FR2835316B1 - Detecteur de gaz sur substrat mince - Google Patents

Detecteur de gaz sur substrat mince

Info

Publication number
FR2835316B1
FR2835316B1 FR0200968A FR0200968A FR2835316B1 FR 2835316 B1 FR2835316 B1 FR 2835316B1 FR 0200968 A FR0200968 A FR 0200968A FR 0200968 A FR0200968 A FR 0200968A FR 2835316 B1 FR2835316 B1 FR 2835316B1
Authority
FR
France
Prior art keywords
gas detector
thin substrate
thin
substrate
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0200968A
Other languages
English (en)
Other versions
FR2835316A1 (fr
Inventor
Guy Baret
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DGTec SAS
Original Assignee
DGTec SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by DGTec SAS filed Critical DGTec SAS
Priority to FR0200968A priority Critical patent/FR2835316B1/fr
Priority to EP20030712282 priority patent/EP1470415A2/fr
Priority to AU2003216961A priority patent/AU2003216961A1/en
Priority to PCT/FR2003/000246 priority patent/WO2003065026A2/fr
Publication of FR2835316A1 publication Critical patent/FR2835316A1/fr
Application granted granted Critical
Publication of FR2835316B1 publication Critical patent/FR2835316B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/122—Circuits particularly adapted therefor, e.g. linearising circuits

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
FR0200968A 2002-01-28 2002-01-28 Detecteur de gaz sur substrat mince Expired - Fee Related FR2835316B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR0200968A FR2835316B1 (fr) 2002-01-28 2002-01-28 Detecteur de gaz sur substrat mince
EP20030712282 EP1470415A2 (fr) 2002-01-28 2003-01-27 Detecteur de gaz sur substrat mince
AU2003216961A AU2003216961A1 (en) 2002-01-28 2003-01-27 Gas detector on a thin substrate
PCT/FR2003/000246 WO2003065026A2 (fr) 2002-01-28 2003-01-27 Detecteur de gaz sur substrat mince

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0200968A FR2835316B1 (fr) 2002-01-28 2002-01-28 Detecteur de gaz sur substrat mince

Publications (2)

Publication Number Publication Date
FR2835316A1 FR2835316A1 (fr) 2003-08-01
FR2835316B1 true FR2835316B1 (fr) 2004-09-17

Family

ID=27619678

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0200968A Expired - Fee Related FR2835316B1 (fr) 2002-01-28 2002-01-28 Detecteur de gaz sur substrat mince

Country Status (4)

Country Link
EP (1) EP1470415A2 (fr)
AU (1) AU2003216961A1 (fr)
FR (1) FR2835316B1 (fr)
WO (1) WO2003065026A2 (fr)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01109250A (ja) * 1987-10-22 1989-04-26 Toshiba Corp ガスセンサ
DE69418615T2 (de) * 1993-10-08 1999-09-16 Microchip (Proprietary) Ltd., Pretoria Katalytischer gassensor
GB9405899D0 (en) * 1994-03-24 1994-05-11 Pima Sensors Inc Gas sensor and sensing device
GB9526393D0 (en) * 1995-12-22 1996-02-21 Capteur Sensors & Analysers Gas sensing
DE19549146A1 (de) * 1995-12-29 1997-07-03 Siemens Ag Gassensor
RU2114422C1 (ru) * 1997-04-15 1998-06-27 Научно-информационный центр проблем интеллектуальной собственности Полупроводниковый датчик газов
GB9926174D0 (en) * 1999-11-04 2000-01-12 Capteur Sensors & Analysers Gas sensors

Also Published As

Publication number Publication date
EP1470415A2 (fr) 2004-10-27
AU2003216961A1 (en) 2003-09-02
WO2003065026A2 (fr) 2003-08-07
FR2835316A1 (fr) 2003-08-01
WO2003065026A3 (fr) 2004-03-25

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Legal Events

Date Code Title Description
CA Change of address
ST Notification of lapse

Effective date: 20070930