DE69411449T2 - Fühlerelement für Beschleunigungsmesser - Google Patents

Fühlerelement für Beschleunigungsmesser

Info

Publication number
DE69411449T2
DE69411449T2 DE69411449T DE69411449T DE69411449T2 DE 69411449 T2 DE69411449 T2 DE 69411449T2 DE 69411449 T DE69411449 T DE 69411449T DE 69411449 T DE69411449 T DE 69411449T DE 69411449 T2 DE69411449 T2 DE 69411449T2
Authority
DE
Germany
Prior art keywords
accelerometer
sensor element
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69411449T
Other languages
English (en)
Other versions
DE69411449D1 (de
Inventor
Leland Joseph Spangler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ford Motor Co
Original Assignee
Ford Motor Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ford Motor Co filed Critical Ford Motor Co
Application granted granted Critical
Publication of DE69411449D1 publication Critical patent/DE69411449D1/de
Publication of DE69411449T2 publication Critical patent/DE69411449T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00—Details of instruments
    • G01P1/003—Details of instruments used for damping
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
DE69411449T 1993-04-07 1994-03-28 Fühlerelement für Beschleunigungsmesser Expired - Fee Related DE69411449T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/043,671 US5404749A (en) 1993-04-07 1993-04-07 Boron doped silicon accelerometer sense element

Publications (2)

Publication Number Publication Date
DE69411449D1 DE69411449D1 (de) 1998-08-13
DE69411449T2 true DE69411449T2 (de) 1998-11-05

Family

ID=21928298

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69411449T Expired - Fee Related DE69411449T2 (de) 1993-04-07 1994-03-28 Fühlerelement für Beschleunigungsmesser

Country Status (6)

Country Link
US (1) US5404749A (de)
EP (1) EP0623825B1 (de)
JP (1) JPH06308152A (de)
BR (1) BR9401393A (de)
DE (1) DE69411449T2 (de)
ES (1) ES2118327T3 (de)

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US5488864A (en) * 1994-12-19 1996-02-06 Ford Motor Company Torsion beam accelerometer with slotted tilt plate
DE19547642A1 (de) * 1994-12-20 1996-06-27 Zexel Corp Beschleunigungssensor und Verfahren zu dessen Herstellung
US5587518A (en) * 1994-12-23 1996-12-24 Ford Motor Company Accelerometer with a combined self-test and ground electrode
US5920013A (en) * 1997-02-07 1999-07-06 Ford Motor Company Silicon micromachine with sacrificial pedestal
US6146917A (en) * 1997-03-03 2000-11-14 Ford Motor Company Fabrication method for encapsulated micromachined structures
US5900550A (en) * 1997-06-16 1999-05-04 Ford Motor Company Capacitive acceleration sensor
US6167757B1 (en) 1997-09-08 2001-01-02 The Regents Of The University Of Michigan Single-side microelectromechanical capacitive accelerometer and method of making same
US6718605B2 (en) 1997-09-08 2004-04-13 The Regents Of The University Of Michigan Single-side microelectromechanical capacitive accelerometer and method of making same
US6035714A (en) * 1997-09-08 2000-03-14 The Regents Of The University Of Michigan Microelectromechanical capacitive accelerometer and method of making same
DE19750350C1 (de) * 1997-11-13 1999-08-05 Univ Dresden Tech Dreidimensionaler Chip-Beschleunigungssensor und Verfahren zu seiner Herstellung mittels UV-unterstützter Mikrogalvanik
US6000287A (en) * 1998-08-28 1999-12-14 Ford Motor Company Capacitor center of area sensitivity in angular motion micro-electromechanical systems
US6223586B1 (en) 1998-12-23 2001-05-01 Visteon Global Technologies, Inc. Micro-electromechanical device inspection
US7105355B2 (en) * 2001-07-18 2006-09-12 The Regents Of The University Of Michigan Flow cytometers and detection system of lesser size
DE102006022811A1 (de) * 2006-05-16 2007-11-22 Robert Bosch Gmbh Beschleunigungssensor
US7578190B2 (en) * 2007-08-03 2009-08-25 Freescale Semiconductor, Inc. Symmetrical differential capacitive sensor and method of making same
US8079262B2 (en) * 2007-10-26 2011-12-20 Rosemount Aerospace Inc. Pendulous accelerometer with balanced gas damping
US8171793B2 (en) * 2008-07-31 2012-05-08 Honeywell International Inc. Systems and methods for detecting out-of-plane linear acceleration with a closed loop linear drive accelerometer
DE102008043788A1 (de) * 2008-11-17 2010-05-20 Robert Bosch Gmbh Mikromechanisches Bauelement
CA2658141C (en) * 2009-03-06 2014-07-22 Nanometrics Inc. Capacitive displacement transducer for a weak-motion inertial sensor
US7736931B1 (en) 2009-07-20 2010-06-15 Rosemount Aerospace Inc. Wafer process flow for a high performance MEMS accelerometer
FR2956906B1 (fr) * 2010-02-26 2012-03-23 Marc Akly Dispositif d'orientation d'un systeme de detection d'impact dans le sens de chute d'un aeronef, suite a une avarie
JP2012088120A (ja) * 2010-10-18 2012-05-10 Seiko Epson Corp 物理量センサー素子、物理量センサーおよび電子機器
US8656778B2 (en) 2010-12-30 2014-02-25 Rosemount Aerospace Inc. In-plane capacitive mems accelerometer
EP2514713B1 (de) 2011-04-20 2013-10-02 Tronics Microsystems S.A. Mikroelektromechanische Systemvorrichtung (MEMS-Vorrichtung)
JP5790296B2 (ja) 2011-08-17 2015-10-07 セイコーエプソン株式会社 物理量センサー及び電子機器
DE102011057110A1 (de) * 2011-12-28 2013-07-04 Maxim Integrated Products, Inc. MEMS-Beschleunigungssensor
JP5979344B2 (ja) 2012-01-30 2016-08-24 セイコーエプソン株式会社 物理量センサーおよび電子機器
JP2013181855A (ja) 2012-03-02 2013-09-12 Seiko Epson Corp 物理量センサーおよび電子機器
JP5935986B2 (ja) 2012-04-06 2016-06-15 セイコーエプソン株式会社 物理量センサーおよび電子機器
JP5930183B2 (ja) 2012-04-09 2016-06-08 セイコーエプソン株式会社 物理量センサーおよび電子機器
JP5942554B2 (ja) * 2012-04-11 2016-06-29 セイコーエプソン株式会社 物理量センサーおよび電子機器
GB2523320A (en) * 2014-02-19 2015-08-26 Atlantic Inertial Systems Ltd Accelerometers
JP6655281B2 (ja) * 2014-08-19 2020-02-26 セイコーエプソン株式会社 物理量センサー、電子機器および移動体
JP7383978B2 (ja) * 2019-10-23 2023-11-21 セイコーエプソン株式会社 物理量センサー、電子機器および移動体

