DE69330835T2 - Verfahren zur Herstellung einer Tandemphotovoltaikvorrichtung mit verbessertem Wirkungsgrad und dadurch hergestellte Vorrichtung - Google Patents
Verfahren zur Herstellung einer Tandemphotovoltaikvorrichtung mit verbessertem Wirkungsgrad und dadurch hergestellte VorrichtungInfo
- Publication number
- DE69330835T2 DE69330835T2 DE69330835T DE69330835T DE69330835T2 DE 69330835 T2 DE69330835 T2 DE 69330835T2 DE 69330835 T DE69330835 T DE 69330835T DE 69330835 T DE69330835 T DE 69330835T DE 69330835 T2 DE69330835 T2 DE 69330835T2
- Authority
- DE
- Germany
- Prior art keywords
- producing
- improved efficiency
- tandem photovoltaic
- tandem
- photovoltaic device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000000463 material Substances 0.000 abstract 2
- 239000004065 semiconductor Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier
- H01L31/075—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PIN type
- H01L31/076—Multiple junction or tandem solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/20—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials
- H01L31/202—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials including only elements of Group IV of the Periodic System
- H01L31/204—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials including only elements of Group IV of the Periodic System including AIVBIV alloys, e.g. SiGe, SiC
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/548—Amorphous silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Sustainable Development (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Energy (AREA)
- Manufacturing & Machinery (AREA)
- Photovoltaic Devices (AREA)
- Materials For Medical Uses (AREA)
- Press Drives And Press Lines (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US990085 | 1992-12-14 | ||
US07/990,085 US5298086A (en) | 1992-05-15 | 1992-12-14 | Method for the manufacture of improved efficiency tandem photovoltaic device and device manufactured thereby |
PCT/US1993/011697 WO1994014199A1 (en) | 1992-12-14 | 1993-12-01 | Method for the manufacture of improved efficiency tandem photovoltaic device and device manufactured thereby |
Publications (3)
Publication Number | Publication Date |
---|---|
DE69330835D1 DE69330835D1 (de) | 2001-10-31 |
DE69330835T2 true DE69330835T2 (de) | 2002-06-13 |
DE69330835T3 DE69330835T3 (de) | 2007-02-22 |
Family
ID=25535748
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69330835T Expired - Lifetime DE69330835T3 (de) | 1992-12-14 | 1993-12-01 | Verfahren zur Herstellung einer Tandemphotovoltaikvorrichtung mit verbessertem Wirkungsgrad und dadurch hergestellte Vorrichtung |
Country Status (9)
Country | Link |
---|---|
US (1) | US5298086A (de) |
EP (1) | EP0673550B2 (de) |
JP (1) | JP2783682B2 (de) |
AT (1) | ATE206247T1 (de) |
AU (1) | AU672466B2 (de) |
CA (1) | CA2151736C (de) |
DE (1) | DE69330835T3 (de) |
ES (1) | ES2164095T5 (de) |
WO (1) | WO1994014199A1 (de) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7772485B2 (en) | 2005-07-14 | 2010-08-10 | Konarka Technologies, Inc. | Polymers with low band gaps and high charge mobility |
US7781673B2 (en) | 2005-07-14 | 2010-08-24 | Konarka Technologies, Inc. | Polymers with low band gaps and high charge mobility |
US8008424B2 (en) | 2006-10-11 | 2011-08-30 | Konarka Technologies, Inc. | Photovoltaic cell with thiazole-containing polymer |
US8008421B2 (en) | 2006-10-11 | 2011-08-30 | Konarka Technologies, Inc. | Photovoltaic cell with silole-containing polymer |
US8158881B2 (en) | 2005-07-14 | 2012-04-17 | Konarka Technologies, Inc. | Tandem photovoltaic cells |
US8455606B2 (en) | 2008-08-07 | 2013-06-04 | Merck Patent Gmbh | Photoactive polymers |
US8975512B2 (en) | 2005-12-21 | 2015-03-10 | Merck Patent Gmbh | Tandem photovoltaic cells |
DE102014018811A1 (de) * | 2014-12-19 | 2016-06-23 | Universität Siegen | Sensor, insbesondere Photodiode |
DE112012001058B4 (de) * | 2011-03-01 | 2019-08-29 | International Business Machines Corporation | Verfahren zur herstellung einer tandem-photovoltaikeinheit |
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US5977476A (en) * | 1996-10-16 | 1999-11-02 | United Solar Systems Corporation | High efficiency photovoltaic device |
JP3935237B2 (ja) * | 1997-03-11 | 2007-06-20 | キヤノン株式会社 | 光電気変換体及び建材 |
JP3768672B2 (ja) | 1998-02-26 | 2006-04-19 | キヤノン株式会社 | 積層型光起電力素子 |
US6166318A (en) | 1998-03-03 | 2000-12-26 | Interface Studies, Inc. | Single absorber layer radiated energy conversion device |
US6468829B2 (en) | 2000-05-16 | 2002-10-22 | United Solar Systems Corporation | Method for manufacturing high efficiency photovoltaic devices at enhanced depositions rates |
JP4086629B2 (ja) * | 2002-11-13 | 2008-05-14 | キヤノン株式会社 | 光起電力素子 |
JP4459086B2 (ja) | 2005-02-28 | 2010-04-28 | 三洋電機株式会社 | 積層型光起電力装置およびその製造方法 |
US7635637B2 (en) * | 2005-07-25 | 2009-12-22 | Fairchild Semiconductor Corporation | Semiconductor structures formed on substrates and methods of manufacturing the same |
US9105776B2 (en) | 2006-05-15 | 2015-08-11 | Stion Corporation | Method and structure for thin film photovoltaic materials using semiconductor materials |
US8017860B2 (en) | 2006-05-15 | 2011-09-13 | Stion Corporation | Method and structure for thin film photovoltaic materials using bulk semiconductor materials |
US20080300918A1 (en) * | 2007-05-29 | 2008-12-04 | Commercenet Consortium, Inc. | System and method for facilitating hospital scheduling and support |
US8071179B2 (en) * | 2007-06-29 | 2011-12-06 | Stion Corporation | Methods for infusing one or more materials into nano-voids if nanoporous or nanostructured materials |
US7919400B2 (en) * | 2007-07-10 | 2011-04-05 | Stion Corporation | Methods for doping nanostructured materials and nanostructured thin films |
US8287942B1 (en) | 2007-09-28 | 2012-10-16 | Stion Corporation | Method for manufacture of semiconductor bearing thin film material |
US8058092B2 (en) | 2007-09-28 | 2011-11-15 | Stion Corporation | Method and material for processing iron disilicide for photovoltaic application |
US8759671B2 (en) * | 2007-09-28 | 2014-06-24 | Stion Corporation | Thin film metal oxide bearing semiconductor material for single junction solar cell devices |
US8614396B2 (en) * | 2007-09-28 | 2013-12-24 | Stion Corporation | Method and material for purifying iron disilicide for photovoltaic application |
US8187434B1 (en) | 2007-11-14 | 2012-05-29 | Stion Corporation | Method and system for large scale manufacture of thin film photovoltaic devices using single-chamber configuration |
US8440903B1 (en) | 2008-02-21 | 2013-05-14 | Stion Corporation | Method and structure for forming module using a powder coating and thermal treatment process |
US8075723B1 (en) | 2008-03-03 | 2011-12-13 | Stion Corporation | Laser separation method for manufacture of unit cells for thin film photovoltaic materials |
US8772078B1 (en) | 2008-03-03 | 2014-07-08 | Stion Corporation | Method and system for laser separation for exclusion region of multi-junction photovoltaic materials |
US20090229667A1 (en) * | 2008-03-14 | 2009-09-17 | Solarmer Energy, Inc. | Translucent solar cell |
US7939454B1 (en) | 2008-05-31 | 2011-05-10 | Stion Corporation | Module and lamination process for multijunction cells |
US8642138B2 (en) | 2008-06-11 | 2014-02-04 | Stion Corporation | Processing method for cleaning sulfur entities of contact regions |
US9087943B2 (en) * | 2008-06-25 | 2015-07-21 | Stion Corporation | High efficiency photovoltaic cell and manufacturing method free of metal disulfide barrier material |
US8003432B2 (en) | 2008-06-25 | 2011-08-23 | Stion Corporation | Consumable adhesive layer for thin film photovoltaic material |
US8207008B1 (en) | 2008-08-01 | 2012-06-26 | Stion Corporation | Affixing method and solar decal device using a thin film photovoltaic |
US7855089B2 (en) * | 2008-09-10 | 2010-12-21 | Stion Corporation | Application specific solar cell and method for manufacture using thin film photovoltaic materials |
US8394662B1 (en) | 2008-09-29 | 2013-03-12 | Stion Corporation | Chloride species surface treatment of thin film photovoltaic cell and manufacturing method |
US8236597B1 (en) | 2008-09-29 | 2012-08-07 | Stion Corporation | Bulk metal species treatment of thin film photovoltaic cell and manufacturing method |
US8008110B1 (en) | 2008-09-29 | 2011-08-30 | Stion Corporation | Bulk sodium species treatment of thin film photovoltaic cell and manufacturing method |
US8008112B1 (en) | 2008-09-29 | 2011-08-30 | Stion Corporation | Bulk chloride species treatment of thin film photovoltaic cell and manufacturing method |
US8476104B1 (en) | 2008-09-29 | 2013-07-02 | Stion Corporation | Sodium species surface treatment of thin film photovoltaic cell and manufacturing method |
US8026122B1 (en) | 2008-09-29 | 2011-09-27 | Stion Corporation | Metal species surface treatment of thin film photovoltaic cell and manufacturing method |
US8367798B2 (en) | 2008-09-29 | 2013-02-05 | The Regents Of The University Of California | Active materials for photoelectric devices and devices that use the materials |
US8501521B1 (en) | 2008-09-29 | 2013-08-06 | Stion Corporation | Copper species surface treatment of thin film photovoltaic cell and manufacturing method |
US8425739B1 (en) | 2008-09-30 | 2013-04-23 | Stion Corporation | In chamber sodium doping process and system for large scale cigs based thin film photovoltaic materials |
US7947524B2 (en) * | 2008-09-30 | 2011-05-24 | Stion Corporation | Humidity control and method for thin film photovoltaic materials |
US8383450B2 (en) * | 2008-09-30 | 2013-02-26 | Stion Corporation | Large scale chemical bath system and method for cadmium sulfide processing of thin film photovoltaic materials |
US7863074B2 (en) * | 2008-09-30 | 2011-01-04 | Stion Corporation | Patterning electrode materials free from berm structures for thin film photovoltaic cells |
US7910399B1 (en) * | 2008-09-30 | 2011-03-22 | Stion Corporation | Thermal management and method for large scale processing of CIS and/or CIGS based thin films overlying glass substrates |
US8741689B2 (en) * | 2008-10-01 | 2014-06-03 | Stion Corporation | Thermal pre-treatment process for soda lime glass substrate for thin film photovoltaic materials |
US20110018103A1 (en) | 2008-10-02 | 2011-01-27 | Stion Corporation | System and method for transferring substrates in large scale processing of cigs and/or cis devices |
US8003430B1 (en) | 2008-10-06 | 2011-08-23 | Stion Corporation | Sulfide species treatment of thin film photovoltaic cell and manufacturing method |
US8435826B1 (en) | 2008-10-06 | 2013-05-07 | Stion Corporation | Bulk sulfide species treatment of thin film photovoltaic cell and manufacturing method |
USD625695S1 (en) | 2008-10-14 | 2010-10-19 | Stion Corporation | Patterned thin film photovoltaic module |
US8168463B2 (en) | 2008-10-17 | 2012-05-01 | Stion Corporation | Zinc oxide film method and structure for CIGS cell |
