DE69418615T2 - Katalytischer gassensor - Google Patents

Katalytischer gassensor

Info

Publication number
DE69418615T2
DE69418615T2 DE69418615T DE69418615T DE69418615T2 DE 69418615 T2 DE69418615 T2 DE 69418615T2 DE 69418615 T DE69418615 T DE 69418615T DE 69418615 T DE69418615 T DE 69418615T DE 69418615 T2 DE69418615 T2 DE 69418615T2
Authority
DE
Germany
Prior art keywords
sensing structure
pct
substrate
electrically conductive
conductive track
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69418615T
Other languages
English (en)
Other versions
DE69418615D1 (de
Inventor
De Vyver James Van
Marysia Brodalka
Michael Howden
Ian Leith
Rosalyn Pennefather
Jeremy Wallis
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MICROCHIP Ltd Pty
Original Assignee
MICROCHIP Ltd Pty
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MICROCHIP Ltd Pty filed Critical MICROCHIP Ltd Pty
Publication of DE69418615D1 publication Critical patent/DE69418615D1/de
Application granted granted Critical
Publication of DE69418615T2 publication Critical patent/DE69418615T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
    • G01N27/16—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by burning or catalytic oxidation of surrounding material to be tested, e.g. of gas
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00—Investigating or analyzing materials by the use of thermal means
    • G01N25/20—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity
    • G01N25/22—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on combustion or catalytic oxidation, e.g. of components of gas mixtures
    • G01N25/28—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on combustion or catalytic oxidation, e.g. of components of gas mixtures the rise in temperature of the gases resulting from combustion being measured directly
    • G01N25/30—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on combustion or catalytic oxidation, e.g. of components of gas mixtures the rise in temperature of the gases resulting from combustion being measured directly using electric temperature-responsive elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/122—Circuits particularly adapted therefor, e.g. linearising circuits

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Pathology (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
  • Measuring Oxygen Concentration In Cells (AREA)
DE69418615T 1993-10-08 1994-10-10 Katalytischer gassensor Expired - Fee Related DE69418615T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
ZA937479 1993-10-08
PCT/GB1994/002231 WO1995010770A1 (en) 1993-10-08 1994-10-10 A catalytic gas sensor

Publications (2)

Publication Number Publication Date
DE69418615D1 DE69418615D1 (de) 1999-06-24
DE69418615T2 true DE69418615T2 (de) 1999-09-16

Family

ID=25583298

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69418615T Expired - Fee Related DE69418615T2 (de) 1993-10-08 1994-10-10 Katalytischer gassensor

Country Status (8)

Country Link
US (1) US5902556A (de)
EP (1) EP0722565B1 (de)
AT (1) ATE180329T1 (de)
AU (1) AU7820194A (de)
CA (1) CA2173612A1 (de)
DE (1) DE69418615T2 (de)
WO (1) WO1995010770A1 (de)
ZA (1) ZA948200B (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3035040A1 (de) * 2014-12-18 2016-06-22 Dräger Safety AG & Co. KGaA Gassensor, messelement für einen gassensor und verfahren zur herstellung eines messelementes

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JP3494508B2 (ja) * 1995-06-26 2004-02-09 日本碍子株式会社 可燃性ガスセンサ、可燃性ガス濃度の測定方法及び触媒劣化検知方法
EP0822578B1 (de) * 1996-07-31 2003-10-08 STMicroelectronics S.r.l. Verfahren zur Herstellung von integrierten Halbleiteranordnungen mit chemoresistivem Gasmikrosensor
EP0882978A1 (de) 1997-06-04 1998-12-09 STMicroelectronics S.r.l. Integrierte Halbleitervorrichtung mit einem auf chemischer Widerstandsfähigkeit beruhenden Microgassensor und Verfahren zu deren Herstellung
US6248249B1 (en) * 1997-07-15 2001-06-19 Silverbrook Research Pty Ltd. Method of manufacture of a Lorenz diaphragm electromagnetic ink jet printer
US6079873A (en) * 1997-10-20 2000-06-27 The United States Of America As Represented By The Secretary Of Commerce Micron-scale differential scanning calorimeter on a chip
GB9819160D0 (en) * 1998-09-02 1998-10-28 City Tech Pellistor
US6344174B1 (en) * 1999-01-25 2002-02-05 Mine Safety Appliances Company Gas sensor
US6418784B1 (en) 1999-10-08 2002-07-16 Ford Global Technologies, Inc. Combined combustible gas sensor and temperature detector
KR20010037655A (ko) * 1999-10-19 2001-05-15 이진경 마이크로머시닝 기술에 의해 제조되는 저전력형 세라믹 가스센서 및 그 제조방법
GB2361997A (en) * 2000-05-04 2001-11-07 Bw Technologies Ltd Combustible gas detection
DE10029012C2 (de) 2000-06-13 2002-06-06 Amtec Gmbh Mikrostruktur und Verfahren zu deren Herstellung
EP1245528A1 (de) * 2001-03-27 2002-10-02 Delta Danish Electronics, Light & Acoustics Ein einstückiges flexibles Mikrosystem und Verfahren zu dessen Herstellung
US7479255B2 (en) * 2001-11-15 2009-01-20 Riken Keiki Co., Ltd. Gas sensor
FR2835316B1 (fr) * 2002-01-28 2004-09-17 Dgtec Detecteur de gaz sur substrat mince
US6812708B2 (en) * 2002-06-04 2004-11-02 Scott Technologies, Inc. Combustible-gas measuring instrument
US7389672B2 (en) * 2004-01-27 2008-06-24 H2Scan Corporation Method and apparatus for thermal isolation of a gas sensor
US7249490B2 (en) * 2004-01-27 2007-07-31 H2Scan, Llc Isolated gas sensor configuration
GB2415047B (en) * 2004-06-09 2008-01-02 Schlumberger Holdings Electro-chemical sensor
DE102005029841B4 (de) * 2004-07-28 2013-09-05 Robert Bosch Gmbh Mikromechanischer Drucksensor mit beheiztem Passivierungsmittel und Verfahren zu seiner Steuerung
EP1820005B1 (de) * 2004-11-24 2019-01-09 Sensirion Holding AG Verfahren zur selektiven auftragung einer schicht auf ein strukturiertes substrat durch verwendung eines temperaturgradienten im substrat
US20080098799A1 (en) * 2006-10-25 2008-05-01 Kirk Donald W Hydrogen and/or Oxygen Sensor
JP5144090B2 (ja) * 2007-02-26 2013-02-13 シチズンホールディングス株式会社 接触燃焼式ガスセンサ及び接触燃焼式ガスセンサの製造方法
KR20090064693A (ko) * 2007-12-17 2009-06-22 한국전자통신연구원 마이크로 가스 센서 및 그 제작 방법
ITMI20120276A1 (it) * 2012-02-24 2013-08-25 St Microelectronics Srl Reattore per la generazione di energia mediante reazioni lenr (low energy nuclear reactions) tra idrogeno e metalli di transizione e relativo metodo di generazione dell¿energia
RU2510499C1 (ru) * 2012-10-29 2014-03-27 Закрытое акционерное общество "Производственное объединение "Электроточприбор" Способ измерения концентрации метана и устройство для осуществления этого способа
WO2014128615A1 (en) * 2013-02-22 2014-08-28 Indian Institute Of Science A cmos chip compatible gas sensor
EP2806266B1 (de) * 2013-05-23 2017-06-14 Honeywell International Inc. Pellistor mit Einzelelement, der unempfindlich gegenüber internen und externen Störungen ist
JP6385743B2 (ja) * 2013-07-16 2018-09-05 地方独立行政法人東京都立産業技術研究センター マイクロヒータ
DE102013217465A1 (de) * 2013-09-02 2015-03-05 Continental Automotive Gmbh Sensor zur Detektion oxidierbarer Gase
KR101489891B1 (ko) * 2013-10-16 2015-02-04 한국해양대학교 산학협력단 인듐 주석 산화물 박막 센서를 이용한 해상 유류 및 위험유해물질 유출 감지장치
JP2016151472A (ja) * 2015-02-17 2016-08-22 ヤマハファインテック株式会社 接触燃焼式ガスセンサ
US10234412B2 (en) 2016-11-04 2019-03-19 Msa Technology, Llc Identification of combustible gas species via pulsed operation of a combustible gas sensor
CN107941857A (zh) * 2017-10-18 2018-04-20 苏州慧闻纳米科技有限公司 一种传感器芯片及其制备方法
US10900922B2 (en) 2018-07-17 2021-01-26 Msa Technology, Llc Power reduction in combustible gas sensors
WO2020117472A2 (en) 2018-12-03 2020-06-11 Carrier Corporation Combustible gas sensor
US11543396B2 (en) * 2019-06-11 2023-01-03 Msa Technology, Llc Gas sensor with separate contaminant detection element
CN110501086B (zh) * 2019-08-01 2020-09-25 电子科技大学 一种柔性温度传感器及其制备方法
US11049788B2 (en) 2019-10-18 2021-06-29 Microsoft Technology Licensing, Llc Integrated circuit chip device with thermal control
US11703473B2 (en) 2019-12-11 2023-07-18 Msa Technology, Llc Operation of combustible gas sensor in a dynamic mode with a constant resistance setpoint
DE102021111431A1 (de) 2020-06-29 2021-12-30 Dräger Safety AG & Co. KGaA Überwachungssystem
DE102022102969A1 (de) * 2021-02-22 2022-08-25 Dräger Safety AG & Co. KGaA Gasdetektionsvorrichtung mit einem Detektor und einem Kompensator und Gasdetektionsverfahren mit einer solchen Gasdetektionsvorrichtung

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JPS5991350A (ja) * 1982-11-17 1984-05-26 Toyota Central Res & Dev Lab Inc 薄膜酸素センサ
JPS60243549A (ja) * 1984-05-05 1985-12-03 ゲゼルシヤフト、フユール、ゲレーテバウ、ミツト、ベシユレンクテル、ハフツング ガスの触媒燃焼用のセンサの製造方法
US4935289A (en) * 1986-09-18 1990-06-19 Kabushiki Kaisha Toshiba Gas sensor and method for production thereof
DE3844023A1 (de) * 1988-12-27 1990-06-28 Hartmann & Braun Ag Sensor zur bestimmung der gaskonzentration in einem gasgemisch durch messung der waermetoenung
JP2849395B2 (ja) * 1989-02-15 1999-01-20 株式会社リコー ガスセンサの駆動方法
CN1019331B (zh) * 1989-08-11 1992-12-02 法国煤矿公司 薄膜细丝型传感器及其制造方法和应用
GB2238617A (en) * 1989-11-28 1991-06-05 Eev Ltd Detector for flammable gases
DE4008150A1 (de) * 1990-03-14 1991-09-19 Fraunhofer Ges Forschung Katalytischer gassensor
DE4423289C1 (de) * 1994-07-02 1995-11-02 Karlsruhe Forschzent Gassensor für reduzierende oder oxidierende Gase

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3035040A1 (de) * 2014-12-18 2016-06-22 Dräger Safety AG & Co. KGaA Gassensor, messelement für einen gassensor und verfahren zur herstellung eines messelementes

Also Published As

Publication number Publication date
US5902556A (en) 1999-05-11
DE69418615D1 (de) 1999-06-24
EP0722565A1 (de) 1996-07-24
CA2173612A1 (en) 1995-04-20
ATE180329T1 (de) 1999-06-15
ZA948200B (en) 1995-06-12
AU7820194A (en) 1995-05-04
WO1995010770A1 (en) 1995-04-20
EP0722565B1 (de) 1999-05-19

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee