DE69311627T2 - Schutzvorrichtung einer integrierten Schaltung gegen elektrostatische Entladungen - Google Patents
Schutzvorrichtung einer integrierten Schaltung gegen elektrostatische EntladungenInfo
- Publication number
- DE69311627T2 DE69311627T2 DE69311627T DE69311627T DE69311627T2 DE 69311627 T2 DE69311627 T2 DE 69311627T2 DE 69311627 T DE69311627 T DE 69311627T DE 69311627 T DE69311627 T DE 69311627T DE 69311627 T2 DE69311627 T2 DE 69311627T2
- Authority
- DE
- Germany
- Prior art keywords
- integrated circuit
- protection device
- electrostatic discharge
- circuit protection
- device against
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/0203—Particular design considerations for integrated circuits
- H01L27/0248—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection
- H01L27/0251—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices
- H01L27/0259—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices using bipolar transistors as protective elements
- H01L27/0262—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices using bipolar transistors as protective elements including a PNP transistor and a NPN transistor, wherein each of said transistors has its base coupled to the collector of the other transistor, e.g. silicon controlled rectifier [SCR] devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/0203—Particular design considerations for integrated circuits
- H01L27/0248—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection
- H01L27/0251—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices
- H01L27/0259—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices using bipolar transistors as protective elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/861—Diodes
- H01L29/87—Thyristor diodes, e.g. Shockley diodes, break-over diodes
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Semiconductor Integrated Circuits (AREA)
- Thyristors (AREA)
- Emergency Protection Circuit Devices (AREA)
- Protection Of Static Devices (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9205422A FR2690786A1 (fr) | 1992-04-30 | 1992-04-30 | Dispositif de protection d'un circuit intégré contre les décharges électrostatiques. |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69311627D1 DE69311627D1 (de) | 1997-07-24 |
DE69311627T2 true DE69311627T2 (de) | 1997-10-09 |
Family
ID=9429468
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69311627T Expired - Fee Related DE69311627T2 (de) | 1992-04-30 | 1993-04-22 | Schutzvorrichtung einer integrierten Schaltung gegen elektrostatische Entladungen |
Country Status (5)
Country | Link |
---|---|
US (2) | US5548134A (de) |
EP (1) | EP0568421B1 (de) |
JP (1) | JPH0662529A (de) |
DE (1) | DE69311627T2 (de) |
FR (1) | FR2690786A1 (de) |
Families Citing this family (35)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2690786A1 (fr) * | 1992-04-30 | 1993-10-29 | Sgs Thomson Microelectronics Sa | Dispositif de protection d'un circuit intégré contre les décharges électrostatiques. |
US6078083A (en) * | 1994-05-16 | 2000-06-20 | Texas Instruments Incorporated | ESD protection circuit for dual 3V/5V supply devices using single thickness gate oxides |
EP0704889A3 (de) * | 1994-09-29 | 1998-10-21 | Siemens Aktiengesellschaft | Leistungshalbleiterbauelement mit monolithisch integriertem Messwiderstand und Verfahren zu dessen Herstellung |
US5747834A (en) * | 1995-09-29 | 1998-05-05 | Texas Instruments Inc | Adjustable Bipolar SCR holding voltage for ESD protection circuits in high speed Bipolar/BiCMOS circuits |
EP0785576A3 (de) * | 1995-09-29 | 1998-10-07 | Texas Instruments Incorporated | Schaltung mit einem Schutzmittel |
KR100222078B1 (ko) * | 1996-11-02 | 1999-10-01 | 윤종용 | 최소면적에 형성되는 정전기 보호 회로 |
AU4726197A (en) * | 1996-11-07 | 1998-05-29 | Hitachi Limited | Semiconductor integrated circuit device and its manufacture |
JP3732908B2 (ja) * | 1996-12-27 | 2006-01-11 | 三洋電機株式会社 | 半導体集積回路 |
JP3557510B2 (ja) * | 1997-06-30 | 2004-08-25 | 沖電気工業株式会社 | 半導体装置 |
US5977639A (en) * | 1997-09-30 | 1999-11-02 | Intel Corporation | Metal staples to prevent interlayer delamination |
US5936284A (en) | 1997-11-03 | 1999-08-10 | Sgs-Thomson Microelectronics S.R.L. | Electrostatic discharge protection circuit and transistor |
US6137144A (en) * | 1998-04-08 | 2000-10-24 | Texas Instruments Incorporated | On-chip ESD protection in dual voltage CMOS |
KR100493006B1 (ko) * | 1998-06-16 | 2005-08-04 | 삼성전자주식회사 | 정전기보호역할을겸하는블락가드링구조 |
GB9817120D0 (en) * | 1998-08-07 | 1998-10-07 | Abb Power T & D Limited | Improvements in or relating to electronic components |
US6825504B2 (en) * | 1999-05-03 | 2004-11-30 | Hitachi, Ltd. | Semiconductor integrated circuit device and method of manufacturing the same |
US6304423B1 (en) * | 1999-06-08 | 2001-10-16 | Delphi Technologies, Inc. | Input protection circuit for a semiconductor device |
DE10005811A1 (de) * | 2000-02-10 | 2001-08-23 | Micronas Gmbh | Laterale Thyristorstruktur zum Schutz vor elektrostatischer Entladung |
US6700164B1 (en) * | 2000-07-07 | 2004-03-02 | International Business Machines Corporation | Tungsten hot wire current limiter for ESD protection |
US6611025B2 (en) * | 2001-09-05 | 2003-08-26 | Winbond Electronics Corp. | Apparatus and method for improved power bus ESD protection |
AU2002304066A1 (en) * | 2002-05-24 | 2003-12-12 | National Institute Of Advanced Industrial Science And Technology | Electric signal transmission line |
US6720622B1 (en) * | 2002-07-05 | 2004-04-13 | Taiwan Semiconductor Manufacturing Company | SCR-ESD structures with shallow trench isolation |
JP3810375B2 (ja) | 2003-03-14 | 2006-08-16 | ローム株式会社 | 半導体装置 |
US9842629B2 (en) | 2004-06-25 | 2017-12-12 | Cypress Semiconductor Corporation | Memory cell array latchup prevention |
US7773442B2 (en) | 2004-06-25 | 2010-08-10 | Cypress Semiconductor Corporation | Memory cell array latchup prevention |
KR100679943B1 (ko) * | 2004-11-10 | 2007-02-08 | 주식회사 하이닉스반도체 | 낮은 촉발전압에서 동작이 가능한 실리콘제어정류기구조의 정전기방전 보호 회로 |
US7230807B2 (en) * | 2004-12-15 | 2007-06-12 | Vice Michael W | Protection circuit for a transistor |
US7417287B2 (en) * | 2005-07-01 | 2008-08-26 | System General Corp. | Electrostatic discharge device having controllable trigger voltage |
JP5595751B2 (ja) * | 2009-03-11 | 2014-09-24 | ルネサスエレクトロニクス株式会社 | Esd保護素子 |
EP2230736B1 (de) * | 2009-03-20 | 2014-12-17 | ABB Research Ltd. | Verkapselungssystem für einphasige verkapselte Schaltanlage |
CN102569267A (zh) * | 2010-12-08 | 2012-07-11 | 凹凸电子(武汉)有限公司 | 集成电路、信号传输方法以及集成电路制造方法 |
DE102011018450B4 (de) | 2011-04-21 | 2017-08-31 | Infineon Technologies Ag | Halbleiterbauelement mit durchgeschalteten parasitären Thyristor bei einem Lichtangriff und Halbleiterbauelement mit Alarmschaltung für einen Lichtangriff |
US8878334B1 (en) | 2012-03-23 | 2014-11-04 | Altera Corporation | Integrated circuit resistors with reduced parasitic capacitance |
JP7007564B2 (ja) * | 2017-11-10 | 2022-01-24 | ミツミ電機株式会社 | レギュレータ用半導体集積回路 |
US10861848B2 (en) * | 2018-08-23 | 2020-12-08 | Xilinx, Inc. | Single event latch-up (SEL) mitigation techniques |
US11037921B2 (en) * | 2019-10-15 | 2021-06-15 | Nanya Technology Corporation | Off chip driver structure |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57130461A (en) * | 1981-02-06 | 1982-08-12 | Hitachi Ltd | Semiconductor memory storage |
JPS5961169A (ja) * | 1982-09-30 | 1984-04-07 | Fujitsu Ltd | 半導体装置 |
US4633283A (en) * | 1985-03-11 | 1986-12-30 | Rca Corporation | Circuit and structure for protecting integrated circuits from destructive transient voltages |
JPS62101067A (ja) * | 1985-10-28 | 1987-05-11 | Nec Corp | 入力保護装置 |
JPH0722129B2 (ja) * | 1985-10-28 | 1995-03-08 | 株式会社日立製作所 | 酸化・拡散装置内ウエハ温度制御システム |
US5012317A (en) * | 1986-04-11 | 1991-04-30 | Texas Instruments Incorporated | Electrostatic discharge protection circuit |
FR2623016B1 (fr) * | 1987-11-06 | 1991-06-14 | Thomson Semiconducteurs | Dispositif de fusion d'un fusible dans un circuit integre de type cmos |
FR2623018B1 (fr) * | 1987-11-06 | 1990-02-09 | Thomson Semiconducteurs | Circuit integre protege contre les decharges electrostatiques avec seuil de protection variable |
US4939616A (en) * | 1988-11-01 | 1990-07-03 | Texas Instruments Incorporated | Circuit structure with enhanced electrostatic discharge protection |
ES2078343T3 (es) * | 1989-05-17 | 1995-12-16 | Sarnoff David Res Center | Dispositivo de proteccion scr de bajo voltaje de disparo y estructura. |
US5274262A (en) * | 1989-05-17 | 1993-12-28 | David Sarnoff Research Center, Inc. | SCR protection structure and circuit with reduced trigger voltage |
JPH0330363A (ja) * | 1989-06-27 | 1991-02-08 | Fuji Electric Co Ltd | 入出力保護回路を備えた半導体集積回路装置 |
FR2649830B1 (fr) * | 1989-07-13 | 1994-05-27 | Sgs Thomson Microelectronics | Structure de circuit integre cmos protege contre les decharges electrostatiques |
US5032742A (en) * | 1989-07-28 | 1991-07-16 | Dallas Semiconductor Corporation | ESD circuit for input which exceeds power supplies in normal operation |
FR2660795B1 (fr) * | 1990-04-10 | 1994-01-07 | Sgs Thomson Microelectronics Sa | Circuit de detection de fusible. |
US5032741A (en) * | 1990-06-04 | 1991-07-16 | Motorola, Inc. | CDCFL logic circuits having shared loads |
FR2676870B1 (fr) * | 1991-05-24 | 1994-12-23 | Sgs Thomson Microelectronics | Structure de protection dans un circuit cmos contre le verrouillage. |
US5272371A (en) * | 1991-11-19 | 1993-12-21 | Sgs-Thomson Microelectronics, Inc. | Electrostatic discharge protection structure |
FR2685817B1 (fr) * | 1991-12-31 | 1994-03-11 | Sgs Thomson Microelectronics Sa | Protection generale d'un circuit integre contre les surcharges permanentes et decharges electrostatiques. |
FR2690786A1 (fr) * | 1992-04-30 | 1993-10-29 | Sgs Thomson Microelectronics Sa | Dispositif de protection d'un circuit intégré contre les décharges électrostatiques. |
JP2850801B2 (ja) * | 1995-07-28 | 1999-01-27 | 日本電気株式会社 | 半導体素子 |
US5663860A (en) * | 1996-06-28 | 1997-09-02 | Harris Corporation | High voltage protection circuits |
-
1992
- 1992-04-30 FR FR9205422A patent/FR2690786A1/fr not_active Withdrawn
-
1993
- 1993-04-22 EP EP93401052A patent/EP0568421B1/de not_active Expired - Lifetime
- 1993-04-22 DE DE69311627T patent/DE69311627T2/de not_active Expired - Fee Related
- 1993-04-27 US US08/053,606 patent/US5548134A/en not_active Expired - Lifetime
- 1993-04-30 JP JP5128314A patent/JPH0662529A/ja not_active Withdrawn
-
1996
- 1996-12-02 US US08/758,375 patent/US5903424A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US5548134A (en) | 1996-08-20 |
EP0568421B1 (de) | 1997-06-18 |
EP0568421A1 (de) | 1993-11-03 |
JPH0662529A (ja) | 1994-03-04 |
US5903424A (en) | 1999-05-11 |
DE69311627D1 (de) | 1997-07-24 |
FR2690786A1 (fr) | 1993-10-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |