DE69312554D1 - Robotereinrichtung - Google Patents

Robotereinrichtung

Info

Publication number
DE69312554D1
DE69312554D1 DE69312554T DE69312554T DE69312554D1 DE 69312554 D1 DE69312554 D1 DE 69312554D1 DE 69312554 T DE69312554 T DE 69312554T DE 69312554 T DE69312554 T DE 69312554T DE 69312554 D1 DE69312554 D1 DE 69312554D1
Authority
DE
Germany
Prior art keywords
robotic device
robotic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69312554T
Other languages
English (en)
Other versions
DE69312554T2 (de
Inventor
Howard Grunes
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of DE69312554D1 publication Critical patent/DE69312554D1/de
Application granted granted Critical
Publication of DE69312554T2 publication Critical patent/DE69312554T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • B25J9/1065—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms
    • B25J9/107—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms of the froglegs type

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Specific Conveyance Elements (AREA)
DE69312554T 1992-04-23 1993-04-22 Robotereinrichtung Expired - Fee Related DE69312554T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US87342292A 1992-04-23 1992-04-23

Publications (2)

Publication Number Publication Date
DE69312554D1 true DE69312554D1 (de) 1997-09-04
DE69312554T2 DE69312554T2 (de) 1998-02-19

Family

ID=25361604

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69330968T Expired - Fee Related DE69330968T2 (de) 1992-04-23 1993-04-22 Robotervorrichtung
DE69312554T Expired - Fee Related DE69312554T2 (de) 1992-04-23 1993-04-22 Robotereinrichtung

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69330968T Expired - Fee Related DE69330968T2 (de) 1992-04-23 1993-04-22 Robotervorrichtung

Country Status (5)

Country Link
EP (2) EP0742084B1 (de)
JP (1) JPH0773833B2 (de)
KR (1) KR100281239B1 (de)
DE (2) DE69330968T2 (de)
ES (1) ES2106219T3 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5180276A (en) * 1991-04-18 1993-01-19 Brooks Automation, Inc. Articulated arm transfer device
JP3769802B2 (ja) * 1996-02-09 2006-04-26 株式会社日立製作所 半導体装置の製造方法
EP0960696A4 (de) * 1996-03-22 2000-02-02 Komatsu Mfg Co Ltd Roboter zum handhaben
JP3757016B2 (ja) * 1997-02-20 2006-03-22 ローツェ株式会社 ハンドリング用ロボット
US6132165A (en) * 1998-02-23 2000-10-17 Applied Materials, Inc. Single drive, dual plane robot
JP2000150615A (ja) * 1998-11-17 2000-05-30 Tokyo Electron Ltd 搬送装置
US6609877B1 (en) 2000-10-04 2003-08-26 The Boc Group, Inc. Vacuum chamber load lock structure and article transport mechanism
JP4485086B2 (ja) * 2001-02-28 2010-06-16 Ｊｕｋｉ株式会社 縫製装置
JP3804780B2 (ja) * 2002-04-25 2006-08-02 ナブテスコ株式会社 ロボットアーム及びロボット
JP4000036B2 (ja) 2002-09-30 2007-10-31 東京エレクトロン株式会社 搬送装置
JP4515133B2 (ja) * 2004-04-02 2010-07-28 株式会社アルバック 搬送装置及びその制御方法並びに真空処理装置
JP4233520B2 (ja) * 2004-12-28 2009-03-04 ローツェ株式会社 ハンドリング用ロボット
JP5306908B2 (ja) * 2009-06-03 2013-10-02 東京エレクトロン株式会社 搬送モジュール
JP5525399B2 (ja) 2010-09-16 2014-06-18 東京エレクトロン株式会社 搬送装置、基板処理システム及び姿勢制御機構
JP6581831B2 (ja) 2015-07-28 2019-09-25 東京エレクトロン株式会社 保持部の姿勢維持機構
RU171274U1 (ru) * 2016-11-22 2017-05-29 Акционерное общество "Делан" Анодный заземлитель
JP6417444B2 (ja) * 2017-04-20 2018-11-07 株式会社ダイヘン 搬送装置
CN114604621B (zh) * 2022-04-02 2023-08-11 合肥哈工长隆智能装备科技有限公司 一种轮毂锻造自动化加工机器人

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1144724B (it) * 1981-06-03 1986-10-29 Comau Spa Apparecchio manipolatore a due bracci contrapposti
JPS60207786A (ja) * 1984-03-29 1985-10-19 ぺんてる株式会社 ア−ム直線駆動型ロボツト
DE3573899D1 (en) * 1984-05-02 1989-11-30 Tokuda Seisakusho Carrying device
US4712971A (en) * 1985-02-13 1987-12-15 The Charles Stark Draper Laboratory, Inc. Control arm assembly
JPS61244475A (ja) * 1985-04-22 1986-10-30 株式会社東芝 産業用ロボツト
US4929146A (en) * 1987-11-13 1990-05-29 U.S. Philips Corporation Manipulator
JPH0825151B2 (ja) * 1988-09-16 1996-03-13 東京応化工業株式会社 ハンドリングユニット
EP0858867A3 (de) * 1989-10-20 1999-03-17 Applied Materials, Inc. Robotereinrichtung
DE9200071U1 (de) * 1992-01-04 1992-04-30 G + W Bühler Maschinenbau GmbH & Co. KG, 7836 Bahlingen Handhabungsgerät

Also Published As

Publication number Publication date
EP0567121B1 (de) 1997-07-30
ES2106219T3 (es) 1997-11-01
EP0742084A2 (de) 1996-11-13
EP0742084A3 (de) 1997-01-02
DE69330968T2 (de) 2002-06-06
KR940005363A (ko) 1994-03-21
EP0567121A1 (de) 1993-10-27
JPH0615592A (ja) 1994-01-25
EP0742084B1 (de) 2001-10-17
DE69330968D1 (de) 2001-11-22
JPH0773833B2 (ja) 1995-08-09
KR100281239B1 (ko) 2001-02-01
DE69312554T2 (de) 1998-02-19

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee