DE69312554D1 - Robotereinrichtung - Google Patents
RobotereinrichtungInfo
- Publication number
- DE69312554D1 DE69312554D1 DE69312554T DE69312554T DE69312554D1 DE 69312554 D1 DE69312554 D1 DE 69312554D1 DE 69312554 T DE69312554 T DE 69312554T DE 69312554 T DE69312554 T DE 69312554T DE 69312554 D1 DE69312554 D1 DE 69312554D1
- Authority
- DE
- Germany
- Prior art keywords
- robotic device
- robotic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J18/00—Arms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
- B25J9/1065—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms
- B25J9/107—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms of the froglegs type
Landscapes
- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Specific Conveyance Elements (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US87342292A | 1992-04-23 | 1992-04-23 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69312554D1 true DE69312554D1 (de) | 1997-09-04 |
DE69312554T2 DE69312554T2 (de) | 1998-02-19 |
Family
ID=25361604
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69330968T Expired - Fee Related DE69330968T2 (de) | 1992-04-23 | 1993-04-22 | Robotervorrichtung |
DE69312554T Expired - Fee Related DE69312554T2 (de) | 1992-04-23 | 1993-04-22 | Robotereinrichtung |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69330968T Expired - Fee Related DE69330968T2 (de) | 1992-04-23 | 1993-04-22 | Robotervorrichtung |
Country Status (5)
Country | Link |
---|---|
EP (2) | EP0742084B1 (de) |
JP (1) | JPH0773833B2 (de) |
KR (1) | KR100281239B1 (de) |
DE (2) | DE69330968T2 (de) |
ES (1) | ES2106219T3 (de) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5180276A (en) * | 1991-04-18 | 1993-01-19 | Brooks Automation, Inc. | Articulated arm transfer device |
JP3769802B2 (ja) * | 1996-02-09 | 2006-04-26 | 株式会社日立製作所 | 半導体装置の製造方法 |
US6364599B1 (en) | 1996-03-22 | 2002-04-02 | Komatsu Ltd. | Robot for handling |
JP3757016B2 (ja) * | 1997-02-20 | 2006-03-22 | ローツェ株式会社 | ハンドリング用ロボット |
US6132165A (en) * | 1998-02-23 | 2000-10-17 | Applied Materials, Inc. | Single drive, dual plane robot |
JP2000150615A (ja) * | 1998-11-17 | 2000-05-30 | Tokyo Electron Ltd | 搬送装置 |
US6609877B1 (en) * | 2000-10-04 | 2003-08-26 | The Boc Group, Inc. | Vacuum chamber load lock structure and article transport mechanism |
JP4485086B2 (ja) * | 2001-02-28 | 2010-06-16 | Juki株式会社 | 縫製装置 |
JP3804780B2 (ja) * | 2002-04-25 | 2006-08-02 | ナブテスコ株式会社 | ロボットアーム及びロボット |
JP4000036B2 (ja) | 2002-09-30 | 2007-10-31 | 東京エレクトロン株式会社 | 搬送装置 |
JP4515133B2 (ja) * | 2004-04-02 | 2010-07-28 | 株式会社アルバック | 搬送装置及びその制御方法並びに真空処理装置 |
JP4233520B2 (ja) * | 2004-12-28 | 2009-03-04 | ローツェ株式会社 | ハンドリング用ロボット |
JP5306908B2 (ja) * | 2009-06-03 | 2013-10-02 | 東京エレクトロン株式会社 | 搬送モジュール |
JP5525399B2 (ja) | 2010-09-16 | 2014-06-18 | 東京エレクトロン株式会社 | 搬送装置、基板処理システム及び姿勢制御機構 |
JP6581831B2 (ja) | 2015-07-28 | 2019-09-25 | 東京エレクトロン株式会社 | 保持部の姿勢維持機構 |
RU171274U1 (ru) * | 2016-11-22 | 2017-05-29 | Акционерное общество "Делан" | Анодный заземлитель |
JP6417444B2 (ja) * | 2017-04-20 | 2018-11-07 | 株式会社ダイヘン | 搬送装置 |
CN112768392B (zh) * | 2021-01-07 | 2024-06-21 | 北京北方华创微电子装备有限公司 | 晶片传输装置 |
CN114604621B (zh) * | 2022-04-02 | 2023-08-11 | 合肥哈工长隆智能装备科技有限公司 | 一种轮毂锻造自动化加工机器人 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT1144724B (it) * | 1981-06-03 | 1986-10-29 | Comau Spa | Apparecchio manipolatore a due bracci contrapposti |
JPS60207786A (ja) * | 1984-03-29 | 1985-10-19 | ぺんてる株式会社 | ア−ム直線駆動型ロボツト |
EP0160305B1 (de) * | 1984-05-02 | 1989-10-25 | Kabushiki Kaisha Tokuda Seisakusho | Tragevorrichtung |
US4712971A (en) * | 1985-02-13 | 1987-12-15 | The Charles Stark Draper Laboratory, Inc. | Control arm assembly |
JPS61244475A (ja) * | 1985-04-22 | 1986-10-30 | 株式会社東芝 | 産業用ロボツト |
US4929146A (en) * | 1987-11-13 | 1990-05-29 | U.S. Philips Corporation | Manipulator |
JPH0825151B2 (ja) * | 1988-09-16 | 1996-03-13 | 東京応化工業株式会社 | ハンドリングユニット |
DE69032945T2 (de) * | 1989-10-20 | 1999-09-16 | Applied Materials, Inc. | Robotereinrichtung |
DE9200071U1 (de) * | 1992-01-04 | 1992-04-30 | G + W Bühler Maschinenbau GmbH & Co. KG, 7836 Bahlingen | Handhabungsgerät |
-
1993
- 1993-04-21 JP JP5094086A patent/JPH0773833B2/ja not_active Expired - Fee Related
- 1993-04-22 EP EP96112331A patent/EP0742084B1/de not_active Expired - Lifetime
- 1993-04-22 DE DE69330968T patent/DE69330968T2/de not_active Expired - Fee Related
- 1993-04-22 EP EP93106555A patent/EP0567121B1/de not_active Expired - Lifetime
- 1993-04-22 DE DE69312554T patent/DE69312554T2/de not_active Expired - Fee Related
- 1993-04-22 ES ES93106555T patent/ES2106219T3/es not_active Expired - Lifetime
- 1993-04-23 KR KR1019930006843A patent/KR100281239B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JPH0615592A (ja) | 1994-01-25 |
DE69312554T2 (de) | 1998-02-19 |
DE69330968D1 (de) | 2001-11-22 |
EP0567121B1 (de) | 1997-07-30 |
JPH0773833B2 (ja) | 1995-08-09 |
KR940005363A (ko) | 1994-03-21 |
KR100281239B1 (ko) | 2001-02-01 |
EP0742084A3 (de) | 1997-01-02 |
EP0742084B1 (de) | 2001-10-17 |
ES2106219T3 (es) | 1997-11-01 |
DE69330968T2 (de) | 2002-06-06 |
EP0742084A2 (de) | 1996-11-13 |
EP0567121A1 (de) | 1993-10-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |