DE69310893D1 - Methode und vorrichtung zur reflektionsfreien ellipsometrie an kleinen probenzellen - Google Patents
Methode und vorrichtung zur reflektionsfreien ellipsometrie an kleinen probenzellenInfo
- Publication number
- DE69310893D1 DE69310893D1 DE69310893T DE69310893T DE69310893D1 DE 69310893 D1 DE69310893 D1 DE 69310893D1 DE 69310893 T DE69310893 T DE 69310893T DE 69310893 T DE69310893 T DE 69310893T DE 69310893 D1 DE69310893 D1 DE 69310893D1
- Authority
- DE
- Germany
- Prior art keywords
- ellipsometry
- reflection
- free
- small sample
- sample cells
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/0018—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 with means for preventing ghost images
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
- G01N21/211—Ellipsometry
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Optics & Photonics (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/975,304 US5402237A (en) | 1992-11-12 | 1992-11-12 | Reflection-free ellipsometry measurement apparatus and method for small sample cells |
PCT/US1993/010766 WO1994011722A1 (en) | 1992-11-12 | 1993-11-09 | Reflection-free ellipsometry measurement apparatus and method for small sample cells |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69310893D1 true DE69310893D1 (de) | 1997-06-26 |
DE69310893T2 DE69310893T2 (de) | 1997-12-18 |
Family
ID=25522891
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69310893T Expired - Fee Related DE69310893T2 (de) | 1992-11-12 | 1993-11-09 | Methode und vorrichtung zur reflektionsfreien ellipsometrie an kleinen probenzellen |
Country Status (6)
Country | Link |
---|---|
US (1) | US5402237A (de) |
EP (1) | EP0620914B1 (de) |
JP (1) | JP2703407B2 (de) |
KR (1) | KR100189596B1 (de) |
DE (1) | DE69310893T2 (de) |
WO (1) | WO1994011722A1 (de) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000081371A (ja) * | 1998-09-07 | 2000-03-21 | Nec Corp | 薄膜分子配向評価方法、評価装置及び記録媒体 |
FR2809491B1 (fr) * | 2000-05-26 | 2008-07-04 | Production Rech S Appliquees | Procede et appareil de metrologie ellipsometrique pour echantillon contenu dans une chambre ou analogue |
US7006221B2 (en) * | 2001-07-13 | 2006-02-28 | Rudolph Technologies, Inc. | Metrology system with spectroscopic ellipsometer and photoacoustic measurements |
WO2004070363A1 (en) * | 2003-02-03 | 2004-08-19 | Beaglehole Instruments Ltd | Sample container |
KR101105328B1 (ko) * | 2009-11-23 | 2012-01-16 | 한국표준과학연구원 | 분자 흡착 및 해리 동특성 측정장치 및 측정방법 |
WO2011113007A2 (en) | 2010-03-12 | 2011-09-15 | Board Of Regents Of The University Of Texas System | Modification of a flow cell to measure adsorption kinetics under stagnation point flow and development of a setup correction procedure for obtaining adsorption kinetics at the stagnation point |
FR2987907B1 (fr) | 2012-03-08 | 2014-02-21 | Saint Gobain | Valve optique et son procede de fabrication |
CN106291788B (zh) * | 2016-09-30 | 2018-10-23 | 东北大学 | 自由曲面棱镜及其形状的确定方法及其光学成像方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4565446A (en) * | 1982-09-29 | 1986-01-21 | The Research Foundation Of State University Of New York | Scattering cells |
US4582431A (en) * | 1983-10-11 | 1986-04-15 | Honeywell Inc. | Optical monitor for direct thickness control of transparent films |
JPS61284642A (ja) * | 1985-06-12 | 1986-12-15 | Mitsubishi Metal Corp | 分光測定用試料冷却装置 |
US4927766A (en) * | 1986-05-27 | 1990-05-22 | The Boc Group, Inc. | Gas constituent measurement and recording |
US4795262A (en) * | 1987-07-29 | 1989-01-03 | The Regents Of The Univerity Of Michigan | Liquid chromatography absorbance detector |
JPH05889A (ja) * | 1990-11-05 | 1993-01-08 | Ulvac Japan Ltd | 気相合成方法およびそれを実施するための装置 |
US5156461A (en) * | 1991-05-17 | 1992-10-20 | Texas Instruments Incorporated | Multi-point pyrometry with real-time surface emissivity compensation |
-
1992
- 1992-11-12 US US07/975,304 patent/US5402237A/en not_active Expired - Fee Related
-
1993
- 1993-11-09 WO PCT/US1993/010766 patent/WO1994011722A1/en active IP Right Grant
- 1993-11-09 KR KR1019940702391A patent/KR100189596B1/ko not_active IP Right Cessation
- 1993-11-09 JP JP6512270A patent/JP2703407B2/ja not_active Expired - Lifetime
- 1993-11-09 EP EP94900582A patent/EP0620914B1/de not_active Expired - Lifetime
- 1993-11-09 DE DE69310893T patent/DE69310893T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
KR100189596B1 (ko) | 1999-06-01 |
WO1994011722A1 (en) | 1994-05-26 |
EP0620914A1 (de) | 1994-10-26 |
US5402237A (en) | 1995-03-28 |
DE69310893T2 (de) | 1997-12-18 |
JPH07502344A (ja) | 1995-03-09 |
JP2703407B2 (ja) | 1998-01-26 |
EP0620914B1 (de) | 1997-05-21 |
KR940704000A (ko) | 1994-12-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69325157D1 (de) | Methode und vorrichtung zur oberflächenanalyse | |
DE69423760D1 (de) | Verfahren und vorrichtung zur isolierung von mikrogefässzellen | |
DE69029210D1 (de) | Verwaltungsverfahren und Vorrichtung zur Datenspeicherung | |
DE3687760D1 (de) | Vorrichtung und verfahren zur koordinatenmessung. | |
DE59305773D1 (de) | Verfahren und vorrichtung zur koordinatenmessung an werkstücken | |
DE69316419D1 (de) | Vorrichtung zur feinelektrochemischen Bearbeitung | |
DE3585204D1 (de) | Verfahren und vorrichtung zur entdeckung eines objekts. | |
DE69718551D1 (de) | Verfahren und Vorrichtung zur Messung von Substrattemperaturen | |
DE69308957D1 (de) | Verfahren und Vorrichtung zur Handhabung von Proben | |
DE69740113D1 (de) | Vorrichtung und verfahren zur inkubation von zellen | |
DE69307722D1 (de) | Vorrichtung und verfahren zur inspektion transparenten materials | |
DE3781654D1 (de) | Verfahren und vorrichtung zur ketonmessung. | |
DE69018838D1 (de) | Verfahren und Vorrichtung zur Oberflächenanalyse. | |
DE69630925D1 (de) | Verfahren und Vorrichtung zur Ellipsometrie mit Vielfachdetektoren | |
DE59208297D1 (de) | Verfahren und vorrichtung zur gleichzeitigen kultivierung unterschiedlicher säugerzellen | |
DE68924563D1 (de) | Verfahren und Vorrichtung zur Oberflächenanalyse. | |
DE58904662D1 (de) | Verfahren und vorrichtung zur glanzmessung. | |
DE69426761D1 (de) | Verfahren und Vorrichtung zur Messung der Ionenkonzentration | |
DE69009109D1 (de) | Vorrichtung und Verfahren zur Lichtmessung. | |
DE59609795D1 (de) | Verfahren und Vorrichtung zur Koordinatenmessung an Werkstücken | |
DE3675413D1 (de) | Vorrichtung und verfahren zur pruefung des spezifischen widerstandes. | |
DE3689539D1 (de) | Verfahren und Vorrichtung zur Betätigung einer elektrochemischen Messzelle. | |
DE69229036D1 (de) | Methode und Vorrichtung zur automatischen Zellanalyse | |
DE59309444D1 (de) | Bearbeitungsstation zur Durchführung von Fluoreszenz Polarisations-Messungen in einer Analysenvorrichtung | |
DE69429230D1 (de) | Vorrichtung und verfahren zur automatischen prüfung von proben |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |