ATE165173T1 - Vorrichtung zur erzeugung von laserstrahlen - Google Patents
Vorrichtung zur erzeugung von laserstrahlenInfo
- Publication number
- ATE165173T1 ATE165173T1 AT93111875T AT93111875T ATE165173T1 AT E165173 T1 ATE165173 T1 AT E165173T1 AT 93111875 T AT93111875 T AT 93111875T AT 93111875 T AT93111875 T AT 93111875T AT E165173 T1 ATE165173 T1 AT E165173T1
- Authority
- AT
- Austria
- Prior art keywords
- resonator
- laser beams
- generating laser
- wavelength conversion
- error signal
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/37—Non-linear optics for second-harmonic generation
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
- G02F1/3542—Multipass arrangements, i.e. arrangements to make light pass multiple times through the same element, e.g. using an enhancement cavity
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
- H01S3/0092—Nonlinear frequency conversion, e.g. second harmonic generation [SHG] or sum- or difference-frequency generation outside the laser cavity
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
- H01S3/139—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length
- H01S3/1398—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length by using a supplementary modulation of the output
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
- Laser Surgery Devices (AREA)
- Laser Beam Processing (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20132892A JP3309430B2 (ja) | 1992-07-28 | 1992-07-28 | レーザ光発生装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE165173T1 true ATE165173T1 (de) | 1998-05-15 |
Family
ID=16439195
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT93111875T ATE165173T1 (de) | 1992-07-28 | 1993-07-23 | Vorrichtung zur erzeugung von laserstrahlen |
Country Status (5)
Country | Link |
---|---|
US (1) | US5339324A (de) |
EP (1) | EP0582884B1 (de) |
JP (1) | JP3309430B2 (de) |
AT (1) | ATE165173T1 (de) |
DE (1) | DE69317957T2 (de) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5691999A (en) * | 1994-09-30 | 1997-11-25 | United Technologies Corporation | Compression-tuned fiber laser |
US5616159A (en) * | 1995-04-14 | 1997-04-01 | Corning Incorporated | Method of forming high purity fused silica having high resistance to optical damage |
US5832009A (en) * | 1995-08-18 | 1998-11-03 | Sony Corporation | Laser light emitting device, laser beacon device and laser imager display device |
US6619073B2 (en) | 1996-03-05 | 2003-09-16 | Corning Incorporated | Method of increasing the initial transmittance of optical glass |
DE19620594A1 (de) * | 1996-05-22 | 1997-11-27 | Sel Alcatel Ag | Resonator für elektromagnetische Wellen mit einer Stabilisierungseinrichtung und Verfahren zum Stabilisieren der Resonatorlänge |
DE19647878A1 (de) * | 1996-11-19 | 1998-05-20 | Daimler Benz Ag | Laser- und Verstärkersystem zur Erzeugung von Laserstrahlung im sichtbaren Wellenlängenbereich |
JP3007875B2 (ja) * | 1998-04-20 | 2000-02-07 | オー・エム・シー株式会社 | レーザ出力検出方法とその装置並びに該方法を利用したレーザ出力制御方法とその装置 |
US6175579B1 (en) | 1998-10-27 | 2001-01-16 | Precision Light L.L.C. | Apparatus and method for laser frequency control |
AU3855300A (en) | 1999-01-26 | 2000-08-07 | California Institute Of Technology | Opto-electronic oscillators having optical resonators |
JP2000223760A (ja) * | 1999-02-04 | 2000-08-11 | Nec Corp | イオンレーザ装置及びイオンレーザ装置のミラー角度調整方法 |
JP4332933B2 (ja) * | 1999-06-10 | 2009-09-16 | ソニー株式会社 | 検査装置 |
DE10302031A1 (de) * | 2003-01-21 | 2004-09-23 | Evotec Oai Ag | Faser-Laser |
US7286582B1 (en) * | 2003-10-08 | 2007-10-23 | Fay Jr Theodore Denis | Optical external cavities having brewster angle wedges |
JP2006049584A (ja) * | 2004-08-04 | 2006-02-16 | Sony Corp | レーザ光発生装置 |
US20090229651A1 (en) * | 2008-03-14 | 2009-09-17 | Fay Jr Theodore Denis | Solar energy production system |
US20110068279A1 (en) * | 2009-08-11 | 2011-03-24 | Fay Jr Theodore Denis | Ultra dark field microscope |
US9509112B2 (en) * | 2013-06-11 | 2016-11-29 | Kla-Tencor Corporation | CW DUV laser with improved stability |
US9293882B2 (en) | 2013-09-10 | 2016-03-22 | Kla-Tencor Corporation | Low noise, high stability, deep ultra-violet, continuous wave laser |
US10554011B2 (en) * | 2013-12-20 | 2020-02-04 | Sony Corporation | Light source device and wavelength conversion method using non-linear crystal and a first and second optical path length control mechanism |
US10067404B2 (en) | 2013-12-24 | 2018-09-04 | Sony Corporation | Device for controlling resonator light path length |
WO2015097972A1 (en) | 2013-12-26 | 2015-07-02 | Sony Corporation | Control device, control method, and program |
US10175555B2 (en) | 2017-01-03 | 2019-01-08 | KLA—Tencor Corporation | 183 nm CW laser and inspection system |
CN108336632B (zh) * | 2017-01-18 | 2020-03-06 | 中国科学院理化技术研究所 | 一种腔镜晶体一体化的超稳腔装置及方法 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4410992A (en) * | 1980-03-26 | 1983-10-18 | Laser Science, Inc. | Generation of pulsed laser radiation at a finely controlled frequency by transient regerative amplification |
US4896324A (en) * | 1988-12-22 | 1990-01-23 | United Technologies Corporation | Method and apparatus for optimizing coupled laser resonator performance |
US5053641A (en) * | 1989-07-14 | 1991-10-01 | Cornell Research Foundation, Inc. | Tunable optical parametric oscillator |
JP2505892B2 (ja) * | 1989-08-03 | 1996-06-12 | 浜松ホトニクス株式会社 | パラメトリツクパルスレ―ザ |
JP2893862B2 (ja) * | 1990-05-16 | 1999-05-24 | ソニー株式会社 | 固体レーザー発振器 |
US5027360A (en) * | 1990-06-13 | 1991-06-25 | Stanford University | High power continuous wave injection-locked solid state laser |
US5293263A (en) * | 1990-09-07 | 1994-03-08 | U.S. Philips Corporation | Electro-optical modulator which provides optical bias stabilization during operation |
US5199038A (en) * | 1990-10-09 | 1993-03-30 | Vahala Kerry J | Semiconductor laser noise reduction |
US5130997A (en) * | 1990-12-18 | 1992-07-14 | Laserscope | Medical laser apparatus, high powered red laser used in same, and laser resonator with non-linear output |
US5206868A (en) * | 1990-12-20 | 1993-04-27 | Deacon Research | Resonant nonlinear laser beam converter |
JP2805402B2 (ja) * | 1991-07-30 | 1998-09-30 | 富士写真フイルム株式会社 | 光波長変換装置 |
US5175737A (en) * | 1991-09-23 | 1992-12-29 | Rockwell International Corporation | Cavity referenced acousto-optical laser frequency stabilization |
US5212711A (en) * | 1992-02-18 | 1993-05-18 | At&T Bell Laboratories | Harmonically mode-locked laser |
JP3564705B2 (ja) * | 1992-03-02 | 2004-09-15 | ソニー株式会社 | レーザ光発生装置 |
-
1992
- 1992-07-28 JP JP20132892A patent/JP3309430B2/ja not_active Expired - Lifetime
-
1993
- 1993-07-22 US US08/096,346 patent/US5339324A/en not_active Expired - Lifetime
- 1993-07-23 AT AT93111875T patent/ATE165173T1/de active
- 1993-07-23 EP EP93111875A patent/EP0582884B1/de not_active Expired - Lifetime
- 1993-07-23 DE DE69317957T patent/DE69317957T2/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0582884B1 (de) | 1998-04-15 |
JP3309430B2 (ja) | 2002-07-29 |
DE69317957D1 (de) | 1998-05-20 |
DE69317957T2 (de) | 1998-11-19 |
US5339324A (en) | 1994-08-16 |
EP0582884A1 (de) | 1994-02-16 |
JPH0653593A (ja) | 1994-02-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
UEP | Publication of translation of european patent specification |