DE69621395D1 - Transmissionselektronenmikroskop mit Kamerasystem - Google Patents

Transmissionselektronenmikroskop mit Kamerasystem

Info

Publication number
DE69621395D1
DE69621395D1 DE69621395T DE69621395T DE69621395D1 DE 69621395 D1 DE69621395 D1 DE 69621395D1 DE 69621395 T DE69621395 T DE 69621395T DE 69621395 T DE69621395 T DE 69621395T DE 69621395 D1 DE69621395 D1 DE 69621395D1
Authority
DE
Germany
Prior art keywords
electron microscope
camera system
transmission electron
camera
transmission
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69621395T
Other languages
English (en)
Inventor
Masanari Kouguchi
Hiroshi Kakibayashi
Hiroyuki Tanaka
Shigeto Isakozawa
Keiichi Kanehori
Tatsuo Makishima
Kazutaka Tsuji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Application granted granted Critical
Publication of DE69621395D1 publication Critical patent/DE69621395D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H01J37/265—Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • H01J37/224—Luminescent screens or photographic plates for imaging; Apparatus specially adapted therefor, e. g. cameras, TV-cameras, photographic equipment or exposure control; Optical subsystems specially adapted therefor, e. g. microscopes for observing image on luminescent screen
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2445—Photon detectors for X-rays, light, e.g. photomultipliers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2802—Transmission microscopes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measurement Of Radiation (AREA)
DE69621395T 1995-08-03 1996-07-23 Transmissionselektronenmikroskop mit Kamerasystem Expired - Lifetime DE69621395D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7198341A JPH0945271A (ja) 1995-08-03 1995-08-03 撮像装置付き電子顕微鏡

Publications (1)

Publication Number Publication Date
DE69621395D1 true DE69621395D1 (de) 2002-07-04

Family

ID=16389515

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69621395T Expired - Lifetime DE69621395D1 (de) 1995-08-03 1996-07-23 Transmissionselektronenmikroskop mit Kamerasystem

Country Status (4)

Country Link
US (1) US5717207A (de)
EP (1) EP0766283B1 (de)
JP (1) JPH0945271A (de)
DE (1) DE69621395D1 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3490597B2 (ja) * 1997-01-07 2004-01-26 株式会社東芝 マスク検査装置
US5998790A (en) * 1997-06-18 1999-12-07 The Regents Of The University Of California Transmission electron microscope CCD camera
US6891159B2 (en) * 2002-07-03 2005-05-10 National University Of Singapore Converting scanning electron microscopes
US7057187B1 (en) * 2003-11-07 2006-06-06 Xradia, Inc. Scintillator optical system and method of manufacture
JP4634852B2 (ja) * 2005-04-25 2011-02-16 株式会社日立ハイテクノロジーズ Ｓｅｍ式外観検査装置および検査方法
DE102005063142B4 (de) * 2005-12-31 2008-03-06 Olympus Soft Imaging Solutions Gmbh Elektronenmikroskop, insbesondere Transmissions-Elektronenmikroskop
JP2009120405A (ja) * 2007-11-09 2009-06-04 Canon Inc 紫外光用ガラス組成物及びそれを用いた光学装置
US7745786B2 (en) * 2008-03-19 2010-06-29 Fama Leo A Method and apparatus allowing simultaneous direct observation and electronic capture of scintillation images in an electron microscope
FR2960699B1 (fr) * 2010-05-27 2013-05-10 Centre Nat Rech Scient Systeme de detection de cathodoluminescence souple et microscope mettant en oeuvre un tel systeme.
JP2013026152A (ja) * 2011-07-25 2013-02-04 Hitachi High-Technologies Corp 電子顕微鏡

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL233650A (de) * 1957-11-27
US3370168A (en) * 1964-01-14 1968-02-20 Hitachi Ltd Anode aperture plate for a television camera tube in an electron microscope comprising a stainless steel foil
US4211924A (en) * 1976-09-03 1980-07-08 Siemens Aktiengesellschaft Transmission-type scanning charged-particle beam microscope
US4514629A (en) * 1982-07-07 1985-04-30 National Research Development Corporation Scanning transmission electron microscopes
US5194956A (en) * 1989-10-24 1993-03-16 Sony Corporation Lens and aperture control apparatus
US5349382A (en) * 1991-01-25 1994-09-20 Canon Kabushiki Kaisha Image pickup apparatus with image light focus prevention
US5300776A (en) * 1992-09-16 1994-04-05 Gatan, Inc. Autoadjusting electron microscope
JP2934358B2 (ja) * 1992-10-23 1999-08-16 株式会社日立製作所 透過電子顕微鏡
JPH06249799A (ja) * 1993-02-25 1994-09-09 Natl Res Inst For Metals 電子線回折強度迅速精密計測装置
US5401964A (en) * 1993-12-09 1995-03-28 Mancuso; James F. Reduced electron scattering phosphor screen for high resolution transmission electron microscope imaging

Also Published As

Publication number Publication date
JPH0945271A (ja) 1997-02-14
US5717207A (en) 1998-02-10
EP0766283B1 (de) 2002-05-29
EP0766283A1 (de) 1997-04-02

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Legal Events

Date Code Title Description
8332 No legal effect for de