WO2003065026A3 - Detecteur de gaz sur substrat mince - Google Patents

Detecteur de gaz sur substrat mince Download PDF

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Publication number
WO2003065026A3
WO2003065026A3 PCT/FR2003/000246 FR0300246W WO03065026A3 WO 2003065026 A3 WO2003065026 A3 WO 2003065026A3 FR 0300246 W FR0300246 W FR 0300246W WO 03065026 A3 WO03065026 A3 WO 03065026A3
Authority
WO
WIPO (PCT)
Prior art keywords
substrate
gas detector
thin substrate
ranges
covered
Prior art date
Application number
PCT/FR2003/000246
Other languages
English (en)
Other versions
WO2003065026A2 (fr
Inventor
Guy Baret
Original Assignee
Dgtec
Guy Baret
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dgtec, Guy Baret filed Critical Dgtec
Priority to AU2003216961A priority Critical patent/AU2003216961A1/en
Priority to EP20030712282 priority patent/EP1470415A2/fr
Publication of WO2003065026A2 publication Critical patent/WO2003065026A2/fr
Publication of WO2003065026A3 publication Critical patent/WO2003065026A3/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/122—Circuits particularly adapted therefor, e.g. linearising circuits

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

Une électrode de chauffage (2) est disposée sur une face d'un substrat (1), des électrodes de mesure (6) et une couche sensible (8) étant disposées sur la face opposée. Le substrat (1) a une épaisseur comprise entre 30 µm et 1,1 mm et est en verre ou en vitro-céramique, contenant moins de 2% de métaux alcalins. Une électrode de mesure de température (3), destinée à contrôler la température de surface du substrat (1), est déposée sur l'une des deux faces. La face du substrat (1) portant l'électrode de chauffage (2) peut être recouverte d'une couche de protection (9) et/ou d'une couche d'isolation thermique (10) de porosité comprise entre 40 et 70%. La face du substrat qui porte les électrodes de mesure (6) et la couche sensible (8), peut être recouverte d'une couche d'isolation thermique (11) de porosité comprise entre 40 et 70%.
PCT/FR2003/000246 2002-01-28 2003-01-27 Detecteur de gaz sur substrat mince WO2003065026A2 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
AU2003216961A AU2003216961A1 (en) 2002-01-28 2003-01-27 Gas detector on a thin substrate
EP20030712282 EP1470415A2 (fr) 2002-01-28 2003-01-27 Detecteur de gaz sur substrat mince

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0200968A FR2835316B1 (fr) 2002-01-28 2002-01-28 Detecteur de gaz sur substrat mince
FR02/00968 2002-01-28

Publications (2)

Publication Number Publication Date
WO2003065026A2 WO2003065026A2 (fr) 2003-08-07
WO2003065026A3 true WO2003065026A3 (fr) 2004-03-25

Family

ID=27619678

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/FR2003/000246 WO2003065026A2 (fr) 2002-01-28 2003-01-27 Detecteur de gaz sur substrat mince

Country Status (4)

Country Link
EP (1) EP1470415A2 (fr)
AU (1) AU2003216961A1 (fr)
FR (1) FR2835316B1 (fr)
WO (1) WO2003065026A2 (fr)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0313390A2 (fr) * 1987-10-22 1989-04-26 Kabushiki Kaisha Toshiba Capteur de gaz et son procédé de fabrication
EP0674171A1 (fr) * 1994-03-24 1995-09-27 PIMA Sensors, Inc. Capteur de gaz et dispositif de mesure
RU2114422C1 (ru) * 1997-04-15 1998-06-27 Научно-информационный центр проблем интеллектуальной собственности Полупроводниковый датчик газов
US5840255A (en) * 1995-12-29 1998-11-24 Siemens Aktiengesellschaft Gas sensor
US5902556A (en) * 1993-10-08 1999-05-11 Microchip (Proprietary) Limited Catalytic gas sensor
US5918261A (en) * 1995-12-22 1999-06-29 Capteur Sensors & Analysers, Ltd. Multi-electrode gas sensors and methods of making and using them
WO2001033205A1 (fr) * 1999-11-04 2001-05-10 Capteur Sensors And Analysers Limited Capteurs de gaz a semi-conducteurs

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0313390A2 (fr) * 1987-10-22 1989-04-26 Kabushiki Kaisha Toshiba Capteur de gaz et son procédé de fabrication
US5902556A (en) * 1993-10-08 1999-05-11 Microchip (Proprietary) Limited Catalytic gas sensor
EP0674171A1 (fr) * 1994-03-24 1995-09-27 PIMA Sensors, Inc. Capteur de gaz et dispositif de mesure
US5918261A (en) * 1995-12-22 1999-06-29 Capteur Sensors & Analysers, Ltd. Multi-electrode gas sensors and methods of making and using them
US5840255A (en) * 1995-12-29 1998-11-24 Siemens Aktiengesellschaft Gas sensor
RU2114422C1 (ru) * 1997-04-15 1998-06-27 Научно-информационный центр проблем интеллектуальной собственности Полупроводниковый датчик газов
WO2001033205A1 (fr) * 1999-11-04 2001-05-10 Capteur Sensors And Analysers Limited Capteurs de gaz a semi-conducteurs

Also Published As

Publication number Publication date
FR2835316B1 (fr) 2004-09-17
WO2003065026A2 (fr) 2003-08-07
EP1470415A2 (fr) 2004-10-27
FR2835316A1 (fr) 2003-08-01
AU2003216961A1 (en) 2003-09-02

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