DE69408626T2 - Durchfluss-Steuerventil - Google Patents

Durchfluss-Steuerventil

Info

Publication number
DE69408626T2
DE69408626T2 DE69408626T DE69408626T DE69408626T2 DE 69408626 T2 DE69408626 T2 DE 69408626T2 DE 69408626 T DE69408626 T DE 69408626T DE 69408626 T DE69408626 T DE 69408626T DE 69408626 T2 DE69408626 T2 DE 69408626T2
Authority
DE
Germany
Prior art keywords
valve
gas supply
supply channel
channel
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69408626T
Other languages
German (de)
English (en)
Other versions
DE69408626D1 (de
Inventor
Ryutaro Nishimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of DE69408626D1 publication Critical patent/DE69408626D1/de
Application granted granted Critical
Publication of DE69408626T2 publication Critical patent/DE69408626T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32—Details
    • F16K1/34—Cutting-off parts, e.g. valve members, seats
    • F16K1/44—Details of seats or valve members of double-seat valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
    • F16K11/10—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit
    • F16K11/20—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit operated by separate actuating members
    • F16K11/22—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit operated by separate actuating members with an actuating member for each valve, e.g. interconnected to form multiple-way valves
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/85978—With pump
    • Y10T137/86083—Vacuum pump
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87877—Single inlet with multiple distinctly valved outlets

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Valve Housings (AREA)
  • Multiple-Way Valves (AREA)
DE69408626T 1993-10-27 1994-10-24 Durchfluss-Steuerventil Expired - Fee Related DE69408626T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26869093A JP3361162B2 (ja) 1993-10-27 1993-10-27 タンク室付ブロックバルブ

Publications (2)

Publication Number Publication Date
DE69408626D1 DE69408626D1 (de) 1998-04-02
DE69408626T2 true DE69408626T2 (de) 1998-11-05

Family

ID=17462036

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69408626T Expired - Fee Related DE69408626T2 (de) 1993-10-27 1994-10-24 Durchfluss-Steuerventil

Country Status (8)

Country Link
US (1) US5469885A (enExample)
EP (1) EP0651189B1 (enExample)
JP (1) JP3361162B2 (enExample)
KR (1) KR0170018B1 (enExample)
CA (1) CA2134425C (enExample)
DE (1) DE69408626T2 (enExample)
SG (1) SG45143A1 (enExample)
TW (1) TW273589B (enExample)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3299048B2 (ja) * 1994-08-30 2002-07-08 株式会社フジキン 三方切換制御器
DE19540771A1 (de) * 1995-11-02 1997-05-07 Hertz Inst Heinrich Gaseinlaßvorrichtung für eine Beschichtungsanlage
CA2194598A1 (en) 1996-08-12 1998-02-12 Norris R. Long Lpn canister connector for combustion appliance
US5868126A (en) * 1996-08-12 1999-02-09 The Coleman Company, Inc. LPG canister connector for combustion appliance
US6041817A (en) * 1998-08-21 2000-03-28 Fairchild Semiconductor Corp. Processing system having vacuum manifold isolation
US6161576A (en) * 1999-06-23 2000-12-19 Mks Instruments, Inc. Integrated turbo pump and control valve system
DE19929519A1 (de) * 1999-06-28 2001-01-04 Pfeiffer Vacuum Gmbh Verfahren zum Betrieb einer Mehrkammer-Vakuumanlage
US6817381B2 (en) * 1999-08-24 2004-11-16 Tokyo Electron Limited Gas processing apparatus, gas processing method and integrated valve unit for gas processing apparatus
US6223770B1 (en) * 1999-09-29 2001-05-01 Lsi Logic Corporation Vacuum valve interface
US6129108A (en) * 1999-12-03 2000-10-10 United Semiconductor Corp Fluid delivering system
US7264013B2 (en) 2005-05-13 2007-09-04 Air Products And Chemicals, Inc. Enhanced purge effect in gas conduit
JP4499012B2 (ja) * 2005-09-30 2010-07-07 シーケーディ株式会社 複合流体制御ユニット
CN201344287Y (zh) * 2008-10-20 2009-11-11 温晋轩 连续式抽真空设备的真空阀
CN101397986B (zh) * 2008-11-25 2010-10-13 温晋轩 多功能抽空真空设备
CN101639132A (zh) * 2009-08-27 2010-02-03 青岛子鹤工贸有限公司 混合气体阀
JP5788685B2 (ja) * 2011-02-09 2015-10-07 Ckd株式会社 薬液供給ユニット
CN106568630B (zh) * 2016-10-28 2020-02-21 核工业北京地质研究院 一种全金属小体积容器及其体积测定系统、方法
EP3545221B1 (en) * 2016-11-22 2025-09-17 Parker-Hannifin Corporation Ultra-low carryover solenoid valve
CN107701788A (zh) * 2017-08-15 2018-02-16 叶子建 一种可控性较强的蓄水池控制阀门
CN109854784A (zh) * 2018-12-06 2019-06-07 成都华科阀门制造有限公司 一种基于工业使用的气体采集装置
WO2022080933A1 (ko) * 2020-10-15 2022-04-21 삼성전자주식회사 가스압력조절장치 및 이를 갖는 조리기기
KR102243713B1 (ko) 2020-11-30 2021-04-26 주식회사 대성이노텍 목재 및 합판의 방염처리장치
KR102243715B1 (ko) 2020-11-30 2021-04-26 주식회사 대성이노텍 목재 및 합판의 방염분사장치
US12066116B2 (en) * 2021-06-02 2024-08-20 Robertshaw Controls Company Double flow rate gas solenoid valve
JP2024146175A (ja) 2023-03-31 2024-10-15 東京エレクトロン株式会社 流体制御装置及び基板処理装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR783370A (fr) * 1934-12-27 1935-07-11 Robinet
US3206159A (en) * 1961-09-29 1965-09-14 American Radiator & Standard Vacuum-operated valve
FR2043936A5 (enExample) * 1969-05-02 1971-02-19 Dubois Roger
DE2408208A1 (de) * 1974-02-21 1975-09-11 Hansa Metallwerke Ag Mischbatterie fuer kalt- und warmwasser mit zwei drucktastenventilen
US4714091A (en) * 1985-06-10 1987-12-22 Emcore, Inc. Modular gas handling apparatus
JPH0251671A (ja) * 1988-08-12 1990-02-21 Motoyama Seisakusho:Kk メタルダイヤフラム弁
US5137047A (en) * 1990-08-24 1992-08-11 Mark George Delivery of reactive gas from gas pad to process tool
US5224513A (en) * 1991-06-04 1993-07-06 Cselt - Centro Studi E Laboratori Telecomunicazioni S.P.A. Device for introducing reagents into an organometallic vapor phase deposition apparatus
US5145152A (en) * 1991-07-09 1992-09-08 Smc Corporation High-vacuum valves
US5273075A (en) * 1993-03-25 1993-12-28 Itt Corporation Diverter valve

Also Published As

Publication number Publication date
EP0651189A2 (en) 1995-05-03
DE69408626D1 (de) 1998-04-02
US5469885A (en) 1995-11-28
EP0651189A3 (en) 1995-09-20
CA2134425C (en) 1998-03-31
JPH07119844A (ja) 1995-05-12
TW273589B (enExample) 1996-04-01
EP0651189B1 (en) 1998-02-25
JP3361162B2 (ja) 2003-01-07
SG45143A1 (en) 1998-01-16
KR950011892A (ko) 1995-05-16
KR0170018B1 (ko) 1999-03-30
CA2134425A1 (en) 1995-04-28

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee