DE69321627T2 - Lithographisches Verfahren - Google Patents

Lithographisches Verfahren

Info

Publication number
DE69321627T2
DE69321627T2 DE69321627T DE69321627T DE69321627T2 DE 69321627 T2 DE69321627 T2 DE 69321627T2 DE 69321627 T DE69321627 T DE 69321627T DE 69321627 T DE69321627 T DE 69321627T DE 69321627 T2 DE69321627 T2 DE 69321627T2
Authority
DE
Germany
Prior art keywords
pattern
ch2ch2o
surfactant
resist
molecular weight
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69321627T
Other languages
English (en)
Other versions
DE69321627D1 (de
Inventor
Tadahiro Ohmi
Hisayuki Shimada
Shigeki Shimomura
Akiyoshi Suzuki
Mamoru Miyawaki
Miyoko Noguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TADAHIRO OHMI SENDAI
Canon Inc
Original Assignee
TADAHIRO OHMI SENDAI
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP4233081A external-priority patent/JPH05308048A/ja
Application filed by TADAHIRO OHMI SENDAI, Canon Inc filed Critical TADAHIRO OHMI SENDAI
Publication of DE69321627D1 publication Critical patent/DE69321627D1/de
Application granted granted Critical
Publication of DE69321627T2 publication Critical patent/DE69321627T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70091—Illumination settings, i.e. intensity distribution in the pupil plane or angular distribution in the field plane; On-axis or off-axis settings, e.g. annular, dipole or quadrupole settings; Partial coherence control, i.e. sigma or numerical aperture [NA]
    • G03F7/701—Off-axis setting using an aperture
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/30—Imagewise removal using liquid means
    • G03F7/32—Liquid compositions therefor, e.g. developers
    • G03F7/322—Aqueous alkaline compositions
DE69321627T 1992-02-10 1993-02-09 Lithographisches Verfahren Expired - Lifetime DE69321627T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP5752692 1992-02-10
JP4233081A JPH05308048A (ja) 1992-02-10 1992-08-07 リソグラフィ工程
JP4233083A JPH05303209A (ja) 1992-02-10 1992-08-07 リソグラフィ工程

Publications (2)

Publication Number Publication Date
DE69321627D1 DE69321627D1 (de) 1998-11-26
DE69321627T2 true DE69321627T2 (de) 1999-04-22

Family

ID=27296291

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69321627T Expired - Lifetime DE69321627T2 (de) 1992-02-10 1993-02-09 Lithographisches Verfahren

Country Status (4)

Country Link
US (1) US6107007A (de)
EP (1) EP0556014B1 (de)
AT (1) ATE172551T1 (de)
DE (1) DE69321627T2 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002351094A (ja) * 2001-05-22 2002-12-04 Fuji Photo Film Co Ltd 現像液組成物及び画像形成方法
JP3889386B2 (ja) * 2003-09-30 2007-03-07 株式会社東芝 インプリント装置及びインプリント方法
CN100476597C (zh) * 2003-12-30 2009-04-08 东友精密化学株式会社 感放射线性组合物用低泡沫显影液
US20080176047A1 (en) * 2004-05-22 2008-07-24 Hynix Semiconductor Inc. Liquid Composition for Immersion Lithography and Lithography Method Using the Same
US20060209410A1 (en) * 2005-03-18 2006-09-21 Smith Adlai H Method and apparatus for compensation or amelioration of lens field curvature and other imaging defects by utilizing a multi-wavelength setting illumination source
DE602005024371D1 (de) 2005-05-10 2010-12-09 Agfa Gevaert Nv Verfahren zur Verarbeitung von Flachdruckplatten
US7916269B2 (en) 2007-07-24 2011-03-29 Asml Netherlands B.V. Lithographic apparatus and contamination removal or prevention method
US20090025753A1 (en) * 2007-07-24 2009-01-29 Asml Netherlands B.V. Lithographic Apparatus And Contamination Removal Or Prevention Method

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3100259A1 (de) * 1981-01-08 1982-08-05 Hoechst Ag, 6000 Frankfurt Verfahren und entwicklergemisch zum entwickeln von belichteten negativ arbeitenden diazoniumsalzschichten
JPH063549B2 (ja) * 1984-12-25 1994-01-12 株式会社東芝 ポジ型フォトレジスト現像液組成物
US4749640A (en) * 1986-09-02 1988-06-07 Monsanto Company Integrated circuit manufacturing process
GB8628613D0 (en) * 1986-11-29 1987-01-07 Horsell Graphic Ind Ltd Developing fluid for lithographic plates
JPH01129250A (ja) * 1987-11-16 1989-05-22 Tama Kagaku Kogyo Kk ポジ型フォトレジスト用現像液
JP2543742B2 (ja) * 1988-04-07 1996-10-16 富士写真フイルム株式会社 ポジ型フオトレジスト用現像液
DE68924303T2 (de) * 1988-06-14 1996-02-29 Nec Corp Optische Kopfanordnung.
JP2585070B2 (ja) * 1988-08-02 1997-02-26 日本ペイント株式会社 画像形成方法
US5305054A (en) * 1991-02-22 1994-04-19 Canon Kabushiki Kaisha Imaging method for manufacture of microdevices

Also Published As

Publication number Publication date
US6107007A (en) 2000-08-22
EP0556014B1 (de) 1998-10-21
DE69321627D1 (de) 1998-11-26
EP0556014A1 (de) 1993-08-18
ATE172551T1 (de) 1998-11-15

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