US8344243B2 (en) * | 2008-11-20 | 2013-01-01 | Stion Corporation | Method and structure for thin film photovoltaic cell using similar material junction |
US20100276071A1 (en) * | 2009-04-29 | 2010-11-04 | Solarmer Energy, Inc. | Tandem solar cell |
USD662040S1 (en) | 2009-06-12 | 2012-06-19 | Stion Corporation | Pin striped thin film solar module for garden lamp |
USD628332S1 (en) | 2009-06-12 | 2010-11-30 | Stion Corporation | Pin striped thin film solar module for street lamp |
USD632415S1 (en) | 2009-06-13 | 2011-02-08 | Stion Corporation | Pin striped thin film solar module for cluster lamp |
USD662041S1 (en) | 2009-06-23 | 2012-06-19 | Stion Corporation | Pin striped thin film solar module for laptop personal computer |
USD652262S1 (en) | 2009-06-23 | 2012-01-17 | Stion Corporation | Pin striped thin film solar module for cooler |
US8507786B1 (en) | 2009-06-27 | 2013-08-13 | Stion Corporation | Manufacturing method for patterning CIGS/CIS solar cells |
USD627696S1 (en) | 2009-07-01 | 2010-11-23 | Stion Corporation | Pin striped thin film solar module for recreational vehicle |
US8440496B2 (en) * | 2009-07-08 | 2013-05-14 | Solarmer Energy, Inc. | Solar cell with conductive material embedded substrate |
US8372945B2 (en) | 2009-07-24 | 2013-02-12 | Solarmer Energy, Inc. | Conjugated polymers with carbonyl substituted thieno[3,4-B]thiophene units for polymer solar cell active layer materials |
US8398772B1 (en) | 2009-08-18 | 2013-03-19 | Stion Corporation | Method and structure for processing thin film PV cells with improved temperature uniformity |
US8809096B1 (en) | 2009-10-22 | 2014-08-19 | Stion Corporation | Bell jar extraction tool method and apparatus for thin film photovoltaic materials |
US8399889B2 (en) | 2009-11-09 | 2013-03-19 | Solarmer Energy, Inc. | Organic light emitting diode and organic solar cell stack |
US8859880B2 (en) | 2010-01-22 | 2014-10-14 | Stion Corporation | Method and structure for tiling industrial thin-film solar devices |
US8263494B2 (en) | 2010-01-25 | 2012-09-11 | Stion Corporation | Method for improved patterning accuracy for thin film photovoltaic panels |
US9096930B2 (en) | 2010-03-29 | 2015-08-04 | Stion Corporation | Apparatus for manufacturing thin film photovoltaic devices |
US8461061B2 (en) | 2010-07-23 | 2013-06-11 | Stion Corporation | Quartz boat method and apparatus for thin film thermal treatment |
US8628997B2 (en) | 2010-10-01 | 2014-01-14 | Stion Corporation | Method and device for cadmium-free solar cells |
US8998606B2 (en) | 2011-01-14 | 2015-04-07 | Stion Corporation | Apparatus and method utilizing forced convection for uniform thermal treatment of thin film devices |
US8728200B1 (en) | 2011-01-14 | 2014-05-20 | Stion Corporation | Method and system for recycling processing gas for selenization of thin film photovoltaic materials |
US8436445B2 (en) | 2011-08-15 | 2013-05-07 | Stion Corporation | Method of manufacture of sodium doped CIGS/CIGSS absorber layers for high efficiency photovoltaic devices |
DE102015006379B4 (de) * | 2015-05-18 | 2022-03-17 | Azur Space Solar Power Gmbh | Skalierbare Spannungsquelle |
Family Cites Families (9)
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US4226898A (en) * | 1978-03-16 | 1980-10-07 | Energy Conversion Devices, Inc. | Amorphous semiconductors equivalent to crystalline semiconductors produced by a glow discharge process |
US4517223A (en) * | 1982-09-24 | 1985-05-14 | Sovonics Solar Systems | Method of making amorphous semiconductor alloys and devices using microwave energy |
US4480585A (en) * | 1983-06-23 | 1984-11-06 | Energy Conversion Devices, Inc. | External isolation module |
US4878097A (en) * | 1984-05-15 | 1989-10-31 | Eastman Kodak Company | Semiconductor photoelectric conversion device and method for making same |
US5071490A (en) * | 1988-03-18 | 1991-12-10 | Sharp Kabushiki Kaisha | Tandem stacked amorphous solar cell device |
KR910007465B1 (ko) * | 1988-10-27 | 1991-09-26 | 삼성전관 주식회사 | 비정질 실리콘 태양전지의 제조방법 |
JP2890441B2 (ja) * | 1989-02-23 | 1999-05-17 | 工業技術院長 | 半導体装置 |
JP2690380B2 (ja) * | 1990-03-23 | 1997-12-10 | キヤノン株式会社 | 機能性堆積膜の連続的形成方法 |
US5204272A (en) * | 1991-12-13 | 1993-04-20 | United Solar Systems Corporation | Semiconductor device and microwave process for its manufacture |
-
1992
- 1992-12-14 US US07/990,085 patent/US5298086A/en not_active Expired - Lifetime
-
1993
- 1993-12-01 CA CA002151736A patent/CA2151736C/en not_active Expired - Fee Related
- 1993-12-01 AT AT94902490T patent/ATE206247T1/de not_active IP Right Cessation
- 1993-12-01 JP JP6514244A patent/JP2783682B2/ja not_active Expired - Fee Related
- 1993-12-01 ES ES94902490T patent/ES2164095T5/es not_active Expired - Lifetime
- 1993-12-01 DE DE69330835T patent/DE69330835T3/de not_active Expired - Lifetime
- 1993-12-01 EP EP94902490A patent/EP0673550B2/de not_active Expired - Lifetime
- 1993-12-01 WO PCT/US1993/011697 patent/WO1994014199A1/en active IP Right Grant
- 1993-12-01 AU AU56846/94A patent/AU672466B2/en not_active Ceased
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8158881B2 (en) | 2005-07-14 | 2012-04-17 | Konarka Technologies, Inc. | Tandem photovoltaic cells |
US7781673B2 (en) | 2005-07-14 | 2010-08-24 | Konarka Technologies, Inc. | Polymers with low band gaps and high charge mobility |
US7772485B2 (en) | 2005-07-14 | 2010-08-10 | Konarka Technologies, Inc. | Polymers with low band gaps and high charge mobility |
US8058550B2 (en) | 2005-07-14 | 2011-11-15 | Konarka Technologies, Inc. | Polymers with low band gaps and high charge mobility |
US8975512B2 (en) | 2005-12-21 | 2015-03-10 | Merck Patent Gmbh | Tandem photovoltaic cells |
US8008421B2 (en) | 2006-10-11 | 2011-08-30 | Konarka Technologies, Inc. | Photovoltaic cell with silole-containing polymer |
US8563678B2 (en) | 2006-10-11 | 2013-10-22 | Merck Patent Gmbh | Photovoltaic cell with thiazole-containing polymer |
US8962783B2 (en) | 2006-10-11 | 2015-02-24 | Merck Patent Gmbh | Photovoltaic cell with silole-containing polymer |
US8008424B2 (en) | 2006-10-11 | 2011-08-30 | Konarka Technologies, Inc. | Photovoltaic cell with thiazole-containing polymer |
US9123895B2 (en) | 2006-10-11 | 2015-09-01 | Merck Patent Gmbh | Photovoltaic cell with thiazole-containing polymer |
US8455606B2 (en) | 2008-08-07 | 2013-06-04 | Merck Patent Gmbh | Photoactive polymers |
DE112012001058B4 (de) * | 2011-03-01 | 2019-08-29 | International Business Machines Corporation | Verfahren zur herstellung einer tandem-photovoltaikeinheit |
DE102014018811A1 (de) * | 2014-12-19 | 2016-06-23 | Universität Siegen | Sensor, insbesondere Photodiode |
Also Published As
Publication number | Publication date |
---|---|
AU672466B2 (en) | 1996-10-03 |
JPH08504542A (ja) | 1996-05-14 |
EP0673550A1 (de) | 1995-09-27 |
WO1994014199A1 (en) | 1994-06-23 |
EP0673550A4 (de) | 1997-08-13 |
EP0673550B2 (de) | 2006-09-13 |
EP0673550B1 (de) | 2001-09-26 |
JP2783682B2 (ja) | 1998-08-06 |
ATE206247T1 (de) | 2001-10-15 |
AU5684694A (en) | 1994-07-04 |
US5298086A (en) | 1994-03-29 |
DE69330835T3 (de) | 2007-02-22 |
DE69330835D1 (de) | 2001-10-31 |
CA2151736A1 (en) | 1994-06-23 |
ES2164095T3 (es) | 2002-02-16 |
CA2151736C (en) | 2003-03-18 |
ES2164095T5 (es) | 2007-03-01 |
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