BR9401393A - Elemento sensor com largura de faixa de medição com frequência natural, elemento sensor capacitivo para acelerômetro; e processo de fabricação de elemento sensor capacitivo com resposta de frequência com frequência natural - Google Patents

Elemento sensor com largura de faixa de medição com frequência natural, elemento sensor capacitivo para acelerômetro; e processo de fabricação de elemento sensor capacitivo com resposta de frequência com frequência natural

Info

Publication number
BR9401393A
BR9401393A BR9401393A BR9401393A BR9401393A BR 9401393 A BR9401393 A BR 9401393A BR 9401393 A BR9401393 A BR 9401393A BR 9401393 A BR9401393 A BR 9401393A BR 9401393 A BR9401393 A BR 9401393A
Authority
BR
Brazil
Prior art keywords
sensor element
natural frequency
capacitive sensor
frequency
accelerometer
Prior art date
Application number
BR9401393A
Other languages
English (en)
Inventor
Leland Joseph Spangler
Original Assignee
Ford Motor Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ford Motor Co filed Critical Ford Motor Co
Publication of BR9401393A publication Critical patent/BR9401393A/pt

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00—Details of instruments
    • G01P1/003—Details of instruments used for damping
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
BR9401393A 1993-04-07 1994-04-05 Elemento sensor com largura de faixa de medição com frequência natural, elemento sensor capacitivo para acelerômetro; e processo de fabricação de elemento sensor capacitivo com resposta de frequência com frequência natural BR9401393A (pt)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/043,671 US5404749A (en) 1993-04-07 1993-04-07 Boron doped silicon accelerometer sense element

Publications (1)

Publication Number Publication Date
BR9401393A true BR9401393A (pt) 1994-10-18

Family

ID=21928298

Family Applications (1)

Application Number Title Priority Date Filing Date
BR9401393A BR9401393A (pt) 1993-04-07 1994-04-05 Elemento sensor com largura de faixa de medição com frequência natural, elemento sensor capacitivo para acelerômetro; e processo de fabricação de elemento sensor capacitivo com resposta de frequência com frequência natural

Country Status (6)

Country Link
US (1) US5404749A (pt)
EP (1) EP0623825B1 (pt)
JP (1) JPH06308152A (pt)
BR (1) BR9401393A (pt)
DE (1) DE69411449T2 (pt)
ES (1) ES2118327T3 (pt)

