DE69403145T2 - Quellen für Siliziumoxidbeschichtung - Google Patents

Quellen für Siliziumoxidbeschichtung

Info

Publication number
DE69403145T2
DE69403145T2 DE69403145T DE69403145T DE69403145T2 DE 69403145 T2 DE69403145 T2 DE 69403145T2 DE 69403145 T DE69403145 T DE 69403145T DE 69403145 T DE69403145 T DE 69403145T DE 69403145 T2 DE69403145 T2 DE 69403145T2
Authority
DE
Germany
Prior art keywords
silicon oxide
oxide coating
coating sources
sources
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69403145T
Other languages
English (en)
Other versions
DE69403145D1 (de
Inventor
Toshihiko Shindoh
Takeshi Kakegawa
Kazuhiko Urano
Toshimasa Okamura
Tetsuo Suzuki
Masatoshi Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Nihon Shinku Gijutsu KK
Original Assignee
Shin Etsu Chemical Co Ltd
Nihon Shinku Gijutsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd, Nihon Shinku Gijutsu KK filed Critical Shin Etsu Chemical Co Ltd
Application granted granted Critical
Publication of DE69403145D1 publication Critical patent/DE69403145D1/de
Publication of DE69403145T2 publication Critical patent/DE69403145T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C03C17/245—Oxides by deposition from the vapour phase
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/10—Glass or silica
DE69403145T 1993-07-20 1994-07-19 Quellen für Siliziumoxidbeschichtung Expired - Lifetime DE69403145T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5200318A JP2900759B2 (ja) 1993-07-20 1993-07-20 珪素酸化物蒸着用材料及び蒸着フィルム

Publications (2)

Publication Number Publication Date
DE69403145D1 DE69403145D1 (de) 1997-06-19
DE69403145T2 true DE69403145T2 (de) 1998-02-05

Family

ID=16422318

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69403145T Expired - Lifetime DE69403145T2 (de) 1993-07-20 1994-07-19 Quellen für Siliziumoxidbeschichtung

Country Status (4)

Country Link
US (1) US5532063A (de)
EP (1) EP0636589B1 (de)
JP (1) JP2900759B2 (de)
DE (1) DE69403145T2 (de)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2729131B1 (fr) * 1995-01-09 1997-02-14 Pechiney Electrometallurgie Silicium et ferrosilicium metallurgique a basse teneur en oxygene
JPH09287619A (ja) * 1996-02-23 1997-11-04 Nippon Seiko Kk 密封装置付転がり軸受ユニット
CA2281265C (en) * 1998-09-22 2003-12-16 Toyota Jidosha Kabushiki Kaisha Method for manufacturing a nonlinear optical thin film
US6003632A (en) * 1998-09-25 1999-12-21 Miller; Carlos Wayne Tree stand ladder adapter
EP1008443A1 (de) * 1998-12-08 2000-06-14 Alusuisse Technology & Management AG Sterilisierbarer Folienverbund für Verpackungszwecke
EP1318207A4 (de) * 2000-08-31 2006-08-16 Sumitomo Titanium Corp Siliziummonoxid-gasphasenabscheidungsmaterial, herstellungsverfahren dafür, rohmaterial zu dessen herstellung und vorrichtung zur herstellung
JP4911909B2 (ja) 2005-03-29 2012-04-04 三洋電機株式会社 リチウム二次電池用電極の製造方法
US20060266472A1 (en) * 2005-05-06 2006-11-30 Kipp Michael D Vacuum bagging methods and systems
DE102006047014B4 (de) 2005-10-04 2023-01-19 Ntn Corp. Radlagervorrichtung
WO2007130372A2 (en) * 2006-05-01 2007-11-15 American Consulting Technology & Research Method for extending the useful life of mold type tooling
US20080106007A1 (en) * 2006-10-17 2008-05-08 Kipp Michael D Resin infusion process utilizing a reusable vacuum bag
US20080105997A1 (en) * 2006-10-17 2008-05-08 Ridges Michael D Method for enhancing the sealing potential of formable, disposable tooling materials
JP2008133908A (ja) 2006-11-29 2008-06-12 Nsk Ltd シールリング付車輪支持用転がり軸受ユニット
US20080131716A1 (en) * 2006-12-04 2008-06-05 American Consulting Technology & Research, Inc. Shrinkable film barrier for mandrel tooling members
EP2335138A4 (de) 2008-08-15 2012-12-19 Qualcomm Inc Erweiterte mehrfachberührungsdetektion
JP2010235966A (ja) * 2009-03-30 2010-10-21 Toppan Printing Co Ltd ＳｉＯｘ成形体、およびガスバリア性フィルム
JP5353592B2 (ja) * 2009-09-15 2013-11-27 凸版印刷株式会社 蒸着材料
US9142804B2 (en) * 2010-02-09 2015-09-22 Samsung Display Co., Ltd. Organic light-emitting device including barrier layer and method of manufacturing the same
EP2547515A4 (de) * 2010-03-19 2015-12-09 Vinperfect Inc Sauerstoffregulierungsmechanismus für eine flüssigkeitsdichtung
JP5549483B2 (ja) * 2010-08-31 2014-07-16 凸版印刷株式会社 蒸着用材料、ガスバリア性蒸着フィルムの製造方法およびガスバリア性蒸着フィルム
JP5594051B2 (ja) * 2010-10-21 2014-09-24 凸版印刷株式会社 蒸着用材料
JP5720315B2 (ja) * 2011-03-08 2015-05-20 凸版印刷株式会社 蒸着フィルムの評価方法
JP6123351B2 (ja) * 2012-03-05 2017-05-10 凸版印刷株式会社 蒸着用材料、ガスバリア性蒸着フィルムおよびガスバリア性蒸着フィルムの製造方法
JP6103642B2 (ja) * 2012-08-01 2017-03-29 株式会社 高千穂 シラス構造体およびシラス構造体の製造方法
US10571619B2 (en) * 2014-10-16 2020-02-25 Toppan Printing Co., Ltd. Quantum dot protective film, quantum dot film using same, and backlight unit
US11745484B2 (en) * 2020-10-08 2023-09-05 Polymeric Film & Bags, Inc. Pet sandwich layer

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD152120A1 (de) * 1980-07-11 1981-11-18 Rudolf Tuemmler Verfahren zur herstellung von siliziumoxid als aufdampfmaterial
DD159003A3 (de) * 1981-02-12 1983-02-16 Heinz Schicht Verfahren zur herstellung von aufdampfmaterial zur erzeugung von siliziummonoxidschichten durch vakuumverdampfung
US4671123A (en) * 1984-02-16 1987-06-09 Rainin Instrument Co., Inc. Methods and apparatus for pipetting and/or titrating liquids using a hand held self-contained automated pipette
US4563303A (en) * 1984-04-14 1986-01-07 Judicial Foundation The Chemosero-Therapeutic Research Institute Method for purification of filamentous hemagglutinin
US5085904A (en) * 1990-04-20 1992-02-04 E. I. Du Pont De Nemours And Company Barrier materials useful for packaging
JPH0428858A (ja) * 1990-05-24 1992-01-31 Mitsubishi Heavy Ind Ltd 蒸着用材料の製造方法

Also Published As

Publication number Publication date
JPH0734224A (ja) 1995-02-03
EP0636589A1 (de) 1995-02-01
EP0636589B1 (de) 1997-05-14
JP2900759B2 (ja) 1999-06-02
US5532063A (en) 1996-07-02
DE69403145D1 (de) 1997-06-19

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Legal Events

Date Code Title Description
8332 No legal effect for de
8370 Indication of lapse of patent is to be deleted
8364 No opposition during term of opposition