DE69504347T2 - Elektronenmikroskop mit raman spektroskopie - Google Patents

Elektronenmikroskop mit raman spektroskopie

Info

Publication number
DE69504347T2
DE69504347T2 DE69504347T DE69504347T DE69504347T2 DE 69504347 T2 DE69504347 T2 DE 69504347T2 DE 69504347 T DE69504347 T DE 69504347T DE 69504347 T DE69504347 T DE 69504347T DE 69504347 T2 DE69504347 T2 DE 69504347T2
Authority
DE
Germany
Prior art keywords
specimen
pct
guide
microscope
light beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69504347T
Other languages
English (en)
Other versions
DE69504347D1 (de
Inventor
Blitterswijk Clemens Van
Hendrick Koerten
Jan Greve
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BIOMAT RES GROUP STICHTING AZL
Original Assignee
BIOMAT RES GROUP STICHTING AZL
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BIOMAT RES GROUP STICHTING AZL filed Critical BIOMAT RES GROUP STICHTING AZL
Publication of DE69504347D1 publication Critical patent/DE69504347D1/de
Application granted granted Critical
Publication of DE69504347T2 publication Critical patent/DE69504347T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical or photographic arrangements associated with the tube
    • H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
    • H01J37/228—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object whereby illumination and light collection take place in the same area of the discharge
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical or photographic arrangements associated with the tube
    • H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • G01N2021/653—Coherent methods [CARS]
    • G01N2021/656—Raman microprobe
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2445—Photon detectors for X-rays, light, e.g. photomultipliers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE69504347T 1994-01-24 1995-01-24 Elektronenmikroskop mit raman spektroskopie Expired - Lifetime DE69504347T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL9400111A NL9400111A (nl) 1994-01-24 1994-01-24 Elektronenmicroscoop met Ramanspectroscopie.
PCT/NL1995/000033 WO1995020242A1 (en) 1994-01-24 1995-01-24 Electron microscope with raman spectroscopy

Publications (2)

Publication Number Publication Date
DE69504347D1 DE69504347D1 (de) 1998-10-01
DE69504347T2 true DE69504347T2 (de) 1999-04-29

Family

ID=19863739

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69504347T Expired - Lifetime DE69504347T2 (de) 1994-01-24 1995-01-24 Elektronenmikroskop mit raman spektroskopie

Country Status (9)

Country Link
US (1) US5811804A (de)
EP (1) EP0766869B1 (de)
AT (1) ATE170331T1 (de)
AU (1) AU1427195A (de)
DE (1) DE69504347T2 (de)
DK (1) DK0766869T3 (de)
ES (1) ES2122530T3 (de)
NL (1) NL9400111A (de)
WO (1) WO1995020242A1 (de)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6885445B2 (en) 1998-05-09 2005-04-26 Renishaw Plc Electron microscope and spectroscopy system
SE0000555D0 (sv) * 2000-02-22 2000-02-22 Nanofactory Instruments Ab Mätanordning för transmissions-elektron-mikroskop
TWI283296B (en) * 2002-02-04 2007-07-01 Ortho Mcneil Pharm Inc Method and apparatus for obtaining molecular data from a pharmaceutical specimen
US6654118B2 (en) * 2002-02-04 2003-11-25 Ortho-Mcneil Pharmaceutical, Inc. Method and apparatus for obtaining molecular data from a pharmaceutical specimen
US20040254479A1 (en) * 2003-02-20 2004-12-16 John Fralick Bio-photonic feedback control software and database
US20050278184A1 (en) 2004-06-10 2005-12-15 John Fralick Bio-photonic feedback control software and database
US7154091B2 (en) * 2004-04-02 2006-12-26 California Institute Of Technology Method and system for ultrafast photoelectron microscope
US8004662B2 (en) * 2004-10-15 2011-08-23 Malvern Instruments Incorporated Pharmaceutical mixture evaluation
NL1027462C2 (nl) * 2004-11-09 2006-05-10 Koninkl Philips Electronics Nv Werkwijze voor het lokaliseren van fluorescente markers.
EP1953791A1 (de) * 2007-02-05 2008-08-06 FEI Company Vorrichtung zum Betrachten einer Probe mit einem Teilchenstrahl und einem optischen Mikroskop
DE102009015341A1 (de) * 2009-03-27 2010-10-07 Carl Zeiss Ag Verfahren und Vorrichtungen zur optischen Untersuchung von Proben
EP2469253A1 (de) * 2010-12-24 2012-06-27 HybriScan Technologies Holding BV System für die Elektronenmikroskopie und Raman-Spektroskopie
JP2013096750A (ja) * 2011-10-28 2013-05-20 Hamamatsu Photonics Kk Ｘ線分光検出装置
WO2013119612A1 (en) * 2012-02-07 2013-08-15 Board Of Trustees Of Michigan State University Electron microscope
US8872105B2 (en) 2013-02-19 2014-10-28 Fei Company In situ reactivation of fluorescence marker
EP2824445B1 (de) * 2013-07-08 2016-03-02 Fei Company Mikroskopie mit geladenen teilchen kombiniert mit raman-spektroskopie
DE102014103360A1 (de) 2014-03-12 2015-09-17 Leibniz-Institut Für Neue Materialien Gemeinnützige Gmbh Vorrichtung für die korrelative Raster-Transmissionselektronenmikroskopie (STEM) und Lichtmikroskopie
CZ305388B6 (cs) * 2014-03-26 2015-08-26 Tescan Orsay Holding, A.S. Analytický systém s Ramanovým mikroskopem a elektronovým mikroskopem
DE102014108331A1 (de) 2014-06-13 2015-12-17 Leibniz-Institut Für Neue Materialien Gemeinnützige Gesellschaft Mit Beschränkter Haftung Spezifische Proteinmarkierung sowie Verfahren zur Identifizierung der statistischen Verteilung der Proteinstöchiometrie
DE102014108825A1 (de) 2014-06-24 2015-12-24 Leibniz-Institut Für Neue Materialien Gemeinnützige Gesellschaft Mit Beschränkter Haftung Vorrichtung und Verfahren für die stöchiometrische Analyse von Proben
US11454540B2 (en) * 2019-07-12 2022-09-27 Biospex, Inc. Wearable spectroscopy using filtered sensor
US11326944B2 (en) 2019-07-12 2022-05-10 Biospex, Inc. Wearable spectrometer with filtered sensor
WO2021021656A1 (en) 2019-07-26 2021-02-04 The Board Of Trustees Of The Leland Stanford Junior University Sub-wavelength raman imaging with combined optical and electron excitation
CN112485235B (zh) * 2020-11-13 2022-02-18 中国科学院物理研究所 具备超快时间分辨光谱能力的透射电子显微镜样品杆系统和应用

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2055772A1 (de) * 1969-08-13 1971-04-30 Sopelem
DE3037983C2 (de) * 1980-10-08 1983-03-31 Fa. Carl Zeiss, 7920 Heidenheim Verfahren und Vorrichtung zur lichtinduzierten rastermikroskopischen Darstellung von Probenparametern in ihrer räumlichen Verteilung
GB2130433B (en) * 1982-03-05 1986-02-05 Jeol Ltd Scanning electron microscope with as optical microscope
FR2596863B1 (fr) * 1986-04-07 1988-06-17 Centre Nat Rech Scient Dispositif de microscopie analytique, propre a former a la fois une sonde raman et une sonde electronique
US4917462A (en) * 1988-06-15 1990-04-17 Cornell Research Foundation, Inc. Near field scanning optical microscopy
GB9112343D0 (en) * 1991-06-08 1991-07-31 Renishaw Transducer Syst Surface analysis apparatus
US4929041A (en) * 1989-01-09 1990-05-29 Johnston Pump/General Valve, Inc. Cathodoluminescence system for use in a scanning electron microscope including means for controlling optical fiber aperture
US5272330A (en) * 1990-11-19 1993-12-21 At&T Bell Laboratories Near field scanning optical microscope having a tapered waveguide
US5218195A (en) * 1991-06-25 1993-06-08 Fuji Photo Film Co., Ltd. Scanning microscope, scanning width detecting device, and magnification indicating apparatus
US5362964A (en) * 1993-07-30 1994-11-08 Electroscan Corporation Environmental scanning electron microscope
US5412211A (en) * 1993-07-30 1995-05-02 Electroscan Corporation Environmental scanning electron microscope
US5473157A (en) * 1994-03-22 1995-12-05 At&T Corp. Variable temperature near-field optical microscope

Also Published As

Publication number Publication date
EP0766869B1 (de) 1998-08-26
DK0766869T3 (da) 1999-05-25
US5811804A (en) 1998-09-22
EP0766869A1 (de) 1997-04-09
DE69504347D1 (de) 1998-10-01
NL9400111A (nl) 1995-09-01
WO1995020242A1 (en) 1995-07-27
ES2122530T3 (es) 1998-12-16
ATE170331T1 (de) 1998-09-15
AU1427195A (en) 1995-08-08

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