DE69323859D1 - Verfahren zur Herstellung einer isolierten Schicht - Google Patents
Verfahren zur Herstellung einer isolierten SchichtInfo
- Publication number
- DE69323859D1 DE69323859D1 DE69323859T DE69323859T DE69323859D1 DE 69323859 D1 DE69323859 D1 DE 69323859D1 DE 69323859 T DE69323859 T DE 69323859T DE 69323859 T DE69323859 T DE 69323859T DE 69323859 D1 DE69323859 D1 DE 69323859D1
- Authority
- DE
- Germany
- Prior art keywords
- producing
- isolated layer
- isolated
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/28—Applying non-metallic protective coatings
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
- G03F7/168—Finishing the coated layer, e.g. drying, baking, soaking
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/07—Treatments involving liquids, e.g. plating, rinsing
- H05K2203/0756—Uses of liquids, e.g. rinsing, coating, dissolving
- H05K2203/0759—Forming a polymer layer by liquid coating, e.g. a non-metallic protective coating or an organic bonding layer
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/07—Treatments involving liquids, e.g. plating, rinsing
- H05K2203/0779—Treatments involving liquids, e.g. plating, rinsing characterised by the specific liquids involved
- H05K2203/0783—Using solvent, e.g. for cleaning; Regulating solvent content of pastes or coatings for adjusting the viscosity
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/11—Treatments characterised by their effect, e.g. heating, cooling, roughening
- H05K2203/1105—Heating or thermal processing not related to soldering, firing, curing or laminating, e.g. for shaping the substrate or during finish plating
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Non-Metallic Protective Coatings For Printed Circuits (AREA)
- Formation Of Insulating Films (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5005713A JP2925103B2 (ja) | 1993-01-18 | 1993-01-18 | 表面平滑な絶縁層の形成方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69323859D1 true DE69323859D1 (de) | 1999-04-15 |
DE69323859T2 DE69323859T2 (de) | 1999-10-07 |
Family
ID=11618765
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69323859T Expired - Fee Related DE69323859T2 (de) | 1993-01-18 | 1993-12-20 | Verfahren zur Herstellung einer isolierten Schicht |
Country Status (4)
Country | Link |
---|---|
US (1) | US5460858A (de) |
EP (1) | EP0607691B1 (de) |
JP (1) | JP2925103B2 (de) |
DE (1) | DE69323859T2 (de) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3442200B2 (ja) * | 1995-08-08 | 2003-09-02 | インターナショナル・ビジネス・マシーンズ・コーポレーション | プリント回路基板、プリント回路基板の製造方法 |
JP2003037352A (ja) * | 2001-07-25 | 2003-02-07 | Nitto Denko Corp | 配線回路基板の製造方法 |
CN102150234B (zh) | 2008-11-05 | 2014-11-05 | 株式会社东芝 | 成膜装置、成膜方法和半导体装置 |
JP4748742B2 (ja) * | 2009-02-13 | 2011-08-17 | 東京エレクトロン株式会社 | 基板処理装置及び基板処理方法 |
TWI730037B (zh) * | 2016-01-26 | 2021-06-11 | 日商富士軟片和光純藥股份有限公司 | 光硬化方法,及用於該光硬化方法之化合物和組成物 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3529960A (en) * | 1967-01-24 | 1970-09-22 | Hilbert Sloan | Methods of treating resist coatings |
US3684553A (en) * | 1970-12-14 | 1972-08-15 | Du Pont | Process for removing surface defects from articles having a thermoplastic surface |
JPS6386434A (ja) * | 1986-09-30 | 1988-04-16 | Toshiba Corp | レジストパタ−ン形成方法 |
US4794021A (en) * | 1986-11-13 | 1988-12-27 | Microelectronics And Computer Technology Corporation | Method of providing a planarized polymer coating on a substrate wafer |
JPH03184323A (ja) * | 1989-12-13 | 1991-08-12 | Mitsubishi Electric Corp | 高段差基板上の高精度レジストパターン形成方法 |
-
1993
- 1993-01-18 JP JP5005713A patent/JP2925103B2/ja not_active Expired - Fee Related
- 1993-12-20 EP EP93310326A patent/EP0607691B1/de not_active Expired - Lifetime
- 1993-12-20 DE DE69323859T patent/DE69323859T2/de not_active Expired - Fee Related
-
1994
- 1994-01-18 US US08/183,092 patent/US5460858A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0607691A2 (de) | 1994-07-27 |
US5460858A (en) | 1995-10-24 |
JP2925103B2 (ja) | 1999-07-28 |
EP0607691A3 (de) | 1997-05-02 |
EP0607691B1 (de) | 1999-03-10 |
DE69323859T2 (de) | 1999-10-07 |
JPH06236871A (ja) | 1994-08-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |