DE69323812D1 - Reflexionsverhindernder Film und Verfahren zur Herstellung von Resistmustern - Google Patents
Reflexionsverhindernder Film und Verfahren zur Herstellung von ResistmusternInfo
- Publication number
- DE69323812D1 DE69323812D1 DE69323812T DE69323812T DE69323812D1 DE 69323812 D1 DE69323812 D1 DE 69323812D1 DE 69323812 T DE69323812 T DE 69323812T DE 69323812 T DE69323812 T DE 69323812T DE 69323812 D1 DE69323812 D1 DE 69323812D1
- Authority
- DE
- Germany
- Prior art keywords
- reflection film
- resist patterns
- making resist
- making
- patterns
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/091—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers characterised by antireflection means or light filtering or absorbing means, e.g. anti-halation, contrast enhancement
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Architecture (AREA)
- Structural Engineering (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23757592 | 1992-08-14 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69323812D1 true DE69323812D1 (de) | 1999-04-15 |
DE69323812T2 DE69323812T2 (de) | 1999-08-26 |
Family
ID=17017352
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69323812T Expired - Lifetime DE69323812T2 (de) | 1992-08-14 | 1993-08-04 | Reflexionsverhindernder Film und Verfahren zur Herstellung von Resistmustern |
Country Status (4)
Country | Link |
---|---|
US (1) | US5410005A (de) |
EP (1) | EP0583918B1 (de) |
KR (1) | KR100249445B1 (de) |
DE (1) | DE69323812T2 (de) |
Families Citing this family (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1995010798A1 (en) * | 1993-10-12 | 1995-04-20 | Hoechst Celanese Corporation | Top anti-reflective coating films |
JP3099646B2 (ja) * | 1994-09-01 | 2000-10-16 | ブラザー工業株式会社 | インクジェット装置の製造方法 |
US5525457A (en) * | 1994-12-09 | 1996-06-11 | Japan Synthetic Rubber Co., Ltd. | Reflection preventing film and process for forming resist pattern using the same |
EP0794199A3 (de) * | 1996-03-07 | 1999-10-20 | Wako Pure Chemical Industries, Ltd | Funktionelle Polymere |
US5652317A (en) * | 1996-08-16 | 1997-07-29 | Hoechst Celanese Corporation | Antireflective coatings for photoresist compositions |
US5708095A (en) * | 1996-08-30 | 1998-01-13 | E. I. Du Pont De Nemours And Company | Graft copolymers containing sulfonate and phosphonate groups having particular utility as pigmented ink dispersants |
US5879863A (en) * | 1997-01-22 | 1999-03-09 | Kabushiki Kaisha Toshiba | Pattern forming method |
US6190839B1 (en) | 1998-01-15 | 2001-02-20 | Shipley Company, L.L.C. | High conformality antireflective coating compositions |
US6242161B1 (en) * | 1998-05-29 | 2001-06-05 | Jsr Corporation | Acrylic copolymer and reflection-preventing film-forming composition containing the same |
US6316113B1 (en) | 1999-06-16 | 2001-11-13 | Xerox Corporation | Flexible loop leveling blade for flow coating process for manufacture of polymeric printer roll and belt components |
KR20020038283A (ko) * | 2000-11-17 | 2002-05-23 | 박종섭 | 포토레지스트 단량체, 그의 중합체 및 이를 함유하는포토레지스트 조성물 |
JP3509760B2 (ja) * | 2001-02-08 | 2004-03-22 | 株式会社半導体先端テクノロジーズ | 半導体装置の製造方法 |
KR20030059970A (ko) * | 2002-01-04 | 2003-07-12 | 주식회사 몰커스 | 패턴 무너짐 현상을 극복하기 위한 유기 난반사 방지막조성물 및 이를 이용한 패턴 형성방법 |
JP3851594B2 (ja) * | 2002-07-04 | 2006-11-29 | Azエレクトロニックマテリアルズ株式会社 | 反射防止コーティング用組成物およびパターン形成方法 |
KR101041285B1 (ko) * | 2004-01-15 | 2011-06-14 | 제이에스알 가부시끼가이샤 | 액침용 상층막 형성 조성물 및 포토레지스트 패턴 형성방법 |
JP4355944B2 (ja) * | 2004-04-16 | 2009-11-04 | 信越化学工業株式会社 | パターン形成方法及びこれに用いるレジスト上層膜材料 |
US20060008731A1 (en) * | 2004-07-09 | 2006-01-12 | Michael Van Der Puy | Novel photoresist monomers and polymers |
US20060008730A1 (en) * | 2004-07-09 | 2006-01-12 | Puy Michael V D | Monomers for photoresists bearing acid-labile groups of reduced optical density |
EP2277929B1 (de) * | 2004-09-30 | 2012-11-21 | JSR Corporation | Copolymer und oberfilmbildende Zusammensetzung |
KR100574993B1 (ko) * | 2004-11-19 | 2006-05-02 | 삼성전자주식회사 | 포토레지스트용 탑 코팅 조성물과 이를 이용한포토레지스트 패턴 형성 방법 |
JP4322205B2 (ja) * | 2004-12-27 | 2009-08-26 | 東京応化工業株式会社 | レジスト保護膜形成用材料およびこれを用いたレジストパターン形成方法 |
JP4724427B2 (ja) * | 2005-01-27 | 2011-07-13 | 富士フイルム株式会社 | 塗布組成物、光学フィルム、反射防止フィルム、偏光板およびそれらを用いたディスプレイ装置 |
JP4595606B2 (ja) * | 2005-03-17 | 2010-12-08 | Jsr株式会社 | 反射防止膜形成用組成物、積層体およびレジストパターンの形成方法 |
KR101365275B1 (ko) * | 2006-10-13 | 2014-02-26 | 제이에스알 가부시끼가이샤 | 상층막 형성용 조성물 및 포토레지스트 패턴 형성 방법 |
US20090035704A1 (en) * | 2007-08-03 | 2009-02-05 | Hong Zhuang | Underlayer Coating Composition Based on a Crosslinkable Polymer |
US8039201B2 (en) * | 2007-11-21 | 2011-10-18 | Az Electronic Materials Usa Corp. | Antireflective coating composition and process thereof |
US20100015550A1 (en) * | 2008-07-17 | 2010-01-21 | Weihong Liu | Dual damascene via filling composition |
US20100272658A1 (en) | 2009-04-27 | 2010-10-28 | Akzo Nobel Chemicals International B.V. | Enhanced efficiency of sunscreen compositions |
US8445181B2 (en) | 2010-06-03 | 2013-05-21 | Az Electronic Materials Usa Corp. | Antireflective coating composition and process thereof |
KR101807198B1 (ko) * | 2010-11-09 | 2017-12-11 | 주식회사 동진쎄미켐 | 극자외선 리소그라피용 포토레지스트 탑코트 조성물과 이를 이용하는 패턴 형성 방법 |
US8563672B2 (en) * | 2010-12-17 | 2013-10-22 | E I Du Pont De Nemours And Company | Process for producing fluorinated copolymers of (meth)acrylates and (meth)acrylic acid amine complexes |
FR2986004B1 (fr) * | 2012-01-25 | 2014-03-14 | Seppic Sa | Nouveau polymere epaississant reduisant le caractere collant des formules cosmetiques a base de glycerine |
KR102095314B1 (ko) * | 2015-09-30 | 2020-03-31 | 후지필름 가부시키가이샤 | 패턴 형성 방법, 전자 디바이스의 제조 방법, 및 적층체 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1175420A (en) * | 1967-02-15 | 1969-12-23 | Minnesota Mining & Mfg | Fluorine-Containing Polymers |
JPS6029724B2 (ja) * | 1977-05-13 | 1985-07-12 | 旭硝子株式会社 | 撥水撥油性の優れた重合体の製造方法 |
JPH02202904A (ja) * | 1989-02-02 | 1990-08-13 | Daikin Ind Ltd | 含フツ素メタクリル酸エステル系重合体及びレジスト材料 |
DE4027594A1 (de) * | 1990-08-31 | 1992-03-05 | Herberts Gmbh | Wasserverduennbares copolymerisat, dessen herstellung und verwendung, sowie waessrige ueberzugsmittel |
DE69214035T2 (de) * | 1991-06-28 | 1997-04-10 | Ibm | Reflexionsverminderde Überzüge |
US5139879A (en) * | 1991-09-20 | 1992-08-18 | Allied-Signal Inc. | Fluoropolymer blend anti-reflection coatings and coated articles |
US5118579A (en) * | 1991-09-20 | 1992-06-02 | Allied-Signal Inc. | Fluoropolymer blends for coatings |
-
1993
- 1993-08-04 DE DE69323812T patent/DE69323812T2/de not_active Expired - Lifetime
- 1993-08-04 EP EP93306164A patent/EP0583918B1/de not_active Expired - Lifetime
- 1993-08-13 US US08/105,622 patent/US5410005A/en not_active Expired - Lifetime
- 1993-08-13 KR KR1019930015681A patent/KR100249445B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR100249445B1 (ko) | 2000-06-01 |
US5410005A (en) | 1995-04-25 |
EP0583918B1 (de) | 1999-03-10 |
KR940004384A (ko) | 1994-03-15 |
DE69323812T2 (de) | 1999-08-26 |
EP0583918A2 (de) | 1994-02-23 |
EP0583918A3 (de) | 1995-04-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |