DE69317957D1 - Vorrichtung zur Erzeugung von Laserstrahlen - Google Patents

Vorrichtung zur Erzeugung von Laserstrahlen

Info

Publication number
DE69317957D1
DE69317957D1 DE69317957T DE69317957T DE69317957D1 DE 69317957 D1 DE69317957 D1 DE 69317957D1 DE 69317957 T DE69317957 T DE 69317957T DE 69317957 T DE69317957 T DE 69317957T DE 69317957 D1 DE69317957 D1 DE 69317957D1
Authority
DE
Germany
Prior art keywords
resonator
laser beams
generating laser
wavelength conversion
error signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69317957T
Other languages
English (en)
Other versions
DE69317957T2 (de
Inventor
Naoya Eguchi
Michio Oka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Application granted granted Critical
Publication of DE69317957D1 publication Critical patent/DE69317957D1/de
Publication of DE69317957T2 publication Critical patent/DE69317957T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/37—Non-linear optics for second-harmonic generation
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
    • G02F1/3542—Multipass arrangements, i.e. arrangements to make light pass multiple times through the same element, e.g. using an enhancement cavity
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
    • H01S3/0092—Nonlinear frequency conversion, e.g. second harmonic generation [SHG] or sum- or difference-frequency generation outside the laser cavity
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
    • H01S3/139—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length
    • H01S3/1398—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length by using a supplementary modulation of the output

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
  • Laser Beam Processing (AREA)
  • Laser Surgery Devices (AREA)
DE69317957T 1992-07-28 1993-07-23 Vorrichtung zur Erzeugung von Laserstrahlen Expired - Lifetime DE69317957T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20132892A JP3309430B2 (ja) 1992-07-28 1992-07-28 レーザ光発生装置

Publications (2)

Publication Number Publication Date
DE69317957D1 true DE69317957D1 (de) 1998-05-20
DE69317957T2 DE69317957T2 (de) 1998-11-19

Family

ID=16439195

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69317957T Expired - Lifetime DE69317957T2 (de) 1992-07-28 1993-07-23 Vorrichtung zur Erzeugung von Laserstrahlen

Country Status (5)

Country Link
US (1) US5339324A (de)
EP (1) EP0582884B1 (de)
JP (1) JP3309430B2 (de)
AT (1) ATE165173T1 (de)
DE (1) DE69317957T2 (de)

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US5691999A (en) * 1994-09-30 1997-11-25 United Technologies Corporation Compression-tuned fiber laser
US5616159A (en) * 1995-04-14 1997-04-01 Corning Incorporated Method of forming high purity fused silica having high resistance to optical damage
US5832009A (en) * 1995-08-18 1998-11-03 Sony Corporation Laser light emitting device, laser beacon device and laser imager display device
US6619073B2 (en) 1996-03-05 2003-09-16 Corning Incorporated Method of increasing the initial transmittance of optical glass
DE19620594A1 (de) * 1996-05-22 1997-11-27 Sel Alcatel Ag Resonator für elektromagnetische Wellen mit einer Stabilisierungseinrichtung und Verfahren zum Stabilisieren der Resonatorlänge
DE19647878A1 (de) * 1996-11-19 1998-05-20 Daimler Benz Ag Laser- und Verstärkersystem zur Erzeugung von Laserstrahlung im sichtbaren Wellenlängenbereich
JP3007875B2 (ja) * 1998-04-20 2000-02-07 オー・エム・シー株式会社 レーザ出力検出方法とその装置並びに該方法を利用したレーザ出力制御方法とその装置
US6175579B1 (en) 1998-10-27 2001-01-16 Precision Light L.L.C. Apparatus and method for laser frequency control
AU3855300A (en) 1999-01-26 2000-08-07 California Institute Of Technology Opto-electronic oscillators having optical resonators
JP2000223760A (ja) * 1999-02-04 2000-08-11 Nec Corp イオンレーザ装置及びイオンレーザ装置のミラー角度調整方法
JP4332933B2 (ja) * 1999-06-10 2009-09-16 ソニー株式会社 検査装置
DE10302031A1 (de) * 2003-01-21 2004-09-23 Evotec Oai Ag Faser-Laser
US7286582B1 (en) * 2003-10-08 2007-10-23 Fay Jr Theodore Denis Optical external cavities having brewster angle wedges
JP2006049584A (ja) * 2004-08-04 2006-02-16 Sony Corp レーザ光発生装置
US20090229651A1 (en) * 2008-03-14 2009-09-17 Fay Jr Theodore Denis Solar energy production system
EP2524260A4 (de) * 2009-08-11 2013-07-24 Chromx Llc Ultradunkelfeldmikroskop
US9509112B2 (en) 2013-06-11 2016-11-29 Kla-Tencor Corporation CW DUV laser with improved stability
US9293882B2 (en) 2013-09-10 2016-03-22 Kla-Tencor Corporation Low noise, high stability, deep ultra-violet, continuous wave laser
WO2015093210A1 (ja) * 2013-12-20 2015-06-25 ソニー株式会社 光源装置及び波長変換方法
US10067404B2 (en) 2013-12-24 2018-09-04 Sony Corporation Device for controlling resonator light path length
WO2015097972A1 (en) 2013-12-26 2015-07-02 Sony Corporation Control device, control method, and program
US10175555B2 (en) 2017-01-03 2019-01-08 KLA—Tencor Corporation 183 nm CW laser and inspection system
CN108336632B (zh) * 2017-01-18 2020-03-06 中国科学院理化技术研究所 一种腔镜晶体一体化的超稳腔装置及方法
US12308600B2 (en) 2021-05-21 2025-05-20 Lasertec Corporation Light source apparatus and inspection apparatus

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4410992A (en) * 1980-03-26 1983-10-18 Laser Science, Inc. Generation of pulsed laser radiation at a finely controlled frequency by transient regerative amplification
US4896324A (en) * 1988-12-22 1990-01-23 United Technologies Corporation Method and apparatus for optimizing coupled laser resonator performance
US5053641A (en) * 1989-07-14 1991-10-01 Cornell Research Foundation, Inc. Tunable optical parametric oscillator
JP2505892B2 (ja) * 1989-08-03 1996-06-12 浜松ホトニクス株式会社 パラメトリツクパルスレ―ザ
JP2893862B2 (ja) * 1990-05-16 1999-05-24 ソニー株式会社 固体レーザー発振器
US5027360A (en) * 1990-06-13 1991-06-25 Stanford University High power continuous wave injection-locked solid state laser
US5293263A (en) * 1990-09-07 1994-03-08 U.S. Philips Corporation Electro-optical modulator which provides optical bias stabilization during operation
US5199038A (en) * 1990-10-09 1993-03-30 Vahala Kerry J Semiconductor laser noise reduction
US5130997A (en) * 1990-12-18 1992-07-14 Laserscope Medical laser apparatus, high powered red laser used in same, and laser resonator with non-linear output
US5206868A (en) * 1990-12-20 1993-04-27 Deacon Research Resonant nonlinear laser beam converter
US5077748A (en) 1991-04-01 1991-12-31 International Business Machines Corporation Laser system and method
JP2805402B2 (ja) * 1991-07-30 1998-09-30 富士写真フイルム株式会社 光波長変換装置
US5175737A (en) * 1991-09-23 1992-12-29 Rockwell International Corporation Cavity referenced acousto-optical laser frequency stabilization
US5212711A (en) * 1992-02-18 1993-05-18 At&T Bell Laboratories Harmonically mode-locked laser
JP3564705B2 (ja) * 1992-03-02 2004-09-15 ソニー株式会社 レーザ光発生装置

Also Published As

Publication number Publication date
DE69317957T2 (de) 1998-11-19
EP0582884A1 (de) 1994-02-16
EP0582884B1 (de) 1998-04-15
ATE165173T1 (de) 1998-05-15
JPH0653593A (ja) 1994-02-25
US5339324A (en) 1994-08-16
JP3309430B2 (ja) 2002-07-29

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Legal Events

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