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DE19547642A1 (de) * 1994-12-20 1996-06-27 Zexel Corp Beschleunigungssensor und Verfahren zu dessen Herstellung
US5587518A (en) * 1994-12-23 1996-12-24 Ford Motor Company Accelerometer with a combined self-test and ground electrode
US5920013A (en) * 1997-02-07 1999-07-06 Ford Motor Company Silicon micromachine with sacrificial pedestal
US6146917A (en) * 1997-03-03 2000-11-14 Ford Motor Company Fabrication method for encapsulated micromachined structures
US5900550A (en) * 1997-06-16 1999-05-04 Ford Motor Company Capacitive acceleration sensor
US6718605B2 (en) 1997-09-08 2004-04-13 The Regents Of The University Of Michigan Single-side microelectromechanical capacitive accelerometer and method of making same
US6167757B1 (en) 1997-09-08 2001-01-02 The Regents Of The University Of Michigan Single-side microelectromechanical capacitive accelerometer and method of making same
US6035714A (en) 1997-09-08 2000-03-14 The Regents Of The University Of Michigan Microelectromechanical capacitive accelerometer and method of making same
DE19750350C1 (de) * 1997-11-13 1999-08-05 Univ Dresden Tech Dreidimensionaler Chip-Beschleunigungssensor und Verfahren zu seiner Herstellung mittels UV-unterstützter Mikrogalvanik
US6000287A (en) * 1998-08-28 1999-12-14 Ford Motor Company Capacitor center of area sensitivity in angular motion micro-electromechanical systems
US6223586B1 (en) 1998-12-23 2001-05-01 Visteon Global Technologies, Inc. Micro-electromechanical device inspection
AU2002318269A1 (en) * 2001-07-18 2003-03-03 The Regents Of The University Of Michigan Gas-focusing flow cytometer cell and flow cytometer detection system with waveguide optics
DE102006022811A1 (de) * 2006-05-16 2007-11-22 Robert Bosch Gmbh Beschleunigungssensor
US7578190B2 (en) * 2007-08-03 2009-08-25 Freescale Semiconductor, Inc. Symmetrical differential capacitive sensor and method of making same
US8079262B2 (en) * 2007-10-26 2011-12-20 Rosemount Aerospace Inc. Pendulous accelerometer with balanced gas damping
US8171793B2 (en) * 2008-07-31 2012-05-08 Honeywell International Inc. Systems and methods for detecting out-of-plane linear acceleration with a closed loop linear drive accelerometer
DE102008043788A1 (de) * 2008-11-17 2010-05-20 Robert Bosch Gmbh Mikromechanisches Bauelement
CA2658141C (en) * 2009-03-06 2014-07-22 Nanometrics Inc. Capacitive displacement transducer for a weak-motion inertial sensor
US7736931B1 (en) 2009-07-20 2010-06-15 Rosemount Aerospace Inc. Wafer process flow for a high performance MEMS accelerometer
FR2956906B1 (fr) * 2010-02-26 2012-03-23 Marc Akly Dispositif d'orientation d'un systeme de detection d'impact dans le sens de chute d'un aeronef, suite a une avarie
JP2012088120A (ja) * 2010-10-18 2012-05-10 Seiko Epson Corp 物理量センサー素子、物理量センサーおよび電子機器
US8656778B2 (en) 2010-12-30 2014-02-25 Rosemount Aerospace Inc. In-plane capacitive mems accelerometer
EP2514713B1 (en) 2011-04-20 2013-10-02 Tronics Microsystems S.A. A micro-electromechanical system (MEMS) device
JP5790296B2 (ja) 2011-08-17 2015-10-07 セイコーエプソン株式会社 物理量センサー及び電子機器
DE102011057110A1 (de) * 2011-12-28 2013-07-04 Maxim Integrated Products, Inc. MEMS-Beschleunigungssensor
JP5979344B2 (ja) 2012-01-30 2016-08-24 セイコーエプソン株式会社 物理量センサーおよび電子機器
JP2013181855A (ja) 2012-03-02 2013-09-12 Seiko Epson Corp 物理量センサーおよび電子機器
JP5935986B2 (ja) 2012-04-06 2016-06-15 セイコーエプソン株式会社 物理量センサーおよび電子機器
JP5930183B2 (ja) 2012-04-09 2016-06-08 セイコーエプソン株式会社 物理量センサーおよび電子機器
JP5942554B2 (ja) 2012-04-11 2016-06-29 セイコーエプソン株式会社 物理量センサーおよび電子機器
GB2523320A (en) * 2014-02-19 2015-08-26 Atlantic Inertial Systems Ltd Accelerometers
JP6655281B2 (ja) * 2014-08-19 2020-02-26 セイコーエプソン株式会社 物理量センサー、電子機器および移動体
JP7383978B2 (ja) * 2019-10-23 2023-11-21 セイコーエプソン株式会社 物理量センサー、電子機器および移動体

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US3478604A (en) * 1968-05-17 1969-11-18 Us Army Electronic solid-state accelerometer
CH642461A5 (fr) * 1981-07-02 1984-04-13 Centre Electron Horloger Accelerometre.
US4598585A (en) * 1984-03-19 1986-07-08 The Charles Stark Draper Laboratory, Inc. Planar inertial sensor
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US4736629A (en) * 1985-12-20 1988-04-12 Silicon Designs, Inc. Micro-miniature accelerometer
US4881410A (en) * 1987-06-01 1989-11-21 The Regents Of The University Of Michigan Ultraminiature pressure sensor and method of making same
US4951510A (en) * 1988-07-14 1990-08-28 University Of Hawaii Multidimensional force sensor
US5083466A (en) * 1988-07-14 1992-01-28 University Of Hawaii Multidimensional force sensor
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US5233213A (en) * 1990-07-14 1993-08-03 Robert Bosch Gmbh Silicon-mass angular acceleration sensor
JP2728807B2 (ja) * 1991-07-24 1998-03-18 株式会社日立製作所 静電容量式加速度センサ
US5220835A (en) * 1991-09-12 1993-06-22 Ford Motor Company Torsion beam accelerometer

Also Published As

Publication number Publication date
ES2118327T3 (es) 1998-09-16
EP0623825A1 (en) 1994-11-09
DE69411449T2 (de) 1998-11-05
DE69411449D1 (de) 1998-08-13
JPH06308152A (ja) 1994-11-04
EP0623825B1 (en) 1998-07-08
US5404749A (en) 1995-04-11

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Legal Events

Date Code Title Description
FA10 Dismissal: dismissal - article 33 of industrial property law
HKFN Application deemed withdrawn (deleted)
FA7 Application deemed withdrawn (art. 18 par. 1 of law 5772/71) - being contrary to morals, good customs and public security, order and health
B15K Others concerning applications: alteration of classification

Ipc: G01P 15/125 (2006.01), G01P 1/00 (2006.0