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL136155C (de) * 1966-09-09
US3478604A (en) * 1968-05-17 1969-11-18 Us Army Electronic solid-state accelerometer
CH642461A5 (fr) * 1981-07-02 1984-04-13 Centre Electron Horloger Accelerometre.
US4598585A (en) * 1984-03-19 1986-07-08 The Charles Stark Draper Laboratory, Inc. Planar inertial sensor
US4574327A (en) * 1984-05-18 1986-03-04 Becton, Dickinson And Company Capacitive transducer
US4736629A (en) * 1985-12-20 1988-04-12 Silicon Designs, Inc. Micro-miniature accelerometer
US4881410A (en) * 1987-06-01 1989-11-21 The Regents Of The University Of Michigan Ultraminiature pressure sensor and method of making same
US5083466A (en) * 1988-07-14 1992-01-28 University Of Hawaii Multidimensional force sensor
US4951510A (en) * 1988-07-14 1990-08-28 University Of Hawaii Multidimensional force sensor
US5101669A (en) * 1988-07-14 1992-04-07 University Of Hawaii Multidimensional force sensor
US5095762A (en) * 1988-07-14 1992-03-17 University Of Hawaii Multidimensional force sensor
US5233213A (en) * 1990-07-14 1993-08-03 Robert Bosch Gmbh Silicon-mass angular acceleration sensor
JP2728807B2 (ja) * 1991-07-24 1998-03-18 株式会社日立製作所 静電容量式加速度センサ
US5220835A (en) * 1991-09-12 1993-06-22 Ford Motor Company Torsion beam accelerometer

Also Published As

Publication number Publication date
EP0623825A1 (de) 1994-11-09
BR9401393A (pt) 1994-10-18
JPH06308152A (ja) 1994-11-04
EP0623825B1 (de) 1998-07-08
DE69411449D1 (de) 1998-08-13
US5404749A (en) 1995-04-11
ES2118327T3 (es) 1998-09-16

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee