DE69409100D1 - Elektronenmikroskop mit im referenzsystem des bildes gesteuertem goniometer - Google Patents

Elektronenmikroskop mit im referenzsystem des bildes gesteuertem goniometer

Info

Publication number
DE69409100D1
DE69409100D1 DE69409100T DE69409100T DE69409100D1 DE 69409100 D1 DE69409100 D1 DE 69409100D1 DE 69409100 T DE69409100 T DE 69409100T DE 69409100 T DE69409100 T DE 69409100T DE 69409100 D1 DE69409100 D1 DE 69409100D1
Authority
DE
Germany
Prior art keywords
goniometer
image
controlled
electron microscope
reference system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69409100T
Other languages
English (en)
Other versions
DE69409100T2 (de
Inventor
Madeleine Internationaal Rosar
Karen Internationaal O Trovato
Leendert Internationaal Dorst
Thomas Prof Warmerdam
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronics NV filed Critical Philips Electronics NV
Publication of DE69409100D1 publication Critical patent/DE69409100D1/de
Application granted granted Critical
Publication of DE69409100T2 publication Critical patent/DE69409100T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H01J2237/20278—Motorised movement
    • H01J2237/20285—Motorised movement computer-controlled
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE69409100T 1994-01-03 1994-12-23 Elektronenmikroskop mit im referenzsystem des bildes gesteuertem goniometer Expired - Fee Related DE69409100T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/176,051 US5481111A (en) 1994-01-03 1994-01-03 Electron microscope having a goniometer controlled from the image frame of reference
PCT/IB1994/000440 WO1995019040A1 (en) 1994-01-03 1994-12-23 Electron microscope having a goniometer controlled from the image frame of reference

Publications (2)

Publication Number Publication Date
DE69409100D1 true DE69409100D1 (de) 1998-04-23
DE69409100T2 DE69409100T2 (de) 1998-09-03

Family

ID=22642783

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69409100T Expired - Fee Related DE69409100T2 (de) 1994-01-03 1994-12-23 Elektronenmikroskop mit im referenzsystem des bildes gesteuertem goniometer

Country Status (5)

Country Link
US (1) US5481111A (de)
EP (1) EP0687380B1 (de)
JP (1) JP3670011B2 (de)
DE (1) DE69409100T2 (de)
WO (1) WO1995019040A1 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD433641S (en) * 1996-03-04 2000-11-14 D. Barclay Slocum Goniometer frame
US5870832A (en) * 1996-03-18 1999-02-16 Slocum; Barclay Frame for gravity-related measurement device
US6317651B1 (en) * 1999-03-26 2001-11-13 Kuka Development Laboratories, Inc. Trajectory generation system
JP3859396B2 (ja) * 1999-07-19 2006-12-20 日本電子株式会社 走査型荷電粒子ビーム装置における試料像観察方法及び走査型荷電粒子ビーム装置
GB2393571B (en) * 2002-09-26 2007-03-21 Leo Electron Microscopy Ltd Improvements in and relating to the control of instruments
DE10335504B4 (de) * 2003-07-31 2008-11-27 Carl Zeiss Nts Gmbh Elektronenstrahlgerät mit Präparathalter
DE10335644B9 (de) * 2003-08-04 2006-06-01 Carl Zeiss Mikroskopiesystem
US7381968B2 (en) * 2004-04-16 2008-06-03 Hitachi High-Technologies Corporation Charged particle beam apparatus and specimen holder
KR100995877B1 (ko) * 2008-07-23 2010-11-22 한국기계연구원 투과전자현미경의 고니오미터를 이용한 이웃하는 결정립의결정학적 방위관계 측정장치 및 그에 의한 결정립계 특성규명 방법
DE102009001587A1 (de) * 2009-01-06 2010-07-08 Carl Zeiss Nts Gmbh Verfahren zur Einstellung eines Betriebsparameters eines Teilchenstrahlgeräts sowie Probenhalter zur Durchführung des Verfahrens
JP5499732B2 (ja) * 2009-06-23 2014-05-21 ソニー株式会社 生体サンプル像取得装置、生体サンプル像取得方法及び生体サンプル像取得プログラム
JP2011180442A (ja) * 2010-03-02 2011-09-15 Sony Corp サンプル像取得装置、サンプル像取得方法及びサンプル像取得プログラム
GB2484197A (en) * 2010-09-29 2012-04-04 Zeiss Carl Nts Gmbh Particle beam microscope and method of operating the particle microscope
DE102010041678B4 (de) * 2010-09-29 2023-12-28 Carl Zeiss Microscopy Gmbh Teilchenstrahlgerät mit einem Probenträger
US20160187636A1 (en) * 2013-06-26 2016-06-30 President And Fellows Of Harvard College Microscopy Blade System And Method Of Control
DE112016006875B4 (de) * 2016-06-17 2022-05-12 Hitachi High-Tech Corporation Ladungsteilchenstrahlvorrichtung sowie verfahren zum betrachten einer probe
DE102018207603B4 (de) 2018-05-16 2020-06-10 Carl Zeiss Microscopy Gmbh Verfahren und Vorrichtung zur Positionierung mikroskopischer Proben mit Hilfe einer zweidimensionalen Positionstabelle

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1789019B1 (de) * 1968-09-23 1972-04-27 Siemens Ag Verfahren zur erzeugung eines stereobildes mittels der elektronenstrahlmikroskopie
GB1304944A (de) * 1970-06-29 1973-01-31
DE2236529C3 (de) * 1972-07-21 1976-01-02 Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V., 3400 Goettingen Drehvorrichtung hoher Genauigkeit für optische Geräte, insbesondere Elektronenmikroskope
DE2542360C2 (de) * 1975-09-19 1977-11-17 Siemens AG, 1000 Berlin und 8000 München Korpuskularstrahlgerät mit einem Goniometer
US4433382A (en) * 1981-07-20 1984-02-21 Cincinnati Milacron Inc. Apparatus for automatically adjusting the programmed location of a robot arm
NL8301033A (nl) * 1983-03-23 1984-10-16 Philips Nv Stralingsapparaat met membraanaandrijving voor een objectdrager.
US4627009A (en) * 1983-05-24 1986-12-02 Nanometrics Inc. Microscope stage assembly and control system
US5038089A (en) * 1988-03-23 1991-08-06 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Synchronized computational architecture for generalized bilateral control of robot arms
US5208763A (en) * 1990-09-14 1993-05-04 New York University Method and apparatus for determining position and orientation of mechanical objects

Also Published As

Publication number Publication date
JPH08507646A (ja) 1996-08-13
JP3670011B2 (ja) 2005-07-13
EP0687380B1 (de) 1998-03-18
EP0687380A1 (de) 1995-12-20
US5481111A (en) 1996-01-02
DE69409100T2 (de) 1998-09-03
WO1995019040A1 (en) 1995-07-13

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: KONINKLIJKE PHILIPS ELECTRONICS N.V., EINDHOVEN, N

8339 Ceased/non-payment of the annual fee