DE69417109T2 - Wärmetauscher - Google Patents
WärmetauscherInfo
- Publication number
- DE69417109T2 DE69417109T2 DE69417109T DE69417109T DE69417109T2 DE 69417109 T2 DE69417109 T2 DE 69417109T2 DE 69417109 T DE69417109 T DE 69417109T DE 69417109 T DE69417109 T DE 69417109T DE 69417109 T2 DE69417109 T2 DE 69417109T2
- Authority
- DE
- Germany
- Prior art keywords
- heat exchanger
- degrees
- exchanger according
- container
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000126 substance Substances 0.000 claims description 43
- 239000007788 liquid Substances 0.000 claims description 38
- 238000001816 cooling Methods 0.000 claims description 26
- 238000000034 method Methods 0.000 claims description 21
- 239000000463 material Substances 0.000 claims description 19
- 230000008569 process Effects 0.000 claims description 19
- 239000007787 solid Substances 0.000 claims description 13
- 125000006850 spacer group Chemical group 0.000 claims description 11
- 238000010438 heat treatment Methods 0.000 claims description 9
- 238000011109 contamination Methods 0.000 claims description 6
- 238000009413 insulation Methods 0.000 claims description 6
- 239000010935 stainless steel Substances 0.000 claims description 6
- 229910001220 stainless steel Inorganic materials 0.000 claims description 6
- 238000012546 transfer Methods 0.000 claims description 6
- 230000007704 transition Effects 0.000 claims description 6
- 238000005219 brazing Methods 0.000 claims description 4
- -1 polyethylene terephthalate Polymers 0.000 claims description 4
- 230000000694 effects Effects 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 229920000728 polyester Polymers 0.000 claims description 3
- 239000011343 solid material Substances 0.000 claims description 3
- 229920000139 polyethylene terephthalate Polymers 0.000 claims description 2
- 239000005020 polyethylene terephthalate Substances 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 85
- 239000000443 aerosol Substances 0.000 description 74
- 238000004140 cleaning Methods 0.000 description 43
- 239000002245 particle Substances 0.000 description 32
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 28
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 18
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 16
- 239000000356 contaminant Substances 0.000 description 16
- 229910052786 argon Inorganic materials 0.000 description 14
- 238000004519 manufacturing process Methods 0.000 description 14
- 239000001569 carbon dioxide Substances 0.000 description 9
- 229910002092 carbon dioxide Inorganic materials 0.000 description 9
- 238000010926 purge Methods 0.000 description 9
- 230000015572 biosynthetic process Effects 0.000 description 8
- 238000012545 processing Methods 0.000 description 8
- 235000012431 wafers Nutrition 0.000 description 8
- 229910052757 nitrogen Inorganic materials 0.000 description 7
- 229910000679 solder Inorganic materials 0.000 description 6
- 239000008188 pellet Substances 0.000 description 5
- 230000004888 barrier function Effects 0.000 description 4
- 238000004377 microelectronic Methods 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 229920003023 plastic Polymers 0.000 description 3
- 239000011253 protective coating Substances 0.000 description 3
- 239000004809 Teflon Substances 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 2
- 239000012298 atmosphere Substances 0.000 description 2
- 239000012159 carrier gas Substances 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000012459 cleaning agent Substances 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000000155 melt Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000005453 pelletization Methods 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 238000007711 solidification Methods 0.000 description 2
- 230000008023 solidification Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000003085 diluting agent Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 238000011010 flushing procedure Methods 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
- 239000003517 fume Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000383 hazardous chemical Substances 0.000 description 1
- 231100000206 health hazard Toxicity 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- 230000003442 weekly effect Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J1/00—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures
- F25J1/02—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures requiring the use of refrigeration, e.g. of helium or hydrogen ; Details and kind of the refrigeration system used; Integration with other units or processes; Controlling aspects of the process
- F25J1/0243—Start-up or control of the process; Details of the apparatus used; Details of the refrigerant compression system used
- F25J1/0257—Construction and layout of liquefaction equipments, e.g. valves, machines
- F25J1/0275—Construction and layout of liquefaction equipments, e.g. valves, machines adapted for special use of the liquefaction unit, e.g. portable or transportable devices
- F25J1/0276—Laboratory or other miniature devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0064—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by temperature changes
- B08B7/0092—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by temperature changes by cooling
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/02—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by distortion, beating, or vibration of the surface to be cleaned
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D1/00—Heat-exchange apparatus having stationary conduit assemblies for one heat-exchange medium only, the media being in contact with different sides of the conduit wall, in which the other heat-exchange medium is a large body of fluid, e.g. domestic or motor car radiators
- F28D1/06—Heat-exchange apparatus having stationary conduit assemblies for one heat-exchange medium only, the media being in contact with different sides of the conduit wall, in which the other heat-exchange medium is a large body of fluid, e.g. domestic or motor car radiators with the heat-exchange conduits forming part of, or being attached to, the tank containing the body of fluid
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D20/00—Heat storage plants or apparatus in general; Regenerative heat-exchange apparatus not covered by groups F28D17/00 or F28D19/00
- F28D20/0056—Heat storage plants or apparatus in general; Regenerative heat-exchange apparatus not covered by groups F28D17/00 or F28D19/00 using solid heat storage material
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2290/00—Other details not covered by groups F25J2200/00 - F25J2280/00
- F25J2290/42—Modularity, pre-fabrication of modules, assembling and erection, horizontal layout, i.e. plot plan, and vertical arrangement of parts of the cryogenic unit, e.g. of the cold box
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D21/00—Heat-exchange apparatus not covered by any of the groups F28D1/00 - F28D20/00
- F28D2021/0019—Other heat exchangers for particular applications; Heat exchange systems not otherwise provided for
- F28D2021/0033—Other heat exchangers for particular applications; Heat exchange systems not otherwise provided for for cryogenic applications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/14—Thermal energy storage
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Clinical Laboratory Science (AREA)
- Cleaning In General (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Heat-Exchange Devices With Radiators And Conduit Assemblies (AREA)
- Coating Apparatus (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US08/076,051 US5400603A (en) | 1993-06-14 | 1993-06-14 | Heat exchanger |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69417109D1 DE69417109D1 (de) | 1999-04-22 |
| DE69417109T2 true DE69417109T2 (de) | 1999-10-14 |
Family
ID=22129640
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69417109T Expired - Lifetime DE69417109T2 (de) | 1993-06-14 | 1994-05-06 | Wärmetauscher |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US5400603A (enExample) |
| EP (1) | EP0633443B1 (enExample) |
| JP (1) | JP2765676B2 (enExample) |
| DE (1) | DE69417109T2 (enExample) |
| TW (1) | TW253976B (enExample) |
Families Citing this family (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5512106A (en) * | 1993-01-27 | 1996-04-30 | Sumitomo Heavy Industries, Ltd. | Surface cleaning with argon |
| EP0713071B1 (en) * | 1994-11-15 | 1999-06-16 | International Business Machines Corporation | Heat exchanger |
| US5810942A (en) * | 1996-09-11 | 1998-09-22 | Fsi International, Inc. | Aerodynamic aerosol chamber |
| US5942037A (en) * | 1996-12-23 | 1999-08-24 | Fsi International, Inc. | Rotatable and translatable spray nozzle |
| US5961732A (en) * | 1997-06-11 | 1999-10-05 | Fsi International, Inc | Treating substrates by producing and controlling a cryogenic aerosol |
| US6036786A (en) * | 1997-06-11 | 2000-03-14 | Fsi International Inc. | Eliminating stiction with the use of cryogenic aerosol |
| US6527865B1 (en) | 1997-09-11 | 2003-03-04 | Applied Materials, Inc. | Temperature controlled gas feedthrough |
| US6258170B1 (en) | 1997-09-11 | 2001-07-10 | Applied Materials, Inc. | Vaporization and deposition apparatus |
| ES2223195T3 (es) * | 1999-01-29 | 2005-02-16 | Norsk Hydro Asa | Colector para intercambiador de calor. |
| WO2001002108A1 (en) * | 1999-07-06 | 2001-01-11 | Semitool, Inc. | Fluid heating system for processing semiconductor materials |
| US6536450B1 (en) | 1999-07-07 | 2003-03-25 | Semitool, Inc. | Fluid heating system for processing semiconductor materials |
| KR100385431B1 (ko) * | 2000-09-19 | 2003-05-27 | 주식회사 케이씨텍 | 표면 세정용 에어로졸 생성 시스템 |
| JP3980416B2 (ja) * | 2002-06-17 | 2007-09-26 | 住友重機械工業株式会社 | エアロゾル洗浄装置、及び、その制御方法 |
| JP4118194B2 (ja) * | 2003-06-02 | 2008-07-16 | 横河電機株式会社 | 洗浄装置 |
| US7264679B2 (en) * | 2004-02-11 | 2007-09-04 | Applied Materials, Inc. | Cleaning of chamber components |
| US7112541B2 (en) * | 2004-05-06 | 2006-09-26 | Applied Materials, Inc. | In-situ oxide capping after CVD low k deposition |
| US20060005955A1 (en) * | 2004-07-12 | 2006-01-12 | Orr Troy J | Heat exchanger apparatus and methods for controlling the temperature of a high purity, re-circulating liquid |
| US7273823B2 (en) * | 2005-06-03 | 2007-09-25 | Applied Materials, Inc. | Situ oxide cap layer development |
| US7654010B2 (en) * | 2006-02-23 | 2010-02-02 | Tokyo Electron Limited | Substrate processing system, substrate processing method, and storage medium |
| CN201839457U (zh) * | 2010-05-24 | 2011-05-18 | 小田(中山)实业有限公司 | 发热器以及即热式电热水机 |
| US9328063B2 (en) | 2012-02-29 | 2016-05-03 | Mitsubishi Rayon Co., Ltd. | Method for producing acrylonitrile |
| CN104136412B (zh) | 2012-02-29 | 2016-12-28 | 三菱丽阳株式会社 | 丙烯腈的制造方法 |
| JP2020018993A (ja) * | 2018-08-03 | 2020-02-06 | 三菱重工業株式会社 | 洗浄装置、表面処理装置および洗浄方法 |
| EP4403517A4 (en) * | 2021-09-14 | 2025-04-16 | Irbis Technology LLC | METHOD, DEVICE AND PLANT FOR THE PRODUCTION OF CARBON DIOXIDE GRANULES |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2852232A (en) * | 1953-03-30 | 1958-09-16 | Gen Precision Lab Inc | Heat exchanger |
| US4241592A (en) * | 1977-10-03 | 1980-12-30 | Schlumberger Technology Corporation | Cryostat for borehole sonde employing semiconductor detector |
| AU533206B2 (en) * | 1979-06-21 | 1983-11-10 | Schlumberger Technology B.V. | Cryostats for photon detectors |
| US4340405A (en) * | 1980-10-29 | 1982-07-20 | The United States Of America As Represented By The United States Department Of Energy | Apparatus and method for maintaining low temperatures about an object at a remote location |
| DE3210370C2 (de) * | 1982-02-11 | 1984-04-12 | Walter Dr. 5902 Unglinghausen Helmbold | Langzeit-Wärmespeicher |
| BR8407039A (pt) * | 1983-08-26 | 1985-07-30 | Oestbo Karl | Trocador de calor |
| DE3582555D1 (de) * | 1984-11-09 | 1991-05-23 | Cryologic Pty Ltd | Kryogensystem fuer biologisches material. |
| US4747421A (en) * | 1985-03-13 | 1988-05-31 | Research Development Corporation Of Japan | Apparatus for removing covering film |
| JPS6228599A (ja) * | 1985-07-26 | 1987-02-06 | 住友電気工業株式会社 | 可撓性断熱パイプ |
| JPS62286733A (ja) * | 1986-06-05 | 1987-12-12 | 平岡織染株式会社 | 遮熱性シ−ト |
| DE3804694A1 (de) * | 1987-06-23 | 1989-01-05 | Taiyo Sanso Co Ltd | Verfahren zur oberflaechenbearbeitung fuer halbleiter-wafer und vorrichtung zur durchfuehrung des verfahrens |
| JPS6456151A (en) * | 1987-08-27 | 1989-03-03 | Yoshikage Oda | Medium circulation type temperature control device of thermostatic chamber |
| US4870838A (en) * | 1988-03-21 | 1989-10-03 | Zeamer Geoffrey H | Cryostat |
| US4854128A (en) * | 1988-03-22 | 1989-08-08 | Zeamer Corporation | Cryogen supply system |
| US4827736A (en) * | 1988-07-06 | 1989-05-09 | Daikin Industries, Ltd. | Cryogenic refrigeration system for cooling a specimen |
| US4977749A (en) * | 1989-04-25 | 1990-12-18 | Sercel Jeffrey P | Apparatus and method for purification of gases used in exciplex (excimer) lasers |
| JPH03247966A (ja) * | 1990-02-23 | 1991-11-06 | Toshiba Corp | 極低温冷凍機 |
| DE4009850C1 (enExample) * | 1990-03-27 | 1991-11-07 | Lambda Physik Gesellschaft Zur Herstellung Von Lasern Mbh, 3400 Goettingen, De | |
| US5062898A (en) * | 1990-06-05 | 1991-11-05 | Air Products And Chemicals, Inc. | Surface cleaning using a cryogenic aerosol |
| US5073896A (en) * | 1991-04-18 | 1991-12-17 | Lumonics Inc. | Purification of laser gases |
| US5108512A (en) * | 1991-09-16 | 1992-04-28 | Hemlock Semiconductor Corporation | Cleaning of CVD reactor used in the production of polycrystalline silicon by impacting with carbon dioxide pellets |
| US5165246A (en) * | 1991-11-15 | 1992-11-24 | Praxair Technology Inc. | Transport trailer for ultra-high-purity cryogenic liquids |
| US5209028A (en) * | 1992-04-15 | 1993-05-11 | Air Products And Chemicals, Inc. | Apparatus to clean solid surfaces using a cryogenic aerosol |
| US5294261A (en) * | 1992-11-02 | 1994-03-15 | Air Products And Chemicals, Inc. | Surface cleaning using an argon or nitrogen aerosol |
-
1993
- 1993-06-14 US US08/076,051 patent/US5400603A/en not_active Expired - Lifetime
-
1994
- 1994-05-06 EP EP94480041A patent/EP0633443B1/en not_active Expired - Lifetime
- 1994-05-06 DE DE69417109T patent/DE69417109T2/de not_active Expired - Lifetime
- 1994-05-18 JP JP6104216A patent/JP2765676B2/ja not_active Expired - Fee Related
- 1994-11-14 TW TW083110520A patent/TW253976B/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| TW253976B (enExample) | 1995-08-11 |
| JP2765676B2 (ja) | 1998-06-18 |
| JPH0719765A (ja) | 1995-01-20 |
| EP0633443A1 (en) | 1995-01-11 |
| US5400603A (en) | 1995-03-28 |
| DE69417109D1 (de) | 1999-04-22 |
| EP0633443B1 (en) | 1999-03-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE69417109T2 (de) | Wärmetauscher | |
| EP0631847B1 (en) | Nozzle apparatus for producing aerosol | |
| EP0712691B1 (en) | Apparatus for producing cryogenic aerosol | |
| DE4402247B4 (de) | Oberflächenreinigung mit Argon | |
| DE69112913T2 (de) | Reinigung einer Oberfläche mittels eines kryogenen Aerosols. | |
| DE69730349T2 (de) | Drehbare und verschiebbare sprühdüse | |
| DE3876670T2 (de) | Apparat und verfahren zum entfernen von sehr kleinen teilchen aus einem substrat. | |
| DE19926119C2 (de) | Strahlwerkzeug | |
| US5989647A (en) | Heat-treatment device and process | |
| DE4104543C2 (de) | Mit feinen Eisteilchen arbeitende Reinigungsvorrichtung | |
| DE19860084B4 (de) | Verfahren zum Strukturieren eines Substrats | |
| EP0712690B1 (en) | Mounting apparatus for cryogenic aerosol cleaning | |
| DE69423931T2 (de) | Befestigung einer Vorrichtung zur Reinigung mittels kryogenem Aerosol | |
| DE69416204T2 (de) | Vorrichtung zur Erzeugung eines kryogenen Aerosols | |
| DE69415414T2 (de) | Gerät mit Düse zur Erzeugung eines Aerosols | |
| EP0924315A1 (de) | Heissgaserzeugung beim thermischen Spritzen | |
| DE602005000770T2 (de) | Verfahren und Einrichtung zum Recycling von Inertgasen | |
| DE19926084A1 (de) | Absaugvorrichtung und Vorrichtung enthaltend eine Absaugvorrichtung | |
| DE19747383A1 (de) | Verbinden von Werkstücken | |
| DE102021112339A1 (de) | Verfahren, Inertisierungsvorrichtung und Inertgasbox zur Herstellung einer Inertgasatmosphäre | |
| DE102006013801A1 (de) | Gaseinlassorgan mit gelochter Isolationsplatte | |
| EP0713071A1 (en) | Heat exchanger | |
| DE19850415C1 (de) | Substrathalter für Mehrkammer-Vakuumbeschichtungsanlagen | |
| KR0122874B1 (ko) | 에어로졸 생성용 노즐장치 | |
| KR0145028B1 (ko) | 에어로졸 생성장치 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8320 | Willingness to grant licences declared (paragraph 23) | ||
| 8328 | Change in the person/name/address of the agent |
Representative=s name: DUSCHER, R., DIPL.-PHYS. DR.RER.NAT., PAT.-ANW., 7 |