DE69331291T2 - Verfahren zur Herstellung einer Sperrbeschichtung mittels plasmaunterstütztem CVD - Google Patents
Verfahren zur Herstellung einer Sperrbeschichtung mittels plasmaunterstütztem CVDInfo
- Publication number
- DE69331291T2 DE69331291T2 DE69331291T DE69331291T DE69331291T2 DE 69331291 T2 DE69331291 T2 DE 69331291T2 DE 69331291 T DE69331291 T DE 69331291T DE 69331291 T DE69331291 T DE 69331291T DE 69331291 T2 DE69331291 T2 DE 69331291T2
- Authority
- DE
- Germany
- Prior art keywords
- plasma
- producing
- barrier coating
- assisted cvd
- cvd
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32192—Microwave generated discharge
- H01J37/32211—Means for coupling power to the plasma
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D65/00—Wrappers or flexible covers; Packaging materials of special type or form
- B65D65/38—Packaging materials of special type or form
- B65D65/42—Applications of coated or impregnated materials
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0209—Pretreatment of the material to be coated by heating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0227—Pretreatment of the material to be coated by cleaning or etching
- C23C16/0245—Pretreatment of the material to be coated by cleaning or etching by etching with a plasma
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/401—Oxides containing silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/401—Oxides containing silicon
- C23C16/402—Silicon dioxide
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/511—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using microwave discharges
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
- C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32192—Microwave generated discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32733—Means for moving the material to be treated
- H01J37/32752—Means for moving the material to be treated for moving the material across the discharge
- H01J37/32761—Continuous moving
- H01J37/3277—Continuous moving of continuous material
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Plasma & Fusion (AREA)
- Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Laminated Bodies (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US97614992A | 1992-11-13 | 1992-11-13 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69331291D1 DE69331291D1 (de) | 2002-01-17 |
DE69331291T2 true DE69331291T2 (de) | 2002-08-08 |
Family
ID=25523783
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69327725T Expired - Lifetime DE69327725T2 (de) | 1992-11-13 | 1993-11-10 | Mikrowellenvorrichtung fuer die beschichtung von duennen filmen |
DE69331291T Expired - Lifetime DE69331291T2 (de) | 1992-11-13 | 1993-11-10 | Verfahren zur Herstellung einer Sperrbeschichtung mittels plasmaunterstütztem CVD |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69327725T Expired - Lifetime DE69327725T2 (de) | 1992-11-13 | 1993-11-10 | Mikrowellenvorrichtung fuer die beschichtung von duennen filmen |
Country Status (8)
Country | Link |
---|---|
US (1) | US5411591A (de) |
EP (2) | EP0931853B1 (de) |
JP (2) | JP3471356B2 (de) |
KR (1) | KR100291692B1 (de) |
AU (1) | AU5598194A (de) |
CA (1) | CA2146369C (de) |
DE (2) | DE69327725T2 (de) |
WO (1) | WO1994011544A1 (de) |
Families Citing this family (42)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5670224A (en) * | 1992-11-13 | 1997-09-23 | Energy Conversion Devices, Inc. | Modified silicon oxide barrier coatings produced by microwave CVD deposition on polymeric substrates |
US5567241A (en) * | 1993-04-30 | 1996-10-22 | Energy Conversion Devices, Inc. | Method and apparatus for the improved microwave deposition of thin films |
JPH0853116A (ja) * | 1994-08-11 | 1996-02-27 | Kirin Brewery Co Ltd | 炭素膜コーティングプラスチック容器 |
US5653811A (en) | 1995-07-19 | 1997-08-05 | Chan; Chung | System for the plasma treatment of large area substrates |
US6273955B1 (en) * | 1995-08-28 | 2001-08-14 | Canon Kabushiki Kaisha | Film forming apparatus |
US5728224A (en) * | 1995-09-13 | 1998-03-17 | Tetra Laval Holdings & Finance S.A. | Apparatus and method for manufacturing a packaging material using gaseous phase atmospheric photo chemical vapor deposition to apply a barrier layer to a moving web substrate |
KR100197649B1 (ko) * | 1995-09-29 | 1999-06-15 | 김영환 | 박막 증착장치 |
US5707452A (en) * | 1996-07-08 | 1998-01-13 | Applied Microwave Plasma Concepts, Inc. | Coaxial microwave applicator for an electron cyclotron resonance plasma source |
JP3773340B2 (ja) * | 1996-12-18 | 2006-05-10 | 大日本印刷株式会社 | 低屈折率SiO2 膜及びその製造方法 |
US8075789B1 (en) * | 1997-07-11 | 2011-12-13 | Applied Materials, Inc. | Remote plasma cleaning source having reduced reactivity with a substrate processing chamber |
US6209482B1 (en) * | 1997-10-01 | 2001-04-03 | Energy Conversion Devices, Inc. | Large area microwave plasma apparatus with adaptable applicator |
DE19744060C2 (de) * | 1997-10-06 | 1999-08-12 | Fraunhofer Ges Forschung | Verfahren und Vorrichtung zur Oberflächenbehandlung von Substraten |
US6274459B1 (en) | 1998-02-17 | 2001-08-14 | Silicon Genesis Corporation | Method for non mass selected ion implant profile control |
US7260051B1 (en) | 1998-12-18 | 2007-08-21 | Nanochip, Inc. | Molecular memory medium and molecular memory integrated circuit |
US6186090B1 (en) * | 1999-03-04 | 2001-02-13 | Energy Conversion Devices, Inc. | Apparatus for the simultaneous deposition by physical vapor deposition and chemical vapor deposition and method therefor |
SE520491C2 (sv) | 1999-04-07 | 2003-07-15 | Tetra Laval Holdings & Finance | Förpackningslaminat med barriäregenskaper mot gas och aromämnen |
US6458723B1 (en) | 1999-06-24 | 2002-10-01 | Silicon Genesis Corporation | High temperature implant apparatus |
EP1174526A1 (de) * | 2000-07-17 | 2002-01-23 | Nederlandse Organisatie voor Toegepast Natuurwetenschappelijk Onderzoek TNO | Kontinuierliches Abscheiden aus der Gasphase |
JP3574401B2 (ja) * | 2000-12-13 | 2004-10-06 | シャープ株式会社 | プラズマプロセス装置 |
JP3689354B2 (ja) * | 2001-08-06 | 2005-08-31 | シャープ株式会社 | プラズマプロセス装置 |
US6985377B2 (en) * | 2002-10-15 | 2006-01-10 | Nanochip, Inc. | Phase change media for high density data storage |
US7233517B2 (en) | 2002-10-15 | 2007-06-19 | Nanochip, Inc. | Atomic probes and media for high density data storage |
US20040142104A1 (en) * | 2003-01-07 | 2004-07-22 | Woolley Christopher P. | Apparatus and method for depositing environmentally sensitive thin film materials |
JP4437647B2 (ja) * | 2003-07-17 | 2010-03-24 | 三菱商事プラスチック株式会社 | ガスバリア膜コーティングプラスチック容器の製造方法 |
ITPD20030314A1 (it) * | 2003-12-30 | 2005-06-30 | Geox Spa | Articolo stratiforme impermeabile all'acqua e permeabile al vapore |
US7379412B2 (en) | 2004-04-16 | 2008-05-27 | Nanochip, Inc. | Methods for writing and reading highly resolved domains for high density data storage |
US20050232061A1 (en) | 2004-04-16 | 2005-10-20 | Rust Thomas F | Systems for writing and reading highly resolved domains for high density data storage |
US7301887B2 (en) * | 2004-04-16 | 2007-11-27 | Nanochip, Inc. | Methods for erasing bit cells in a high density data storage device |
US7367119B2 (en) * | 2005-06-24 | 2008-05-06 | Nanochip, Inc. | Method for forming a reinforced tip for a probe storage device |
US7463573B2 (en) | 2005-06-24 | 2008-12-09 | Nanochip, Inc. | Patterned media for a high density data storage device |
US7309630B2 (en) * | 2005-07-08 | 2007-12-18 | Nanochip, Inc. | Method for forming patterned media for a high density data storage device |
CN102627413B (zh) * | 2012-05-10 | 2013-12-11 | 兰州大学 | 微波辅助类金刚石薄膜包覆玻璃纤维的复合纤维制备方法 |
DE102012109251A1 (de) * | 2012-09-28 | 2014-04-03 | Osram Gmbh | Vorrichtung und Verfahren zur Beschichtung von Substraten |
KR101521813B1 (ko) * | 2013-09-12 | 2015-05-21 | (주)씨엔원 | 롤투롤 방식의 원자층 증착 장비 |
KR102622868B1 (ko) * | 2016-11-28 | 2024-01-08 | 엘지디스플레이 주식회사 | 열충격이 방지된 롤투롤 제조장치 |
US10450119B2 (en) * | 2017-06-22 | 2019-10-22 | The Procter & Gamble Company | Films including a water-soluble layer and a vapor-deposited inorganic coating |
CN110709174A (zh) | 2017-06-22 | 2020-01-17 | 宝洁公司 | 包括水溶性层和气相沉积有机涂层的膜 |
JP7407516B2 (ja) * | 2019-03-26 | 2024-01-04 | 森永乳業株式会社 | 抗原ペプチド検出方法 |
US20220396880A1 (en) * | 2019-10-31 | 2022-12-15 | Indian Institute Of Science | Microwave-assisted apparatus, system and method for deposition of films on substrates |
NL2030360B1 (en) | 2021-12-30 | 2023-07-06 | Leydenjar Tech B V | Plasma-enhanced Chemical Vapour Deposition Apparatus |
CN114934252A (zh) * | 2022-03-02 | 2022-08-23 | 九江德福科技股份有限公司 | 一种在聚合物薄膜表面真空镀膜的预处理方法 |
NL2031257B1 (en) * | 2022-03-11 | 2023-09-20 | Leydenjar Tech B V | Apparatus and method for plasma enhanced chemical vapour deposition |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3814983A (en) * | 1972-02-07 | 1974-06-04 | C Weissfloch | Apparatus and method for plasma generation and material treatment with electromagnetic radiation |
US4515107A (en) * | 1982-11-12 | 1985-05-07 | Sovonics Solar Systems | Apparatus for the manufacture of photovoltaic devices |
US4478874A (en) * | 1983-12-09 | 1984-10-23 | Cosden Technology, Inc. | Methods for improving the gas barrier properties of polymeric containers |
DE3584188D1 (de) * | 1984-05-11 | 1991-10-31 | Terumo Corp | Verfahren zur herstellung eines behaelters aus syntetischem harz. |
DE3576802D1 (de) * | 1984-12-30 | 1990-05-03 | Ajinomoto Kk | Transparente kunststoffmaterialbuechse. |
US4601260A (en) * | 1985-04-01 | 1986-07-22 | Sovonics Solar Systems | Vertical semiconductor processor |
US4673586A (en) * | 1985-10-29 | 1987-06-16 | Cosden Technology, Inc. | Method for making plastic containers having decreased gas permeability |
FR2592874B1 (fr) * | 1986-01-14 | 1990-08-03 | Centre Nat Rech Scient | Procede pour tremper un objet en verre ou vitreux et objet ainsi trempe |
FR2614317B1 (fr) * | 1987-04-22 | 1989-07-13 | Air Liquide | Procede de protection de substrat polymerique par depot par plasma de composes du type oxynitrure de silicium et dispositif pour sa mise en oeuvre. |
US5041303A (en) * | 1988-03-07 | 1991-08-20 | Polyplasma Incorporated | Process for modifying large polymeric surfaces |
US4893584A (en) * | 1988-03-29 | 1990-01-16 | Energy Conversion Devices, Inc. | Large area microwave plasma apparatus |
JPH02175878A (ja) * | 1988-12-28 | 1990-07-09 | Canon Inc | 改良されたマイクロ波導入窓を有するマイクロ波プラズマcvd装置 |
US5130170A (en) * | 1989-06-28 | 1992-07-14 | Canon Kabushiki Kaisha | Microwave pcvd method for continuously forming a large area functional deposited film using a curved moving substrate web with microwave energy with a directivity in one direction perpendicular to the direction of microwave propagation |
US5085904A (en) * | 1990-04-20 | 1992-02-04 | E. I. Du Pont De Nemours And Company | Barrier materials useful for packaging |
FR2670506B1 (fr) * | 1990-12-17 | 1993-02-19 | Air Liquide | Procede de depot d'une couche d'oxyde de silicium liee a un substrat en polyolefine. |
-
1993
- 1993-11-10 JP JP51231494A patent/JP3471356B2/ja not_active Expired - Fee Related
- 1993-11-10 AU AU55981/94A patent/AU5598194A/en not_active Abandoned
- 1993-11-10 WO PCT/US1993/010841 patent/WO1994011544A1/en active IP Right Grant
- 1993-11-10 KR KR1019950701896A patent/KR100291692B1/ko not_active IP Right Cessation
- 1993-11-10 DE DE69327725T patent/DE69327725T2/de not_active Expired - Lifetime
- 1993-11-10 DE DE69331291T patent/DE69331291T2/de not_active Expired - Lifetime
- 1993-11-10 CA CA002146369A patent/CA2146369C/en not_active Expired - Fee Related
- 1993-11-10 EP EP99105256A patent/EP0931853B1/de not_active Expired - Lifetime
- 1993-11-10 EP EP94901375A patent/EP0667921B1/de not_active Expired - Lifetime
-
1994
- 1994-07-22 US US08/278,734 patent/US5411591A/en not_active Expired - Lifetime
-
2003
- 2003-06-27 JP JP2003185572A patent/JP3696865B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP3696865B2 (ja) | 2005-09-21 |
CA2146369C (en) | 1999-06-15 |
EP0667921A1 (de) | 1995-08-23 |
JP3471356B2 (ja) | 2003-12-02 |
AU5598194A (en) | 1994-06-08 |
KR950704534A (ko) | 1995-11-20 |
KR100291692B1 (ko) | 2001-06-01 |
DE69327725D1 (de) | 2000-03-02 |
CA2146369A1 (en) | 1994-05-26 |
DE69327725T2 (de) | 2000-06-21 |
EP0667921B1 (de) | 2000-01-26 |
JP2004003033A (ja) | 2004-01-08 |
JPH08509264A (ja) | 1996-10-01 |
DE69331291D1 (de) | 2002-01-17 |
WO1994011544A1 (en) | 1994-05-26 |
EP0667921A4 (de) | 1997-12-29 |
EP0931853A2 (de) | 1999-07-28 |
US5411591A (en) | 1995-05-02 |
EP0931853A3 (de) | 1999-08-04 |
EP0931853B1 (de) | 2001-12-05 |
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