2 (en) 2017-06-16 2021-02-16 Applied Materials, Inc. Plasma health determination in semiconductor substrate processing reactors
US10727080B2 (en) 2017-07-07 2020-07-28 Applied Materials, Inc. Tantalum-containing material removal
US10297458B2 (en) 2017-08-07 2019-05-21 Applied Materials, Inc. Process window widening using coated parts in plasma etch processes
US10903054B2 (en) 2017-12-19 2021-01-26 Applied Materials, Inc. Multi-zone gas distribution systems and methods
US11328909B2 (en) 2017-12-22 2022-05-10 Applied Materials, Inc. Chamber conditioning and removal processes
US10854426B2 (en) 2018-01-08 2020-12-01 Applied Materials, Inc. Metal recess for semiconductor structures
US10964512B2 (en) 2018-02-15 2021-03-30 Applied Materials, Inc. Semiconductor processing chamber multistage mixing apparatus and methods
US10679870B2 (en) 2018-02-15 2020-06-09 Applied Materials, Inc. Semiconductor processing chamber multistage mixing apparatus
TWI716818B (zh) 2018-02-28 2021-01-21 美商應用材料股份有限公司 形成氣隙的系統及方法
US10593560B2 (en) 2018-03-01 2020-03-17 Applied Materials, Inc. Magnetic induction plasma source for semiconductor processes and equipment
US10319600B1 (en) 2018-03-12 2019-06-11 Applied Materials, Inc. Thermal silicon etch
US10699879B2 (en) 2018-04-17 2020-06-30 Applied Materials, Inc. Two piece electrode assembly with gap for plasma control
US20190323127A1 (en) * 2018-04-19 2019-10-24 Applied Materials, Inc. Texturing and plating nickel on aluminum process chamber components
US10886137B2 (en) 2018-04-30 2021-01-05 Applied Materials, Inc. Selective nitride removal
US10872778B2 (en) 2018-07-06 2020-12-22 Applied Materials, Inc. Systems and methods utilizing solid-phase etchants
US10755941B2 (en) 2018-07-06 2020-08-25 Applied Materials, Inc. Self-limiting selective etching systems and methods
US10672642B2 (en) 2018-07-24 2020-06-02 Applied Materials, Inc. Systems and methods for pedestal configuration
EP3850129A1 (de) * 2018-09-11 2021-07-21 Novelis, Inc. Hochverformbare und thermisch behandelbare endlosspulen und verfahren zur herstellung davon
US11049755B2 (en) 2018-09-14 2021-06-29 Applied Materials, Inc. Semiconductor substrate supports with embedded RF shield
US10892198B2 (en) 2018-09-14 2021-01-12 Applied Materials, Inc. Systems and methods for improved performance in semiconductor processing
US11062887B2 (en) 2018-09-17 2021-07-13 Applied Materials, Inc. High temperature RF heater pedestals
US11417534B2 (en) 2018-09-21 2022-08-16 Applied Materials, Inc. Selective material removal
US11682560B2 (en) 2018-10-11 2023-06-20 Applied Materials, Inc. Systems and methods for hafnium-containing film removal
US11121002B2 (en) 2018-10-24 2021-09-14 Applied Materials, Inc. Systems and methods for etching metals and metal derivatives
US11437242B2 (en) 2018-11-27 2022-09-06 Applied Materials, Inc. Selective removal of silicon-containing materials
US11721527B2 (en) 2019-01-07 2023-08-08 Applied Materials, Inc. Processing chamber mixing systems
US10920319B2 (en) 2019-01-11 2021-02-16 Applied Materials, Inc. Ceramic showerheads with conductive electrodes

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1191437A (fr) * 1958-02-11 1959-10-20 Procédé de préparation de l'aluminium et de ses alliages pour le chromage
US3929591A (en) * 1974-08-26 1975-12-30 Polychrome Corp Novel lithographic plate and method
US4097342A (en) * 1975-05-16 1978-06-27 Alcan Research And Development Limited Electroplating aluminum stock
DE2949807B1 (de) * 1979-12-11 1981-07-16 Schenk Filterbau Gmbh, 7076 Waldstetten Elektrolytloesung zum Elektropolieren

Also Published As

Publication number Publication date
MX9704286A (es) 1997-09-30
CA2208109C (en) 2006-06-20
DE69515691T2 (de) 2000-07-20
EP0795048A1 (de) 1997-09-17
JPH10510881A (ja) 1998-10-20
WO1996019596A1 (en) 1996-06-27
AU4267096A (en) 1996-07-10
EP0795048B1 (de) 2000-03-15
ES2143085T3 (es) 2000-05-01
ATE190678T1 (de) 2000-04-15
JP3647461B2 (ja) 2005-05-11
CA2208109A1 (en) 1996-06-27
US5997721A (en) 1999-12-07

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: NOVELIS INC., TORONTO, ONTARIO, CA