DE69417376T2 - Hochauflösendes und Hochgeschwindigkeits-Filmdickemessverfahren und Vorrichtung dazu - Google Patents

Hochauflösendes und Hochgeschwindigkeits-Filmdickemessverfahren und Vorrichtung dazu

Info

Publication number
DE69417376T2
DE69417376T2 DE69417376T DE69417376T DE69417376T2 DE 69417376 T2 DE69417376 T2 DE 69417376T2 DE 69417376 T DE69417376 T DE 69417376T DE 69417376 T DE69417376 T DE 69417376T DE 69417376 T2 DE69417376 T2 DE 69417376T2
Authority
DE
Germany
Prior art keywords
resolution
film thickness
measuring method
thickness measuring
device therefor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69417376T
Other languages
English (en)
Other versions
DE69417376D1 (de
Inventor
John S Huizinga
John J Costello Iii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Co
Original Assignee
Minnesota Mining and Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Minnesota Mining and Manufacturing Co filed Critical Minnesota Mining and Manufacturing Co
Publication of DE69417376D1 publication Critical patent/DE69417376D1/de
Application granted granted Critical
Publication of DE69417376T2 publication Critical patent/DE69417376T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0691—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of objects while moving

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE69417376T 1993-12-21 1994-12-17 Hochauflösendes und Hochgeschwindigkeits-Filmdickemessverfahren und Vorrichtung dazu Expired - Fee Related DE69417376T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/171,106 US5506407A (en) 1993-12-21 1993-12-21 High resolution high speed film measuring apparatus and method

Publications (2)

Publication Number Publication Date
DE69417376D1 DE69417376D1 (de) 1999-04-29
DE69417376T2 true DE69417376T2 (de) 1999-11-11

Family

ID=22622552

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69417376T Expired - Fee Related DE69417376T2 (de) 1993-12-21 1994-12-17 Hochauflösendes und Hochgeschwindigkeits-Filmdickemessverfahren und Vorrichtung dazu

Country Status (6)

Country Link
US (1) US5506407A (de)
EP (1) EP0660075B1 (de)
JP (1) JPH07234109A (de)
KR (1) KR950019636A (de)
CA (1) CA2136506A1 (de)
DE (1) DE69417376T2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10019789B4 (de) * 1999-04-22 2005-11-17 Electronic Systems S.P.A. Vorrichtung und Verfahren zum Messen der Dicke von Folienmaterial während des Vorschubs

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10104684A1 (de) * 2001-02-02 2002-08-08 Creat Stefan Kipp Kg Schichtdickenmeßverfahren an einem Werkstück
US20040046969A1 (en) * 2002-09-10 2004-03-11 Honeywell International Inc. System and method for monitoring thin film deposition on optical substrates
WO2009069075A2 (en) * 2007-11-29 2009-06-04 Nxp B.V. Method of and device for determining and controlling the distance between an integrated circuit and a substrate
KR100955964B1 (ko) * 2008-03-26 2010-05-04 이종국 이형필름 검사장치
US8553228B2 (en) 2011-09-30 2013-10-08 3M Innovative Properties Company Web inspection calibration system and related methods
KR101893771B1 (ko) * 2012-05-10 2018-08-31 삼성전자주식회사 3d 정보 처리 장치 및 방법
CN110078872B (zh) * 2013-09-16 2021-11-26 科勒克斯有限责任公司 包含聚合物基体和核壳纳米颗粒的复合材料系统、其制备方法及其应用
KR102287586B1 (ko) * 2017-05-31 2021-08-10 (주)아모레퍼시픽 화장료의 두께 측정 장치 및 방법

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3737234A (en) * 1970-12-17 1973-06-05 Shimadzu Corp Spectrophotometer for measurement of derivative spectra
GB1382081A (en) * 1972-03-14 1975-01-29 Ici Ltd Transmission spectra
DE2252527A1 (de) * 1972-10-26 1974-05-02 Messerschmitt Boelkow Blohm Verfahren zur schichtdickenbestimmung organischer methylverbindungen
US4027161A (en) * 1976-04-05 1977-05-31 Industrial Nucleonics Corporation Minimizing wave interference effects on the measurement of thin films having specular surfaces using infrared radiation
JPS58103604A (ja) * 1981-12-16 1983-06-20 Teijin Ltd フイルムの厚さ測定方法及び測定装置
JPS6073406A (ja) * 1983-09-30 1985-04-25 Kurabo Ind Ltd 赤外線厚み計
US4672196A (en) * 1984-02-02 1987-06-09 Canino Lawrence S Method and apparatus for measuring properties of thin materials using polarized light
JPS61133810A (ja) * 1984-12-05 1986-06-21 Hiyuutec:Kk 厚さ測定方法
US4954719A (en) * 1988-09-07 1990-09-04 Harrel, Inc. Sheet thickness gauging method and system with auto calibration
JP2743974B2 (ja) * 1992-06-29 1998-04-28 川崎製鉄株式会社 金属粉末射出成形法における脱脂された成形体の炭素量及び酸素量の制御方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10019789B4 (de) * 1999-04-22 2005-11-17 Electronic Systems S.P.A. Vorrichtung und Verfahren zum Messen der Dicke von Folienmaterial während des Vorschubs

Also Published As

Publication number Publication date
DE69417376D1 (de) 1999-04-29
JPH07234109A (ja) 1995-09-05
CA2136506A1 (en) 1995-06-22
EP0660075A2 (de) 1995-06-28
KR950019636A (ko) 1995-07-24
EP0660075A3 (de) 1996-06-26
US5506407A (en) 1996-04-09
EP0660075B1 (de) 1999-03-24

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee